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TOC - 7

XTC/3 Operating Manual

6.5.4

Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30

Chapter 7

Calibration Procedures

7.1

Importance of Density, Tooling and Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . 7-1

7.2

Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1

7.3

Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2

7.4

Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3

7.5

Estimating Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4

Chapter 8

Measurement and Control Theory

8.1

Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1

8.1.1

Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2

8.1.2

Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4

8.1.3

Z-Match Technique. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5

8.1.4

Active Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6

8.1.5

ModeLock Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7

8.1.6

Control Loop Theory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9

Chapter A

Material Table

Содержание XTC/3

Страница 1: ...O P E R A T I N G M A N U A L XTC 3 Thin Film Deposition Controller PN 074 446 P1L Cover Page...

Страница 2: ...agelok Co Inconel is a registered trademark of Inco Alloys International Huntington WV All other brand and product names are trademarks or registered trademarks of their respective companies Disclaime...

Страница 3: ...Declaration Of Conformity Page 1...

Страница 4: ...h written notification Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification THIS WARRANTY IS MADE AND ACCEPT...

Страница 5: ...ection 1 4 1 3 How to Contact INFICON 1 5 1 3 1 Returning Sensor to INFICON 1 5 1 4 XTC 3 Specifications 1 6 1 4 1 Measurement 1 6 1 4 2 Screens and Parameters 1 6 1 4 3 Process Recipe Storage 1 7 1 4...

Страница 6: ...2 2 3 Minimizing Noise Pickup From External Cabling 2 6 2 3 Connecting the Controller 2 7 2 3 1 Verifying the Correct Input Voltage 2 7 2 3 2 Routing Oscillator XIU Cables 2 7 2 3 3 Interface Cable F...

Страница 7: ...eatures 3 24 3 6 1 Automating a Process 3 24 3 6 2 Ion Assisted Deposition 3 25 3 6 3 Control Delay 3 25 3 6 4 Shutter Delay 3 25 3 6 5 Rate Ramp Trigger of Final Thickness 3 25 3 6 6 Transfer Sensor...

Страница 8: ...C 3M only 4 16 4 3 1 Process Definition 4 17 4 3 1 1 Process Number 4 17 4 3 1 2 Process Name 4 17 4 3 1 3 Building the Layer Sequence 4 17 4 4 General Parameters 4 18 4 4 1 Process Parameters 4 19 4...

Страница 9: ...ry Output Type Definition XTC 3M Only 5 18 5 2 2 3 8 Standard Query Process Parameters XTC 3M Only 5 18 5 2 2 4 Standard UPDATE Commands 5 19 5 2 2 4 1 Update Block 5 19 5 2 2 4 2 Standard Update Film...

Страница 10: ...munications 6 17 6 3 3 1 TCP IP Module LED Diagnostics 6 17 6 4 Replacing the Crystal 6 18 6 4 1 Front Load Single Sensors 6 18 6 4 2 Shuttered Front Load Single and Front Load Dual Sensors 6 19 6 4 3...

Страница 11: ...1 7 3 Determining Tooling 7 2 7 4 Laboratory Determination of Z Ratio 7 3 7 5 Estimating Z Ratio 7 4 Chapter 8 Measurement and Control Theory 8 1 Basics 8 1 8 1 1 Monitor Crystals 8 2 8 1 2 Period Mea...

Страница 12: ...target substrate and the source of vaporized material The sensor incorporates an exposed oscillating quartz crystal whose frequency decreases as material accumulates The change in frequency provides i...

Страница 13: ...finition of Notes Cautions and Warnings When using this manual please pay attention to the NOTES CAUTIONS and WARNINGS found throughout For the purposes of this manual they are defined as follows NOTE...

Страница 14: ...put relay connectors are present Refer all maintenance to technically qualified personnel CAUTION XTC 3 contains delicate circuitry which is susceptible to transient power line voltages Disconnect the...

Страница 15: ...ive earth circuit inside or outside XTC 3 or disconnection of the protective earth terminal is likely to make XTC 3 dangerous This symbol indicates where the protective earth ground is connected insid...

Страница 16: ...tive action that may have already been attempted 1 3 1 Returning Sensor to INFICON Do not return any sensor component to INFICON before speaking with a Customer Support Representative and obtaining a...

Страница 17: ...density Frequency Accuracy 2 5 ppm 0 to 50 C Measurement Frequency 4 Hz Measurement Technique ModeLock User Interface TFT LCD and limited membrane keypad All parameters accessible through computer co...

Страница 18: ...9 s display shows three digits Final Thickness 0 0 to 999 9 k Thickness Set Point 0 0 to 999 9 k Rate Ramp 1 per film New Rate 0 0 to 999 9 s display shows three digits Ramp Time 00 00 to 99 59 min s...

Страница 19: ...Option Time Power Yes No Delay Option None Shutter Control Both Transfer Sensor Yes No Transfer Tooling 10 0 to 500 0 Control Delay Time 00 00 to 99 59 min s Ion Assisted Deposit Yes No Name XTC 3M o...

Страница 20: ...x on Recorder Resolution 15 bits over full range 10 V Update Rate 4 Hz maximum dependent on source characteristics Recorder Output Functions Rate or Thickness or Power or Rate Deviation Recorder Outpu...

Страница 21: ...Communications RS232C Serial Port Standard see section 5 1 1 on page 5 1 Baud Rates 9 600 19 200 38 400 57 600 115 200 Ethernet TCP IP Port Optional Static address DHCP not supported 1 4 8 Accessories...

