LEYBOLD 230070V02, Руководство по эксплуатации

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13 300544652_002_C1 - 11/2016 - © Leybold
Bake out
The transmitter electronics can withstand maximum 85 o C (185 o F) when the power is turned off.
Contamination
Locate and orient the transmitter where contamination is least likely. The MEMS Pirani sensor has a low filament
temperature of only 35 o C above ambient temperature; therefore, the MEMS Pirani is less prone to contamination
by cracking products from fore vacuum pump oil.
Vibrations and instant air inrush
The sensor elements are extremely robust to mechanical forces like vibration and G-forces.
The sensor element cannot be damaged by fast and repeated pressure cycles or instant inrush of air.
3.4
Vacuum connections
The transmitters are available with different types of vacuum fittings. When mounting the transmitter, always
ensure that all vacuum sealing items and surfaces are clean, without damage and free of particles. Do not touch
the vacuum flange sealing surface.
Pressure range
The standard PTR 90 N PENNINGVAC transmitters are internally sealed with elastomer FPM sealing for use down
to 1×10
-8
mbar. If used in UHV applications the out gassing rate of FPM can be too high.
If the transmitter is backfilled with a liquid like pump oil the sensor element is likely permanently
damaged. The transmitter cannot be cleaned using solvents.
If the transmitter will be exposed to pressures above atmospheric pressure make sure that proper
vacuum fittings are used. Ensure that the internal system pressure is at ambient pressure
conditions before opening the vacuum system and removing any connections.
Attention
Caution
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