MKS HPS 917, Руководство по эксплуатации и обслуживанию

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14 Pirani Vacuum Sensor System
Operating the
Series 917 Pirani System
Reading Pressure
The Sensor must be connected to the Controller before turning
on the unit.
Turn the power on to display pressure or to operate the set point relays. The
graph below shows the Series 917 Pirani System’s voltage output as a
function of pressure for nitrogen, helium, and argon and the table on the next
page gives the same information.
Pressure
(Torr)
3
2
1
0
Output V
oltage
(VDC)
He
N
2
Ar
10 -3 10 -2 10 -1 10 0 10 +1 10 +2 10 +3