Страница 22: ...ge Temperature 10 to 70 C 14 to 158 F 1 4 12 Warm Up Period Warm Up Period None required For maximum stability allow five minutes 1 4 13 Size H x W x L not including mounts or user connectors 89 x 203...

Страница 23: ...ion 4 Take an inventory of your order by referring to the order invoice and the information contained in section 1 6 on page 1 12 5 To perform a power on verification see section 1 7 on page 1 16 6 Fo...

Страница 24: ...PN 780 612 G100 Above kits consist of oscillator PN 780 600 G2 4 m 6 in BNC oscillator to feedthrough cable PN 755 257 G6 157 5 in 4 m in vacuum cable PN 321 039 G16 and multiconductor controller to o...

Страница 25: ...21 039 G15 3 5 m In Vacuum Sensor Cable PN 760 701 G20 XTC 3 Unit to Oscillator Cable 4 6 m 15 ft PN 600 1261 P15 XTC 3 Unit to Oscillator Cable 9 2 m 30 ft PN 600 1261 P30 XTC 3 Unit to Oscillator Ca...

Страница 26: ...78 cm 30 75 in 1 15 2 cm 6 in 2 30 5 cm 12 in 3 61 cm 24 in 4 91 4 cm 36 in 5 121 9 cm 48 in 6 152 4 cm 60 in 7 182 9 cm 72 in 8 Crystal Carousel Assembly One Included in Base Unit 0 Spare Crystal Ca...

Страница 27: ...wer cord or external input relay connectors are present Refer all maintenance to qualified personnel WARNING Risk Of Electric Shock Never interrupt the protective earth circuit Any interruption of the...

Страница 28: ...1 17 XTC 3 Operating Manual 3 The LCD will display a screen similar to the one shown in Figure 1 1 or Figure 1 2 Figure 1 1 XTC 3M operate screen Figure 1 2 XTC 3S operate screen...

Страница 29: ...n XTC 2 or XTC C with a dual sensor and sensor type CrystalTwo is selected PN 779 220 G1 6 in BNC Cables or PN 779 220 G2 20 in BNC Cables and Xtal 2 CrystalTwo Switch is required XTC 3 uses only one...

Страница 30: ...ines to install sensors for optimum performance and convenience Figure 2 1 Typical installation Mounting Brackett Coax Cable Routed with water tubes Braze Weld Joint or Compression Fittings Source to...

Страница 31: ...ovide support Plan the installation to ensure there are no obstructions blocking the path between the Sensor and the Source Be certain to consider rotating or moving fixtures Install sensors so their...

Страница 32: ...must be operated with all enclosure covers sub panels and braces in place and fully secured with the screws and fasteners provided NOTE When using XTC 3 with an RF sputtering system the cable between...

Страница 33: ...es must always have three conductors including a protective earth conductor This ground provides for personal safety but is ineffective for suppressing electrical noise WARNING Risk Of Electric Shock...

Страница 34: ...l connections Minimize cable lengths Avoid routing cables near areas that have the potential to generate high levels of interference For example large power supplies such as those used for electron be...

Страница 35: ...line current The acceptable voltage input ranges and the fuse rating and type are shown in section 1 4 9 on page 1 10 2 3 2 Routing Oscillator XIU Cables The signals traveling on this cable are both a...

Страница 36: ...um voltage rating of 30 V dc or 30 V ac RMS or 42 V peak The maximum current rating per connector pin or relay contact is 2 5 Amps NOTE I O functions are fixed in XTC 3S and are identical to the defau...

Страница 37: ...5 22 Sample Inhibit Input 6 23 Crystal Fail Inhibit Input 7 24 Zero thickness Input 8 25 Soak 2 Hold Ground 13 14 15 16 17 Input Common These input functions may be reassigned according toTable 2 2 Us...

Страница 38: ...oint Relay 8 3 4 Soak 2 Relay 9 5 6 Crystal Fail Relay 10 7 8 Alarms Relay 11 9 10 Source 1 Source 2 Relay 12 11 12 End Deposit Final Thickness TTL Output 1 13 Cruc SRC 1 Bin 18 Crucible Select 1 if a...

Страница 39: ...nd and a male 9 pin D connector at the XTC 3 end will work however only pins 1 2 3 and 5 are used 2 3 5 TCP IP Communications Connection Optional NOTE This section applies only if the optional TCP IP...

Страница 40: ...tries must be followed by ENTER CLEAR is used to erase data entry errors If an illegal value has been entered CLEAR will erase the error message and re display the last valid data MENU is used to navi...

Страница 41: ...C 3 PN 780 702 G2 for two XTC 3 mounted side by side 3 2 Rear Panel Interfaces Interfaces for XTC 3 are located on the rear panel see Figure 3 2 Figure 3 2 XTC 3 rear panel 1 AC Power Inlet and Mains...

Страница 42: ...vides 0 to 10 V output selectable to correspond to Rate Rate Deviation and Thickness at various ranges and Power BNC connector 8 Aux I O Connector Provides pin connection for 6 Relays rated for 30 V d...

Страница 43: ...es without a key press see section 4 4 2 Hardware Parameters on page 4 21 parameter LCD DIMMER TIME Pressing a key before the dimmer time elapses resets the dimmer interval to start over The default s...

Страница 44: ...a Remote Communications the R Lock message will appear instead To enable entering or changing parameters move the cursor to the lock code message located to the right of Sensor enter the lock code and...

