MKS HPS 917, Руководство по эксплуатации и обслуживанию

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15 Pirani Vacuum Sensor System
When using the graph, remember that the pressure scale is
logarithmic, and the voltage scale is linear. Equal increments of
distance along the pressure scale do not correspond to equal
pressure changes.
Adjusting the Set Points
To adjust a set point to open or close the relay contact at a particular
pressure, press the view button for the desired set point on the front panel.
While keeping this button depressed, use a small screwdriver to adjust the
corresponding potentiometer until the meter reading coincides with the desired
set point pressure.
When an LED is on, the measured pressure is below the set point value, the
normally open relay contact is closed, and the normally closed contact is
open. When an LED is off, the measured pressure is above the set point
value, the normally open relay contact is open, and the normally closed
contact is closed.
Torr Pascal Voltage
Nitrogen Argon Helium
Series 917 Pirani System
Output Voltage vs. Pressure
1.0E-03 1.3E -01 0.065 0.048 0.056
2.0E-03 2.7E -01 0.101 0.065 0.084
4.0E-03 5.3E -01 0.172 0.108 0.137
6.0E-03 8.0E -01 0.229 0.150 0.185
8.0E-03 1.1E+00 0.281 0.189 0.230
1.0E-02 1.3E+00 0.329 0.230 0.270
1.5E-02 2.0E+00 0.382 0.290 0.330
2.0E-02 2.7E+00 0.422 0.340 0.371
3.0E-02 4.0E+00 0.491 0.400 0.429
4.0E-02 5.3E+00 0.552 0.444 0.481
5.0E-02 6.7E+00 0.606 0.485 0.527
6.0E-02 8.0E+00 0.657 0.520 0.569
7.0E-02 9.3E+00 0.702 0.555 0.609
8.0E-02 1.1E+01 0.743 0.586 0.645
9.0E-02 1.2E+01 0.781 0.617 0.680
1.0E-01 1.3E+01 0.817 0.646 0.713
1.5E-01 2.0E+01 0.972 0.768 0.859
2.0E-01 2.7E+01 1.102 0.865 0.982
3.0E-01 4.0E+01 1.310 1.025 1.187
4.0E-01 5.3E+01 1.468 1.152 1.360
5.0E-01 6.7E+01 1.594 1.257 1.511
6.0E-01 8.0E+01 1.707 1.343 1.646
7.0E-01 9.3E+01 1.800 1.419 1.769
8.0E-01 1.1E+02 1.880 1.488 1.882
9.0E -01 1.2E+02 1.950 1.545 1.988
1.0E+00 1.3E+02 2.012 1.596 2.086
1.5E+00 2.0E+02 2.250 1.815 2.507
2.0E+00 2.7E+02 2.410 1.950 2.846
3.0E+00 4.0E+02 2.610 2.108 3.377
4.0E+00 5.3E+02 2.728 2.214 3.788
5.0E+00 6.7E+02 2.806 2.292 4.121
6.0E+00 8.0E+02 2.866 2.345 4.401
7.0E+00 9.3E+02 2.913 2.386 4.640
8.0E+00 1.1E+03 2.948 2.418 4.847
9.0E+00 1.2E+03 2.974 2.440 5.029
1.0E+01 1.3E+03 2.996 2.467 5.191
1.5E+01 2.0E+03 3.062 2.529 5.700
2.0E+01 2.7E+03 3.101 2.564 6.184
3.0E+01 4.0E+03 3.138 2.598 6.670
4.0E+01 5.3E+03 3.157 2.615 6.961
5.0E+01 6.7E+03 3.168 2.625 7.155
6.0E+01 8.0E+03 3.176 2.631 7.295
7.0E+01 9.3E+03 3.181 2.635 7.400
8.0E+01 1.1E+04 3.185 2.638 7.481
9.0E+01 1.2E+04 3.188 2.641 7.547
1.0E+02 1.3E+04 3.191 2.644 7.601
7.6E+02 1.0E+05 3.226 2.668 7.625
Torr Pascal Voltage
Nitrogen Argon Helium