MKS 248A, Руководство пользователя

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Chapter Four: Maintenance
17
Type 248 Valve Components
Valve Assembly
ID Number
(refer to Figure Error!
Bookmark not defined. , page
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defined. )
Valve
Component
1 Body
2 Collar
3 Center Shaft
4 Coil Assembly
5 Armature/Plug Assembly
(with O-rings, see #10)
6 Orifice Assembly
(without O-rings)
7 ¼” Swagelok
®
Fitting
8 Socket Head Screw (8-32 x 0.50)
9 Hex Nut (
7
/
16
- 14)
10 O-Ring, Viton
®
, Size 2-016
11 O-Ring, Viton, Size 2-009
12 O-Ring, Viton, Size 3-902
Table 1: Type 248 Valve Components
Note
Table 1 above is provided for reference purposes only. Disassembly of
the valve will void its warranty. For maintenance, please contact MKS
Instruments, Inc. and obtain an RMA (Return Materials Authorization.