LEYBOLD 250000, Руководство по эксплуатации

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Head
38
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GA10218_0101 - 5/2002
4.1.3 Vacuum Method
For the purpose of leak detection on a test sample (vacuum method), the
sample has to be evacuated so that Helium or Hydrogen which is sprayed
on to the outside, can enter through any leaks due to the pressure diffe-
rential for detection by the PhoeniXL.
The test sample is evacuated - START button (Fig 3-1/10) - by the
backing pump or the external pump. In the case of larger test samples an
additional external partial flow pump with a corresponding linking valve
may be connected in parallel as required.
Inlet valve V1 is opend so that the evacuation can take place. At the same
time all other valves are closed in order to prevent an unacceptable pres-
sure increase in the mass spectrometer.
In this context (valve V2a closed) the turbomolecular pump is operated
without being supported by the rotary vane pump. Since generally no gas
is pumped out of the mass spectrometer, p
2
remains constant or increa-
ses only slowly.
The condition for the evacuation process described here is maintained
until the inlet pressure p1 has droped
≤ 15 mbar. Now the valves V2a and
V2b are opened additionally. Possibly present Helium or Hydrogen may
now flow upstream against the pumping direction of the turbomolecular
pump into the mass spectrometer where it is detected. This measurement
mode is called GROSS. In this mode, leak reates down to 10
-8
mbar l/s
can be detected.
Since the rotary vane vacuum pump continues to evacuate the test sam-
ple via valves V2a, V2b and V1 the inlet pressure p
1
will continue to drop.
When the pressure drops below p
E
< 0.2 mbar, the PhoeniXL will switch
to the FINE mode, i.e. valve V1and V2b closes and valve V4a opens so
that the gas flow enters the turbomolecular pump at the side. This offer
two advantages:
In the FINE mode the full sensitivity of the PhoeniXL is reached.
Because of the higher base pressure of the diaphragm pump the swit-
ching from GROSS to FINE mode of the PhoeniXL
300 dry
is done by the
valve V4b. When the pressure drops below
≤
3,5 mbar the valves V1 and
V2b will be close and V4b opens step by step. When valve V4b is open
completely, pressure < 0,1 mbar, V4a will open also to get the maximum
pumping speed. In PRECISION mode the PhoeniXL
300 dry
opens the valve
V4b only, with the disadvantage of low pumping speed but with the high-
est sensitivity.
When the leak detection process is stopped – STOP-button – all valves
exept valve V2a are closed.
Valve V3 is opened during venting of the inlet or test sample.
a) A part of the high pumping speed of the turbomolecular pump
remains available for further evacuation of the test sample. The
response time is inversely proportional to pumping speed.).
b) The advantages offered by the counterflow priniple can still be utzili-
zed