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LEYBOLD IONIVAC ITR 90, Руководство по эксплуатации

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Sales and Service 

 

 

Original:  German  GA09420_001_C0  (2016-10) 

 

Headquarter 
Leybold GmbH 

Bonner Strasse 498 
D-50968 Cologne 
T: +49-(0)221-347-0 
F: +49-(0)221-347-1250 
[email protected] 

 

w w w . l e y b o l d . c o m

 

ga09420. 002. c0

Germany

 

Great Britain

 

America

 

Leybold Japan Co., Ltd. 

Tsukuba Technical Service Center 
1959, Kami-yokoba 
Tsukuba-shi, Ibaraki-shi 305-0854 
Japan 
Service: 
T: 

+81 -29-839 5480 

F: 

+81 -29-839 5485 

Malaysia 

Leybold Malaysia 
Leybold  Singapore Pte Ltd. 

No. 1 Jalan Hi-Tech 2/6 
Kulim Hi-Tech Park 
Kulim, Kedah Darul 
Aman 09000 
Malaysia

 

Sales and Service: 
T: 

+604 4020 222 

F: 

+604 4020 221 

[email protected] 
[email protected] 

South Korea 

Leybold Korea Ltd. 

3F. Jellzone 2 Tower 
Jeongja-dong 159-4 
Bundang-gu Sungnam-si 
Gyeonggi-do 
Bundang 463-384, Korea 
Sales: 
T: 

+82-31 785 1367 

F: 

+82-31 785 1359 

[email protected] 
Service: 
623-7, Upsung-Dong 
Cheonan-Si 
Chungcheongnam-Do 
Korea 330-290 
T: 

+82-41 589 3035 

F: 

+82-41 588 0166 

[email protected] 

Singapore 

Leybold Singapore Pte Ltd. 

8 Commonwealth Lane #01-01 
Singapore 149555 
Singapore 
Sales und Service: 
T: +65-6303 

7030 

F: +65-6773 

0039 

[email protected] 
[email protected] 

Taiwan 

Leybold Taiwan Ltd. 

No 416-1, Sec. 3 
Chunghsin Rd., Chutung 
Hsinchu County 310 
Taiwan, R.O.C. 
Sales and Service: 
T: +886-3-500 

1688 

F: +886-3-583 

3999 

[email protected] 
[email protected]

 

Leybold GmbH

 

Sales, Service, Support Center (3SC) 
Bonner Strasse 498 
D-50968 Cologne 
T: +49-(0)221-347 

1234 

F: +49-(0)221-347 

31234 

[email protected] 
www.leybold.com 

Leybold GmbH 
Sales Area North 

Branch Office Berlin 
Industriestrasse 10b  
D-12359 Berlin 
T: 

+49-(0)30-435 609 0 

F: 

+49-(0)30-435 609 10 

[email protected] 

Leybold GmbH  
Sales Office South 

Branch Office Munich 
Karl-Hammerschmidt-Strasse 34 
D-85609 Aschheim-Dornach 
T: +49-(0)89-357 

33 

9-10 

F: +49-(0)89-357 

33 

9-33 

[email protected] 
[email protected] 

Leybold Dresden GmbH 
Service Competence Center

 

Zur Wetterwarte 50, Haus 304 
D-01109 Dresden 
Service: 
T: +49-(0)351-88 

55 

00 

F: +49-(0)351-88 

55 

041 

[email protected] 

Europe

 

Belgium 

Leybold Nederland B.V.

 

Belgisch bijkantoor

 

Leuvensesteenweg 542-9A 
B-1930 Zaventem 
Sales: 
T: +32-2-711 

00 

83 

F: +32-2-720 

83 

38 

[email protected] 
Service: 
T: +32-2-711 

00 

82 

F: +32-2-720 

83 

38 

[email protected] 

France 

Leybold France S.A.S.

  

Parc du Technopolis, Bâtiment Beta 
3, Avenue du Canada 
F-91940 Les Ulis cedex 
Sales and Service: 
T: 

+33-1-69 82 48 00 

F: 

+33-1-69 07 57 38 

[email protected] 
[email protected] 

Leybold France S.A.S

 

Valence Factory 
640, Rue A. Bergès 
B.P. 107 
F-26501 Bourg-lès-Valence Cedex 
T: 

+33-4-75 82 33 00 

F: 

+33-4-75 82 92 69 

[email protected] 

Leybold UK LTD.

 

Unit 9 
Silverglade Business Park 
Leatherhead Road 
Chessington 
Surrey (London) 
KT9 2QL 
Sales: 
T: +44-13-7273 

7300 

F: +44-13-7273 

7301 

[email protected] 
Service: 
T: +44-13-7273 

7320 

F: +44-13-7273 

7303 

[email protected] 

Italy 

Leybold Italia S.r.l. 