Страница 45: ...rate deviation and power The rate deviation scale can also be toggled between 5 10 20 and 40 s when the cursor is placed on the graph Y axis value System messages and errors are displayed on all scree...

Страница 46: ...splay of Rate Deviation or Power 7 Layer Thickness 8 Lock Status Area 9 Test Mode Indicator 10 State of Layer 11 State Time 12 Source Number In Use 13 Sensor Number In Use Crystal in Use if multi posi...

Страница 47: ...shorter as little as 10 to 20 This is due to thermal and intrinsic stresses at the quartz dielectric film interface which are usually exacerbated by the poor mechanical strength of the film For these...

Страница 48: ...med in XTC 3M nine in XTC 3S Pre Post Deposit Deposit Sensor Source and Option screens are accessed from the Film Name screen If the parameters are locked the L Lock or R Lock message will be displaye...

Страница 49: ...ntering the Process screen the process displayed is the process when the Process screen was last displayed A different process can be displayed by moving to the process number parameter entering the d...

Страница 50: ...utoStart Next Layer The General parameter screen is subdivided into Process Hardware and Communication Info screens The L Lock lock code is initially set in the Process screen If the parameters are lo...

Страница 51: ...3M programming details 3 3 7 Diagnostics Display Figure 3 10 Diagnostics display The Diagnostics display is described under section 6 2 XTC 3 Diagnostics on page 6 6 The Diagnostics display shows firm...

Страница 52: ...ers the accumulated counts can be cleared on this screen If a multi position sensor is in use it can be switched to the next or rotated through all its positions by positioning the cursor on Switch Cr...

Страница 53: ...pressed when XTC 3 is in Stop takes a process back to the first layer HINT It may be desirable to execute a new process in TEST enabled in Process sub screen of the General Parameter display see secti...

Страница 54: ...AY SHUTTER DELAY CONTROL DELAY YES YES NO MPWR SET LAYER TO START YES YES NO NO NO NO NO YES YES YES YES NO START or AutoStart Next Yes READY IDLE INCREMENT LAYER NUMBER IF NOT READY OR STOP STATE WAS...

Страница 55: ...terrupt or discontinue the process press STOP This will close the sensor and source shutters set the control voltage output to zero and freeze the display The process can be restarted where it left of...

Страница 56: ...sing to Soak Power 1 level Rise Time 1 Inactive Inactive SOAK 1 Source is being maintained at Soak Power 1 level Soak Time 1 Soak Power 1 Inactive Inactive SOAK HOLD 1 M only Soak 1 state Source is be...

Страница 57: ...ive Active MANUAL Source power controlled by handheld controller or front panel Up Down cursor keys Active Active TIME POWER Crystal failed source maintained at average control power prior to crystal...

Страница 58: ...done When Idle is entered Xtal Fail When active crystal fails When active crystal becomes valid Digital Set Crystal Fail Inhibit Alarms On Rate Deviation error On Shutter Delay error When Max power re...

Страница 59: ...5 or 0 5 of the desired rate for 60 seconds or 20 times the time constant if the time constant is greater than 3 seconds When rate deviation is within test limits When Idle Ramp is entered Xtal Sw Fai...

Страница 60: ...TART if a layer is not already running Stop Detection of a falling edge effects a STOP End Deposit Detection of a falling edge terminates the Deposit state just as if the Final Thickness were achieved...

Страница 61: ...sit state Non deposit states include the pre deposit states Ready Crucible Switch Rise 1 Soak 1 Rise 2 Soak 2 and the post deposit states Idle Ramp and Idle For the feature to be activated the state s...

Страница 62: ...C VALID input within thirty seconds Rate control not established during the first sixty seconds of SHUTTER DELAY or twenty times the TIME CONSTANT if greater Rate has been out of control in DEPOSIT fo...

Страница 63: ...ckness will not be zeroed upon reentry of the DEPOSIT state Instead the thickness accumulated at the time of the generation of the STOP is used Thickness will accumulate in the normal fashion from tha...

Страница 64: ...eater of the desired deposition rate for five seconds before XTC 3 will enter the DEPOSIT state opening the source shutter and thus exposing the substrate to a well controlled rate of evaporant flux I...

Страница 65: ...ential TTL outputs can be assigned see section 4 5 3 on page 4 29 3 6 7 2 BCD Mode XTC 3M only In BCD mode three sequential outputs are used so that 000 represents position 1 and 111 represents positi...

Страница 66: ...pending on whether TIME POWER option Yes or No is chosen A crystal switch can be manually executed via the front panel XTSW key handheld controller or remote communications when the system is configur...

Страница 67: ...tween two crystals Opening the closure for one second allows the ratchet mechanism to relax whereupon the second contact closure advances the next crystal into the proper position 3 6 8 3 Crystal12 Wh...

Страница 68: ...stal switch output If a good resonant frequency is not found after five attempts XTC 3 will then enter the Time Power Idle Ramp or STOP state depending on whether Time Power in the Option sub screen o...

Страница 69: ...sor In XTC 3M there are separate sensor shutter and crystal switch options so RateWatcher and multi position sensors may coexist 3 6 9 Start Layer Without Backup Crystal Configuration The following ap...

Страница 70: ...n the completion of the last sample period or the achievement of rate control and the initiation of the next sample period The process engineer may set the interval up to a maximum of 99 59 mm ss for...

Страница 71: ...ay be viewed but not changed from the front panel unless the lock code is reentered on the Menu screen while the cursor is positioned at the LOCK Code selection A lost lock code may be cleared by pres...

