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pg. 44

MicroPirani gas dependence

The 910 MicroPirani is based on measurement of thermal conductivity and consequently its reading depends

on gas and gas concentration. The 910 has calibration curves for a number of common gases. For gas setup

refer to gas calibration page 19.

The 910 is per factory default calibrated for Nitrogen gas and below is showed the 910 Nitrogen MicroPirani

reading in different gas types.

Helium gas dependence

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Содержание 910 DualTrans Series

Страница 1: ...pg 1 910 DualTrans Vacuum Pressure Transducer RS232 RS485 Display Operation and Installation Manual P N 100017123 910 DualTrans Transducer Operation and Installation Manual Revision G February 2020...

Страница 2: ...e If the product has been dropped or the enclosure has been damaged f When the product exhibits a distinct change in performance This indicates a need for service Service and Warranty Some minor probl...

Страница 3: ...eproduced by any method including photocopying and recording or by any information or retrieval system without written permission of MKS Instruments Inc Table of Contents Warranty Information 2 Propri...

Страница 4: ...cording to the specifications Output pins are not protected against wrong electrical connections Wrong electrical connections can cause permanent damage to the transducer or interference to measuring...

Страница 5: ...ype Not all part number combinations are available Transducers can be delivered with customer configuration of various parameters like setpoint settings These specials have an additional 4 digits afte...

Страница 6: ...e within the cavity and consequently the sensor is insensitive to mounting position Gas molecules are passed by diffusion only to the heated element where the heat loss of the gas is measured The Piez...

Страница 7: ...d using the FD VAC command See Factory default page 21 If the transducer is delivered with customer specified parameters the User Switch is disabled For enabling the switch see page 23 LED Status Indi...

Страница 8: ...large temperature gradients and direct cooling like air condition air stream or direct heating like a pump exhaust stream Bake out The transducer electronics can withstand 85 oC 185 oF when the power...

Страница 9: ...is protected by an internal thermal fuse The fuse is self recoverable do not replace it Damage may occur to the circuitry if excessive voltage is applied polarity reversed or if a wrong connection is...

Страница 10: ...nalog Out 2 Hardware option 14 Relay 3 Common 15 Relay 3 Normally Open 910 I O Connector 6 pin Hirschmann PIN Description 1 Identification resistor 2 Analog Output 3 Analog Output 4 Power 9 30 VDC 5 P...

Страница 11: ...lity and communication speed but relative long cable spans up to 1 200m 4 000 ft is possible There are 2 wires other than ground that are used to transmit the digital RS485 signal The 910 uses half du...

Страница 12: ...tax Queries return current parameter settings commands change the parameter setting according to the value the user enters into the command syntax Each query or command must begin with the attention c...

Страница 13: ...nsducers will transmit a reply Commands sent with address 255 will be executed by all transducers on the network but the transducers will not transmit replies For example use address 254 to communicat...

Страница 14: ...ke protection Inadequate protection can cause permanent damage to the transducer or interfere with the analog output signal Always ensure that inductive in rush currents do not exceed relay contact ra...

Страница 15: ...E 1 FF 4 Enable set point ON OFF Command 253EN1 ON FF Reply 253ACKON FF Setpoint setup by PDR900 Controller 1 Edit Setpoint Setpoint Value 1 Enter set point value 5 00E 1 Torr 2 Edit Setpoint Directio...

Страница 16: ...delay Command 253SPD ON FF Command values ON OFF Command reply 253ACKON FF Query 253SPD FF Query reply 253ACKON FF Factory default ON Integrated Touch Display For 910 transducer versions with integrat...

Страница 17: ...Setpoint menu pressing the screen will lead back to the same menu If accessed via the quick access buttons on the Main screen pressing the screen will lead back to the Main screen Model info The Mode...

Страница 18: ...23 for details Combined reading PR3 and PR4 The PR3 PR4 and the analog output combines the Piezo absolute reading and the MicroPirani reading into one smooth pressure reading with superior measurement...

Страница 19: ...transducers ability to repeat the same measurement value after multiple pressure cycles Refer to the transducer specification page 53 for actual values Gas calibration The MicroPirani used for pressu...

Страница 20: ...xecuted This indicates that the transducer is contaminated and should be serviced See page 52 for Service and Maintenance procedures The query feature reads the delta value between the user offset val...

Страница 21: ...ensor value too high 253NAK8 FF Factory default The transducer is per factory default delivered with parameters and setup as listed below If the transducer is delivered with customer preconfigured par...

Страница 22: ...ed personal are able to change transducer setup and parameters the transducer lock function can prevent direct access to parameter changes Transducers delivered with pre configured custom specified pa...

Страница 23: ...y reply 253ACKON FF Factory default OFF Status Query Commands Query replies are examples that might be different from actual transducer reply Device Type DT Specifies transducer device type name Query...

Страница 24: ...r MicroPirani fail or Z for Piezo fail Query 253T FF Query reply 253ACKO FF Analog output The 910 transducer provides a voltage output as function of pressure The standard output is 1 VDC decade but c...

