LEYBOLD IONIVAC ITR 90, Руководство по эксплуатации

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Appendix
46
GA09420_002_C0 – (2016-10) – 
Leybold
Conversion table
Output signal U
[V] [mbar]
Pressure p
[Torr] [Pa]
0.3 / 0.5
Sensor error (
→
 39)
0.51 … 0.774 Inadmissible range
0.774 5×10
-10
3.75×10
-10
5×10
-8
1.00 1×10
-9
7.5×10
-10
1×10
-7
1.75 1×10
-8
7.5×10
-9
1×10
-6
2.5 1×10
-7
7.5×10
-8
1×10
-5
3.25 1×10
-6
7.5×10
-7
1×10
-4
4.00 1×10
-5
7.5×10
-6
1×10
-3
4.75 1×10
-4
7.5×10
-5
1×10
-2
5.50 1×10
-3
7.5×10
-4
1×10
-1
6.25 1×10
-2
7.5×10
-3
1×10
0
7.00 1×10
-1
7.5×10
-2
1×10
1
7.75 1×10
0
7.5×10
-1
1×10
2
8.50 1×10
1
7.5×10
0
1×10
3
9.25 1×10
2
7.5×10
1
1×10
4
10.00 1×10
3
7.5×10
2
1×10
5
>10.00 Inadmissible range
B: Gas Type Dependence
Indication range above 10
-2
mbar
Pressure indicated (transmitter adjusted for air, Pirani-only mode)
10
2
10 1
10
0
10 –1
10
–2
10
–3
p (mbar)
10
–3
10
–2
10
–1
10
0
10
1
10
2
H
2
He Ne
Xe
Ar
Freon 12
H O
vapor
2
Air
O2
CO
N2
Kr
Indication range
above 10 mbar)
-2
CO
2