MKS 653B Скачать руководство пользователя

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117082-P1

Rev D, 1/98

Instruction Manual

MKS Type 653B

Exhaust Throttle Valve

Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350

Fax: (978) 975-0093

E-mail: [email protected]

Web site: http://www.mksinst.com

Содержание 653B

Страница 1: ...P1 Rev D 1 98 Instruction Manual MKS Type 653B Exhaust Throttle Valve Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web site http www mksinst com ...

Страница 2: ...S of this warranty The purchaser before returning any equipment covered by this warranty which is asserted to be defective by the purchaser shall make specific written arrange ments with respect to the responsibility for shipping the equipment and handling any other incidental charges with the MKS sales representative or distributor from which the equipment was purchased or in the case of a direct...

Страница 3: ...117082 P1 Rev D 1 98 MKS Type 653B Exhaust Throttle Valve ...

Страница 4: ...ed in the United States of America Baratron is a registered trademark of MKS Instruments Inc Andover MA Chemraz is a registered trademark of Greene Tweed Co Inc Kulpsville PA Viton and Kalrez are registered trademarks of DuPont Dow Elastomers Inc Wilmington DE Parker is a registered trademark of Parker Seals Lexington KY Please Note MKS Instruments provides these documents as the latest version fo...

Страница 5: ...o Installation 7 How To Unpack the Type 653 Unit 7 Unpacking Checklist 7 Environmental Requirements 8 Setup 8 Choosing A Pressure Controller 9 Flange Types 9 ASA Series Flanges 10 CF Series Flanges 11 ISO NW Series Flanges 12 JIS Series Flanges 13 KF Series Flanges 14 Interface Cables 15 Generic Shielded Cable Description 16 Interface Connector 17 Chapter Three Operation 19 Theory of Operation 19 ...

Страница 6: ...22 Appendix A Product Specifications 23 General Specifications 23 Appendix B ASA Series Flange Specifications 25 Appendix C ISO NW Series Flange Specifications 27 Appendix D CF Series Flange Specifications 29 Appendix E JIS Series Flange Specifications 31 Index 33 ...

Страница 7: ...es Flange 12 Figure 5 Outline Dimensions of a JIS Series Flange 13 Figure 6 Outline Dimensions of a KF Series Flange 14 Tables Table 1 Definition of Symbols Found on the Unit 2 Table 2 Size Options for ASA Series Flanges 10 Table 3 Size Options for CF Series Flanges 11 Table 4 Size Options for ISO NW Series Flanges 12 Table 5 Size Options for JIS Series Flanges 13 Table 6 Size Options for KF Serie...

Страница 8: ...List of Figures and Tables vi ...

Страница 9: ...practice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attention to an operating procedure practice or the like which if not correctly performed or adhered to could result in damage to or destruction of all or part of the product Note The NOTE sign denotes important informatio...

Страница 10: ...round IEC 417 No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC 417 No 5033 a Class ll equipment IEC 417 No 5172 a Three phase alternating current IEC 617 2 No 020206 Caution refer to accompanying documents ISO 3864 No B 3 1 Caution risk of electric shock ISO 3864 No B...

Страница 11: ...alve DO NOT SUBSTITUTE PARTS OR MODIFY VALVE Do not install substitute parts or perform any unauthorized modification to the valve Return the valve to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not attempt component replacement and internal adjustments Any service must b...

Страница 12: ...sure leak tight installation OPERATE AT SAFE INLET PRESSURES Never operate the valve at pressures higher than the rated maximum pressure refer to the product specifications for the maximum allowable pressure INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise KEEP T...

Страница 13: ...required to operate a 4 inch sealing valve or a 12 inch non sealing valve and is constructed of corrosion resistant 316L sst The valve body can be heated up to 150 C using the appropriate sealing material without damaging the motor or drive assembly thereby allowing for operation in high temperature applications and processes Heating the valve along with the high torque and corrosion resistant mat...

Страница 14: ... of the valve Appendices B through E contain the Flange Specifications Customer Support Standard maintenance and repair services are available at all of our regional MKS Calibration and Service Centers listed on the back cover In addition MKS accepts the instruments of other manufacturers for recalibration using the Primary and Transfer Standard calibration equipment located at all of our regional...

Страница 15: ...during shipment Note Do not discard any packing materials until you have completed your inspection and are sure the unit arrived safely If you find any damage notify your carrier and MKS immediately If it is necessary to return the unit to MKS obtain an ERA Number Equipment Return Authorization Number from the MKS Service Center before shipping Please refer to the inside of the back cover of this ...