Страница 25: ...his is set by the first digit The second and third digit represents the analog output calibration The primary analog output provides 16 bit resolution Due to curve form and limits some of the alternat...

Страница 26: ...eply 253ACK15 FF Query 253AO2 FF Query reply 253ACK15 FF Factory default 10 Analog output calibration 1 Edwards APG L emulation The APG L emulation provides a strongly non linear output with very poor...

Страница 27: ...100 10 000 8 00 750 1 000 100 000 9 00 Analog output calibration 3 Edwards WRG emulation The WRG emulation covers a wider measuring range than supported by the 910 range The 910 provides only values a...

Страница 28: ...01 5 018 1 00E 00 1 33E 00 1 33E 02 6 304 1 00E 01 1 33E 01 1 33E 03 7 59 1 00E 02 1 33E 02 1 33E 04 8 876 7 60E 02 1 01E 03 1 01E 05 10 00873 Analog output calibration 5 Inficon MPG400 Pfeiffer PKR2...

Страница 29: ...Vout 1 00E 05 1 33E 05 1 33E 03 0 372 1 00E 04 1 33E 04 1 33E 02 0 372 2 50E 04 3 33E 04 3 33E 02 0 376 5 00E 04 6 67E 04 6 67E 02 0 381 7 50E 04 1 00E 03 1 00E 01 0 385 1 00E 03 1 33E 03 1 33E 01 0...

Страница 30: ...1E 03 1 01E 05 3 2396 8 00E 02 1 07E 03 1 07E 05 3 2398 Analog out calibration 9 MKS Moducell 325 amplified 3 times The Moducell x3 emulation is in curve form identical with the standard Moducell howe...

Страница 31: ...mulation provides a signal directly proportional with pressure with a full scale reading of 10 VDC at 1 Torr Torr mbar Pascal Vout 1 00E 2 1 33E 2 1 33E0 0 100 5 00E 2 6 66E 2 6 66E0 0 500 1 00E 1 1 3...

Страница 32: ...6 66 6 66E 2 0 500 10 0 13 3 1 333E 3 1 000 50 0 66 66 6 66E 3 5 000 100 0 133 3 1 333E 4 10 000 Analog out calibration 14 MKS Baratron 1000 Torr The 1000 Torr Baratron emulation provides a signal dir...

Страница 33: ...7E 1 2 67E 1 4 70 1 00E 1 1 33E 1 1 33E 1 5 00 1 00E 1 1 33E 1 1 33E 1 5 00 2 00E 1 2 67E 1 2 67E 1 5 30 3 00E 1 4 00E 1 4 00E 1 5 48 4 00E 1 5 33E 1 5 33E 1 5 60 5 00E 1 6 67E 1 6 67E 1 5 70 6 00E 1...

Страница 34: ...10E 5 1 47E 5 1 47E 3 7 2 2 20E 5 2 93E 5 2 93E 3 8 3 20E 5 4 27E 5 4 27E 3 8 4 4 30E 5 5 73E 5 5 73E 3 8 6 5 90E 5 7 87E 5 7 87E 3 8 8 9 00E 5 1 20E 4 1 20E 2 9 1 40E 4 1 87E 4 1 87E 2 9 2 2 5E 4 3 3...

Страница 35: ...20E 0 8 5000 P 10 Vout c Vout c log10 P c mbar 10 5 Torr 10 625 Pascal 8 5 Analog out calibration 19 Pfeiffer TPR265 TPR280 PCR280 Inficon TPR280 The Pfeiffer TPR265 emulation provides a log linear ou...

Страница 36: ...1 2 84 0 008 1 07E 02 1 07E 00 3 06 0 01 1 33E 02 1 33E 00 3 27 0 02 2 67E 02 2 67E 00 4 16 0 04 5 33E 02 5 33E 00 5 56 0 05 6 67E 02 6 67E 00 6 01 0 06 8 00E 02 8 00E 00 6 46 0 08 1 07E 01 1 07E 01 7...

Страница 37: ...1 69E 01 2 25E 01 2 25E 01 1 200 2 18E 01 2 90E 01 2 90E 01 1 400 2 74E 01 3 65E 01 3 65E 01 1 600 3 53E 01 4 71E 01 4 71E 01 1 846 0 4092 5 46E 01 5 46E 01 2 000 0 4879 6 51E 01 6 51E 01 2 200 0 575...

Страница 38: ...9 98 750 06 1 00E 03 1 00E 05 9 99 Analog Output calibration 25 MKS GP275 Emulation 5 6 VDC FS The GP275 emulation with 5 6VDC full scale provides a strongly non linear output with very poor resolutio...

Страница 39: ...02 5 92E 00 5 6 56E 02 8 74E 02 8 74E 00 5 2 9 53E 02 1 27E 01 1 27E 01 5 4 1 28E 01 1 71E 01 1 71E 01 5 6 1 67E 01 2 23E 01 2 23E 01 5 8 2 18E 01 2 90E 01 2 90E 01 6 2 68E 01 3 57E 01 3 57E 01 6 2 3...

