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MKS Baratron 622A, Инструкция по эксплуатации

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114492-P1

Rev F, 10/98

Instruction Manual

MKS Baratron

® 

Type

622A/626A/627A/628A/629A

Absolute Pressure Transducers

Six Shattuck Road
Andover, MA  01810-2449
(800) 227-8766 or (978) 975-2350

Fax:  (978) 975-0093

E-mail:  [email protected]

Web site:  http://www.mksinst.com

Содержание Baratron 622A

Страница 1: ...truction Manual MKS Baratron Type 622A 626A 627A 628A 629A Absolute Pressure Transducers Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web site http www mksinst com ...

Страница 2: ... by the purchaser shall make specific written arrangements with respect to the responsibility for shipping the equipment and handling any other incidental charges with the MKS sales representative or distributor from which the equipment was purchased or in the case of a direct purchase from MKS with the MKS home office in Andover Massachusetts USA This warranty does not apply to any equipment whic...

Страница 3: ...Absolute Pressure Transducers Type 622 Pressure Transducer 15 VDC 35 mA PIN SIGNAL 1 Pwr Com 2 Sig Com 3 Sig Output 4 15 VDC 5 15 VDC Chassis ZERO Type 62x Pressure Transducer VDC 250 mA PIN SIGNAL 2 Sig Output 5 Pwr Com 6 15 VDC 7 15 VDC 12 Sig Com 15 Chassis ZERO R ...

Страница 4: ...ecording or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Inc Printed in the United States of America Swagelok VCR and VCO are registered trademarks of Swagelok Marketing Co Solon OH Baratron is a registered trademark of MKS Instruments Inc Andover MA Inconel is a registered trademark of Inc Alloys International Huntington WV ...

Страница 5: ... le transducteur de pression 9 Symboles utilisés dans ce manuel d utilisation 9 Symboles apparaissant sur l unité 10 Mesures de sécurité et précautions 11 Medidas de seguridad del transductor de presión 13 Símbolos usados en este manual de instrucciones 13 Símbolos hallados en la unidad 14 Procedimientos y precauciones de seguridad 15 Chapter One General Information 17 Introduction 17 How This Man...

Страница 6: ... Available for Reading 35 Lowest Suggested Pressure to Use for Control 35 How to Use the External Zero on the Type 629 Unit 37 Adjusting the External Zero 37 Rejecting Common Mode Voltages 37 Chapter Five Maintenance and Troubleshooting 39 General 39 Zero Adjustment 39 Troubleshooting Chart 40 Appendix A Product Specifications 41 MKS Types 622 and 626 Units 41 MKS Type 627 and 629 Units 42 MKS Typ...

Страница 7: ...e 8 Using Pin 7 as an External Zero Adjustment 37 Figure 9 Type 629 Transducers Connected to Reject Common Mode Voltages 38 Tables Table 1 Definition of Symbols Found on the Unit 2 Tabelle 2 Bedeutung der am Gerät angebrachten Symbole 6 Tableau 3 Définition des symboles apparaissant sur l unité 10 Tabla 4 Definición de los símbolos hallados en la unidad 14 Table 5 Interface Cables 20 Table 6 Highe...

Страница 8: ...List of Figures and Tables vi ...

Страница 9: ...o a procedure practice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attention to an operating procedure practice or the like which if not correctly performed or adhered to could result in damage to or destruction of all or part of the product Note The NOTE sign denotes import...

Страница 10: ...earth ground IEC 417 No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC 417 No 5033 a Class ll equipment IEC 417 No 5172 a Three phase alternating current IEC 617 2 No 020206 Caution refer to accompanying documents ISO 3864 No B 3 1 Caution risk of electric shock ISO 38...

Страница 11: ...ervice must be made by qualified service personnel only USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used users must take responsibility to observe the proper safety precautions completely purge the instrument when necessary and ensure that the material used is compatible with the materials in this product including any sealing materials PURGE THE INSTRUMENT After...

Страница 12: ...ource install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit before or during use Contamination such as dust dirt lint glass chips and metal chips may permanently damage the unit or contaminate the process ALLOW PROPER WARM UP TIME FOR TEMPERATURE CONTROLLED UNITS ...

