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LEYBOLD 230070V02, Руководство по эксплуатации

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Содержание 230070V02

Страница 1: ...1 300544652_002_C1 11 2016 Leybold PENNINGVAC Transmitter PTR 90 N Operating Manual 300544657_002_C1 Part Numbers 230070V02 230085V02 230071V02 230072V02 230088V02 230089V02...

Страница 2: ...bility 12 3 4 Vacuum connections 13 Transmitter Installation Electrical 14 4 1 Input Output Wiring 15 4 2 Setpoint relays 17 Operations 18 5 1 Pressure output 18 5 2 Cold Cathode Ignition 19 5 3 Analo...

Страница 3: ...find out whether any vacuum components are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts Safety Precautions Failure to read messag...

Страница 4: ...nt Dirt and damages impair the function of the vacuum component When handling vacuum components take appropriate measures to ensure cleanliness and prevent damages CE marking The transmitter complies...

Страница 5: ...information in this document use the product in a non conforming manner make any kind of interventions modifications alterations etc on the product use the product with accessories not listed in the p...

Страница 6: ...mediately Please be sure that your transmitter package contains these items 1 pcs PTR 90 N PENNINGVAC Transmitter 1 pcs English short form manual P N 300544671_002 1 pcs German short form manual P N 3...

Страница 7: ...MEMS Micro Electro Mechanical System sensor element is based on measurement of thermal conductivity The MEMS Pirani sensor consists of a silicon chip with a heated resistive element forming one surfac...

Страница 8: ...relay range 1 10 8 to 1000 mbar Setpoint relay contact rating 1 A 30 VDC AC resistive load Setpoint relay contact resistance 100 m max Setpoint relay response time 100 ms Setpoint relay contact endur...

Страница 9: ...9 300544652_002_C1 11 2016 Leybold 2 2 Dimensions mm P N 230070V02 230071V02 230072V02 P N 230088V02...

Страница 10: ...10 300544652_002_C1 11 2016 Leybold P N 230085V02 P N 230089V02 Flanges KF 25 KF 40 CF 40...

Страница 11: ...0681V01 Graphix Three 230682V01 Cables Type A 5 Meter 12426 Cables Type A 10 Meter 230012 Cables Type A 15 Meter 12427 Cables Type A 20 Meter 12428 Cables Type A 30 Meter 12429 Cables Type A 50 Meter...

Страница 12: ...ntended for use in relatively clean environments The transmitter cannot be used in corrosive environments like a semiconductor etch process chamber where aggressive gases such as fluorine are used If...

Страница 13: ...are available with different types of vacuum fittings When mounting the transmitter always ensure that all vacuum sealing items and surfaces are clean without damage and free of particles Do not touch...

Страница 14: ...Potential difference between supply common and housing 18 V overvoltage protection The power supply input is 9 to 30 VDC The power supply input is protected by an internal thermal fuse The fuse is sel...

Страница 15: ...FCC68 PIN Description 1 Power 9 30 VDC 5 Analog Output 2 Power return GND 6 Status 3 Analog Output 7 Not Connected 4 ID Resistor 85 k 1 8 Not Connected Part Numbers 23088V02 I O Connector 15 pin HD S...

Страница 16: ...Connected 4 Not Connected 8 Not Connected Part Numbers 230089V02 I O Connector 15 pin HD Sub D male PIN Description 1 Not Connected 9 Not Connected 2 Not Connected 10 Not Connected 3 Power 9 30 VDC 11...

Страница 17: ...values of the capacitance C and the resistance R can be calculated by the following equations C I2 1 x 107 R E Ia where C is in Farads R is in ohms I is DC or ACpeak load current in amperes E is DC o...

Страница 18: ...etween 1 3E 4 and 5 3E 4 mbar the two measurements are smoothly integrated SLC Low CC turn on pressure 6 7E 4 mbar SHC High CC turn off pressure 1 1E 3 mbar SLP Low CC MP integration 1 3E 4 mbar SHP H...

Страница 19: ...the system When the Cold Cathode is enabled but ionization has not started the LED ring LED will flash green The LED ring LED will be illuminated continuously green when valid measurements are presen...

Страница 20: ...219 500 00 8 419 6 00E 08 2 467 6 00E 06 3 667 6 00E 04 4 867 6 00E 02 6 067 6 00 7 267 600 00 8 467 7 00E 08 2 507 7 00E 06 3 707 7 00E 04 4 907 7 00E 02 6 107 7 00 7 307 700 00 8 507 8 00E 08 2 542...

Страница 21: ...surement cold cathode sensor measurement and the combined Cold cathode MEMS Pirani reading Refer to the Communication Protocol 300544663 RS232 and 300544664 EtherCAT for analog output setup The analog...

Страница 22: ...in different gas types Be aware that when measuring in environments where other gases than nitrogen calibration gas are present the readings can deviate from the true pressure In the range below 1 mba...

Страница 23: ...reen Normal operation 2 sec red Power on sequence Green 1 sec flash cycle Test mode only relevant for RS232 version 2 sec red User switch disabled Continuously RED Transmitter defect Off Power off Oth...

Страница 24: ...ani sensor by using the user switch See chapter 6 3 By using Serial interface For transmitter versions with RS232 digital communication interface P N 230088V02 or EtherCAT digital communication interf...

Страница 25: ...adjustments using the digital communication interface Refer to Communication Protocol 300544663 for RS232 or Communication Protocol 300544664 for EtherCAT for further details To obtain best measuring...

Страница 26: ...transmitter during user switch adjustments Transmitter status LED ring LED color Normal operation Solid green Vacuum zero Full scale adjustment Pulsing between red and green If the user switch is acti...

Страница 27: ...own for 1 second Normal operation Process Legend LED ring behavior Action Setpoint properties Cancel All steps from Normal operation to Vacuum zero Full scale adjustment mode and related adjusting ste...

Страница 28: ...r transmitter versions with integrated touch display P N 230085V2 it is possible to see information about setpoints sensors model and measurements unit It is also possible to set up a pressure thresho...

Страница 29: ...F If the Setpoint screen is accessed by the Setpoint menu pressing the screen will lead back to the same menu If accessed by the quick access buttons on the Main screen pressing the screen will lead b...

Страница 30: ...pressure cycles and instant air ventilation Q Can I connect a valve to be controlled by the transmitter relay contact A Driving inductive loads such as valves requires special precautions Refer to cha...

Страница 31: ...e measuring performance is contamination corrosion heat and electronic interference Q Will the transmitter retain user calibration after power is shut off A Yes all transmitter parameters including ca...

Страница 32: ...sed to heat or cooling air stream Perform a zero adjustment Incorrect pressure value at high pressure Contaminated sensor Transmitter repair required Corroded sensor Transmitter repair required Incorr...

Страница 33: ...acing or cleaning the cold cathode parts to achieve the best measurement performance in the lowest part of the measurement range Changing the cathode plates 1 Turn power off and remove cable 2 Dismoun...

Страница 34: ...ed the contractor is to be informed about any possible contamination of the compressor vacuum pump or component sent in for servicing Based on this information the contractor will be able to take the...

Страница 35: ...35 300544652_002_C1 11 2016 Leybold...

Страница 36: ...36 300544657_002 10 2015 Leybold Declaration of Conformity...

Страница 37: ...37 300544657_002 10 2015 Leybold Notes...

Страница 38: ...38 300544657_002 10 2015 Leybold Sales and Service...

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