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Head

⏐

GA10218_0101 - 5/2002

E47 Emission for both cathodes

can not be switched on!

Signal MSIBE on MSV board is not active. Emission can not be swit-
ched on. Exchange the cathode by changing the ion source. After
having exchanged the ion source it must be possible to switch on
both cathodes manually via the service menu.

Replace ion source.

MSV board is defective.

E48 Anode heater is faulty!

Signal MSAFD on MSV board is active. Anode heater fuse has
blown.

Replace fuse F2 on the MSV board.

E50 No communication with turbo

pump converter.

Clock from the frequency converter has failed. No communication to
the frequency converter.

Fuse F4 on the wiring backplane has blown.

Drive electronics Turbo Drive S is defective.

E51 Unknown TMP error

The frequency converter Turbo Drive S indicates an unknown error
code. Inform Leybold service

E52 TMP frequency is too low!

TMP frequency is too low!

Frequency converter is faulty.

Turbomolecular pump is faulty.

W53 Temperature at electronic unit

is too high (>55°C)

Ambient temperature too high.

Ventilation failure.

Air filter dirty and have to be changed.

54 Temperatur at electronic unit

is too high (>60°C).

Ambient temperature is too high.

Internal ventilation has failed.

Air filters are dirty and must be exchanged.

W55 Temperature at electronic unit

is too low (< 2°C)

The temperature sensor on the wiring plane indicates T < 2 °C. Run-
up time for the forevacuum pump will be longer.

Temperature sensor is faulty.

Ambient temperature is too low.

E56 Inlet pressure p1 too low!

Output voltage Pirani P1 U < 0,27 V.

Pirani sensor P1 is defective.

Pirani electronics on the I/O board is defective.

E58 Foreline pressure p2 too low! Output voltage Pirani P2 U < 0,27 V.

Pirani sensor P2 is defective.

Pirani electronics on the I/O board is defective.

E60 p2>10mbar after 5 minutes

since power on

Run-up time of the forevacuum pump is too long.

Forepump is faulty.

Valve V2 does not open.

Leak in the high vacuum system.

No. Displayed Message

Description and possible solutions

Содержание 250000

Страница 1: ...GA10218_0102 PhoeniXL300 leak detector catalog numbers PhoeniXL300 250000 251000 PhoeniXL300 dry 250001 251001 PhoeniXL300 Modul 250002 Operating Instructions ...

Страница 2: ...1 3 2 2 Electrical Data 12 1 3 2 3 Other Data 13 1 3 2 4 Ambient Conditions 13 1 3 3 Technical Data PhoeniXL300 dry 13 1 3 3 1 Technical Data 13 1 3 3 2 Electrical Data 14 1 3 3 3 Other Data 14 1 3 3 4 Ambient Conditions 14 1 3 4 Technical Data PhoeniXL300 Modul 15 1 3 4 1 Technical Data 15 1 3 4 2 Electrical Data 15 1 3 4 3 Other Data 16 1 3 4 4 Ambient Conditions 16 1 4 Unpacking 16 1 4 1 Suppli...

Страница 3: ... 24 2 3 4 Gas ballast connection 24 2 3 5 Connection of an external pump Only PhoeniXL300 Modul 25 2 4 Default settings 25 3 First Operation Check 27 3 1 Needed Equipment 27 3 2 Description of the Initial Operation 27 3 2 1 Startup and Measure 27 3 2 2 Internal Calibration 28 3 2 3 Verification with an external test leak 29 3 2 4 Measure with a test object 29 3 2 5 Switch off 29 4 Description and ...

Страница 4: ...eniXL 43 5 1 Display 43 5 2 The Screen in Run Up Mode 43 5 3 Display in stand by mode 44 5 3 1 Gas Ballast Purge 44 5 4 The Screen in Measurement Mode 44 5 4 1 Call for Calibration 45 5 4 2 Speaker Volume 45 5 4 3 Status Line in the Display 45 5 4 4 Measurement Mode with bargraph 46 5 4 5 Measurement Mode with trend information 46 6 Description of the Menu 48 6 1 Main menu 48 6 2 View 50 6 2 1 Sca...

Страница 5: ...ngs 61 6 6 1 Vacuum settings 62 6 6 1 1 Automatic purge 63 6 6 1 2 Vent delay 63 6 6 1 3 Vacuum ranges 64 6 6 1 4 Partial flow setup 65 6 6 1 5 Sniffer factor 67 6 6 1 6 Machine factor 67 6 6 1 7 Leak rate internal test leak 68 6 6 2 Filter Background 68 6 6 2 1 Calculate inlet area background 69 6 6 2 2 Background suppression 69 6 6 2 3 Leak rate filter 69 6 6 3 Mass 70 6 6 4 Interfaces 70 6 6 4 ...

Страница 6: ...filter 78 6 6 6 Parameter save load 78 6 6 6 1 Load parameter set 79 6 6 6 2 Save parameter set 79 6 6 7 Monitoring functions 79 6 6 7 1 Pressure limits for vacuum mode 79 6 6 7 2 Pressure limits for sniff mode 80 6 6 7 3 Maximum evacuation time 81 6 7 Information 82 6 7 1 Service 82 6 8 Access Control 83 6 8 1 Access to CAL function 83 6 8 2 Change Menu PIN 84 6 8 3 Zero 84 7 Calibration 85 7 1 I...

