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Instruction Manual IGM402 Hornet

InstruTech

Page 54

7.3.2.2

IG + CG1 analog output correction factors - Convection gauge range

When using the IG + CG1 analog output mode (Log-Linear 0.5 - 7 V, 0.5 V/decade) for gases other than N

/ Air,

use the following look-up table and information to convert the analog output to pressure when operating in the
convection gauge pressure measurement range. The look-up table has been derived from equation listed in

section 6.2

Analog output IG + CG1 mode when in the pressure range of overpressure shutdown value to 1,000 Torr

True

Pressure

(Torr)

Freon12

Freon22

1.00E-3

4.000

3.923 3.952 4.000 4.021 3.801

4.088

4.057

3.923

4.115

2.00E-3

4.151

4.073 4.102 4.151 4.181 4.000

4.246

4.190

4.088

4.259

5.00E-3

4.349

4.259 4.301 4.349 4.322 4.181

4.440

4.423

4.389

4.272

4.443

1.00E-2

4.500

4.410 4.454 4.493 4.521 4.341

4.584

4.565

4.541

4.426

4.592

2.00E-2

4.651

4.559 4.603 4.648 4.673 4.489

4.738

4.717

4.693

4.575

4.741

5.00E-2

4.849

4.755 4.804 4.846 4.870 4.686

4.930

4.919

4.889

4.771

4.944

1.00E-1

5.000

4.904 4.957 4.994 5.015 4.835

5.078

5.067

5.041

4.923

5.101

2.00E-1

5.151

5.050 5.109 5.144 5.161 4.980

5.220

5.209

5.199

5.075

5.249

5.00E-1

5.349

5.247 5.319 5.343 5.345 5.168

5.393

5.387

5.418

5.278

5.446

1.00E+0

5.500

5.389 5.487 5.493 5.489 5.301

5.511

5.509

5.595

5.436

5.602

2.00E+0

5.651

5.528 5.673 5.644 5.616 5.423

5.605

5.610

5.808

5.601

5.761

5.00E+0

5.849

5.695 6.065 5.849 5.762 5.554

5.695

5.709

6.695

5.860

5.938

1.00E+1

6.000

5.801

6.006 5.848 5.625

5.736

5.765

6.166

6.223

2.00E+1

6.151

5.882

6.174 5.909 5.680

5.761

5.785

6.883

6.775

5.00E+1

6.349

5.947

6.445 5.957 5.705

5.789

5.809

6.963

1.00E+2

6.500

5.973

6.660 5.983 5.719

5.835

5.846

2.00E+2

6.651

5.995

6.735 6.045 5.761

5.889

5.904

3.00E+2

6.739

6.027

6.790 6.114 5.778

5.919

5.938

4.00E+2

6.801

6.065

6.843 6.175 5.798

5.941

5.963

5.00E+2

6.849

6.103

6.891 6.229 5.812

5.959

5.982

6.00E+2

6.889

6.137

6.932 6.281 5.824

5.974

5.999

7.00E+2

6.923

6.169

6.967 6.332 5.834

5.987

6.015

7.60E+2

6.940

6.187

6.987 6.366 5.838

5.995

6.023

8.00E+2

6.952

6.200

6.999 6.387 5.842

5.999

6.028

9.00E+2

6.977

6.227

6.450 5.849

6.011

6.040

1.00E+3

7.000

6.256

6.523 5.853

6.023

6.052

Values listed under each gas type are in volts (Vdc).

Example:

The gas in use is O

. Voltage output is 5.144 volts.

True pressure of O

is 2.0E-01 Torr

Содержание The Hornet IGM402

Страница 1: ...athode Ionization Vacuum Gauge With Dual Convection IGM402 Module The Hornet User Manual InstruTech 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrute...

Страница 2: ...or diagrams included in this manual are provided solely for illustrative purposes Because of the many variables and requirements imposed on any particular installation InstruTech cannot assume respon...

Страница 3: ...t as may be expressly permitted in writing by InstruTech Printed in the United States of America Granville Phillips and Convectron are registered trademarks of MKS Instruments Andover MA Conflat is a...

Страница 4: ...per Equipment Grounding 11 2 4 2 Electrical Interface and Control 11 2 5 Overpressure and use with hazardous gases 11 2 6 Gases other than nitrogen air 12 Installation 12 3 3 1 Mechanical Installation...

Страница 5: ...ICE MENU 40 5 9 Activating the IG sensor 41 Analog output 41 6 6 1 Ion gauge analog output IG ONLY 42 6 2 Ion gauge plus convection gauge analog output IG CG1 43 6 3 Convection gauge analog output LOG...

