Section 3: Test subroutine library reference
S530 Parametric Test System Test Subroutine Library User's Manual
3-74
S530-907-01 Rev. A / September 2015
The steps used by this technique to find the maximum slope or maximum g
m
(where V
GS
step size is a
user-input variable):
1. From the last point below
ithr
(threshold I
DS
), measure four points (I
DS
, V
GS
). V
GS
is stepped,
and I
DS
is measured.
2. Calculate the first slope. This value is now the MAX SLOPE.
3. Step V
GS
, measure I
DS
.
4. Delete the first point in the five-point LLSQ array, and add the most recent point (shift left one
point).
5. Calculate the new slope.
6. Compare the new slope to MAX SLOPE.
7. Repeat steps 3 through 6 until the peak slope is crossed.
8. At peak slope, evaluate the V
GS
intercept (V
G
).
9. Calculate V
T
.
10. Return V
T
as
vtext
result and
slope
.
This subroutine is very sensitive to the V
GS
step size (
vstep
) and the start and stop points for the
binary search (
vlow
,
vhigh
), but is generally the most accurate way of evaluating the extrapolated
threshold voltage. The
vtext2
subroutine is a further variation on this technique. The major
differences are that
vtext2
uses the
trigger
and
sweep
calls to collect data, and it uses some
refinements in the data analysis. It also runs faster than the
vtext
subroutine.
If a zero or negative substrate pin is specified, the substrate is left floating. If the pin number is
greater than 0 and V
BS
is less than 0.9 mV, the substrate is grounded. In all other cases, it is
connected and forced.
The
nmax
parameter defaults to 21 steps if a smaller value is entered.
V/I polarities
The polarities of V
DS
and I
THR
are determined by the device type.
The
vstep
parameter is 10 mV to 100 mV. This depends on the
vlow
and
vhigh
parameters. For
an N-channel, if
vlow
= 0.0 and
vhigh
= 2.0,
vstep
should be positive.
Source-measure units (SMUs)
SMU1: Forces
vds
, default current limit, measures I
DS
SMU2: Searches V
GS
, default current limit
SMU3: Forces
vbs
, default current limit