LEYBOLD 230070V02, Руководство по эксплуатации

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12 300544652_002_C1 - 11/2016 - © Leybold
Transmitter Installation (Mechanical)
3.1
Conforming utilization

The transmitter is intended for measuring pressure.

The transmitters are intended for use in relatively clean environments.

The transmitter can only be used by persons who have suitable technical training and the necessary
experience or who have been instructed by the end-user of the product.

Always ensure that all vacuum sealing items and surfaces are clean, without damage and free of particles.

Use a cable with strain relief to ensure proper electrical connection and to reduce stress on the connectors.

To comply with EN61326-1 immunity requirements, use a braided, shielded cable.
3.2
Non-conforming utilization

The transmitter cannot be used for measurements other than described in this manual.

The transmitters are not intended for use in dirty and corrosive environments

Do not use the transmitter in presence of flammable gases or other explosive environments.

Do not install substituted parts or perform any unauthorized modification to the instrument.

The transmitter is not intended for use above maximum allowed pressure.
3.3
Process compatibility
The PTR 90 N PENNINGVAC transmitters are intended for use in relatively
clean environments. The transmitter cannot be used in corrosive environments
like a semiconductor etch process chamber where aggressive gases such as
fluorine are used.
If the transmitters are located close to a gas source connection like a flow
controller or leak valve the transmitter pressure measurement can be higher
than the actual chamber pressure. Location close to a pumping system
connection can cause a lower pressure measurement than actual chamber
pressure.
The transmitters and their sensor design can be mounted in any orientation
without compromising accuracy. However it is not recommended to mount the
transmitters upside down, as dust and dirt might fall into the sensor.
Explosive Environments
The transmitters should not be used in explosive environments, due to their high voltage potential that can cause
ignition.
Temperature
The transmitters have an active and individual sensor temperature compensation circuit that ensures accurate
measurement in a wide temperature range.
For best measuring performance avoid large temperature gradients and direct cooling like air-condition air stream
or direct heating like a pump exhaust stream.
Do not use or install the transmitter where the following conditions occur:
- Temperatures lower than 0 °C or higher than 40 °C
- Corrosive or explosive gases
- Direct sunlight or other heat sources
Caution
!
!
!
Not recommended