Страница 40: ...8 1 32E 01 1 76E 01 1 76E 01 5 1 67E 01 2 22E 01 2 22E 01 5 2 2 37E 01 3 16E 01 3 16E 01 5 4 3 10E 01 4 13E 01 4 13E 01 5 6 4 05E 01 5 40E 01 5 40E 01 5 8 5 12E 01 6 82E 01 6 82E 01 6 6 31E 01 8 41E 0...

Страница 41: ...0 1 00E 02 2 442 1 50E 00 2 00E 00 2 00E 02 3 083 2 25E 00 3 00E 00 3 00E 02 3 452 3 00E 00 4 00E 00 4 00E 02 3 698 3 75E 00 5 00E 00 5 00E 02 3 875 4 50E 00 6 00E 00 6 00E 02 4 009 5 25E 00 7 00E 00...

Страница 42: ...1 14E 00 1 51E 00 1 51E 02 5 1 72E 00 2 29E 00 2 29E 02 5 44 3 00E 00 4 00E 00 4 00E 02 6 12 4 50E 00 6 00E 00 6 00E 02 6 8 4 88E 00 6 50E 00 6 50E 02 7 4 5 25E 00 7 00E 00 7 00E 02 7 96 6 00E 00 8 0...

Страница 43: ...2 00E 02 2 00E 00 1 8 2 25E 02 3 00E 02 3 00E 00 2 5 3 00E 02 4 00E 02 4 00E 00 3 15 3 75E 02 5 00E 02 5 00E 00 3 65 4 50E 02 6 00E 02 6 00E 00 4 1 5 25E 02 7 00E 02 7 00E 00 4 5 6 00E 02 8 00E 02 8 0...

Страница 44: ...its reading depends on gas and gas concentration The 910 has calibration curves for a number of common gases For gas setup refer to gas calibration page 19 The 910 is per factory default calibrated f...

Страница 45: ...pg 45 Argon gas dependence Hydrogen gas dependence...

Страница 46: ...be energized above setpoint value If set to below relay will be energized below setpoint value xxxSPD FF xxxACKON FF Setpoint safety delay Transducer information Command Response Explanation xxxMD FF...

Страница 47: ...F Set Transducer communication address 001 to 253 xxxRSD OFF FF xxxACKOFF FF Turn on or off communication delay between receive and transmit sequence Calibration and adjustment Command Response Explan...

Страница 48: ...ownload software from the Documentation CD or download from www mksinst com vtsw 2 Turn power off 3 Hold down the User switch while turning power on 4 Release the User switch 5 Run the 900 Series firm...

Страница 49: ...tant air ventilation Q Can I connect a valve to be controlled by the transducer relay contact A Driving inductive loads such as valves requires special precautions Refer to detailed description page 1...

Страница 50: ...transducer retain user calibration after power is shut off A Yes all transducer parameters including calibration data are stored internally in the transducer nonvolatile memory Service and repair Q Ca...

Страница 51: ...sure value at low pressure Contaminated sensor Transducer repair required Corroded sensor Transducer repair required Incorrect VAC adjustment has been executed Transducer exposed to heat or cooling ai...

Страница 52: ...nsducer from the vacuum system 2 Turn power off and remove cable 3 Unscrew the two hex screws 4 at the DSUB connector using a 5mm hex screw driver 4 Use a paper clip a small screwdriver or similar to...

Страница 53: ...Setpoint relay contact resistance 100 m max Setpoint relay contact endurance 30VDC 1A load 100 000 min Setpoint relay contact endurance 30VDC 0 2A load 2 000 000 min Setpoint relay response time 100...

Страница 54: ...pg 54 Dimensions KF16 flange P N 910 1xxx mm Inch Dimensions KF16 long flange P N 910 8xxx mm Inch Dimensions KF25 flange P N 910 2xxx mm Inch...

Страница 55: ...pg 55 Dimensions VCR4 flange P N 910 4xxx mm Inch Dimensions VCR8 flange P N 910 5xxx mm Inch...

Страница 56: ...pg 56 Dimensions NPT 1 8 flange P N 910 3xxx mm Inch...

Страница 57: ...ctors cables Part number Description 100010757 Setpoint Relay 3 pin connector 100013638 Analog output 8 pin connector 100013686 Analog output cable 3 meter 10ft 100013693 RS232 RS485 user communicatio...

Страница 58: ...nts Clear backlight display Easy viewing in all environments Readout of transducer parameters 91 0 DualTrans transducer with IP54 enclosure Sealed enclosure for harsh environments Protected against wa...

Страница 59: ...Hydrogen gas 45 Inductive relay load 12 Input Output Wiring 8 Internal volume 53 Lock function 21 Manufacturer 22 Model 22 Moducell 325 30 NAK Code 10 NAK180 13 21 51 Operating temperature 53 Part nu...

Страница 60: ...910 DualTrans Vacuum Pressure Transducer RS232 RS485 Display Operation and Installation Manual P N 100017123 910 DualTrans Transducer Operation and Installation Manual Revision G February 2020...

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