2
Chapter 1: Introduction
Product Service 1-800-522-7658
ISO Class 5 Definition
Airborne particulate cleanliness inside any clean bench or
enclosure is designated by ISO Class 5, which is equivalent to
3520 particles 0.5 µm or larger per cubic meter of air per ISO
Standard 14644-1. ISO Class 5 cleanliness is illustrated in the
table to follow and is equivalent to Class 100 air conditions as
defined by Federal Standard 209E. Class 100 is equal to 100
particles 0.5 µm or larger per cubic foot of air.
Table 1-1 Selected airborne particulate cleanliness classes for cleanrooms and clean zones.
ISO
classification
number (N)
Maximum concentration limits (particles/m3 of air) for particles equal to and
larger than the considered sizes shown below (concentration limits are
calculated in accordance with 3.2 of Standard 14644-1)
0.1 µm
0.2 µm
0.3 µm
0.5 µm
1 µm
5 µm
ISO Class 1
10
2
ISO Class 2
100
24
10
4
ISO Class 3
1 000
237
102
35
8
ISO Class 4
10 000
2 370
1 020
352
83
ISO Class 5
100 000
23 700
10 200
3 520
832
29
ISO Class 6
1 000 000 237 000
102 000
35 200
8 320
293
ISO Class 7
352 000
83 200
2 930
ISO Class 8
3 520 000
832 000
29 300
ISO Class 9
35 200 000
8 320 000
293 000
Table 1-1 ISO Classification Number (N)
About This Manual
This manual is designed to help you learn how to install, use, and
maintain your Clean Bench.
Chapter 1: Introduction
provides a brief overview of the Clean
Bench, explains the organization of the manual, and defines the
typographical conventions used in the manual.
Chapter 2: Prerequisites
explains what you need to do to prepare
your site before you install the Clean Bench. Electrical and service
requirements are discussed.
Chapter 3: Getting Started
contains the information you need to
properly unpack, inspect, install, and certify the Clean Bench.
Содержание Purifier 3970200
Страница 15: ...11 Chapter 3 Getting Started Product Service 1 800 522 7658 Figure 3 1 Vertical Clean Bench Installation ...
Страница 58: ...54 Appendix B Dimensions Product Service 1 800 522 7658 Figure B 1 Purifier Vertical Clean Bench ...
Страница 60: ...56 Appendix C Vertical Clean Bench Specifications Product Service 1 800 522 7658 C 1 ...
Страница 61: ...57 Appendix C Vertical Clean Bench Specifications Product Service 1 800 522 7658 C 2 ...
Страница 62: ...58 Appendix C Vertical Clean Bench Specifications Product Service 1 800 522 7658 C 3 ...
Страница 63: ...59 Appendix C Vertical Clean Bench Specifications Product Service 1 800 522 7658 C 4 ...