Страница 6: ...orrection factors 56 RS485 serial communications 57 8 8 1 Device Specific Serial Communication Info BINARY Protocol with CRC8 57 8 2 RS485 Command Protocol Summary BINARY Protocol with CRC8 60 8 3 Dev...

Страница 7: ...x 10 2 mbar 1 3 x 10 7 to 6 7 Pa convection CG 1 x 10 4 to 1 000 Torr 1 3 x 10 4 to 1 333 mbar 1 3 x 10 2 Pa to 133 kPa used as a full range gauge IG CG 1 x 10 9 to 1 000 Torr 1 3 x 10 9 to 1 333 mba...

Страница 8: ...1010 1 environmental RoHS 1 3 Dimensions fitting dimension A NW16KF 1 45 in 37mm NW25KF 1 45 in 37mm NW40KF 1 45 in 37mm 1 1 3 in Mini CF 1 85 in 47 mm 2 3 4 in Conflat 1 70 in 43 mm 3 4 in Tube 2 16...

Страница 9: ...e IGM402 Hornet vacuum gauge module Power Input 100 240 Vac Power Plug North American 115 Vac Output 24 Vdc 2 5 A 60 W Connector 9 pin D sub female to mate with and power the IGM401 module Cable lengt...

Страница 10: ...uct should never be operated with the covers removed unless equivalent protection of the operator from accidental contact with hazardous internal voltages is provided WARNING There are no operator ser...

Страница 11: ...is turned on 180 V is present at the power supply and other components such as the ion gauge and the cable Furthermore voltages as high as 350 V are present during degas DO NOT operate the IGM402 with...

Страница 12: ...is mounted is electrically grounded Remove cable to the unit before attempting to service the gauge Remove cable to the unit if a cable or plug is damaged or the product is not operating normally acc...

Страница 13: ...will limit the level of pressure inside your vacuum chamber to less than what the vacuum chamber system components are capable of withstanding In cases where an equipment failure could cause a hazardo...

Страница 14: ...he ignition temperature of certain combustible gases and gas mixture This could cause an explosion which could result in serious injury or death Installation 3 3 1 Mechanical Installation IGM402 ioniz...

Страница 15: ...1 Torr mounting position has little to no effect For Accurate Measurements Above 1 Torr Mount the Gauge Axis Horizontally as Shown Below Correct Orientation Incorrect Orientation Mount the CVG101 wit...

Страница 16: ...ing or disconnecting it The IGM402 is provided with two D sub connectors used for I O interface as shown below 1 9 pin D sub male DE 9P connector for Digital I O and analog output 2 9 pin D sub female...

Страница 17: ...l to other external instruments to confirm degas is on or off Signal Open collector transistor grounded emitter rated at 40 V max VCE 50 mA IC max Transistor off degas off transistor on degas on 6 Deg...

Страница 18: ...etpoint relay Normally Closed contact RLY I on front panel display 6 RS485 DATA A Input output 7 Setpoint Relay Common contact RLY I on front panel display 8 Not used do not connect 9 RS485 DATA B Inp...

Страница 19: ...O Setpoint relays for CG1 or CG2 Normally Open contact COM Setpoint relay Common contact program screen for relays RLY A RLY B NC Setpoint relays for CG1 or CG2 Normally Closed contact CG1 Output Sign...

Страница 20: ...mperature is to exceed 70 o C To bake out the sensor use the following procedure 1 Turn off power to the IGM402 2 Disconnect the cable from the IGM402 3 Use a 3 32 in size Hex key to remove the 4 40 s...

Страница 21: ...led Activating the sensor for further details 5 2 Emission Current 4 mA or 100 A 0 1 mA emission current are available settings of emission current 1 In clean applications and operating at higher pres...

Страница 22: ...eneral vacuum applications dual yttria coated filaments are offered for use with air and inert gases such as N2 argon etc Optional dual tungsten filaments are available for use with gases not compatib...

Страница 23: ...lways turn off the IG filament manually before pressure is to rise above 1 00 x 10 3 Torr Note Both types of filaments will suffer eventual damage if operated at high pressures The type and amount of...

Страница 24: ...elow If IG CNTL is set to FRONT PANEL the Top Level Program Menu shown here will be modified See section 5 8 2 FRONT PANEL for the modified Top Level Program Menu choices when IG CNTL is set for FRONT...

Страница 25: ...oices SET VAC Factory default 0 00E 0 TORR SET ATM Factory default 7 59E 2 TORR ANALOG TYPE Factory default LOG LINEAR ANALOG OUTPUT IG ANALOG CAL Factory default Factory Set CG1 ANALOG CAL Factory de...