Страница 72: ...irst one of a process a preface Begin Process xxx xxx is the process number or name XTC 3M only if the name is programmed is output If the layer is the last one of the process a postscript End Process...

Страница 73: ...show READY press STOP then RESET 2 Define Film s Defining a film consists of entering parameters in five sub screens Pre Post Deposit Deposit Sensor Source Option These parameters establish source pre...

Страница 74: ...ensor type involves designating whether the sensor is a Single CrystalTwo CrystalSix Crystal12 Rotary or Dual Head These parameters are on the Hardware page of the General Parameter display 4b Configu...

Страница 75: ...ilm Parameter display Pre Post Deposit Sensor Source and Option screens can be entered by cursoring to the respective label The keys move between the selection left panel and the parameter right panel...

Страница 76: ...ve processes or layers Nine films 1 to 9 may be defined but not named and a General parameter will indicate which film to run On entering the film screen the film displayed will be the one displayed w...

Страница 77: ...period RISE TIME 1 The default value is 0 SOAK TIME 1 00 00 to 99 59 min s This parameter provides the time period for which XTC 3 holds at SOAK POWER 1 The default value is 00 00 RISE TIME 2 00 00 t...

Страница 78: ...dle power Rise 1 and Soak 1 states are skipped in the pre deposit sequence IDLE RAMP TIME 00 00 to 99 59 min s This is the time interval over which the source power is ramped linearly from the power l...

Страница 79: ...THICKNESS SET POINT 0 000 to 999 9 k This sets the thickness at which the Thickness Set Point is triggered and the New Rate if non zero is initiated This thickness begins to accumulate after entering...

Страница 80: ...tal shutter relay is in its normal state during this time The default value is 00 00 which disables the function During a Rate Ramp the Sample and Hold feature is inactive the crystal shutter is open...

Страница 81: ...run in the TIME POWER mode or even terminate the process if a backup crystal is not available 4 2 3 3 2 Stability Under ideal conditions the crystal s frequency will only decrease during a deposition...

Страница 82: ...s declared failed PERCENT 0 to 99 and 0 5 sec This sets the deviation that must be exceeded to cause the COUNTS to increment The default value is 0 which disables the function COUNTS 0 to 99 This sets...

Страница 83: ...anged while the film is running CRUCIBLE 0 to 8 This parameter can be used to automatically index the turret position when using a multiple pocket turret source The value selected denotes which pocket...

Страница 84: ...sec This is the evaporation source s time constant This value is defined as the time difference between the actual start of a change in rate and the time at which 63 of the rate step is achieved This...

Страница 85: ...ault value is 100 0 DENSITY 0 50 to 99 99 g cm3 This parameter is specific to the material being deposited onto the crystal It is one of two parameters that relate the mass loading on the crystal to a...

Страница 86: ...RATE value The Time Power state will terminate when the FINAL THICKNESS value has been exceeded Any post deposit states will be executed exactly as if a normal deposition had occurred When the post de...

Страница 87: ...shutter delay time has expired TRANSFER TOOLING 10 0 to 500 0 This parameter is enabled if Transfer Sensor has been set to Yes Sets the tooling factor to use with the Transfer sensor See Tooling unde...

Страница 88: ...s can be programmed or deleted in any order e g process 5 can be created even if process 4 is empty To delete a film cursor to the film to be deleted in the process list Press the 0 key followed by th...

Страница 89: ...he process Name and using the keypad in a manner similar to a cell phone For instance to enter the letter S press the PQRS key four times To enter the letter A press the ABC key once If no name is ent...

Страница 90: ...ill appear in the list otherwise the film number will appear 4 4 General Parameters Figure 4 12 Main Menu screen XTC 3M NOTE The Process List line is not present in XTC 3S The General Parameter displa...

Страница 91: ...C 3S Process screen PROCESS TO RUN 1 to 99 XTC 3M only Selects the process to be run Only processes with layers may be entered The default is 1 This function is not available in XTC 3S FILM TO RUN 1 t...

Страница 92: ...ion has been true for 5 seconds continuously DEP ETCH MODE Deposit Etch Press the TOGL key to move through the choices Default mode is Deposit By setting the mode to Etch XTC 3 may be configured to di...

Страница 93: ...o their default values 4 4 2 Hardware Parameters Figure 4 15 XTC3 M Hardware screen SENSOR 1 TYPE Single CrystalTwo CrystalSix Crystal12 Rotary Dual Head Press the TOGL key to move through the choices...

Страница 94: ...scale 50 Angstroms sec Unit must be in Deposit and not in Stop to show a rate deviation FILTER Smooth Unfiltered Rate Press the TOGL key to move through the choices Default is Unfiltered rate Unfilte...

Страница 95: ...Selecting the Film Select option allows selecting one of the 9 films based on the state of the Film Select inputs 5 6 7 and 8 as shown in the table below In addition input 4 is reassigned to perform t...

Страница 96: ...mm Info Screen with TCP IP Option installed NOTE IP address and net mask are initialized 1 minute after power up IP address and net mask text are grayed if no TCP IP option is installed or if communic...

Страница 97: ...Sum it is highly recommended to check all prior parameters entered to verify that they are compatible with the reduced parameter set available in the XTC 2 protocols Otherwise unexpected behavior may...

Страница 98: ...shown in the upper portion of the screen and the status of the outputs is shown on the lower portion of the screen Active outputs are highlighted In XTC 3M the selection panel permits selecting All I...