Via Trasimeno 8 
I-20128 Mailand 
Sales: 
T: +39-02-27 

22 

31 

F: 

+39-02-27 20 96 41 

[email protected] 
Service: 
T: +39-02-27 

22 

31 

F: 

+39-02-27 22 32 17 

[email protected] 

Nederlands 

Leybold Nederland B.V. 

Floridadreef 102 
NL-3565 AM Utrecht 
Sales and Service: 
T: 

+31-(30) 242 63 30 

F: 

+31-(30) 242 63 31 

[email protected] 
[email protected] 

Switzerland 

Leybold Schweiz AG, Pfäffikon 

Churerstrasse 120 
CH-8808 Pfäffikon 
Warehouse and shipping address: 
Riedthofstrasse 214 
CH-8105 Regensdorf 
Sales: 
T: +41-44-308 

40 

50 

F: +41-44-302 

43 

73 

[email protected] 
Service: 
T: +41-44-308 

40 

62 

F: 

+41-44-308 40 60  

[email protected] 

Spain 

Leybold Spain, S.A. 

C/. Huelva, 7 
E-08940 Cornellà de Llobregat 
(Barcelona) 
Sales: 
T: +34-93-666 

43 

11 

F: +34-93-666 

43 

70 

[email protected] 
Service: 
T: +34-93-666 

46 

11 

F: +34-93-685 

43 

70 

[email protected] 

USA 

Leybold USA Inc. 

5700 Mellon Road 
USA-Export, PA 15632 
T: +1-724-327-5700 
F: +1-724-325-3577 
[email protected] 
Sales: 
T: +1-724-327-5700 
F: +1-724-333-1217 
Service: 
T: +1-724-327-5700 
F: +1-724-325-3577 

Brazil 

Leybold do Brasil 

Rod. Vice-Prefeito Hermenegildo Tonolli, 
nº. 4413 - 6B 
Distrito Industrial 
Jundiaí - SP 
CEP 13.212-315 
Sales and Service: 
T: 

+55 11 2152 0499 

F: 

+55 11 99467 5934 

[email protected] 
[email protected] 

Asia

 

P.R. China 

Leybold (Tianjin)

 

International Trade Co. Ltd. 

Beichen Economic 
Development Area (BEDA), 
No. 8 Western Shuangchen Road 
Tianjin 300400 
China 
Sales and Service: 
T: +86-22-2697 

0808 

F: +86-22-2697 

4061 

F: +86-22-2697 

2017 

[email protected] 
[email protected] 

India 

Leybold India Pvt Ltd. 

No. 82(P), 4th Phase 
K.I.A.D.B. Plot 
Bommasandra Industrial Area 
Bangalore - 560 099 
India 
Sales and Service: 
T: +91-80-2783 

9925 

F: +91-80-2783 

9926 

[email protected] 
[email protected] 

Japan 

Leybold Japan Co., Ltd. 

Headquarters 
Shin-Yokohama A.K.Bldg., 4th floor 
3-23-3, Shin-Yokohama 
Kohoku-ku, Yokohama-shi 
Kanawaga 222-0033 
Japan 
Sales: 
T: +81 

-45-471-3330 

F: +81 

-45-471-3323 

[email protected] 

 

Содержание IONIVAC ITR 90

Страница 1: ...IONIVAC ITR 90 ITR 90 P Operating Manual GA09420_002_C0 Part Numbers 120 90 120 91 120 92 120 94 230 030 230 031...

Страница 2: ...taken from the product nameplate If not indicated otherwise in the legends the illustrations in this docu ment correspond to the KF vacuum connection They apply to other vacuum connections by analogy...

Страница 3: ...s with a Bayard Alpert hot cathode ionization measure ment system p 2 0 10 2 mbar and a Pirani measurement system p 5 5 10 3 mbar In the overlapping pressure range of 2 0 10 2 5 5 10 3 mbar a mixed si...

Страница 4: ...the Transmitter Into Operation 27 4 4 Degas 27 4 5 Display 28 4 6 RS232C Interface 29 4 6 1 Description of the Functions 29 4 7 Profibus Interface ITR 90 P 32 4 7 1 Description of the Functions 32 4...

Страница 5: ...ndling or use Disregard can lead to malfunctions or mi nor equipment damage Notice Hint recommendation The result is O K The result is not as expected Optical inspection Waiting time reaction time 1 2...

Страница 6: ...ts are con taminated Adhere to the relevant regulations and take the necessary precau tions when handling contaminated parts Communicate the safety instructions to all other users 1 4 Liability and Wa...

Страница 7: ...2 10 5 mbar Degas Degas emission current p 7 2 10 6 mbar 16 mA Pdegas 4 W Control input signal 0 V 24 VDC active high control via RS232 29 Duration max 3 min followed by automatic stop In degas mode I...