Страница 26: ...ON or OFF for the setpoint relays or when adjusting the VAC zero or ATM span reading for the CG vacuum and atmospheric pressure indications note that the highlight cursor will wrap around the menu cho...

Страница 27: ...OW ALL LG SHOW ALL SM IG CG1 LG IG CG1 CG2 IG CG1 LG IG CG2 LG CG1 CG2 LG CG1 CG2 SM IG ONLY IG ONLY RND CG1 ONLY CG2 ONLY Select the ENTER key again to save the desired mode selected above SHOW ALL L...

Страница 28: ...Indicates Convection Gauge CG2 Relay B is energized Ex 1C CG2 data displayed in SHOW ALL LG mode Note RLY I A B disappears from the display when the relay is not energized relay is turned off SHOW ALL...

Страница 29: ...a log linear 0 5 to 7 Vdc 0 5 V decade over the entire full range measurement See SET UP IG and ANALOG MODE in Section 5 8 3 IG CG1 CG2 In this mode two separate display screens appear sequentially Th...

Страница 30: ...ured Pressure Indicates Pressure Unit Indicates Convection Gauge CG1 Relay A is energized Ex 8A CG1 and CG2 data displayed in CG1 CG2 SM mode IG ONLY This mode displays only the measured pressure from...

Страница 31: ...e normal mode with a dark background color for the first 12 hours and will then switch to a back lit background color for the next 12 hours If you like to have the 12 hour period for the normal displa...

Страница 32: ...485 is selected in the IG CNTL submenu of the SETUP UNIT menu When operating in the Digital Input DIGI mode the IG filament can only be turned on by continuously connecting circuit ground pin 2 to pin...

Страница 33: ...r input and the DIGI RS485 inputs are ignored If FRONT PANEL is selected the following Top Level Program Menu will be displayed after the MENU key is pressed Compare the following program selection me...

Страница 34: ...is the case only when filament turn off is required before the pressure measured by CG1 rises above the maximum of 5 00 x 10 2 Torr for the 100 A emission current setting and 1 00 x 10 3 Torr for the...

Страница 35: ...hen using yttria coated filaments it is highly recommended to periodically alternate operating Filaments 1 and 2 An inactive filament not operating for an extended length of time may result in that fi...

Страница 36: ...I HI TRP to a value lower than RLY I LO TRP the IGM402 will revert back to the original RLY I HI TRP value To do this correctly so that the IGM402 will accept the new setting for the RLY I HI TRP you...

Страница 37: ...ecrease that value to a number lower than the value of RLY A HI TRP you are trying to set The lowest setpoint pressure value that you may set is 1 0E 03 Torr The maximum setpoint pressure allowed is 1...

Страница 38: ...her than 1 00 x 10 3 Torr it is not normally necessary to set zero and thus setting atmosphere should be adequate If you are able to evacuate your system to below 1 00 x 10 4 Torr it is always a good...

Страница 39: ...ed numeral locations until the desired number is reached then press the ENTER key repeatedly until the SET VAC appears on the display again The new zero point is now set Due to the nature of circuit o...

Страница 40: ...IG analog output to a high resolution voltmeter your system PLC etc Evacuate your vacuum system to a low enough pressure for the IG to operate Establish a system pressure so that the displayed IG read...

Страница 41: ...d pressing the ENTER key in the IG ANALOG CAL menu the next screen analog output calibration screen is displaying a pressure of 7 60E 02 Torr Based on the equation and table given in section 6 3 the e...

Страница 42: ...YTE ADDRESS HEXADECIMAL BINARY ADDR OFFSET Upper nibble ADDR Lower nibble 1 0 0 0 0 0 0 0 1 01 5 0 0 0 0 0 1 0 1 05 15 0 0 0 0 1 1 1 1 0F 16 0 0 0 1 0 0 0 0 10 FORMAT Factory default BINARY This progr...

Страница 43: ...on gauge measurement screen may display UNIT STATUS OFF during the time that the IGM402 is starting the emission and stabilizing the measurements Analog output 6 The IGM402 provides a total of three a...

Страница 44: ...ff or any IG fault condition 2 The pressure exceeds 1 00 x 10 3 Torr at 4 mA emission current 3 The pressure exceeds 5 0 x 10 2 Torr at 0 1 mA 100 A emission current Log Linear Analog Output N2 air on...

Страница 45: ...og10 P 4 5 Notes The output voltage will switch to above 10 Vdc under the following conditions 1 The filament is turned off or any other IG fault condition while CG1 is damaged or disconnected 2 The p...