Страница 99: ...L Open Collector outputs 13 to 20 are fixed to perform the functions shown on the screen These function assignments are identical to the default configuration provided in XTC 2 per section 2 3 3 2 1 o...

Страница 100: ...nel The keys will cursor through this list Entering a number 1 9 followed by the ENTER key will assign the selected input function to that input number Any number of inputs may be assigned to the same...

Страница 101: ...lable list of allowed output functions will be displayed on the left side of the parameter panel The keys will cursor through this list With the cursor on More press the arrow to access additional fun...

Страница 102: ...4 30 XTC 3 Operating Manual Figure 4 25 Relay Outputs 2 Figure 4 26 Relay Outputs 3 Figure 4 27 Relay Outputs 4...

Страница 103: ...for position 1 all three outputs will be active for position 8 The first output in the sequence is the LSB Eight consecutive relay or TTL outputs must be available when selecting the Bin output functi...

Страница 104: ...dgment between the host and server and a mechanism for verifying the information content In addition to the optional TCP IP interface XTC 3 supports the following RS 232 protocols Standard Datalog XTC...

Страница 105: ...ndard 9 pin female connector found on the rear panel of XTC 3 A mating male connector is required for attachment of a host interface The host and XTC 3 can be separated by up to fifty feet using multi...

Страница 106: ...ol NOTE If the personal computer only has one ethernet port i e one network connection then setting the PC for direct communications will prohibit it from accessing the Internet until that setting is...

Страница 107: ...erating Manual Figure 5 2 Local Area Connection Properties On the General tab select Internet Protocol TCP IP and press the Properties button as shown in Figure 5 3 Figure 5 3 Internet Protocol TCP IP...

Страница 108: ...TC 3 is shipped from INFICON with a pre assigned address of 10 211 70 203 To communicate directly with XTC 3 from a PC the PC must also be assigned an address that starts with 10 211 70 but cannot be...

Страница 109: ...l Key Enclosed element further defined below or above if repeated use Optional Element I Or x x One or more of x included 5 2 1 1 Standard Command Packet Host to XTC 3 Message length message checksum...

Страница 110: ...Output Type No sub groups are allowed for H E S or R Command ID 1 binary byte Defines specific command within some command groups and sub groups Parameter Byte Integer Float String Byte 1 byte Intege...

Страница 111: ...tween 0 and 255 hex 00 to FF increments every quarter second Response Message Command Response Command Response Packet Error Code NOTE Number of command responses equals number of commands sent If CCB...

Страница 112: ...e done and this error code will be returned Packet Error Code 1 byte ASCII C invalid checksum F illegal format too many bytes for the commands requested or missing value in command I invalid message L...

Страница 113: ...II characters 5 2 2 1 Standard ECHO Command Command E String Response String The same string that was sent String Null terminated series of ASCII characters 5 2 2 2 Standard HELLO Command Command H Co...

Страница 114: ...Process 99 Process 1 Name Process 99 Name Number of Bytes in Response 2 bytes All General parameters 4 bytes per parameter All parameters for each film 4 bytes per parameter 9 or 32 films based on XTC...

Страница 115: ...es null terminated 32 films XTC 3M only Command ID 3 Lower 50 Processes Information XTC 3M only Response Number of Bytes in Response Process One Process 50 Process 1 Name Process 50 Name Number of Byt...

Страница 116: ...Float 4 byte ANSII standard single precision low to high Description Type of response depends on command ID see DataType Format column of Table 5 2 on page 5 22 Special Case QF255 Film Number will re...

Страница 117: ...t used 1 Start 2 Stop 3 End Deposit 4 Rate Watcher Hold Initiate 5 Rate Watcher Hold Inhibit 6 Crystal Fail Inhibit 7 Zero Thickness 8 Soak 2 Hold 9 Crucible 1 Valid 10 Crucible 2 Valid 11 Reset 12 Se...

Страница 118: ...rocesses will return the corresponding number For individual updates only the primary bit can be set The corresponding secondary bits will be set automatically For a block update UI 255 or UB x see be...

Страница 119: ...ce in use Open 1 closed 2 11 Final Thickness 12 End of Film 13 In Layer 14 Ion Assisted Deposition 15 Crystal Switcher 1 16 Crystal Switcher 2 17 Ready 18 Crucible Switching 19 Rise 1 20 Soak 1 21 Ris...

Страница 120: ...tion 49 Crucible Select Source 2 Binary bit 2 50 Crucible Select Source 2 Binary bit 3 51 Crucible Select Source 2 Binary bit 4 52 Crucible Select Source 2 Binary bit 5 53 Crucible Select Source 2 Bin...

Страница 121: ...Parameters XTC 3M Only Command QP Command ID Process Number Parameter Command ID See listing below Process Number Byte 1 99 Parameter Depends on Command ID See listing that follows Response Depends o...

Страница 122: ...parameter 9 or 32 films based on XTC 3S or XTC 3M All input definitions 9 1 byte per input XTC 3M only All output definitions 20 1 byte per output XTC 3M only All output types 20 1 byte per output XTC...

Страница 123: ...each process 1 through 50 2 byte length for the number of layers programmed followed by 1 byte for each programmed layer All process Names null terminated 1 50 List of parameters for Command ID 4 XTC...

Страница 124: ...ingle precision low to high Description Type of parameter value depends on command ID see DataType Format column of Table 5 2 Response None Just header and trailer Special Case UF255 Film Number List...