Страница 7: ...ntenance 95 9 1 LEYBOLD Service 95 9 1 1 Maintenance Plan 95 9 1 2 Opening the PhoeniXL 96 9 1 3 Exchanging the filter mats 97 9 1 4 Exchanging the oil 97 9 1 5 Cleaning 98 9 1 6 Exchanging the fuses 98 9 1 7 Exhaust Oil filter 100 9 2 Turbo molecular pump 100 9 3 Calibrated leak TL7 100 9 3 1 Tecnical Data 101 9 3 2 Factory Inspection 101 Appendix 102 ...

Страница 8: ...he design and the specified data The illu strations are not binding 1 1 Notes on the Use of this Handbook 1 1 1 Safety Symbols Important remarks concerning operational safety and protection are emphasised as follows Attention Information on correct handling or use Disregard can lead to malfunctions or minor equipment damage Caution Information on preventing any kind of physical injury 1 1 2 Indica...

Страница 9: ...rate signal This fuc tion is run during the calibration process or when operating the start pushbutton provided the PhoeniXL has been running previously for at least 20 seconds in the stanby or vent mode GROSS GROSS is a measurement mode which allows high inlet pressure 15 to 0 2 mbar The smallest detectable leak rate is 1 10 7 mbar l s FINE FINE is a measurement mode with inlet pressure 0 2 mbar ...

Страница 10: ...aff Customer Dep Institute Reason for returning applicable please mark Address repair chargable warranty exchange chargable warranty DKD Calibration Factory Calibration Person to contact restoring goods because of following reason Phone Fax rent loan for credit against exchange Order number of customer exchange already received arranged A Description of the equipment machine or component Ancillary...

Страница 11: ...apor rises over the acceptable value So the attribute of the oil changes and danger of corrosion occures for the pump While using the leak detector with condensable gases and steams the oil of the fore pump has to be controlled regularly So you can recognize a condensation of water vapor in the pump Usually the oil is light and lucent When water vapor is inside it gets blear and milky at operating...

Страница 12: ...eak rates in vacuum mode 5 10 12 mbar l s in sniffer mode 1 10 7 mbar l s Minimum detectable Hydrogen leak rates in vacuum mode 1 10 8 mbar l s in sniffer mode 1 10 7 mbar l s Maximum Helium leak rate which can be displayed 0 1 mbar l s Measurement range 12 decades Time constant of the leak rate signal blanked off 63 of the final value 1 s Pumping speed Helium at the inlet GROSS mode 0 4 l s FINE ...

Страница 13: ...x permissible height above sea level during operation 2000 m Max inlet pressure 15 mbar Minimum detectable Helium leak rates in vacuum mode 3 10 11 mbar l s in sniffer mode 1 10 7 mbar l s Minimum detectable Hydrogen leak rates in vacuum mode 1 10 8 mbar l s in sniffer mode 1 10 7 mbar l s Maximum Helium leak rate which can be displayed 0 1 mbar l s Measurement range 11 decades Time constant of th...

Страница 14: ...3 Other Data 1 3 3 4 Ambient Conditions Power supply 230 V 50 Hz 115 V 60 Hz Power consumption 350 VA Type of protection IP40 Power cords EU USA UK 2 5 m Valves solenoid Dimensions L W H in mm 495 x 456 x 314 Weight in kg 35 5 Noise level dB A 54 max Audio alarm dB A 90 Contamination level to IEC 60664 1 2 Overvoltage category to IEC 60664 1 II For use within buildings Permissible ambient temperat...

Страница 15: ... mode with Scroll pump 8 10 12 mbar l s with oil sealed pump 5 10 12 mbar l s in sniffer mode 1 10 7 mbar l s Minimum detectable Hydrogen leak rates in vacuum mode 1 10 8 mbar l s in sniffer mode 1 10 7 mbar l s Maximum Helium leak rate which can be displayed 0 1 mbar l s Measurement range 12 decades Time constant of the leak rate signal blanked off 63 of the final value 1 s Pumping speed Helium a...

Страница 16: ...epartment Retain the packaging materials in the case of complaints about damage 1 4 1 Supplied Equipment Leak Detector PhoeniXL Set of fuses Power cord Folder with documents Operating unstructions PhoeniXL Spare Parts List PhoeniXL 2 L type screwed connections hose connections 1 hose nozzle Valves solenoid Dimensions L W H in mm 495 x 456 x 314 Weight in kg 29 5 Noise level dB A 54 max Audio alarm...

Страница 17: ... PhoeniXL is ready for use and the selected trigger level is not exceeded The red LED is on when the PhoeniXL is not ready for use or the selected trigger level is exceeded The pushbutton in the grip is for the zero function When pushing the but ton the helium background will be suppressed For cancelling the zero function push the button once more refer to Chapter 4 1 2 4 Sniffer Line SL300 252003...

Страница 18: ... venting of large test objects The partial flow system consists of the components partial flow valve block right angle valve DN 25 KF control cable and vacuum hose with flange connections The partial flow valve block with the right angle valve has to be connected to the inlet flange of the PhoeniXL300 Connect the control cable to the Option port and the vacuum hose to the auxiliary pump The Phoeni...

Страница 19: ...vents as well as exposure to extreme climatic conditions Attention The PhoeniXL is designed for indoor use only Attention Ensure a sufficient air cooling The air inlet as well the air discharge openings must never be obstructed It is recommended that you check all major helium sources in the vicinity of the PhoeniXL within a radius of about 10 m for the presence of any big leaks You may use the sn...

Страница 20: ...aving a protection ground conductor must be used Operation of the PhoeniXL where the ground conductor has been left unconnected is not permissible The PhoeniXL can be damaged when using the wrong voltage The voltage must be in the range 230V 5 or 115V 5 depending on the version The mains voltage rating for the PhoeniXL can be read off from the name plate beneath the mains socket Fig 3 4 at the sid...

