pg. 25
Torr/mbar
Vout Torr/mbar
Vout Torr/mbar Vout
Torr/mbar
Vout
1.0E-5
1.000 1.0E-3
3.000 1.0E-1
5.000 10
7.000
2.0E-5
1.301 2.0E-3
3.301 2.0E-1
5.301 20
7.301
3.0E-5
1.477 3.0E-3
3.477 3.0E-1
5.477 30
7.477
4.0E-5
1.602 4.0E-3
3.602 4.0E-1
5.602 40
7.602
5.0E-5
1.699 5.0E-3
3.699 5.0E-1
5.699 50
7.699
6.0E-5
1.778 6.0E-3
3.778 6.0E-1
5.778 60
7.778
7.0E-5
1.845 7.0E-3
3.845 7.0E-1
5.845 70
7.845
8.0E-5
1.903 8.0E-3
3.903 8.0E-1
5.903 80
7.903
9.0E-5
1.954 9.0E-3
3.954 9.0E-1
5.954 90
7.954
1.0E-4
2.000 1.0E-2
4.000 1.0
6.000 100
8.000
2.0E-4
2.301 2.0E-2
4.301 2.0
6.301 200
8.301
3.0E-4
2.477 3.0E-2
4.477 3.0
6.477 300
8.477
4.0E-4
2.602 4.0E-2
4.602 4.0
6.602 400
8.602
5.0E-4
2.699 5.0E-2
4.699 5.0
6.699 500
8.699
6.0E-4
2.778 6.0E-2
4.778 6.0
6.778 600
8.778
7.0E-4
2.845 7.0E-2
4.845 7.0
6.845 700
8.845
8.0E-4
2.903 8.0E-2
4.903 8.0
6.903 760
8.881
9.0E-4
2.954 9.0E-2
4.954 9.0
6.954 800
8.903
Analog output setup
The 910 can emulate analog voltage outputs from other vacuum transducers. The 910 analog output can be
assigned to the MicroPirani sensor measurement (PR1), Piezo absolute sensor measurement (PR2) and the
combined Piezo/MicroPirani reading (PR3). This is set by the first digit. The second and third digit
represents the analog output calibration. The primary analog output provides 16 bit resolution.
Due to curve form and limits, some of the alternative analog outputs will cause loss of
measuring range and accuracy. For best performance use the standard MKS analog
output. Change of analog output setup does not interfere on digital reading.
Change of analog output setup:
Command:
@253AO1!15;FF
Command values:
10 to 332 (xy)
First digit (x)
1 = PR1 (MicroPirani pressure value assignment)
2 = PR2 (Piezo pressure value assignment)
3 = PR3 (Combined pressure value assignment)
Second digit (y)
0 = MKS Standard (1 VDC/decade)
1 = Edwards APG-L (1.99 -10 VDC)
2 = Edwards APG100
3 = Edwards WRG
4 = Inficon PSG500 /Oerlikon/Leybold TTR91
5 = Inficon MPG400 / Pfeiffer PKR251
6 = Inficon BPG400 / MKS 999 Quattro
7 = MKS GP275
8 = MKS Moducell 325
9 = MKS Moducell 325 (x3)
10 = MKS Baratron 0.1 Torr (0-10 VDC)
11 = MKS Baratron 1 Torr (0-10 VDC) / Hasting 2002OBE, Channel 2
12 = MKS Baratron 10 Torr (0-10 VDC)
13 = MKS Baratron 100 Torr (0-10 VDC)
14 = MKS Baratron 1000 Torr (0-10 VDC) / Hasting 2002OBE, Channel 1
15 = Piezo differential output
16 = Edwards AIM-S /-SL
17 = Edwards AIM-X / XL
18 = Pfeiffer IKR251
19 = Pfeiffer TPR 265
20 = OBE Channel 2 special
21 = Edwards DV6M
22 = Edwards APG-M
23 = MKS GP275 (0-9VDC)
24 = MT 241.1
25 = MKS GP275 (0-5.6VDC)
26 = Edwards APG100-LC
27 = Edwards APG100M
28 = MKS 907
29 = K6080-06