Страница 125: ...S Seconds Int 0 99 59 5999 4 0x04 Soak Power 2 Float xxx x 0 0 100 0 5 0x05 Soak Time 2 MM SS Seconds Int 0 99 59 5999 6 0x06 Idle Ramp MM SS Seconds Int 0 99 59 5999 7 0x07 Idle Power Float xxx x 0 0...

Страница 126: ...al Values 1 to 24 are not allowed Int 0 9999 20 0x14 Xtal Quality Percent Int 0 99 21 0x15 Xtal Quality Counts Int 0 99 22 0x16 2 Source Int 1 2 23 0x17 2 Crucible Int 0 8 24 0x18 Control Gain sec Flo...

Страница 127: ...Tooling Float xxx x 10 0 500 0 34 0x22 1 Control Delay Time MM SS Seconds Int 0 99 59 5999 35 0x23 2 Ion Assisted Deposit 1 Yes 0 No Int 0 1 36 0x24 Graph Label 0 Rate Dev 1 Power Int 0 1 37 0x25 Grap...

Страница 128: ...general parameters in numeric order NOTE Some limitations may apply as to when general parameters may be updated Table 5 3 Standard general parameters UG 0x5547 Command ID Name Units Allowed Values No...

Страница 129: ...Deviation Int 0 3 10 0x0a Recorder Range 0 100 1 1000 Int 0 1 11 0x0b Recorder Filter 1 Smooth 0 Unfiltered Int 0 1 12 0x0c Audio Feedback 1 Yes 0 No Int 0 1 13 0x0d Dim LCD Minutes Int 0 99 14 0x0e...

Страница 130: ...refer to section 5 2 2 3 6 on page 5 15 Response None Just header and trailer 5 2 2 4 7 Standard Update Output Type Definition XTC 3M Only Command UT Output Number Output Type Output Number 255 Output...

Страница 131: ...Name String maximum 15 characters characters are restricted to hex 20 hex 7E inclusive plus null terminating character Command ID 3 Specific Layer Parameter List Layer to be updated 2 Bytes Parameter...

Страница 132: ...esonance recovery time of several seconds following loss of sensor crystal frequency measurement State 1 byte Active Sensor 1 byte Active Crystal 1 byte Rate Float One second average Thickness Float P...

Страница 133: ...8 Rate Ramp 9 Manual 10 Time Power 11 Idle Ramp 12 Idle 5 0x05 Current State Time Int Number of seconds 6 0x06 Active Layer Int 7 0x07 Active Film Byte 8 0x08 Active Sensor Byte 1 or 2 9 0x09 Crystal...

Страница 134: ...0 Input 4 5 6 etc 13 0x0d Raw Frequency Int DDS units Multiply by 0 0034924596 to convert to hertz 14 0x0e Xtal Fail Byte 0 good crystal not in Xtal Fail 1 failed crystal in Xtal Fail 15 0x0f Max Powe...

Страница 135: ...tcher fail 20 0x14 Active Process Byte 21 0x15 Power up error flag Byte Bit is set indicating error as follows 0 Parameter loss on power cycle 1 Process variables loss on power cycle 2 Power down up c...

Страница 136: ...0100000 RateWatcher Sample 0x00080000 Crucible Switch Fail 0x00040000 Soak Hold 0x00020000 Non Deposit Hold 0x00010000 Etch Mode 0x00008000 Local Lock 0x00004000 Remote Lock 0x00002000 Test 0x00001000...

Страница 137: ...te at the beginning of the process 3 0x03 Remote lock on Prevents the update of parameters via the front panel 4 0x04 Remote lock off Removes the remote lock 5 0x05 Crystal fail inhibit on Prohibits t...

Страница 138: ...ion If the unit is an XTC 3M an Illegal ID error is returned 17 0x11 Set close digital output Value vv vv Byte output 1 20 In XTC 3S the Communication I O mode must be active for this command to opera...

Страница 139: ...cular parameter with the value sent S Status Sends back pertinent information based on the specific request made R Remote Perform an action based on the specific command given The send and receive pro...

Страница 140: ...ing the high order Byte and NN representing the low order byte CS Checksum modulo 256 value of message_string and ACK or NAK To XTC STX 00 NN message_string CS From XTC STX 00 NN ACK message_string CS...

Страница 141: ...ting Manual 5 3 4 XTC 2 Error Codes Table 5 6 XTC 2 error codes Code Description A Illegal command B Illegal Value C Illegal ID D Illegal command format E No data to retrieve F Cannot change value now...

Страница 142: ...a digit between 1 and 9 L is a digit between 0 and 3 inclusive and represents the interrogated film or layer number NOTE If pp is set to 99 output all parameters in the order specified below each para...

Страница 143: ...0 26 Control DT 0 1 100 27 Max Power 0 0 100 0 28 Sample 0 99 29 Hold Time 0 5999 or 00 00 99 59 30 39 NOT USED 40 Layer 1 31 0 92 99 All 1 May be 0 for Q command if 0 will return values for layers 1...

Страница 144: ...ers in the order specified This command allows a rapid block transfer of data which is convenient for downloading films Each parameter value must be separated by a space To update layers the format of...

Страница 145: ...ific request made The format of the status command is S xx Return the status value of xx where S Is the literal S xx One or two digit code per list below S0 Process information All the information fro...

