MKS HPS 917, Руководство по эксплуатации и обслуживанию

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5 Pirani Vacuum Sensor System
Display 3½" wide face, 95 o deflection
analog meter; LED set point
indicators; units shown in either
Torr, mbar, Pascal, or
mTorr/microns
Electronic Casing Aluminum, anodized
Dimensions 3¾" x 7" x 3¾"
(W x D x H) (96 mm x 178 mm x 96 mm)
Size ¼ DIN
Weight 2.4 lb (1.1 kg)
Sensor Tube
Calibration Gas Air/nitrogen
Installation Orientation Any
Materials Exposed to Vacuum 304 stainless steel, platinum,
alumina ceramic, silver brazing
alloy, nickel 200
Internal Volume 0.5 in. 3 (8.0 cm 3 ) maximum
Operating Temperature Range 0
o
to 50
o
C (32
o
to 122
o
F)
Maximum Bakeout Temperature 50 o C (122 o F)
Length 4.4 in. (112 mm)
Diameter 1.3 in. (34 mm)
Typical Weight (with KF Flange) 0.5 lb (0.2 kg)
Fittings/Interface KF 16
8 VCR
® -F (½")
1 /
8
" NPT-M
with ½" compression seal option
1
1 /
3
" CF (non-rotatable)
2¾" CF (non-rotatable)
Ø 15.0 mm x 30.0 mm tubing
Ø 18.0 mm x 30.0 mm tubing
Design and/or specifications subject to change without notice.