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MKS Instruments UK Ltd

Cirrus2 Hardware Manual – SP101017.100 June 2011

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MKS Instruments UK Ltd - Spectra Products
Cowley Way
Weston Road
Crewe
Cheshire
CW1 6AG
U.K.

+44 (0)1270 250150 Tel. International
+44 (0)1270 251939 Fax. International

Email: [email protected]

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Содержание Cirrus2

Страница 1: ...Cirrus2 Hardware Manual Cirrus2 Hardware Manual SP101017 100 June 2011...

Страница 2: ...ons or inaccuracies you may discover You can send your comments to MKS Instruments UK Ltd Spectra Products Cowley Way Weston Road Crewe Cheshire CW1 6AG U K 44 0 1270 250150 Tel International 44 0 127...

Страница 3: ...ENANCE 10 2 Connections and Indicators 11 Front Panel 11 Power 11 Turbo at Speed 11 Capillary Heater 11 System Heater 11 Emission 12 Coms 12 Rear Panel 13 RGA Coms 13 Power 13 Analogue I O Connector 1...

Страница 4: ...Tool Guide 35 Removal Tool 35 Insertion Tool 36 Fitting the Tool Guide 36 Removing the Orifice Disk 36 Fitting a new Orifice Disk 37 Reassembly 39 Analyser Maintenance 41 Ohmmeter analyser checks 41 C...

Страница 5: ...re that the equipment named above has been designed to comply with the relevant sections of the above referenced specifications The unit complies with all essential requirements of the Directives Sign...

Страница 6: ...faces are provided for integrated systems and future technologies The Cirrus2 is designed to be operated in several ways From a host computer an IBM compatible PC or MAC running the MKS Process Eye Pr...

Страница 7: ...y and SEM detector Electrical Power Inlet 100 to 120 VAC rms 47 63Hz 6 3A rms 200 to 240 VAC rms 47 63Hz 3 15A rms Installation category over voltage category II to IEC664 Insulation Class I to IEC536...

Страница 8: ...EN61010 1 section 6 6 1 Ports for connection of accessories do not carry hazardous potentials Do not position the Cirrus2 so that it is difficult to unplug the supply power cord Installation Category...

Страница 9: ...quipment weighs in excess of 18kg and should be lifted by at least two people To avoid muscle strain and or back injury movers should employ lifting aids and the correct lifting techniques Ventilation...

Страница 10: ...ective earth as the control unit B OPERATION 1 The equipment is not authorised for use as a critical component in a life support or safety critical system without the express written approval of MKS I...

Страница 11: ...rrus2 unit Turbo at Speed The indicator is amber while the turbo molecular pump accelerates changing to green when it has reached normal operating speed The filament protect trip is interlocked to thi...

Страница 12: ...Cirrus2 Hardware Manual SP101017 100 June 2011 12 Emission The indicator is green when a filament is active and operating correctly Coms This indicator blinks green when communications have been estab...

Страница 13: ...tors can be found below The signal and data ports must not be connected to ports that could become hazardous live RGA Coms A standard RJ45 type 10 100 Base T Ethernet connector used to connect the Cir...

Страница 14: ...0mA maximum load for the power supply outputs is shared between the Digital and Analogue connectors Analog input 1 and Analog input 1 return are reserved for use with the internal cold cathode gauge P...

Страница 15: ...ng functionality 16 configurable I O lines 3 3V power output fused at 120mA fuses are self resetting 15V power output fused at 120mA fuses are self resetting 24V power output fused at 120mA fuses are...

Страница 16: ...tal input chip itself b Use an open collector drain contact closure to ground as the output drive signal c Where appropriate arrange the hardware software configuration so that an input Hi state is a...

Страница 17: ...ressure to the IN port to improve detection levels Connect a second pipe to the port labeled OUT to exhaust the dry nitrogen safely The exhaust nitrogen may now contain corrosive toxic gases Exhaust t...

Страница 18: ...addresses to network devices the Cirrus2 can be configured to use any of the following Auto IP A mechanism where in the absence of a DHCP or BOOTP server on the network network entities can obtain the...

Страница 19: ...You can safely connect the Cirrus2 to your network The Cirrus2 is to be connected to a network running BOOTP Option Use Auto IP If the Cirrus2 is to be connected to a network running BOOTP then your I...

Страница 20: ...to check if your PC or MAC is configured for Auto IP most are by default Windows PC Start Connect To Show All Connections Click once on the connection hosting the Cirrus2 Note the information display...

Страница 21: ...the following options Obtain an IP address automatically Obtain DNS server address automatically Click OK MAC Apple Menu System Preferences Network Ethernet Configure Choose the option Using DHCP or...

Страница 22: ...n to start the application After a few moments the following dialog appears displaying a list of all discovered MKS RGA s You can see that there is only one RGA displayed in the example if you have mo...

Страница 23: ...xceptions for the application to function correctly The RGA Device Manager application is designed to locate and retrieve information from any MKS RGA instrument networked or otherwise It does this by...

Страница 24: ...ample if you have more than one RGA on your network this view may contain many entries Ensure you choose the correct instrument from the list You can see that Device Manager displays all the pertinent...

Страница 25: ...d settings option Enter the IP address and the Subnet issued to you by your IT Specialist The Default Gateway is used in situations where multiple networks exist or for connection to the Cirrus2 from...