Страница 16: ...nable To use your MKS valve safely you must always conform to the following instructions Warning The moving parts in the valve create a risk of personal injury until the valve is securely incorporated into a system To avoid injury keep all objects away from any valve opening Do not insert objects into openings where contact with moving parts is possible Isolate the equipment from any electrical or...

Страница 17: ...evision A of the 652 controller does not support the 653 valve 90 75 60 45 30 15 0 0 31 Max 7 9 6 06 154 1 9 pin Type D male 3 95 Dia 100 3 Figure 1 Outline Dimensions of the Motor Driver Assembly Flange Types The 653 valve has available five series of flange types ASA CF ISO NW JIS and KF Refer to the appropriate tables and outline drawings on the following pages for information about the various...

Страница 18: ...6 2 6 5 3 8 6 2 6 5 3 8 8 2 65 3 1 0 1 0 2 5 503 5 8 6 9 7 6 3 6 7 636 1 0 1 1 8 1 0 9 0 1 3 1 9 1 6 0 0 9 7 9 1 1 8 1 1 4 1 1 1 6 9 4 88 1 0 0 12 7 5 0 0 9 5 0 0 1 1 7 5 0 1 4 2 5 0 1 5 5 9 9 5 8 0 0 0 9 7 5 0 1 1 9 3 8 1 8 5 1 1 2 2 2 6 6 2 2 7 3 2 2 7 8 140 1 4 9 1 9 4 194 2 5 7 2 7 7 3 3 5 4 0 6 2 4 9 3 0 0 3 5 8 4 3 0 2 2 2 5 1 5 2 2 0 3 2 4 8 3 0 3 4 7 2 8 1 9 0 2 4 1 2 9 8 3 6 2 L 1 0 0 2 5...

Страница 19: ...7 40 188 7 70 196 16 5 128 130 11 15 6 A B C E F G H 4 68 119 4 6CF 2 3 6CF 1 2 4CF 2 2 3CF 1 20 2CF 2 1 2CF 1 5 91 150 5 869 149 8 90 226 7 650 194 11 22 10 76 273 12 53 318 33 8 4 20 24 7 128 181 9 128 232 9 7 5 8 10 285 L 1 00 25 1 62 41 Model No CF Size 18 59 472 653 653 653 653 653 653 653 6 8CF 2 653 8 10CF 2 Table 3 Size Options for CF Series Flanges H Mates with CF Style Flange K A Dia L B...

Страница 20: ... 71 348 653 6 160 2 5 869 149 8 90 22 6 9 79 249 0 43 11 7 870 200 NW 160 1 62 41 15 85 403 653 8 200 2 7 650 194 11 22 285 12 13 308 12 10 240 260 15º NW 200 18 19 462 653 10 250 2 9 700 246 13 19 335 14 11 358 12 200 310 NW 250 20 17 512 653 12 320 2 12 370 314 16 73 425 17 67 449 0 55 14 15 550 395 NW 320 23 73 603 Table 4 Size Options for ISO NW Series Flanges H A Dia L Accepts K Centering Sea...

Страница 21: ... 345 653 6 150J 2 5 709 145 9 25 235 10 14 258 8 268 210 6 890 175 157 x 6 811 4 x 173 JIS 150MM 1 62 41 16 20 411 653 8 200J 2 7 677 195 11 81 300 12 72 323 0 590 15 10 630 270 8 858 225 0 315 8 0 177 4 5 0 236 x 8 760 6 x 222 5 JIS 200MM 18 78 477 653 10 250J 2 9 645 244 9 13 78 350 14 71 374 12 12 598 320 15º 10 827 275 0 236 x 10 709 6 x 272 JIS 250MM 20 77 528 653 12 300J 2 11 597 294 5 15 75...

Страница 22: ...F E C D B K F 5 0 5 1 2 0 0 7 5 2 9 5 2 5 1 0 0 8 3 3 2 5 3 2 1 2 7 0 3 5 1 3 8 5 K F 4 0 5 7 2 2 5 5 5 2 1 6 3 2 1 2 5 7 0 2 7 5 2 0 0 779 2 2 0 870 Model No A A 1 2 Total Height 10 25 260 10 75 273 Table 6 Size Options for KF Series Flanges B 36 5 1 44 E D Dia Mounts to KF Flange F C Dia Dia A1 A2 Dia Figure 6 Outline Dimensions of a KF Series Flange ...