Страница 21: ...ower which can be drawn is limited to 10 W The contacts are numbered from bottom to top Left side 1 Vent 2 Exhaust 3 Gasballast 4 On Off switch Right side 5 Serial RS232 6 Control 2 7 Record 8 Control 9 Option 10 Remote Fig 3 Side views of the PhoeniXL Pin Assignment 1 24 V constantly applied power supply for the Leybold partial flow valve or sniffer line 2 GND 3 24V switched by the PhoeniXL for a...

Страница 22: ... 6 are working only if the correct location of control is chosen See chapter 6 6 4 1 To avoid a mistake between the connection Control 2 and Record pin 1 and 4 are blocked When using the connectors the guiding nose for pin 1 and 4 must be removed For further information see chapter 6 6 4 5 Pin Assignment 1 PLC in free selectable 2 PLC in free selectable 3 PLC in free selectable 4 GND 5 to 7 Digita...

Страница 23: ...y isolated from other plugs If in spite of this hum interference is apparent it is recommended to operate the PhoeniXL and the chart recorder from the same mains phase If this is not possible you must make sure that the frame ground of both instru ments is kept at the same potential For further information see chapter 6 6 4 2 and 6 6 4 6 2 2 2 5 RS232 This RS232 interface Fig 3 5 is wired as data ...

Страница 24: ...f the rotary vane pump The exhaust filter has to be cleaned when doing the maintenance Caution When the Phoenix is running in closed rooms the exhaust has to be put out of doors using the provided adapter So the oil steams that are harmful to health are lead off With the provided connection a hose line can be connected to the exhaust of the PhoeniXL and lead off 2 3 3 Vent Usually the parts under ...

Страница 25: ...refor the put the PhoeniXL carefully on the electronic hood 4 Screw in the connection piece into the flange in the bottom 5 Connect the hose for the forevacuum pump 6 Connect the blind flange to the sidewise flange 7 Put on the mechanical hood 2 4 Default settings The following parameters are set like shown when in the menu of the PhoeniXL under Settings Parameters Load Save is chosen Scale linear...

Страница 26: ...dio Alarm Type Trigger Alarm Max pressure limit for sniff mode 0 15 mbar Min pressure limit for sniff mode 0 05 mbar Control location local Alarm delay 30 seconds Leak rate filter auto Zero enable Vacuum ranges normal Upper display limit 1E 5 mbar l s Service message exhaust oil filter PhoeniXL300 only on ...

Страница 27: ...he following description step by step to start the initial operation Refer to Chapter 5 for a more detailed description 3 2 1 Startup and Measure 1 Unpack the PhoeniXL and inspect it for any external damage refer to Chapter 1 4 2 Connect the instrument to the mains power Refer to Chapter 2 2 1 For the PhoeniXL300 Modul connect the forevacuum pump and switch it on 3 Switch on the PhoeniXL by using ...

Страница 28: ...ntitative measurements please let the unit warm up 15 20 minutes Press Calibration Soft Key no 5 Fig 4 5 to get into the calibration menu Select internal Soft Key no 4 Fig 23 to choose the internal calibra tion The internal calibration starts automatically and takes about 30 sec onds After a succesfull calibration a visual and audible signal comes up 9 Press the STOP Button Fig 4 12 until the mess...

Страница 29: ...y The inlet is vented now 14 Remove the helium test leak from the inlet port and put a blind flange onto the inlet port again 3 2 4 Measure with a test object 15 Remove the blind flange from the inlet port and connect the test object to the inlet port 16 Press the START Button Fig 4 10 The test object will be evacuated 17 Start spraying Helium onto the outside of the test object The leak rate of t...

Страница 30: ...wet version to be connected because this unit has no internal roughing pump The con nection DN25 KF is on the side or under the bottom of the PhoeniXL300 Modul Another operating mode of the PhoeniXL is the Sniffer mode which can only be used when a sniffer line See Chapter 1 4 2 is hooked up 4 1 1 Vacuum System PhoeniXL300 The vacuum diagram below shows the major components inside the PhoeniXL300 ...

Страница 31: ...e mass spectrometer is low enough under all circumstances The val ves V1 V2a V2b V4a control the gas flows when measuring Valves V3 and V5 are used to vent the system and the Turbo pump valve V6 con trols the gas ballast function of the fore vacuum pump Valve V7 opens and closes the internal test leak during calibration With the pressure in the test part being lower than ambient pressure sprayed h...

Страница 32: ... under the bottom of the PhoeniXL300 Modul Fig 6 Vacuum diagram PhoeniXL300 dry Pos Description 1 MS Mass Spectrometer Helium sensor 180 magnetic field mass spectrometer 2 Turbomolecular Pump TMP provides high vacumm conditions in the MS 3 Pirani gauge P2 fore vacuum pressure 4 Diaphragm pump provides the foreline pressure for the TMP und pumps down the parts under test 5 Inlet Port 6 Pirani gauge...

Страница 33: ...olecular Pump TMP provides high vacumm conditions in the MS 3 Pirani gauge P2 forevacuum pressure 4 Fore pressure pump provides the foreline pressure for the TMP und pumps down the parts under test 5 Inlet Port 6 Pirani gauge P1 inlet pressure V1 V7 Electromagnetic Valves to control the gas flows MS P 1 V 1 V 2a V 3 V 2b V6 P 2 V4a external pump V 5 V7 1 2 4 5 7 6 ...

