LEYBOLD 230070V02, Руководство по эксплуатации

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7 300544652_002_C1 - 11/2016 - © Leybold
Description
The PTR 90 N PENNINGVAC series vacuum transmitters offer a wide measuring range from 1×10
-8 mbar to 1000
mbar and are based on measurement of thermal conductivity in a small cavity on a MEMS Pirani silicon chip
sensor and cold cathode (CC) ionization current.
Transmitter versions with RS232 digital communication interface (P/N: 230088V02) or EtherCAT digital
communication interface (P/N: 230089V02) can set up transmitter parameters and provide real time pressure
measurement. Please see the Communication Protocol 300544663 (RS232) and 300544664 (EtherCAT) for further
details. Transmitter versions with an Integrated touchscreen display (P/N: 2300085V02) have the possibility to
monitor essential transmitter parameters. Please see chapter 6.4 for further details.
Each transmitter is individually tested throughout the measuring range before leaving the factory. A test report is
included in the package. In addition, each transmitter pressure reading is individually temperature-compensated
within the specified operating temperature range.
The transmitters can be used in a variety of applications as standalone unit or with Graphix controllers (P/N:
230680V01, 230681V01, 230682V01) and the Display controllers (P/N: 230001, 230024, 230025). All
PENNINGVAC transmitters are backward compatible with Graphix, Display and Center controllers.
The transmitters have up to three mechanical relays which can be used for process control, for
example interlocking valves or pumps. The analog voltage output can be interfaced to external analog
equipment for pressure readout or control.
Sensor technology
The transmitters contain two separate sensor elements. The MEMS Pirani (MEMS = Micro-Electro-Mechanical-
System) sensor element is based on measurement of thermal conductivity. The MEMS Pirani sensor consists of a
silicon chip with a heated resistive element forming one surface of a cavity. A cover on top of the chip forms the
other surface of the cavity. Due to the geometry of the sensor, convection cannot take place within the cavity and
consequently the sensor is insensitive to mounting position. Gas molecules are passed by diffusion only to the
heated element where the heat loss of the gas is measured.
The cold cathode inverted magnetron utilizes a high voltage anode, cathode and a permanent magnet. Electrons
are accelerated towards the anode and will ionize molecules by collision. The magnetic field deflects the electrons,
causing them to spiral as they move across the magnetic field to the anode. This spiraling movement increases the
opportunity for them to encounter and ionize the molecules.
The ionization of the molecules creates an electric current as a function of the pressure. Both sensor elements are
very robust and can withstand high G-forces and fast inrushes of air.
Applications
The transmitters can be used in many different vacuum applications within the industrial application, research and
development, semiconductor, analytical and coating industries:

General vacuum pressure measurement

Gas backfilling measurement and controlling

Coating

Mass spectrometer control

System process control

Sense abnormal pressure and take appropriate security measures using setpoint relays

Control system pressure
Disposal
The PTR 90 N PENNINGVAC transmitter is manufactured according to the RoHS directive.
For the benefit of the environment, at the end of life of the transmitter, it should not be disposed in
the normal unsorted waste stream. It should be deposited at an appropriate collection point or
facility to enable recovery or recycling.
Attention
!