LEYBOLD IONIVAC ITR 90, Руководство по эксплуатации

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Appendix
GA09420_002_C0 – (2016-10) –

Leybold 47
Calibration in pressure range 10
-2
… 1 mbar
The gas type dependence in the pressure range 10
-2
… 1 mbar can be compen-
sated by means of the following formula:
p
eff
= C × indicated pressure
where Gas type Calibration factor C
Air, O
2
, CO 1.0
N
2
0.9
CO
2
0.5
Water vapor 0.7
Freon 12 1.0
H
2
0.5
He 0.8
Ne 1.4
Ar 1.7
Kr 2.4
Xe 3.0
(The above calibration factors are mean values)
Calibration in pressure range <10
-3
mbar
The gas type dependence in the pressure range <10
-3
mbar can be compensated
by means of the following formula (transmitter adjusted for air):
p
eff
= C × indicated pressure
where Gas type Calibration factor C
Air, O
2
, CO, N2 1.0
N
2
1.0
He 5.9
Ne 4.1
H
2
2.4
Ar 0.8
Kr 0.5
Xe 0.4
(The above calibration factors are mean values)
A mixture of gases and vapors is often involved. In this case, accurate
determination is only possible with a partial-pressure measuring instru-
ment.