Страница 34: ...he measured leak rate is shown in the display If the START button is pushed again in measurement mode the maximum leak rate indicator hold function is acitvated This indicator shows the maxi mum leak rate since START By pressing the START button again the hold function will be started again 4 1 2 3 STOP Button Pushing the STOP Button Fig 8 12 interupts the measure procedure If the button is presse...

Страница 35: ... decreasing background is fitted to the course Fig 9 t 2 automatically When the measurement signal decli nes below the saved backgrond the underground value will automatically be equated with the measurement signal As soon as the measurement signal is increasing again the saved decreasing value remains constant Increasings of the signal are displayed clearly as a leak So it is possible to recogniz...

Страница 36: ... from the submenu without any changes of the pre sent settings and return to the previous menu page Soft Key no 8 Fig 8 8 is OK The selected settings or edited values will be stored and the previous menu page will be displayed again 4 1 2 7 Numerical Entries If you have opened a menu page where a digit can be changed please proceed in the following way If you don t want to change anything press So...

Страница 37: ...Head GA10218_0101 5 2002 37 In the submenu press 3 Soft Key no 4 Fig 12 Fig 11 Numerical entry of the Trigger Level sample of the digit Fig 12 Trigger Level change of the first digit ...

Страница 38: ...meter where it is detected This measurement mode is called GROSS In this mode leak reates down to 10 8 mbar l s can be detected Since the rotary vane vacuum pump continues to evacuate the test sam ple via valves V2a V2b and V1 the inlet pressure p1 will continue to drop When the pressure drops below pE 0 2 mbar the PhoeniXL will switch to the FINE mode i e valve V1and V2b closes and valve V4a open...

Страница 39: ...at an inlet pressure of 1000 mbar 4 1 5 Sniffer Mode The PhoeniXL may simply be converted into a sniffer leak detector via the rugged sniffer line Cat No 252003 For this the KF flange of the sniffer line is connected to the inlet flange and the sniffer mode is selected through menu mode After pressing START the inlet valve V4a opens The sniffer lines have been designed in such a way that the Phoen...

Страница 40: ...as been selected by the operator The status of measurement readiness is indicated to the operator by a green LED at the START button During the pumpdown phase this LED flashes As soon as the status of measurement readiness has been rea ched this LED stays on continiously When pressing the START button in the Standby mode the internal Zero Fig 13 View of remote control 1 ZERO button 8 Scale for the...

Страница 41: ...h comes on The venting valve may be closed again by pressing the STOP VENT but ton briefly once more The PhoeniXL will return to the Standby mode The Vent Vacuum display is turned off ZERO button A constant leak rate reading may be suppressed by pressing the ZERO button i e a constant helium background within a test sample This but ton is only active in the measurement mode see Chapter 4 1 2 4 In ...

Страница 42: ...oustic signal is used to indicate the leak rate An acoustic signal is also generated in the case of warning and error messages The volume of the acoustic signal can be increased by operating the but ton to the left of the loudspeaker With the button to the right of the loudspeaker the volume of the acoustic signal may be reduced To check this a signal will be output at the selected volume for 2 se...

Страница 43: ...onds to the helium background concentra tion in the part under test Since the PhoeniXL continues to pump down the part this background leak rate will further reduce As soon as the leak rate is low enough in respect to your requirements you may start spraying Helium or Hydrogen to search for possible leaks When the measurement is finished please press STOP and hold the but ton a few seconds to vent...

Страница 44: ...ically after 20 seconds During this purge the membrane or sroll pump will be purged by the valve V6 Attention In case there was a large quantum of water vapor pumped with the machine please activate the gas ballast for about 20 minutes before running the machine down 5 4 The Screen in Measurement Mode In measurement mode the leak rates can be displayed in two different modes Numerically combined w...

Страница 45: ...om 0 to 15 Refer to Chapter 6 4 5 Volume for information on loudness alarms and sound tracks 5 4 3 Status Line in the Display The status line at the top of the display Fig 14 and Fig 15 informs about reading from left to right Fig 14 Display Measurement Mode with bargraph Symbol of display Meaning Explanation Volume level Please refer to Chapter 5 4 2 Speaker Volume S1 Trigger 1 If the trigger val...

Страница 46: ... The programmed trigger levels Please refer to Chapters 6 4 1 and 6 4 2 are indicated at the bar by short vertical lines a straight line for trigger 1 and a dotted line for trigger 2 5 4 5 Measurement Mode with trend infor mation In trend mode the leak rates are displayed over time Fig 15 In addition the actual leak rate and inlet pressure also are displayed digitally The time axis can be defined ...

Страница 47: ...es an overview of the entire menu architecture Fig 17 The overview of the menu architecture corresponds to the PhoeniXL300 differing menu points or setting posibilities are described in the respective menu point 6 1 Main menu The main menu Fig 16 shows 7 sub menus In these sub menus groups of technical features are put together logically From here the next levels of the menu tree can be reached Fi...

Страница 48: ...ulate inlet area background Leak rate filter Mass Interfaces Location of Control Define recorder output RS232 Define PLC outputs Define PLC inputs Scaling Recorder Output Scaling Recorder Output Miscellaneous Time Date Language Calibration request Service interval fore pump Service interval exhaust oil filter Service message exhaust oil filter Parameter save load Monitoring functions Pressure limi...

