pg. 6
Description
The 910 DualTrans vacuum transducer offers a wide measuring range from 1×10
-5
to 1000 Torr and is based
on measurement of thermal conductivity and measurement of mechanical deflection of a silicon membrane.
The 910 can be used in a variety of applications as standalone unit
or with the PDR900 display and controller unit.
The transducer has RS232 or RS485 digital communication
interface for setup of transducer parameters and to provide real time
pressure measurement.
The 910 has up to three mechanical relays which can be used for process control such
as interlocking valves or pumps. The analog voltage output can be interfaced to external analog equipment
for pressure readout or control.
Sensor technology
The 910 transducer contains two separate sensor elements. The MicroPirani™ sensor element is based on
measurement of thermal conductivity. The MicroPirani sensor consists of a silicon chip with a heated
resistive element forming one surface of a cavity. A cover on top of the chip forms the other surface of the
cavity. Due to the geometry of the sensor, convection cannot take place within the cavity and consequently
the sensor is insensitive to mounting position. Gas molecules are passed by diffusion only to the heated
element where the heat loss of the gas is measured.
The Piezo sensor is based on measurement of the
mechanical deflection of a silicon membrane relative to an
integrated reference vacuum. The Piezo measures true
absolute pressure independent of gas composition and
concentration.
Both sensor elements are very robust and can withstand high
G-forces and instant air inrush.
Applications
The 910 can be used in many different vacuum applications within the semiconductor, analytical and coating
industries:
•
Loadlock pressure controlling
•
General vacuum pressure measurement
•
Fore line and roughing pressure measurement
•
Gas backfilling measurement and controlling
•
Mass spectrometer control
•
Activation of UHV gauge
•
System process control
•
Sense abnormal pressure and take appropriate security measure using set point relays
•
Control system pressure
Disposal (European Union only)
The 910 transducer is manufactured according to the RoHS directive.
For the benefit of the environment, at the end of life of the 910, it should not be
disposed in the normal unsorted waste stream. It should be deposited at an
appropriate collection point or facility to enable recovery or recycling.