Страница 26: ...is is due to interlocking preventing the powering up of components until the turbo pump is switched on and is up to speed Use the RGA Device Manager to locate and install your unit ready for use This...

Страница 27: ...on A dry inert gas should be flushed continuously through the capillary inlet during bake out The quadrupole should be running with the filament on but only using the faraday detector The multiplier d...

Страница 28: ...illary Heater to lessen the chance of vapour condensing in the capillary leading to memory effects or even blockage Whether you need to heat the capillary or not depends on the application and the nat...

Страница 29: ...nding source plates layers of metal oxides are deposited Being insulators these have a far more noticeable effect upon the performance of the source and therefore a more frequent cleaning program shou...

Страница 30: ...t these operations Before removing any of the Cirrus covers ensure the unit is disconnected from the mains supply and has had adequate time to cool To remove the outer cover remove the three Allen hea...

Страница 31: ...e oven top plate ensure the oven has had adequate time to cool after baking To remove the oven plate remove the eight Philips screws and lift the plate clear of the oven RGA Chamber Backing Bypass Pum...

Страница 32: ...ner to undo the nut on the inlet flange and slide it and the ferrule along the fused silica tube towards the front of the oven 5 Carefully slide the fused silica tube down the capillary assembly away...

Страница 33: ...ted on the end of the quadrupole vacuum chamber opposite to the analyser flange The flange is held in place by eight M8 stainless steel bolts The analyser in your Cirrus2 will almost certainly be fitt...

Страница 34: ...and slide out the bypass line through the oven wall You can now see the ceramic coupling which sits over the PVD inlet of the quadrupole In order to use the orifice disk insertion and removal tools th...

Страница 35: ...Do not attempt to remove or insert an orifice disk without using these tools If they are missing from your toolkit please contact your local MKS Spectra facility for replacements Clean each tool befo...

Страница 36: ...orifice disk into the tapered hole Fitting the Tool Guide Fit the Tool Guide to the inlet flange using the three screws supplied Removing the Orifice Disk Insert the Removal Tool into the guide and p...

Страница 37: ...ttention to the side of the disk that has a black mark this mark indicates the high pressure side of the disk Offer the new disk to the tapered hole in the inlet flange marked side facing into the inl...

Страница 38: ...Some resistance will be felt as the disk seats into position Push the insertion tool fully into the tool guide Once the disk has been pushed fully home remove the Insertion Tool and Tool Guide Inspec...

Страница 39: ...threaded and inserted until the uppermost face of the grub screw is flush with the face of the Inlet Flange 2 Secure the Retaining Ring by using two of the three springs 3 From the side without a spri...

Страница 40: ...nd re fit the Inlet Flange to the chamber using a new copper gasket by firstly sliding the bypass connection through the oven wall and then carefully locating the Ceramic Coupling over the PVD ion sou...

Страница 41: ...analyser feedthrough in turn Each one should give an open circuit If not you have a short to earth There are two types of short to earth an internal short between one part of the analyser and an eart...

Страница 42: ...more correctly described as an open circuit filament There are other conditions such as a heavily contaminated ion source which will result in a filament fail condition when the filament is not open c...

Страница 43: ...small bench vice is ideal pen and paper on which to make notes and sketches You are now ready to pump down and continue the operation of your quadrupole Removing the filaments 1 Remove the analyser f...

Страница 44: ...situation in your vacuum system With the filaments removed you have a clear view of the source cage The signs to look for are powdery deposits which will vary in colour but may be brown blue canary y...

Страница 45: ...ted check the alignment of both filament plates before tightening securely 4 Re fit each barrel connector in the same orientation as removed sliding each barrel connector over the connecting lead and...

Страница 46: ...r with sufficient iso propyl alcohol to cover the ion source only Note the measuring cylinder should be of a diameter and length to accommodate the analyser Put the measuring cylinder into the ultra s...

Страница 47: ...ystem place it on the bench in an upright position holding the analyser in a small bench vice or analyser support stand is recommended 2 If you are cleaning the ion source then you should follow the s...

Страница 48: ...MKS Instruments UK Ltd Cirrus2 Hardware Manual SP101017 100 June 2011 48 PVD Ion source views Fig 1 Fig 2 Fig 2a...

Страница 49: ...no shorts are introduced and that the analyser is kept clean The orientation of the ion source is by the small notch on the mounting base This notch is positioned so that it sits over the gold leads...

Страница 50: ...ily identified as it is the only pin with a metalized contact running through it The pins are numbered clockwise from this pin Pin Descriptions Pin Connection 1 Earth 2 Source plate 3 Electron Multipl...

Страница 51: ...ied in pairs either on a single plate or on two plates depending on the analyser Replacement ion sources are supplied complete with filaments Filaments Ion source Tungsten Thoriated Iridium PVD 842 06...

Страница 52: ...e serial numbers date of purchase and a fault description Fill in the relevant sections of the Health and Safety Returns Form below or we can provide you with a copy This form MUST accompany the instr...

Страница 53: ...nformation before we receive the equipment A copy should also be given to the carrier FAILURE TO COMPLETE THIS FORM OR COMPLY WITH THE PROCEDURE WILL LEAD TO DELAYS IN SERVICING THE EQUIPMENT Our RMA...

Страница 54: ...nces Action to be taken in the event of human contact or spillage I hereby confirm that the only toxic or hazardous substances that the equipment specified above has been in contact with are named abo...

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