Страница 49: ...e Selection of the working modes Vacuum or Sniff Please refer to Chapter 6 3 4 Trigger Alarms Settings of units trigger levels and alarms Please refer to Chapter 6 4 5 Calibration Calibration of the PhoeniXL Please refer to Chapter 6 5 6 Settings Settings of internal machine parameters Please refer to Chapter 6 6 7 Information Information on the PhoeniXL electrical and vacuum data and service menu...

Страница 50: ...d mode Please refer to Chapter 6 2 1 3 Display range auto manual Manual or automatic scaling Please refer to Chapter 6 2 2 4 Time axis Time axis in trend Please refer to Chapter 6 2 3 5 Contrast Display contrast Please refer to Chap ter 6 2 4 6 Background in Stand by Background displayed or not Please refer to Chapter 6 2 5 8 Lower display limit Setting of the display limit Please refer to Chapter...

Страница 51: ...he Soft Key 6 and 7 if you have chosen manual display ranging 6 2 3 Time axis Main menu View Time axis The length of the time axis in trend mode can be changed in given steps between 16 960 seconds Softkey 2 Manual The upper limit of the displayed range can be set manually Softkey 3 Decrease the upper limit if manual is chosen The minimum value is 10 11 mbar l s Softkey 5 Help text Softkey 6 Autom...

Страница 52: ...t The default setting is OFF The internal background is generated by residual gas e g helium that has not been pumped away yet Sources for residual gas are air or absor bed gases from the inner surfaces of the PhoeniXL This internal back ground will never disappear totally Very clean systems which have been pumped for a long time will show a background in the 10 11 mbar l s range Under normal cond...

Страница 53: ...not underlined the old background signal from the last Stand by will be subtracted 6 2 6 Lower display limit Main menu View Lower display limit This mode limits the lower detection limit of the measured leak rate This is valid for vacuum mode only 6 3 Mode Main menu Mode The mode menu Fig 19 enables the submenu to select the different wor king modes Softkey 3 7 Changing of the lower detection limi...

Страница 54: ...will be used 8 OK Save the settings and return to the previous menu Fig 20 Display Trigger Alarms Menu Explanation for Fig 20 Key No Name Description 1 Back Return to the main menu 2 Trigger Level 1 Definition of Trigger level 1 Chapter 6 4 1 3 Trigger Level 2 Definition of Trigger level 2 Chapter 6 4 2 4 Trigger Level 3 Definition of Trigger level 2 Chapter 6 4 3 5 Units Selection of leak rate an...

Страница 55: ...vel 2 Main menu Trigger Alarms Trigger Level 2 The value of the second trigger level can be set Please refer to Chapter 4 1 2 7 Numerical Entries for the description of the entry If Trigger 2 is exceeded the corrensponding relay will switch This is also indicated at the display see 6 4 1 6 4 3 Trigger Level 3 Main menu Trigger Alarms Trigger Level 3 The value of the second trigger level can be set...

Страница 56: ...me can be adjusted between 15 maximum and the value defined as minimum loudness Softkey 2 Scroll up to select a pressure unit Softkey 3 Scroll down to select a pressure unit Softkey 6 Scroll up to select a leak rate unit Softkey 7 Scroll down to select a leak rate unit Softkey 2 Decrease the minimum loudness The minimum value is 0 Softkey 3 Decrease the actual volume The minimum value is limited b...

Страница 57: ...6 4 7 Audio alarm type Main menu Trigger Alarms Audio alarm type The audio alarm type can be chosen Softkey 3 Decrease the delay time The minimum value is 0 seconds Softkey 5 Help text Softkey 7 Increase the delay time The maximum value is 10 minutes up to infinity Softkey 2 Pinpoint This function is for localization of a known leak rate value Details see chapter 6 4 7 1 Softkey 3 Leak rate prop T...

Страница 58: ...eading on the bargraph display The frequency ranges from 300 Hz to 3300 Hz Please refer to Chapter 6 2 1 Scale linear logarithmic for the definition of the number of decades 6 4 7 3 Setpoint The tone is off as long as the leak rate is below the Trigger level 1 Above Trigger 1 the tone varies proportional to the leak rate Fig 22 6 4 7 4 Trigger alarm As soon as the leak rate increases above trigger...

Страница 59: ...on Main menu Calibration In the menu Calibration Fig 23 the selection between internal and external calibration can be chosen Please refer to Chapter 7 Calibration for a detailed description of the calibra tion Fig 23 Display Calibration Menu ...

Страница 60: ...f vacuum system related functions See chapter 6 6 1 3 Filter Background See Chapter 6 6 2 4 Mass Switching between Helium and Hydro gen See Chapter 6 6 3 5 Interfaces Settings for electrical communication and selection for control location See Chapter 6 6 4 6 Miscellaneous Settings like date or time See Chapter 6 6 5 7 Parameter save load Store and load sets of parameters See Chapter 6 6 6 8 Monit...

Страница 61: ... Refer to chapter 6 6 1 3 Softkey 5 Partial flow setup Refer to chapter 6 6 1 4 Softkey 6 Sniffer factor Refer to chapter 6 6 1 5 Softkey 7 Machine factor Refer to chapter 6 6 1 6 Softkey 8 Leak rate internal test leak Refer to chapter 6 6 1 7 Softkey 2 Automatic purge Refer to chapter 6 6 1 1 Softkey 3 Vent delay Refer to chapter 6 6 1 2 Softkey 4 Vacuum ranges Refer to chapter 6 6 1 3 Softkey 6 ...

