MKS HPS 947 Series, Руководство по эксплуатации и обслуживанию, Страница: 15 / 40

9
HPS
®
Products Series 947 CEP System
Typical Applications for the
Series 947 CEP System
Measuring foreline and roughing pressures generated by
mechanical vacuum pumps
Controlling valves and pumps to automate system pump down
using the relay set points
Sensing abnormal pressure and taking appropriate security
measures using the relay set points
Controlling system pressure using the analog output as input to
an automatic pressure controller
Starting or stopping system processes using the relay set points
Measuring pressures of backfilled gases in the range of
10
-3 to 10 +3 Torr
Activating high vacuum sensors at the high end of their
operating pressure range