Страница 13: ...stand oder eine sonstige Gegebenheit aufmerksam deren unsachgemäße Ausführung bzw ungenügende Berücksichtigung zu Verletzungen führen kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr für das Gerät hin Es macht auf einen Bedienungsablauf eine Arbeitsweise oder eine sonstige Gegebenheit aufmerksam deren unsachgemäße Ausführung bzw ungenügende Berücksichtigung zu einer Beschädigung oder Zerstö...

Страница 14: ...anschluß IEC 417 No 5019 Masseanschluß IEC 417 No 5020 Aquipotential anschluß IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Gleich oder Wechselstrom IEC 417 No 5033 a Durchgängige doppelte oder verstärkte Isolierung IEC 417 No 5172 a Dreileiter Wechselstrom Drehstrom IEC 617 2 No 020206 Warnung vor einer Gefahrenstelle Achtung Dokumen tation beachten ISO 3864 No B 3 1 Wa...

Страница 15: ...tung nur durch qualifizierte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgeführt werden niemals vom Bedienpersonal Vorsicht beim Arbeiten mit gefährlichen Stoffen Wenn gefährliche Stoffe verwendet werden muß der Bediener die entsprechenden Sicherheitsvorschriften genauestens einhalten das Gerät falls erforderlic...

Страница 16: ...Geeignete Berstscheibe installieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosionsgefahr aufgrund von steigendem Systemdruck zu vermeiden Verunreinigungen im Gerät vermeiden Stellen Sie sicher daß Verunreinigungen jeglicher Art weder vor dem Einsatz noch während des Betriebs in das Instrume...

Страница 17: ...ondition ou toute autre situation présentant un risque d accident pour le personnel en cas d exécution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l appareil Elle attire l attention sur une procédure d exploitation une pratique ou toute autre situation présentant un risque d endommagement ou de destruction d une partie ou de la totalité de l a...

Страница 18: ... masse IEC 417 No 5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialité IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu et alternatif IEC 417 No 5033 a Matériel de classe II IEC 417 No 5172 a Courant alternatif triphasé IEC 617 2 No 020206 Attention se reporter à la documentation ISO 3864 No B 3 1 Attention risque d...

Страница 19: ...age doit être uniquement effectué par du personnel qualifié PRÉCAUTION EN CAS D UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilisés l utilisateur est responsable de la prise des mesures de précaution appropriées de la purge complète de l appareil quand cela est nécessaire et de la garantie que les produits utilisés sont compatibles avec les composants de cet appareil y ...

Страница 20: ...un disque d échappement adapté dans le système à vide afin d éviter une explosion du système en cas d augmentation de la pression MAINTIEN DE L UNITÉ À L ABRI DES CONTAMINATIONS Ne pas laisser des produits contaminants pénétrer dans l unité avant ou pendant l utilisation Des produits contaminants tels que des poussières et des fragments de tissu de glace et de métal peuvent endommager l unité d un...

Страница 21: ...nales Pone de relieve un procedimiento práctica estado etc que en caso de no realizarse u observarse correctamente puede causar daños personales Precaución El símbolo de precaución indica la posibilidad de producir daños al equipo Pone de relieve un procedimiento operativo práctica estado etc que en caso de no realizarse u observarse correctamente puede causar daños o la destrucción total o parcia...

Страница 22: ... tierra IEC 417 N 5017 Protección a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente continua y alterna IEC 417 N 5033 a Equipo de clase II IEC 417 N 5172 a Corriente alterna trifásica IEC 617 2 N 020206 Precaución Consulte los documentos adjuntos ISO 3864 N B 3 1 Precaución Riesgo de de...

Страница 23: ...BEN SER EFECTUADAS ÚNICAMENTE POR TÉCNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento o reparación deben ser realizadas únicamente por personal autorizado TENGA CUIDADO CUANDO TRABAJE CON MATERIALES TÓXICOS Cuando se utilicen materiales tóxicos es responsabilidad de los operarios toma...

Страница 24: ... hallará la presión máxima permitida INSTALE UNA CÁPSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado instale una cápsula de seguridad adecuada en el sistema de vacío para evitar que se produzcan explosiones cuando suba la presión del sistema MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES No permita el ingreso de contaminantes en la unidad antes o durante su us...

