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Technical Data

GA09420_002_C0 – (2016-10) –



Leybold

11

Dimensions [mm]

Part numbers

Part numbers

120 90

120 92

120 91

120 94

230 030

230 031

4-40UNC 2B

DN 40 CF-R

4-40UNC 2B

DN 25 ISO-KF

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Содержание IONIVAC ITR 90

Страница 1: ...IONIVAC ITR 90 ITR 90 P Operating Manual GA09420_002_C0 Part Numbers 120 90 120 91 120 92 120 94 230 030 230 031...

Страница 2: ...taken from the product nameplate If not indicated otherwise in the legends the illustrations in this docu ment correspond to the KF vacuum connection They apply to other vacuum connections by analogy...

Страница 3: ...s with a Bayard Alpert hot cathode ionization measure ment system p 2 0 10 2 mbar and a Pirani measurement system p 5 5 10 3 mbar In the overlapping pressure range of 2 0 10 2 5 5 10 3 mbar a mixed si...

Страница 4: ...the Transmitter Into Operation 27 4 4 Degas 27 4 5 Display 28 4 6 RS232C Interface 29 4 6 1 Description of the Functions 29 4 7 Profibus Interface ITR 90 P 32 4 7 1 Description of the Functions 32 4...

Страница 5: ...ndling or use Disregard can lead to malfunctions or mi nor equipment damage Notice Hint recommendation The result is O K The result is not as expected Optical inspection Waiting time reaction time 1 2...

Страница 6: ...ts are con taminated Adhere to the relevant regulations and take the necessary precau tions when handling contaminated parts Communicate the safety instructions to all other users 1 4 Liability and Wa...

Страница 7: ...2 10 5 mbar Degas Degas emission current p 7 2 10 6 mbar 16 mA Pdegas 4 W Control input signal 0 V 24 VDC active high control via RS232 29 Duration max 3 min followed by automatic stop In degas mode I...

Страница 8: ...ure reading of the transmitters with fieldbus interface ITR 90 P is normally transmitted via the corresponding bus Electrical connector ITR 90 ITR 90 P D Sub 15 pin male 19 D Sub 15 pin male 20 Cable...

Страница 9: ...nnector TxD Transmit Data RxD Receive Data GND 9600 Baud binary 8 data bits one stop bit no parity bit no handshake Pin 13 Pin 14 Pin 5 Function and interface protocol of the RS232C interface 29 Profi...

Страница 10: ...molybdenum tungsten copper Internal volume DN 25 ISO KF DN 40 CF R 24 cm3 34 cm 3 Max Pressure 2 bar absolute Weight Part numbers 120 90 120 91 120 92 120 94 230 030 230 031 290 g 550 g 430 g 695 g A...

Страница 11: ...Technical Data GA09420_002_C0 2016 10 Leybold 11 Dimensions mm Part numbers Part numbers 120 90 120 92 120 91 120 94 230 030 230 031 4 40UNC 2B DN 40 CF R 4 40UNC 2B DN 25 ISO KF...

Страница 12: ...component When handling vacuum components take appropriate measures to ensure cleanliness and prevent damages The transmitter may be mounted in any orientation To keep conden sates and particles from...

Страница 13: ...Installation GA09420_002_C0 2016 10 Leybold 13 3 1 1 Making the Flange Connection Procedure It is recommended not to apply any vacuum grease The protective lid will be needed for maintenance...

Страница 14: ...Removing the electronics unit Unscrew the hexagon socket set screw 1 on the side of the electronics unit 2 2 1 Remove the electronics unit without twisting it Removal of the electronics unit is comple...

Страница 15: ...acement of the built in grid by the optional baffle 43 is recommended Installing deinstalling the baffle The optional baffle will be installed at the sensor opening of the deinstalled trans mitter Dei...

Страница 16: ...d Carefully place the baffle onto the sensor opening Using a pin press the baffle down in the center until it catches The baffle is now installed Installation of the transmitter 12 Deinstallation Care...

Страница 17: ...errors If the transmitter is operated with the RS232C interface and a fieldbus interface at the same time data transmission errors may occur The transmitter must not be operated with the RS232C interf...

Страница 18: ...for all ITR 90 versions in this document although the pressure reading of the ITR 90 P transmitter with fieldbus interface is normally transmitted via Profibus The sensor cable is required for supply...

Страница 19: ...supply voltages can damage the transmitter For cable lengths up to 5 m 0 34 mm 2 conductor cross section the output signal can be measured directly between the positive signal out put Pin 2 and supply...

Страница 20: ...nd of the sensor cable to the connector of the instru ment or transmitter controller you are using The transmitter can now be operated via analog and RS232C interface Sensor cable connection ITR 90 P...

Страница 21: ...put Pin 2 and supply common GND Pin 5 without loss of accuracy At greater cable lengths differential measurement between signal output Pin 2 and signal common Pin 12 is recommended Reassemble the cabl...

Страница 22: ...suited to Profibus operation may be used 4 5 Procedure Make the Profibus interface cable according to the following indications 1 5 6 9 D Sub 9 pin male soldering side Pin Function BPG400 SP 1 Do not...

Страница 23: ...pped with a software that sup ports the RS232C protocol of the transmitter 29 Technical data Mains connection Mains voltage 90 250 VAC 50 60 Hz Mains cable 1 8 meter Schuko DIN and U S con nectors Out...

Страница 24: ...nsmitter to the power supply and lock the connector with the screws Connect the RS232C line to the instrument or control device and lock the connector with the screws Connect the power supply to the m...

Страница 25: ...n current is dependent upon the emission current Ie the gas type and the gas pressure p according to the following relationship I Ie p C Factor C represents the sensitivity of the transmitter head It...

