MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
34
6. Using a ½” spanner, remove the eight bolts which secure the CF inlet flange to the vacuum chamber. Gently free the
inlet flange from the chamber and slide out the bypass line through the oven wall.
You can now see the ceramic coupling, which sits over the PVD inlet of the quadrupole.
In order to use the orifice disk insertion and
removal tools, this coupling must be
removed from the inlet flange.
7. Remove the springs from the retention plate, by pushing them towards the centre of the inlet.
8. Remove the retaining plate and ceramic coupling from the inlet flange.