Страница 23: ...rective 89 336 EEC an overall metal braided shielded cable properly grounded at both ends is required during use No additional installation requirements are necessary to ensure compliance with Directives 92 59 EEC and 73 23 EEC Note 1 An overall metal braided shielded cable properly grounded at both ends is required during use to meet CE specifications 2 To order an overall metal braided shielded ...

Страница 24: ...For shielded cables with flying leads at one or both ends it is important at each such end to ground the shield before the wires exit Make this ground with absolute minimum length A inch piece of 22 wire may be undesirably long since it has approximately 5 nH of inductance equivalent to 31 ohms at 1000 MHz After picking up the braid s ground keep wires and braid flat against the case With very few...

Страница 25: ...ing A 3 Limit Switch Common 4 Open Limit Switch 5 Closed Limit Switch 6 Motor Winding B 7 Motor Winding B 8 Limit Switch Current Source 9 No Connection Table 8 Interface Connector Pinout The limit switches require 25 mA current For proper operation use a 15 VDC power supply run through a 470 ohm 0 5 Watt resistor To set up the Type 651 1651 or 652B pressure controller refer to the corresponding in...

Страница 26: ...Interface Connector Chapter Two Installation 18 This page intentionally left blank ...

Страница 27: ...ontrol over a wide dynamic range High conductance Fast response Using the Type 651 1651 or 652 pressure controller in conjunction with the 653 valve has another advantage The flow rate of the 653 valve like all throttle valves is non linear with respect to position that is the percent change in flow rate ranges from very large values when the valve is near the closed position to zero when the valv...

Страница 28: ...is no warm up time required for the valve Caution To avoid unstable pump performance when operating the 653 valve with high vacuum diffusion pumps make certain the pressure above the oil vapor jet does not exceed 0 5 mTorr If the pressure does exceed 0 5 mTorr the pump s oscillation will appear to be an unstable control loop If this occurs lower the flow rates to ensure that the diffusion pump can...

Страница 29: ...e or toxic materials The Type 653 valve in particular must be purged of all contaminants Safety Precautions MKS products are designed and tested to provide the highest degree of safety attainable To use your MKS valve safely you must always conform to the following instructions Warning The moving parts in the valve create a risk of personal injury until the valve is securely incorporated into a sy...

Страница 30: ... elastomer as well as any process material by products which may be deposited on the valve The process wetted parts shaft flapper and valve body are 316L stainless steel They may be cleaned using appropriate chemicals to remove process contamination The other parts should be cleaned in non reactive solvents Do not dip the motor or switches in cleaning fluid Inspect all parts for damage nicks dents...

Страница 31: ...lve motor ambient operating temperature 20 to 40 C Differential pressure across valve 1 atm 15 psig maximum External leakage at shaft seal 1 x 10 7 scc sec He for 1 min with 1 ATM P Materials exposed to process 316L sst Viton Shaft Flapper seal4 Viton Due to continuing research and development activities these product specifications are subject to change without notice 2 An overall metal braided s...

Страница 32: ...General Specifications Appendix A Product Specifications 24 This page intentionally left blank ...

Страница 33: ...Appendix B ASA Series Flange Specifications General Specifications 25 Appendix B ASA Series Flange Specifications ...

Страница 34: ...General Specifications Appendix B ASA Series Flange Specifications 26 This page intentionally left blank ...

Страница 35: ...Appendix C ISO NW Series Flange Specifications General Specifications 27 Appendix C ISO NW Series Flange Specifications ...

Страница 36: ...General Specifications Appendix C ISO NW Series Flange Specifications 28 This page intentionally left blank ...

Страница 37: ...Appendix D CF Series Flange Specifications General Specifications 29 Appendix D CF Series Flange Specifications ...

Страница 38: ...General Specifications Appendix D CF Series Flange Specifications 30 This page intentionally left blank ...

Страница 39: ...Appendix E JIS Series Flange Specifications General Specifications 31 Appendix E JIS Series Flange Specifications ...

Страница 40: ...General Specifications Appendix E JIS Series Flange Specifications 32 This page intentionally left blank ...

Страница 41: ...bles 15 Interface connector 17 Introduction 5 ISO NW Series flanges 12 27 J JIS Series flanges 14 31 K KF Series flanges 14 M Maintenance 22 Manual organization 6 O Operating temperature 8 Operation general 20 P Pressure controller 5 9 19 23 R Requirements environmental 8 Returning the product 6 7 21 S Safety information 1 Safety precautions 21 Setup 8 Symbols 2 T Temperature maximum 5 operating 8...

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