Страница 146: ...te 1 Source Shutter 1 1 open 0 closed 2 Source Shutter 2 1 open 0 closed 3 Sensor Shutter 1 1 open 0 closed 4 Sensor Shutter 2 1 open 0 closed 5 Stop 1 Stop 0 not stop 6 End of Process 1 End of proces...

Страница 147: ...Returns ASCII 1 if process has ended 0 if not S18 STOP Returns ASCII 1 if process is in STOP S19 DATALOG Returns the datalog string refer to section 5 2 2 5 S19 command for details Data is separated b...

Страница 148: ...op on Max Power 0 no 1 yes 6 7 8 Recorder Type in order Byte 6 7 8 000 designates Rate 100 s full scale unfiltered 001 designates Rate 1000 s full scale unfiltered 010 designates Thickness 100 full sc...

Страница 149: ...eral R xx Is the remote code per list below vvv Is the associated value needed for some remote commands R0 Start Equivalent to pressing the START key R1 Stop Equivalent to pressing the STOP key R2 Res...

Страница 150: ...XTC 3M if that output has been selected as Computer Contl type R18 Clear open relay xx xx 1 12 Works also in XTC 3M if that output has been selected as Computer Contl type R19 Turn backlight ON R20 T...

Страница 151: ...MIT INDIVIDUAL COMMANDS TO XTC 3 AND ACCEPT THE APPROPRIATE RESPONSE FROM XTC 3 WRITTEN IN GWBASIC 2 32 40 50 OPEN COM1 9600 N 8 1 CS DS AS 1 OPEN COMM PORT 1 60 NAK CHR 21 ACK CHR 6 DEFINE ASCII CODE...

Страница 152: ...N IN GWBASIC 2 32 40 50 OPEN COM1 9600 N 8 1 cs ds AS 1 OPEN COMM PORT 1 60 STX CHR 2 NAK CHR 21 ACK CHR 6 DEFINE ASCII CODES 70 80 INPUT ENTER COMMAND CMD ENTER COMMAND TO XTC 3 90 GOSUB 170 GOTO TRA...

Страница 153: ...TO SIZE STRING BUILD THE 410 TOUT 3 GOSUB 510 RESPONSE STRING AND 420 RESPONSE RESPONSE I CALCULATE THE CHECKSUM 430 CHECKSUM CHECKSUM ASC I CHARACTER BY CHARACTER 440 NEXT I 450 TOUT 3 GOSUB 510 RECI...

Страница 154: ...se a Stop command was received CONTROL DELAY Indicates that XTC 3 is in the Control Delay state CRUCIBLE FAIL Unit has gone into STOP because of a Crucible Switch error CRUCIBLE SW Indicates a crucibl...

Страница 155: ...by pressing STOP on the Handheld Controller INCORRECT TIME Incorrect value was entered INPUT INCORRECT Incorrect lock code was entered to unlock the unit INVALID MASK Gateway mask value is Incorrect...

Страница 156: ...set a TTL output on the Relay screen NOT TTL OUTPUT This message appears when attempting to set a Relay output on the TTL screen ONE SEL PROC ONLY This message appears when attempting to set more tha...

Страница 157: ...s being held constant RATEWATCH SAMPLE The RateWatcher feature is active The sensor shutter is open The source rate is being measured and it s power controlled RS 232 FAILED Indicates the self test wi...

Страница 158: ...will vary according to your unit configuration or the parameter being defined Press CLEAR to delete the value and enter again VALUE TOO HIGH Parameter entry is out of range Allowable values will vary...

Страница 159: ...Diagnostics The initial page shows the revision level of the firmware as well as serial numbers Figure 6 1 Diagnostics display Pressing Enter permits various test and maintenance functions Figure 6 2...

Страница 160: ...tem and press the TOGL key The XIU Self Test determines whether the Crystal Interface Unit XIU interconnect cable and Measurement circuit for the active sensor are operating properly NOTE The XIU PN 7...

Страница 161: ...e components within the XTC 3 case WARNING Risk Of Electric Shock Potentially lethal voltages are present when the line cord Inputs or Outputs are connected CAUTION Refer all maintenance to technicall...

Страница 162: ...duction in the amount of noise entering XTC 3 keep all ground wires short with large surface area to minimize ground impedance c poor grounds or poor grounding practice c verify proper earth ground us...

Страница 163: ...essary c improper control cable fabrication c check for correct cable wiring in the appropriate section of the manual 7 LCD display blank a LCD or CRT power supply problem a contact INFICON b LCD Dimm...

Страница 164: ...to check electrical continuity or isolation as appropriate d poor electrical contact in the transducer feedthroughs or in vacuum cable d use an ohm meter or DVM to check electrical continuity or isol...

Страница 165: ...the optional Crystal Sensor Emulator PN 760 601 G2 See section 6 5 on page 6 25 for a discussion of its use and diagnostic capabilities 6 3 2 1 Verifying Crystal Switching and Rotation The Sensor Info...

Страница 166: ...ystal surface and blow it off with clean air f small pieces of magnetic material being attracted by the sensor magnet and contacting the crystal sputtering sensor head f check the sensor cover s apert...

Страница 167: ...rify earth ground use ground strap adequate for RF ground change location of XTC 3 and oscillator cabling away from RF power lines connect XTC 3 to a different power line d cables oscillator not conne...

Страница 168: ...ttering crystals for better thermal stability install radiation shield c crystal not seated properly in holder c clean or polish the crystal seating surface on the crystal holder d crystal heating cau...