Страница 62: ... for a period of time which is shorter than the delay time specified here the PhoeniXL will just change to Stand by mode When the STOP button is pressed for a period of time which is longer than the delay time specified here the PhoeniXL will vent the inlet port Softkey 2 Automatic purge Refer to chapter 6 6 1 1 Softkey 3 Vent delay Refer to chapter 6 6 1 2 Softkey 4 Vacuum ranges Refer to chapter...

Страница 63: ...be vented with the STOP button Softkey No 2 GROSS only In this mode the PhoeniXL remains at the inlet flange after falling below 15 mbar When the pressure is increasing over 15 mbar the PhoeniXL switches automatically into evacuation mode The smallest detactable leak rate is 1 10 8 mbarl s Softkey No 3 FINE only In this mode the PhoeniXL remains after falling below 0 2 mbar at the inlet flange Val...

Страница 64: ...he PhoeniXL300 dry remains at the inlet flange after falling below 15 mbar When the pressure is increasing over 15 mbar the PhoeniXL300 dry switches automatically into evacuation mode The smal lest detactable leak rate is 1 10 8 mbarl s Softkey No 3 FINE only In this mode the PhoeniXL300 dry remains after falling below 0 1 mbar at the inlet flange Valve V1 will be closed When the pressure at the i...

Страница 65: ... leak rates This is recommended if it is acceptable to wait for a while until measurement mode is reached and leak rate reading at high inlet pressures are not needed With times between 0 and endless V10 is opened and the leak detector tries to reach a inlet pressure of less than 15 mbar within this time TQ When TQ has gone by V10 is closed and the PhoeniXL switches to mea surement mode Helium Hyd...

Страница 66: ... only all measured leak rate would be measured too small The measured leak rate is multiplied with the machine factor and the result is displayed This factor is only used for vacuum measurement modes not for sniff mode See Chapter 4 1 2 7 Numerical Entries for the description of the entry Softkey 2 The entry of the nominal pumping speed of the partial flow pump can be decreased The minimum pumping...

Страница 67: ...ied by factor 40 and then shown in the display 6 6 1 7 Leak rate internal test leak Main menu Settings Vacuum settings Leak rate internal test leak The value of the internal test leak can be set See Chapter 4 1 2 7 Numeri cal Entries for the description of the entry Normally there is no reason to edit the leak rate of the internal test leak besides after a change or a recertification of the intern...

Страница 68: ...This setting should be used by experi enced users only because of the high possibilities of measuring wrong leak rates Softkey 6 inlet area Additionally to the internal offset background the offset of the inlet area will be subtracted This function for the inlet area is only possible in stand by mode therefore this value has to be determined with the menu point Calculate inlet area background Soft...

Страница 69: ... with the mass of 4 amu will be measured Default setting Softkey 2 Location of Control Softkey 3 Define recorder output Softkey 4 RS232 Softkey 5 Define PLC outputs Softkey 6 Define PLC inputs Softkey 7 Scaling Recorder Output Softkey 8 PLC sample rate Softkey 2 PLC The PhoeniXL is controlled via the Digital In connector See Chapter 6 6 4 1 The START STOP and ZERO buttons at the control panel and ...

Страница 70: ...put is switched off P1 L200 The setting for the inlet pressure P1 is identical with those of the L200 Users can exchange their L200 for a PhoeniXL without changing pin assi gnement P1 Pirani The inlet pressure P1 of the PhoeniXL will be shown logarithmic P2 L200 The setting for the forevacuum pressure P2 is identical with those of the L200 Users can exchange their L200 for a PhoeniXL without chang...

Страница 71: ...f range of leak rate log 0 5 V decade Softkey 2 Baudrate and end sign Settings for the baudrate selectable between 1200 and 19200 as well as endsign between CR LF CR or LF Softkey 3 Data Parity Stop bits The settings for Data 7 or 8 Parity Even Odd None and Stop bits 1 or 2 can be selected Softkey 7 RS 232 Protocol The protocol from the RS 232 can be choosen between L200 size Dia gnostic L200 Leak...

Страница 72: ...or measurement Emission on no error CAL active Closed when machine is in calibrating routine CAL Request Is opend in case of calibration request During external calibration a open output indicates that the external calibrated leak has to be closed Fail Open when a error is shown Warning Open when a warning is shown Gas ballast Closed when gas ballast is active Open Open all time Close Closed all t...

Страница 73: ...e from low to high confirm error message CAL Change from low to high When machine is in stand by mode start internal calibration In case machine is measurement mode start external calibration Premise exter nal calibration test leak has to be open and leak rate signal is stable Change from high to low External calibration approve that external test leak is closed and leak rate signal is stable High...

Страница 74: ...ftkey 2 Decrease the decade The decade of the upper leakrate can be decreased Softkey 3 Decrease scaling Decrease scaling of the previously adjusted value in steps of 0 5 1 2 2 5 5 10 Volt decade The complete array is covers 10 V Softkey 5 Help text DSoftkey 6 Increase decade The decade of the upper leakrate can be increased Softkey 7 Increase scaling Increase scaling of the previously adjusted va...

Страница 75: ...e The prefered language can be selected The default setting is english Softkey 2 Time Date See chapter 6 6 5 1 Softkey 3 Language See chapter 6 6 5 2 Softkey 4 Calibration request See chapter 6 6 5 3 Softkey 5 Service interval fore pump See chapter 6 6 5 4 Softkey 7 Service interval oil filter See chapter 6 6 5 5 Softkey 8 Service message oil filter See chapter 6 6 5 6 Softkey 3 German The german ...