Страница 8: ...ure reading of the transmitters with fieldbus interface ITR 90 P is normally transmitted via the corresponding bus Electrical connector ITR 90 ITR 90 P D Sub 15 pin male 19 D Sub 15 pin male 20 Cable...

Страница 9: ...nnector TxD Transmit Data RxD Receive Data GND 9600 Baud binary 8 data bits one stop bit no parity bit no handshake Pin 13 Pin 14 Pin 5 Function and interface protocol of the RS232C interface 29 Profi...

Страница 10: ...molybdenum tungsten copper Internal volume DN 25 ISO KF DN 40 CF R 24 cm3 34 cm 3 Max Pressure 2 bar absolute Weight Part numbers 120 90 120 91 120 92 120 94 230 030 230 031 290 g 550 g 430 g 695 g A...

Страница 11: ...Technical Data GA09420_002_C0 2016 10 Leybold 11 Dimensions mm Part numbers Part numbers 120 90 120 92 120 91 120 94 230 030 230 031 4 40UNC 2B DN 40 CF R 4 40UNC 2B DN 25 ISO KF...

Страница 12: ...component When handling vacuum components take appropriate measures to ensure cleanliness and prevent damages The transmitter may be mounted in any orientation To keep conden sates and particles from...

Страница 13: ...Installation GA09420_002_C0 2016 10 Leybold 13 3 1 1 Making the Flange Connection Procedure It is recommended not to apply any vacuum grease The protective lid will be needed for maintenance...

Страница 14: ...Removing the electronics unit Unscrew the hexagon socket set screw 1 on the side of the electronics unit 2 2 1 Remove the electronics unit without twisting it Removal of the electronics unit is comple...

Страница 15: ...acement of the built in grid by the optional baffle 43 is recommended Installing deinstalling the baffle The optional baffle will be installed at the sensor opening of the deinstalled trans mitter Dei...

Страница 16: ...d Carefully place the baffle onto the sensor opening Using a pin press the baffle down in the center until it catches The baffle is now installed Installation of the transmitter 12 Deinstallation Care...

Страница 17: ...errors If the transmitter is operated with the RS232C interface and a fieldbus interface at the same time data transmission errors may occur The transmitter must not be operated with the RS232C interf...

Страница 18: ...for all ITR 90 versions in this document although the pressure reading of the ITR 90 P transmitter with fieldbus interface is normally transmitted via Profibus The sensor cable is required for supply...

Страница 19: ...supply voltages can damage the transmitter For cable lengths up to 5 m 0 34 mm 2 conductor cross section the output signal can be measured directly between the positive signal out put Pin 2 and supply...

Страница 20: ...nd of the sensor cable to the connector of the instru ment or transmitter controller you are using The transmitter can now be operated via analog and RS232C interface Sensor cable connection ITR 90 P...

Страница 21: ...put Pin 2 and supply common GND Pin 5 without loss of accuracy At greater cable lengths differential measurement between signal output Pin 2 and signal common Pin 12 is recommended Reassemble the cabl...

Страница 22: ...suited to Profibus operation may be used 4 5 Procedure Make the Profibus interface cable according to the following indications 1 5 6 9 D Sub 9 pin male soldering side Pin Function BPG400 SP 1 Do not...

Страница 23: ...pped with a software that sup ports the RS232C protocol of the transmitter 29 Technical data Mains connection Mains voltage 90 250 VAC 50 60 Hz Mains cable 1 8 meter Schuko DIN and U S con nectors Out...

Страница 24: ...nsmitter to the power supply and lock the connector with the screws Connect the RS232C line to the instrument or control device and lock the connector with the screws Connect the power supply to the m...

Страница 25: ...n current is dependent upon the emission current Ie the gas type and the gas pressure p according to the following relationship I Ie p C Factor C represents the sensitivity of the transmitter head It...

Страница 26: ...asuring range The ITR 90 transmitters continuously cover the measuring range 5 10 10 mbar 1000 mbar The Pirani constantly monitors the pressure The hot cathode controlled by the Pirani is activated on...

Страница 27: ...between Pin 2 and Pin 12 of the sensor cable connector Relationship output signal pressure Appendix A Allow for a stabilizing time of approx 10 min Once the transmitter has been switched on permanentl...

Страница 28: ...nt of an error it changes to red The pressure is displayed in mbar default Torr or Pa The pres sure unit can be changed via RS232C interface 29 Pressure display Pressure reading pressure unit Function...

Страница 29: ...hout a request approx every 20 ms Commands are transmitted to the transmitter in a five byte input receive string Operational parameters Data rate 9600 Baud set value no handshake Byte 8 data bits 1 s...