Страница 25: ...mperature stable at operating pressure Protection from FR interference and noisy electrical environments is increased by the use of a metal case by internal design elements and by the use of surge and ESD suppression networks and RFI filtering on all inputs and outputs The Types 622 and 626 transducers have an accuracy of 0 25 of reading optional 0 15 of reading and are identical except for their ...

Страница 26: ...Chapter Five Maintenance and Troubleshooting provides maintenance and troubleshooting information Appendix A Product Specifications lists the specifications of the instrument Appendix B Model Code Explanation describes the model code used to order the instrument Customer Support Standard maintenance and repair services are available at all of our regional MKS Calibration and Service Centers listed...

Страница 27: ... Service Center before shipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Unpacking Checklist Standard Equipment The Type 622 626 627 628 or 629 Absolute Pressure Transducer specified at time of order The Type 622 transducer comes with a mating connector for the transducer s 5 pin terminal block Optional Equipment The Types 622 62...

Страница 28: ...braided shielded cable properly grounded at both ends is required during use to meet CE specifications 2 To order an overall metal braided shielded cable add an S after the cable type designation For example to order a cable to connect a 627 unit to a 146 unit use part number CB259 5 XX where XX designates the cable length for a braided shielded cable use part number CB259S 5 XX Interface Cables P...

Страница 29: ...es with flying leads at one or both ends it is important at each such end to ground the shield before the wires exit Make this ground with absolute minimum length Refer to Figures 1 and 2 page 22 A inch piece of 22 wire may be undesirably long since it has approximately 5 nH of inductance equivalent to 31 ohms at 1000 MHz After picking up the braid s ground keep wires and braid flat against the ca...

Страница 30: ...tional Plastic or Metal Cable Clamp For Physical Strain Relief Figure 1 Preferred Method To Connect an Overall Metal Braided Shielded Cable Example 2 Alternate Method To Connect Cable shown on a transducer Transducer Overall Insulation if present Braid Strands Twisted Under Washer Keep Wires Flat Against Case Optional Plastic or Metal Cable Clamp For Physical Strain Relief Screw Split Lock Washer ...

Страница 31: ...V p p noise and ripple Type 627 and 629 Ambient operating temperature should remain between 15 C and 40 C 59 F and 104 F Input required is 15 VDC 5 250 mA maximum with 20 mV p p noise and ripple Type 628 Ambient operating temperature should remain between 20 C and 70 C 68 F and 158 F Input required is 15 VDC 5 500 mA maximum with 20 mV p p noise and ripple For additional product requirements refer...

Страница 32: ...VCR female Swagelok 8 VCO female Mini CF Caution MKS does not warranty the 622 626 627 628 or 629 transducer when single or double metal ferrule compression type vacuum fittings shown in Figure 3 page 24 are used because damage will occur to the transducer when improper tightening procedures are followed Single Ferrule Double Ferrule Figure 3 Metal Single and Double Ferrule Compression type Vacuum...

Страница 33: ...or approximately 15 minutes for Types 622 and 626 instruments 2 to 4 hours for the Types 627 628 and 629 instruments 1 Torr 8 hours for the 0 05 Torr 627 and 629 and 0 1 Torr 627 628 629 Pump the unit with the power on down to a pressure less than the transducer s resolution 0 01 of Full Scale Note Once the unit is properly warmed up and stabilized the zero adjustment must be made at a pressure le...

Страница 34: ...l the transducer a system with a power supply readout 2 Power the transducer and allow it to warm up Warm up time is 15 minutes for Types 622 and 626 transducers 2 4 hours for Types 627 628 and 629 transducers 1 Torr 8 hours for the 0 05 and 0 1 Torr range units 3 Pump the unit down to a pressure below its resolution refer to Table 6 for recommended pressure levels 4 Using a small screwdriver adju...

Страница 35: ...onditions Note Use the coarse zero adjustment only if the zero potentiometer fails to provide sufficient adjustment The COARSE ZERO control is accessible through the side of the instrument as shown in Figure 5 COARSE ZERO Adjustment ZERO Potentiometer ZERO Type 62X Pressure Transducer 15 VDC 250 mA PIN SIGNAL 2 Sig Output 5 Pwr Com 6 15 VDC 7 15 VDC 12 Sig Com 15 Chassis Figure 5 Location of the C...