Страница 76: ...ing hours or one year the oil in the pump should be controlled See also manual for the Trivac D2 5E which is included in the document folder See chapter 9 1 1 also This setting is possible for the PhoeniXL300 only 6 6 5 5 Service interval exhaust oil filter Main menu Settings Miscellaneous Service Interval exhaust oil fil ter Here you can enter the service intervall for the oil filter This setting...

Страница 77: ...tings Parameter save load Enables to save and load individual settings or reload the default settings Softkey 3 Decrease of the service intervall steps of within 500 hours The limit is 1000 hours Softkey 5 Help text Softkey 7 Increase of the service intervall within steps of 500 hours The limit is 4000 hours Softkey 3 The service message for the oil filter can be reduced to the min 1000 hours Soft...

Страница 78: ...this function the default settings for the pressure limits EVAC GROSS and FINE can be changed This might be necessary if other gases than air will be pumped by the PhoeniXL The pressure signal from the gas dependant inlet pressure P1 will dump false signals With changing the pressure limits this prefor mance will be adjusted Softkey 4 Edit a file name Rename the parameter set Softkey 8 Sav Save th...

Страница 79: ...mbar Default value 15 mbar Softkey No 3 Decrease change over threshold GROSS FINE Chosable between 0 2 0 05 mbar Default value0 2 mbar Softkey No 4 Adjustment for ARGON Selection between air or Argon Softkey No 5 Help text Softkey No 6 Increase change over threshold EVAC GROSS Chosable between 3 15 mbar Softkey No 7 Increase change over threshold GROSS FINE Chosable between 0 05 0 2 mbar Softkey N...

Страница 80: ...ired reaction time for the gross leak message and secondly on the volume of the test sample and the effective pumping speed Caution If the evacuation time was set to endless the oil level of the mechanical pump should be checked more often Softkey No 2 Decreasing maximum evacuation time until p1 100 mbar Within this period of time the inlet pressure at the test flange must have dropped below 100 m...

Страница 81: ...nformation Menu Softkey 2 View settings The current settings will be displayed on 5 pages e g trigger levels test leak mass date and time Softkey 3 View internal data Information on measured internal data is provided on 10 screens Softkey 4 Vacuum diagram The vacuum diagram of the PhoeniXL is shown Here you can see which valves are opend or closed momentarily See chapter 4 1 1 Softkey 5 View error...

Страница 82: ...d or not Fig 28 Display Access Control Menu Softkey 3 Access to Zero function See chapter 6 8 1 Softkey 4 Access to CAL function See chapter 6 8 2 Softkey 8 Change Menu PIN See chapter 6 8 3 Softkey 3 Off The calibration function is only available at the main menu If the Menu PIN See Chapter 6 8 2 is activated you need this PIN to start a calibra tion Default setting Softkey 5 Help text Softkey 7 ...

Страница 83: ... 3 Zero Main menu Access Control Zero This setting enables respectively disables the ZERO button at the control panel With Zero at FINE See Chapter 6 3 the ZERO functions execu tes automatically as soon as the measuring range FINE is reached for the first time after START In this mode the ZERO function also can be execu ted manually via the ZERO button Softkey 3 closed ZERO button disabled Softkey...

Страница 84: ...red 7 2 The calibration routines The calibration routines can be started by pressing button CAL Softkey 5 via 3 different locations main menu Fig 16 Stand by mode Fig 8 measurement mode Fig 14 15 The access via Stand by mode or measurement mode can possibly be blocked see Chapter 6 8 1 In this case the softkey is not labeled Default Access on Once the calibration mode is activated the user must ch...

Страница 85: ...dit leak rate Soft Key no 4 and correct the value If the leak rates are okay press START Soft Key no 8 Make sure that the correct mass is selec ted Make sure that the test leak is connected and opened Fig 29 Display External Calibration Step 1 No action required Fig 30 Display External Calibration Step 2 The bargraph display shows a signal which must not vary much If so please press OK Soft Key no...

Страница 86: ...use of a maloperation When calibration is started via SPS or RS232 no testing for plausibility is occuring When calibrating internal it is also monitored if the newly calculated factor of calibration is higher than 10 or lower than 0 1 In this case a warning see W81 resp W82 in Chapter 8 2 is displayed and the calibration will be interrupted The bargraph display shows a signal which must not decre...

Страница 87: ...rrors are events which force the PhoeniXL to interrupt its measurement operations In this case the PhoeniXL closes all valves exept valve 2a Stand by mode Error messages remain on the LC display until the message has been ack nowledged by pressing Restart key no 8 After that the PhoeniXL restarts with a new run up procedure In some cases it may be helpful to check some settings or measured values ...

Страница 88: ...o low Fuse F1 on the I O board has blown W28 Real time clock reset Please enter date and time Battery at MC68 is discharged or faulty MC68 had been replaced E29 24V supply for fans is too low 20V Fuse F1 on wiring backplane has blown E30 24 V of the remote control is too low 20V Fuse F1 on the I O board has blown W31 The offset voltage of the pre amplifier is too high 5mV The preamplifier is fault...

Страница 89: ...splayed in the service menu MSV is faulty MC 68 is faulty E42 Nominal value of the anode potential is too high Signal MFAZH on MSV board is active Anode voltage has been short circuited Nominal value of the anode voltage is too high Anode voltage is limited to about 1 200 V E43 Cathode current is too high MSV Cat Heater Signal MPKZH on MSV board is active Cathode current is too high I 3 6 A MSV is...

Страница 90: ...ency converter is faulty Turbomolecular pump is faulty W53 Temperature at electronic unit is too high 55 C Ambient temperature too high Ventilation failure Air filter dirty and have to be changed E54 Temperatur at electronic unit is too high 60 C Ambient temperature is too high Internal ventilation has failed Air filters are dirty and must be exchanged W55 Temperature at electronic unit is too low...

