6517B-900-01 Rev. A / Jun 2008
Return to
3-7
Model 6517B Electrometer User’s Manual
Section 3: Basic Measurements
3.
Place the V-Source in operate by pressing
OPER
. The VOLTAGE SOURCE OPERATE
indicator is on when in operate.
4.
Select the lowest possible measurement range to display the leakage current in the test
fixture.
5.
Enable relative (REL annunciator on) by pressing
REL
. This zeroes the display, canceling
the leakage current reading.
6.
Press
OPER
to place the V-Source in standby and enable zero check.
7.
Perform the following steps to establish the amps Rel value for the ohms function.
a.
Press
CONFIG
and then
R
to display the ohms configuration menu.
b.
Use the and keys, place the cursor (blinking menu item) on
AMPSREL
and press
ENTER
.
c.
Place the cursor on
YES
and press
ENTER
to use the amps Rel value for the ohms
measurement.
d.
Use
the
EXIT
key to back out of the menu.
8.
Re-install the DUT in the test fixture.
9.
Select
the
ohms (R)
function and proceed to step 5 of the Resistance Measurement
procedure.
Resistivity measurements
NOTE
The following procedure to measure resistivity (surface or volume) requires the use of the
Keithley Instruments Model 8009 Resistivity Test Fixture. Refer to the Model 8009 Instruction
Manual for details on using the test fixture.
The following procedure requires “BENCH” reset conditions (see
1.
With zero check enabled (“ZeroCheck” displayed), select the ohms function by pressing
R
.
2.
Select
Auto V-Source ohms
. In this mode, the V-Source is automatically set to a voltage
(nominally 40V or 400V) that optimizes measurement accuracy (see
more information). Note that “BENCH” reset conditions selects Manual V-Source ohms. In
this mode, you must manually set the V-Source level for the measurement (see
WARNING
Selecting Auto V-Source ohms may set the V-Source to 400V. Hazardous
voltages may be present on the output and guard terminals that could cause
personal injury or death.
3.
Select a measurement range or use autoranging:
a.
To automatically select the most sensitive range, enable autorange. The
AUTO
key
enables and disables autorange. When enabled, the AUTO annunciator is on.
b.
For manual ranging, use the
RANGE
keys (
and
) to select a measurement range
consistent with the expected resistance.
4.
Connect the Model 6517B to the Model 8009 test fixture as shown in
, and set the
switch on the test fixture to the desired measurement type (Surface or Volume).
5.
Select the resistivity measurement mode as follows:
a.
Press
the
CONFIG
and then
R
to display the ohms configuration menu.
b.
Use the cursor keys ( and ) to place the cursor (blinking menu item) on
MEAS-TYPE
and press
ENTER
.
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