Страница 36: ...6 for recommended pressure levels For best results pump the transducer while it is warming up 4 Center the ZERO pot located at the top of the transducer adjust the screw to leave an equal amount of adjustment both clockwise and counterclockwise 5 Turn the COARSE ZERO s multi position switch located on the side of the unit to a position that produces the output signal closest to zero Volts 6 Re ins...

Страница 37: ...7 1 45 0 31 7 9 125 22 4 93 1 30 3 76 0 500 DIA 3 00 DIA 0 13 12 7 76 2 33 02 95 50 3 30 5 19 131 8 Type 626A 65 0 2 56 DIA 80 52 36 83 12 70 0 500 DIA 3 17 1 45 0 13 3 30 120 65 4 75 Type 627A and 628A Units Manufactured by MKS Instruments Inc Manufactured by MKS Instruments Inc Manufactured by MKS Instruments Inc Figure 6 Dimensions of the Types 622 626 627 628 and 629 Transducers ...

Страница 38: ...he performance and stability of the system Required Inputs for Types 622 626 627 628 and 629 Transducers Input Required Types 622 626 Type 627 629 Type 628 At Startup 15 VDC 5 35 mA 15 VDC 5 250 mA 15 VDC 5 500 mA After 1 hour of operation at 25 C 15 VDC 5 35 mA 15 VDC 5 150 mA 15 VDC 5 350 mA Table 7 Required Inputs for Types 622 626 627 628 and 629 Transducers Readout Power Supply 0 10 V Pressur...

Страница 39: ...pe D whose pinout is listed in Table 10 page 32 Pinout of Type 622 Transducer Pin Number Assignment 1 Power Common 2 Signal Common 3 Signal Output 4 15 VDC 5 15 VDC Chassis Ground is made by using the screw labeled CHASSIS on the endcap Table 8 Pinout of Type 622 Transducer Pinout of Types 626 627 and 628 Transducers Pin Number Assignment 2 Signal Output 5 Power Common 6 15 VDC 7 15 VDC 12 Signal ...

Страница 40: ... Information Chapter Two Installation 32 Pinout of Type 629 Transducer Pin Number Assignment 1 Signal Output 4 15 VDC 5 15 VDC 7 External Zero 8 Signal Common 9 Power Common Table 10 Pinout of Type 629 Transducer ...

Страница 41: ...ects with changing absolute pressure force per unit area independently of the gas type or composition of the measured gas This deflection causes an imbalance of the sensor electrode capacitances since the distance to the diaphragm is now different for each electrode The imbalance of capacitances is converted to a DC voltage in the bridge This bridge is excited by a precision constant frequency osc...

Страница 42: ...ly to the Type 627 transducer with the following exceptions The Type 629 transducer has a unique connector and pinout Refer to Table 10 page 32 for the pinout description The Type 629 transducer output is fully differential with respect to the voltage input to the external zero pin 7 For details refer to Chapter Four Operation page 17 ...

Страница 43: ... for Reading The pressures listed in the middle column of Table 11 page 36 reflect reliable and practical pressures for different range transducers Lower readings may be obtained in environments which have stable temperature and air flow As noted in Table 11 page 36 temperature controlled transducers can obtain repeatable pressure measurements down to 1 x 10 5 Torr and unheated transducers can obt...

Страница 44: ...ding Torr Lowest Suggested Pressure for Control Torr 0 05 2 5 x 10 5 2 5 x 10 4 0 1 5 x 10 5 5 x 10 4 1 5 x 10 4 5 x 10 3 10 5 x 10 3 5 x 10 2 100 5 x 10 2 5 x 10 1 1K 5 x 10 1 5 Only available with Types 627 and 629 transducers Only available with Types 627 628 and 629 transducers Table 11 Suggested Pressures for Reading and Control ...

Страница 45: ...ure below the resolution of the Type 629 transducer Table 6 page 26 lists the correct pressure for each range Use a cold cathode gauge or other high vacuum gauge capable of reading pressures below the transducer s resolution to verify the pressure before adjusting the zero 1 7 8 Type 629 Voltage at zero pressure 0 V V1 V out V1 Figure 8 Using Pin 7 as an External Zero Adjustment Note If the extern...

