LEYBOLD 230070V02, Руководство по эксплуатации

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8 300544652_002_C1 - 11/2016 - © Leybold
2.1
Technical Data
Measurement principle: Thermal conductivity according to a MEMS Pirani sensor
Cold cathode ionization current
Measurement range (N
2
and Air): 1×10 -8 to 1000 mbar
Accuracy
(1)
(N
2
): 1×10
-8
to 1x10
-3
mbar (CC): ±30% of reading
1×10
-4
to 1x10
-3
mbar (MP): ±10% of reading
1×10 -3 to 100 mbar (MP): ± 5% of reading
100 to 1000 mbar (MP): ± 25% of reading
Repeatability
(1)
(N
2
): 1×10
-3
to 100 mbar: ± 2% of reading
Supply Voltage:
9
– 30 VDC
Power consumption: < 2 Watt
Fuse (thermal recoverable): 200 mA
Analog output (100 Ω impedance):
2-8.6 VDC, Log. 0.6 VDC/decade
Analog output resolution: 16 bit
Analog output update rate: 16 Hz
Sensor fail analog output (Pirani): 10 VDC
Materials exposed to vacuum
(2)
: 304 stainless steel, sealing material FPM
Mechanical Setpoint relay(s):
P/N: 230070V02, 230071V02, 230072V02, 230085V02:
0
P/N: 230088V02: 3
Setpoint relay range: 1×10
-8
to 1000 mbar
Setpoint relay contact rating: 1 A / 30 VDC/AC (resistive load)
Setpoint relay contact resistance:
100 mΩ (max)
Setpoint relay response time: <100 ms
Setpoint relay contact endurance: 100,000 cycles (min) (30 VDC/1 A load)
Setpoint relay contact endurance: 2,000,000 cycles (min) (30 VDC/0.2 A load)
Software setpoint relays:
P/N: 230089V02:
2
Setpoint relay response time: < 20 ms
Internal volume:
KF25 28.6 cm
3
KF40 21.7 cm
3
CF46 32.7 cm 3
Housing material:
Stainless steel 304
Weight:
P/N: 230070V02, 230088V02:
321 g
P/N: 230089V02: 600 g
P/N: 230085V02: 550 g
P/N: 230071V02: 358 g
P/N: 230072V02: 576 g
Maximum allowed pressure:
6 bar
Operating temperature: 0 to 40 °C (32 to 104 °F)
Bake out temperature (Power off): 85 °C (185 °F)
Filament temperature: 35 °C above ambient temperature
Ingress Protection Rating: IP40
Leak rate < 5
∙
10
-9
mbar
∙l
/s
(1) Accuracy and repeatability are typical values measured in Nitrogen atmosphere after zero adjustment at
ambient temperature.
(2) For the full list of all materials exposed to process gases please contact LEYBOLD.