Страница 26: ...asuring range The ITR 90 transmitters continuously cover the measuring range 5 10 10 mbar 1000 mbar The Pirani constantly monitors the pressure The hot cathode controlled by the Pirani is activated on...

Страница 27: ...between Pin 2 and Pin 12 of the sensor cable connector Relationship output signal pressure Appendix A Allow for a stabilizing time of approx 10 min Once the transmitter has been switched on permanentl...

Страница 28: ...nt of an error it changes to red The pressure is displayed in mbar default Torr or Pa The pres sure unit can be changed via RS232C interface 29 Pressure display Pressure reading pressure unit Function...

Страница 29: ...hout a request approx every 20 ms Commands are transmitted to the transmitter in a five byte input receive string Operational parameters Data rate 9600 Baud set value no handshake Byte 8 data bits 1 s...

Страница 30: ...adjustment on Bit 3 Definition 0 1 Toggle bit changes with every string received correctly Bit 5 Bit 4 Definition 0 0 Current pressure unit mbar 0 1 Current pressure unit Torr 1 0 Current pressure un...

Страница 31: ...Comment 0 Length of data string 7 Set value 1 Page number 5 ITR 90 2 Status 0 Emission off Pressure unit mbar 3 Error 0 No error 4 5 Measurement High byte Low byte 242 48 Calculation of the pressure p...

Страница 32: ...ofibus operation The physical interface and interface firmware of ITR 90 P comply with the Profibus standard 4 5 Two adjustable switching functions are integrated in the ITR 90 P The corre sponding re...

Страница 33: ...Setting For unambiguous identification of the transmitter in a Profibus environment a node address is required The node address setting is made on the transmitter The node address 0 125dec is set in h...

Страница 34: ...c 7 75 Constant c is pressure unit dependent Appendix A The hysteresis of the switching functions is 10 of the threshold setting 4 8 1 Setting the Switching Functions The threshold values of the two...

Страница 35: ...on Setpoint A B to the desired value UThreshold Setting of the switching functions is now concluded There is no local visual indication of the statuses of the switching func tions However a functional...

Страница 36: ...the function of the vacuum component When handling vacuum components take appropriate measures to ensure cleanliness and prevent damages Procedure Vent the vacuum system Before taking the transmitter...

Страница 37: ...r and tear as well as expendable parts filaments are not covered by the warranty 6 2 Adjusting the Transmitter The transmitter is factory calibrated Through the use in different climatic condi tions f...

Страница 38: ...procedure is the same for all transmitter versions Operate transmitter for approx 10 minutes at atmospheric pressure If the transmitter was operated before in the BA range a cooling down time of appr...

Страница 39: ...minutes at a pressure of 1 10 4 mbar Insert the pin through the opening marked FULL SCALE and push the button inside for 2 s The adjustment is done automatically and ends after 2 minutes The zero poi...

Страница 40: ...f and on again after 5 s Replace the electronics unit transmitter does not switch over to BA at low pressures Pirani zero point out of tolerance Carry out a zero point adjustment 39 Troubleshooting se...

Страница 41: ...ment is necessary when the sensor is severely contaminated the sensor is mechanically deformed the sensor is faulty e g filament of hot cathode broken 39 the sensor is faulty e g Pirani element broken...

Страница 42: ...Maintenance Repair 42 GA09420_002_C0 2016 10 Leybold Deinstall the electronics unit from the faulty sensor and mount it to the new sensor 14 Adjust the transmitter 37 The new sensor is now installed...

Страница 43: ...n and part number Part number Replacement sensor IE 90 vacuum connection DN 25 ISO KF including Allen key E 121 02 Replacement sensor IE 90 vacuum connection DN 40 CF R including Allen key E 121 03 9...

Страница 44: ...taminated parts Contaminated parts can be detrimental to health and environment Before beginning to work find out whether any parts are contami nated Adhere to the relevant regulations and take the ne...

Страница 45: ...ae p 10 U 7 75 0 75 c U 0 75 log p c 7 75 where U p c V mbar 0 V Pa 2 V Torr 0 125 Conversion curve 1E 01 1E 01 1E 03 1E 05 1E 07 1E 09 1E 03 Measuring signal U V 0 0 Sensor error Inadmissible range I...

Страница 46: ...4 75 1 10 4 7 5 10 5 1 10 2 5 50 1 10 3 7 5 10 4 1 10 1 6 25 1 10 2 7 5 10 3 1 10 0 7 00 1 10 1 7 5 10 2 1 10 1 7 75 1 10 0 7 5 10 1 1 10 2 8 50 1 10 1 7 5 10 0 1 10 3 9 25 1 10 2 7 5 10 1 1 10 4 10...

Страница 47: ...Xe 3 0 The above calibration factors are mean values Calibration in pressure range 10 3 mbar The gas type dependence in the pressure range 10 3 mbar can be compensated by means of the following formul...

Страница 48: ...bH D 50968 K ln 2 www leybold com Instruction Sheet IONIVAC ITR 90 P KA09421_002 Leybold GmbH D 50968 K ln 3 www leybold com Interface Manual Profibus ITR 90 P SB09421_002 Leybold GmbH D 50968 K ln 4...

Страница 49: ...Declaration of Contamination GA09420_002_C0 2016 10 Leybold 49 Declaration of Contamination...

Страница 50: ...enue du Canada F 91940 Les Ulis cedex Sales and Service T 33 1 69 82 48 00 F 33 1 69 07 57 38 info ctb leybold com sales ctb leybold com Leybold France S A S Valence Factory 640 Rue A Berg s B P 107 F...

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