Страница 46: ...quisition System Signal Output Signal Common 15V 15V Power Common External Zero top view 10K 1 F Chassis Ground 629 Transducer 1 7 8 9 4 5 top view Signal Output Signal Common 15V 15V Power Common External Zero 10K 1 F Chassis Ground 629 Transducer 1 7 8 9 4 5 top view D A Ground Vcm 1 V max 15V P S Ground 15V Power Supply 15V 15V 15V Figure 9 Type 629 Transducers Connected to Reject Common Mode V...

Страница 47: ...o MKS Instruments for service In production operations such as semiconductor manufacturing verify the transducer zero and adjust if necessary each time the equipment is shut down for routine maintenance Note The ZERO adjustment is the only adjustment that can be made in the field Return the transducer to MKS Instruments for other adjustments calibration or servicing Periodically check for wear on ...

Страница 48: ...al block Inspect cable and transducer Replace if necessary Measurement slowly goes positive over time Overpressure and or a build up of contamination in the Px cavity Return to MKS for servicing or transducer replacement Unstable zero output The ambient temperature may be too high or The ambient temperature is varying over a wide range Refer to Appendix A Product Specifications page 41 and be sure...

Страница 49: ...5 VDC 5 35 mA Materials exposed to gases Inconel Output 0 to 10 VDC into 10K ohm load Overpressure limit without damage 45 psia 310 kPa Temperature coefficients Zero Span 0 005 F S C4 0 04 Reading C Time constant 20 msec Usable measurement range 1 x 10 4 F S Volume Px side 6 3 cc Due to continuing research and development activities these specifications are subject to change without notice 1Availa...

Страница 50: ...Full Scale Ranges Torr 0 1 1 2 10 100 1K Input required 15 VDC 5 250 mA max Materials exposed to gases Inconel Output 0 to 10 VDC into 10K ohm load Overpressure limit without damage 45 psia 310 kPa Temperature coefficients Zero Span 0 002 F S C7 0 02 Reading C Time constant 20 msec Usable measurement range 1 x 10 4 F S Volume Px side 6 3 cc Due to continuing research and development activities the...

Страница 51: ...tandard Optional inch 12 7 mm tubulation NW 16 KF mini CF Swagelok 8 VCR or 8 VCO female Input required 15 VDC 5 250 mA max Materials exposed to gases Inconel Output 0 to 10 VDC into 10K ohm load Overpressure limit without damage 45 psia 310 kPa Pressure ranges Torr F S 0 05 Temperature coefficients Zero Span 0 015 F S C 0 02 Reading C Time constant 20 msec Usable measurement range 2 x 10 4 F S Vo...

Страница 52: ...Scale Range Torr 0 1 1 2 10 100 1K Input required 15 VDC 5 500 mA max Materials exposed to gases Inconel Output 0 to 10 VDC into 10K ohm load Overpressure limit without damage 45 psia 310 kPa Temperature coefficients Zero Span 0 002 F S C11 0 02 Reading C Time constant 20 msec Usable measurement range 1 x 10 4 F S Volume Px side 6 3 cc Due to continuing research and development activities these sp...

Страница 53: ...odel Code The options of your unit are identified in the model code The model code is identified as follows 62XAXXXYYZ where Type Number Full Scale Range Fittings Type 62XA XXX Y Z Accuracy Type Number 62XA This designates the model number of the instrument 622A 626A 627A 628A or 629A ...

Страница 54: ...ingle letter code Fittings Ordering Code inch 12 7 mm tubulation A Swagelok 8 VCR female B Mini CF rotatable C NW 16 KF D Swagelok 8 VCO female E Accuracy Z The accuracy is designated by a single number code Accuracy Ordering Code 0 12 of Reading standard for Type 627 628 and 629 1 2 10 100 1000 Torr ranges only C 0 15 of Reading optional for Type 622 and 626 10 100 and 1000 Torr only standard for...

Страница 55: ...of 2 P Pressure lowest for control 17 lowest for reading 17 R Returning the product 4 5 21 S Safety procedures and precautions 1 2 Sensor 15 Setup 7 Signal Conditioner Electronics 15 Specifications 6 23 26 T Troubleshooting 22 Type 622 transducer 23 Type 626 transducer 23 Type 627 transducer 16 24 50m Torr 25 Type 628 transducer 26 Type 629 transducer 16 24 50m Torr 25 external zero 18 19 U Unpack...

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