Страница 91: ...er supply voltage off and then on again Turbo Drive S faulty Inform Leybold Service E65 TMP error Pass through time exceeded Max time for passing through the critical frequencies has been exceeded Forevacuum or high vacuum pressure to high see chapter 6 6 7 1 to reduce the inlet pressure of the PhoeniXL Bearing defective Inform Leybold service for repair E66 TMP error Bearing tempera ture too high...

Страница 92: ...ll revert to the standby mode Air incrush in the measurement mode W76 Maximum of evacuation time was exeeded Within the pre set evacuation time the pressure threshold of 100 mbar was not reached Test sample has got a GROSS leak Wrong setting too short of the max time of evacuation W77 Peak not in Range The signal maximum has shifted to mass range alignment limits Signal of leak rate was instable d...

Страница 93: ...e of the internal calibrated leak which was entered is much too high or much too small W83 All EEPROM parameter lost Please check your settings EEPROM on back plane is empty and was initialized with default val ves Enter all parameters again The EEPROM might be faulty when warning comes up again after power up W84 EEPROM parameter initiali zed Please check your set tings Software update has been i...

Страница 94: ...LD must return any equipment without a Declaration of Contamination to the sender s address Before shipping fir the yellow screw on seals on to the connections EXHAUST and GAS BALLAST 9 1 1 Maintenance Plan Maintenance work should be done on the PhoeniXL as required This work will normally be limited to exchanging the oil in the Trivac D2 5E rotary vane pump and the built in air and oil filters As...

Страница 95: ...openings Fig 36 1 and lever the cover for the mechanical section out at the bottom 6 In doing so the cover should be moved somewhat to the front by the downward motion of the screwdrivers The cover may be lifted up by the upwards motion of the srewdrivers so that the cover is disengaged completely 7 Then pull the cover off the mechanical section up to its stop and Fig 36 Backview of PhoeniXL 1 Ope...

Страница 96: ...e fan of the turbomolecular pump only partly visible from the outside To exchange the filter mats remove the covers as described above Filter mat a these filter mats are srewed to the electronic cover Unscrew the screws and exchange the filter mats Cat no 20099025 Filter mat b This filter mat is located on the side together with a further metal grid an a recess It can be exchanged without having t...

Страница 97: ...he ventila tion slits 9 1 6 Exchanging the fuses Caution Before exchanging the fuses you must disconnect the mains cord 1 Switch the PhoeniXL off 2 Pull the mains cord off the PhoeniXL 3 Use a screwdriver to fold out the lid of the mains socket from the right the mains switch is not affected by this 4 The fuses can be removed by pulling the drawers out which are marked by the arrows When reinserin...

Страница 98: ... insert a screwdriver into the two recesses at the sides top one after the other and lever the MSV board out by resting the screwdriver on the STE board Nr 2 F2 on MSV Not in use Nr 3 F3 on MSV Fuse rating T 1A For generating 24 V for DCDC converter 15V 5 V Nr 4 F4 on MSV Fuse rating M 0 032A Fuse for the anode voltage Nr 5 F1 on I O board Fuse rating T 0 8A Protects the 24 V supply carried by the...

Страница 99: ... when necessary see instructions for rotary vane pump 8 Finally re install the cover for the mechanical section 9 2 Turbo molecular pump For the Leybold turbo molecular pump TW 70 LS it is recommended to change the bearings after 20 000 running hours For details please refer to the corresponding manual of the turbo pump GA 05156 0101 or contact your local Leybold service 9 3 Calibrated leak TL7 Th...

Страница 100: ...fore advisable once a year A test certificate if required for the Helium calibrated leak can be obtai ned from our Cologne Works In that case the calibrated leak should be forwarded to us and will be returned inspected and recertified with the test certificate against charge The helium flow stated on the main label is the actual leak rate of the cali brated leak Nominal calibration range 10 7 mbar...

Страница 101: ...gross 9 I Internal Calibration 85 L List of Errors Warnings 88 M Maintenance Plan 95 Menu 9 MENU Button 36 Mode 54 N Numerical Entries 36 O Opening the PhoeniXL 96 P Partial Flow Method 39 Partial flow setup 65 Partial flow system 18 precision 9 R Remote control 18 RS232 72 S Settings 61 Sniffer line SL300 17 Sniffer Mode 39 START Button 34 STOP Button 34 T Trigger Alarms 55 Turbo molecular pump 1...

Страница 102: ...Head 103 GA10218_0101 9 2002 Fig 1 Dimensons Side View Abmaße PhoeniXL Familie in mm und inch in Klammern Dimensions PhoeniXL family in mm and inches in brackets ...

Страница 103: ...Head GA10218_0101 9 2002 104 Fig 2 Dimensions Side View Abmessungen PhoeniXL Familie in mm und inch in Klammern Dimensions PhoeniXL family in mm and inches in brackets ...

Страница 104: ...Head 105 GA10218_0101 9 2002 Fig 3 Dimensions PhoeniXLModul Abmessungen PhoeniXL300 Modul in mm und inch in Klammern Dimensions PhoeniXL 300 Modul in mm and inches in brackets ...

Страница 105: ...Head GA10218_0101 9 2002 106 Fig 4 Declaration of Conformance ...

Страница 106: ...Head 107 GA10218_0101 9 2002 ...

Страница 107: ...Head GA10218_0101 9 2002 108 ...

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