Страница 30: ...adjustment on Bit 3 Definition 0 1 Toggle bit changes with every string received correctly Bit 5 Bit 4 Definition 0 0 Current pressure unit mbar 0 1 Current pressure unit Torr 1 0 Current pressure un...

Страница 31: ...Comment 0 Length of data string 7 Set value 1 Page number 5 ITR 90 2 Status 0 Emission off Pressure unit mbar 3 Error 0 No error 4 5 Measurement High byte Low byte 242 48 Calculation of the pressure p...

Страница 32: ...ofibus operation The physical interface and interface firmware of ITR 90 P comply with the Profibus standard 4 5 Two adjustable switching functions are integrated in the ITR 90 P The corre sponding re...

Страница 33: ...Setting For unambiguous identification of the transmitter in a Profibus environment a node address is required The node address setting is made on the transmitter The node address 0 125dec is set in h...

Страница 34: ...c 7 75 Constant c is pressure unit dependent Appendix A The hysteresis of the switching functions is 10 of the threshold setting 4 8 1 Setting the Switching Functions The threshold values of the two...

Страница 35: ...on Setpoint A B to the desired value UThreshold Setting of the switching functions is now concluded There is no local visual indication of the statuses of the switching func tions However a functional...

Страница 36: ...the function of the vacuum component When handling vacuum components take appropriate measures to ensure cleanliness and prevent damages Procedure Vent the vacuum system Before taking the transmitter...

Страница 37: ...r and tear as well as expendable parts filaments are not covered by the warranty 6 2 Adjusting the Transmitter The transmitter is factory calibrated Through the use in different climatic condi tions f...

Страница 38: ...procedure is the same for all transmitter versions Operate transmitter for approx 10 minutes at atmospheric pressure If the transmitter was operated before in the BA range a cooling down time of appr...

Страница 39: ...minutes at a pressure of 1 10 4 mbar Insert the pin through the opening marked FULL SCALE and push the button inside for 2 s The adjustment is done automatically and ends after 2 minutes The zero poi...

Страница 40: ...f and on again after 5 s Replace the electronics unit transmitter does not switch over to BA at low pressures Pirani zero point out of tolerance Carry out a zero point adjustment 39 Troubleshooting se...

Страница 41: ...ment is necessary when the sensor is severely contaminated the sensor is mechanically deformed the sensor is faulty e g filament of hot cathode broken 39 the sensor is faulty e g Pirani element broken...

Страница 42: ...Maintenance Repair 42 GA09420_002_C0 2016 10 Leybold Deinstall the electronics unit from the faulty sensor and mount it to the new sensor 14 Adjust the transmitter 37 The new sensor is now installed...

Страница 43: ...n and part number Part number Replacement sensor IE 90 vacuum connection DN 25 ISO KF including Allen key E 121 02 Replacement sensor IE 90 vacuum connection DN 40 CF R including Allen key E 121 03 9...

Страница 44: ...taminated parts Contaminated parts can be detrimental to health and environment Before beginning to work find out whether any parts are contami nated Adhere to the relevant regulations and take the ne...

Страница 45: ...ae p 10 U 7 75 0 75 c U 0 75 log p c 7 75 where U p c V mbar 0 V Pa 2 V Torr 0 125 Conversion curve 1E 01 1E 01 1E 03 1E 05 1E 07 1E 09 1E 03 Measuring signal U V 0 0 Sensor error Inadmissible range I...

Страница 46: ...4 75 1 10 4 7 5 10 5 1 10 2 5 50 1 10 3 7 5 10 4 1 10 1 6 25 1 10 2 7 5 10 3 1 10 0 7 00 1 10 1 7 5 10 2 1 10 1 7 75 1 10 0 7 5 10 1 1 10 2 8 50 1 10 1 7 5 10 0 1 10 3 9 25 1 10 2 7 5 10 1 1 10 4 10...

Страница 47: ...Xe 3 0 The above calibration factors are mean values Calibration in pressure range 10 3 mbar The gas type dependence in the pressure range 10 3 mbar can be compensated by means of the following formul...

Страница 48: ...bH D 50968 K ln 2 www leybold com Instruction Sheet IONIVAC ITR 90 P KA09421_002 Leybold GmbH D 50968 K ln 3 www leybold com Interface Manual Profibus ITR 90 P SB09421_002 Leybold GmbH D 50968 K ln 4...

Страница 49: ...Declaration of Contamination GA09420_002_C0 2016 10 Leybold 49 Declaration of Contamination...

Страница 50: ...enue du Canada F 91940 Les Ulis cedex Sales and Service T 33 1 69 82 48 00 F 33 1 69 07 57 38 info ctb leybold com sales ctb leybold com Leybold France S A S Valence Factory 640 Rue A Berg s B P 107 F...

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