Страница 46: ...olts 3 V log10 P 3 Where P is the pressure in pascals and V is the output signal in volts The following chart shows the graphical results of table and formulas above for pressure measurements in Torr...

Страница 47: ...Coefficients for y x a bx cx 2 dx 3 ex 4 fx 5 a 0 02585 b 0 03767 c 0 04563 d 0 1151 e 0 04158 f 0 008738 For Non Linear Analog Output voltage range of 2 842 to 4 945 volts use this table Coefficients...

Страница 48: ...some GP controllers produced a different S curve The non linear output from InstruTech convection gauges modules and controllers duplicates exactly the original S curve of 0 375 to 5 659 Vdc for 0 to...

Страница 49: ...nment vessel and attached apparatus exists when using pressure measurement devices that are calibrated for a specific gas type Use a pressure relief device to safely limit the internal pressure of a c...

Страница 50: ...the readout of pressure for a gas type other than nitrogen the displayed pressure readout for that device must be annotated to indicate that the displayed pressure is for the gas type the readout is...

Страница 51: ...ct to thermal conductivity but even N2 and air will exhibit slight differences in readings at higher pressures For example when venting a system to atmosphere using N2 you may see readings change by 3...

Страница 52: ...the gas is helium He the gauge will read OP Overpressure when pressure reaches about 10 Torr true pressure and opening the chamber to atmosphere prematurely may present other hazards for both people a...

Страница 53: ...2 62E 1 2 50E 1 1 41E 1 3 15E 1 5 00E 1 5 00E 1 3 12E 1 4 35E 1 4 86E 1 4 89E 1 2 17E 1 6 11E 1 5 94E 1 6 87E 1 3 59E 1 7 81E 1 1 00E 0 1 00E 0 6 00E 1 9 40E 1 9 70E 1 9 50E 1 4 00E 1 1 05E 0 1 04E 0...

Страница 54: ...ssure This pressure value is based on nitrogen gas B Apply the Gas Correction Factor for the particular gas you are using to the pressure value obtained in step A Use correction factors and example li...

Страница 55: ...ut mode Log Linear 0 5 7 V 0 5 V decade for gases other than N2 Air use the following steps to convert the analog output to pressure when operating in the pressure range of 1 0 x 10 9 Torr to 1 0E 03...

Страница 56: ...4 994 5 015 4 835 5 078 5 067 5 041 4 923 5 101 2 00E 1 5 151 5 050 5 109 5 144 5 161 4 980 5 220 5 209 5 199 5 075 5 249 5 00E 1 5 349 5 247 5 319 5 343 5 345 5 168 5 393 5 387 5 418 5 278 5 446 1 00...

Страница 57: ...6 1 00E 2 3 000 2 820 2 908 2 987 3 041 2 681 3 167 3 130 3 083 2 851 3 185 2 00E 2 3 301 3 117 3 207 3 297 3 346 2 978 3 476 3 435 3 386 3 149 3 483 5 00E 2 3 699 3 511 3 607 3 692 3 740 3 371 3 860...

Страница 58: ...0 868 0 9 0 668 1 009 0 99 0 944 0 768 1 053 2 00E 1 1 1552 0 962 1 068 1 141 1 179 0 847 1 315 1 291 1 265 1 002 1 392 5 00E 1 1 6833 1 386 1 589 1 664 1 668 1 194 1 826 1 805 1 914 1 469 2 014 1 00...

Страница 59: ...bits No Parity 1 stop bit Factory default 19 200 8 N 1 2 The baud rate can be set to various values using the front panel selection keys See SET COMMS BAUD RATE in section 8 2 table for baud rates ava...

Страница 60: ...o be sent Length is the length of the message char Calculate_CRC8 char ptr char Length char CRC_Value char Counter char BitCounter char XOR_Byte char TransmitByte Initialize the local variable CRC_Val...

Страница 61: ...of the responses are NOT ASCII characters These are actual variable values that are of type char float or long This shortens the messages and simplifies the code written by the customer by not having...

Страница 62: ...Message Length 9 bytes 01 02 xx xx xx xx xx CRC cmd 0x02 xx represents the floating point value place holder 01 02 uu yy yy yy yy CRC yy represents the four byte floating point value uu pressure unit...

Страница 63: ...filament is being used Message Length 5 bytes 01 0C xx CRC cmd 0x0C xx represents the byte value place holder FIL 1 01 0C 01 CRC FIL2 01 0C 02 CRC SET ION GAUGE FILAMENT Set which ion gauge filament i...

Страница 64: ...Message Length 8 bytes 01 0F xx xx xx xx CRC cmd 0x0F xx represents the four byte floating point value 01 0F xx xx xx xx CRC READ RELAY I LOW TRIP POINT Get the pressure when Relay I will turn on Mes...

Страница 65: ...1 12 xx xx xx xx CRC READ RELAY B HIGH TRIP POINT Get the pressure when Relay B will turn off Message Length 8 bytes 01 2A xx xx xx xx CRC cmd 0x2A xx represents the four byte floating point value pla...

Страница 66: ...the byte value place holder 01 1A 00 CRC READ ION GAUGE CONTROL STATUS Get the ion gauge control status These are the semaphores that communicate status and errors in two bytes Message Length 6 bytes...

Страница 67: ...acuum pressure setting Message Length 8 bytes 01 2D xx xx xx xx CRC cmd 0x2D xx represents the four byte floating point value place holder 01 2D yy yy yy yy CRC yy represents the four byte floating po...

Страница 68: ...value 01 30 xx xx xx xx CRC READ CG2 ATMOSPHERE SETTING VALUE Gets the CG2 atmosphere pressure setting Message Length 8 bytes 01 33 xx xx xx xx CRC cmd 0x33 xx represents the four byte floating point...

Страница 69: ...01 43 yy yy yy yy CRC yy Represents a byte value place holder for a floating point number SET 100 A TURN ON PRESSURE Set the pressure where CG1 will turn on IG Message Length 8 bytes 01 44 xx xx xx xx...

Страница 70: ...non printable character Do not enter CR from your keyboard A carriage return non printable character may be entered as the Unicode CO controls specified value OD hexadecimal 13 decimal From your keybo...

Страница 71: ...01_7 60E 02 CR When CG is over ranged or not plugged in 01_1 01E 03 CR SET ADDR OFFSET Set the communications RS485 address offset upper nibble 1 xxSAuu CR e g 01SA10 CR where uu 00 or 10 or 20 or 30...

Страница 72: ...to either CG1 or CG2 pressure readings xxSLAzy yyEzpp CR e g 01SLA 4 00E 02 CR e g 01SLA 5 00E 02 CR Turn the relay OFF above 500 Torr xx_PROGM_OK CR If the turns off above pressure setpoint is less...

Страница 73: ...is not a response available with G P Micro Ion COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE SET CGn ZERO Set the zero or vacuum calibration point for CGn where n 1 A as used in the command syntax...

Страница 74: ...ing the UNL will yield a response of xx_COMM_ERR CR If UNL is not enabled then a response would be xx_SYNTX_ER CR xxUNL CR e g 01UNL CR xx_PROGM_OK CR TOGGLE UNL FUNCTION TLU The TLU command will togg...

Страница 75: ...CAL__ CR SET PRESSURE UNIT Set Pressure unit for display and RD response xxSUx CR eg 01SUT CR xx_PROGM_OK CR T Torr M mBar P Pascal READ IG ION CURRENT Read the current IG ion current in amps xxRDIGC...

Страница 76: ...e sensor tube is contaminated Degas the sensor or replace the sensor Leak in the vacuum system Re check for leak in the system Re check that all metal seals are used when operating below 1 0 x 10 7 To...

Страница 77: ...Electronics Failure Contact InstruTech LV OVR PWR The power applied to the filament is at maximum without establishing an emission current Contact InstruTech F1 or F2 OPEN Filament 1 or 2 is open Swit...

Страница 78: ...indication of open filaments but in some cases it could also be an indication of faulty electronics To determine whether the problem is caused by either a failed filament or the electronics refer to s...

Страница 79: ...or wire at zero volts i e ground potential In simple terms the ions collected by the collector electrode a small diameter wire within the grid electrode structure are measured with an electrometer cir...

Страница 80: ...nt Current readings will aid you in monitoring the condition of your gauge filaments over time and perhaps give you an indication of when to schedule replacement of either the device or the filament a...

Страница 81: ...rginal filament coating condition you may have to operate the emission current at the 4 mA setting even if the maximum actual emission current is less than 4 mA This may prevent an EMIS FAIL error tha...

Страница 82: ...ontamination may be removed by degas Furthermore if there is the possibility of oil back streaming from wet vacuum pumps it is recommended that a filter or trap be installed to prevent contamination o...

Страница 83: ...for return authorization and the replacement of the sensor will be done at the factory To replace the sensor use the following procedure 1 Turn off power to the IGM402 2 Disconnect the cable from the...

Страница 84: ...this warranty void The warranty does not apply to products or components which have been abused altered operated outside of the environmental specifications of the product improperly handled or insta...

Страница 85: ...Instruction Manual IGM402 Hornet InstruTech Page 83...

Страница 86: ...p n 000861 116 InstruTech 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com...

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