Страница 169: ...intermediate adhesion layer d cyclic change in rate d make certain source s sweep frequency is not beating with XTC 3 measurement frequency 7 large drift in thickness greater than 200 A for a density...

Страница 170: ...t installed on the supply side of solenoid valve assembly d install orifice as shown in either the CrystalSix manual PN 074 155 or Crystal12 manual PN 074 398 on CD PN 074 5000 9 Crystal12 Carousel Op...

Страница 171: ...evice address in host s applications program and verify XTC 3 address 2 Standard protocol Error code returned in Packet Error byte or Response Error byte a various a Refer to section 5 2 1 2 on page 5...

Страница 172: ...cs may not adhere strongly to the crystal surface and may cause erratic readings NOTE Thick deposits of some materials such as SiO Si and Ni will normally peel off the crystal when it is exposed to ai...

Страница 173: ...is in the relaxed state 6 4 3 Cool Drawer Sensor Follow the procedure below to replace the crystal in a Next Generation Cool Drawer sensor 1 Using your thumb and index fingers gently squeeze the side...

Страница 174: ...ld the retainer by its sides Align its orientation notch with the drawer then gently and evenly push the retainer down until it snaps firmly into the drawer see Figure 6 5 Never push down or pull up o...

Страница 175: ...f the holder flush with the cam mechanism and lock it in place with the cam See Figure 6 6 Figure 6 6 Bakeable crystal sensor Contact PN 007 099 Insulator PN 007 103 Spreader Bar PN 007 267 P2 Shoulde...

Страница 176: ...4 Turn the crystal holder over so that the crystal drops out 5 Install a new crystal into the crystal holder with the patterned electrode facing the back and contacting the leaf springs on the ceramic...

Страница 177: ...he retainer to be pulled straight out 2 2 Reinsert the retainer into the holder after the crystal has been replaced 3 Release the crystal snatcher with a slight side to side motion Figure 6 8 Use of t...

Страница 178: ...nt system from the oscillator to the sensor head It provides a known good monitor crystal with known good electrical connections Using the emulator and the controller in a systematic manner provides a...

Страница 179: ...roperly Re install the 6 in BNC cable to the Feed Through Go to section 6 5 1 2 If the XTAL Fail message remains continue at step 3 3 Disconnect the 6 in BNC cable from the Oscillator and from the Emu...

Страница 180: ...Feed Through is found to be defective replace the Feed Through re attach the BNC and In Vacuum cables and repeat this procedure starting at Step 2 otherwise continue at step 6 6 Verify electrical con...

Страница 181: ...rom the Sensor Head 2 Refer to Figure 6 10 on page 6 25 Connect the Crystal Sensor Emulator to the Sensor Head at Point C If the XTAL Fail message disappears after approximately five seconds the the S...

Страница 182: ...ail Message Remains If the system is operating properly yet the Crystal Fail message is still displayed perform the following tasks 1 On the ceramic retainer verify that the center rivet is secure Rep...

Страница 183: ...ads for which the Crystal Sensor Emulator s Sensor Cover Connector will not fit are shown in Table 6 6 NOTE The Crystal Sensor Emulator s Sensor Cover will not fit the crystal holder opening of the ol...

Страница 184: ...mensions 1 58 in diameter x 1 79 in 40 13 mm diameter x 45 47 mm Temperature Range 0 to 50 C Frequency PN 760 601 G2 5 5 MHz 1 ppm at room temperature Materials 304 Stainless Steel Nylon Teflon brass...

Страница 185: ...e outlined in section 7 4 estimated as outlined in section 7 5 or set to the default value of 1 0 The resulting thickness error due to an estimated value will be non linear and increases with the tota...

Страница 186: ...ermining Tooling 1 Place a test substrate in the system s substrate holder 2 Make a short deposition and determine actual thickness 3 Calculate tooling from the relationship 2 where Tm Actual thicknes...

Страница 187: ...n the following direct method is suggested 1 Establish the correct density value as described in section 7 2 on page 7 1 2 Install a new crystal and record its starting frequency Fco It will be necess...

Страница 188: ...film g cc 7 5 Estimating Z Ratio For multiple layer deposition for example two layers the Z value used for the second layer can be estimated based on the relative thickness of the two layers For most...

Страница 189: ...an indispensable measurement and process control tool that can easily detect the addition of less than an atomic layer of an adhered foreign material In the late 1950 s it was noted by Sauerbrey1 2 an...

Страница 190: ...ental The characteristic movement of the thickness shear mode is for displacement to take place parallel to the major monitor crystal faces In other words the faces are displacement antinodes as shown...

Страница 191: ...electrode and the quartz as film stress rises These micro tears leave portions of the deposited film unattached and therefore unable to participate in the oscillation These free portions are no longe...

Страница 192: ...lation of the proportionality between the crystal s thickness Iq and the period of oscillation Tq 1 Fq Electronically the period measurement technique uses a second crystal oscillator or reference osc...

Страница 193: ...or some simple films but can cause unacceptable errors in the production of critical films such as optical filters or very thin layered superlattices grown at low rates In many cases the desired prope...

Страница 194: ...stal oscillator s stability is derived from the rapid change of phase for a small change in the crystal s frequency near the series resonance point as shown in Figure 8 5 Figure 8 4 Active oscillator...

Страница 195: ...e film s thickness is suddenly apparently thinner by an amount equivalent to the frequency difference between the fundamental and the anharmonic that is sustaining the oscillation Figure 8 5 Crystal f...

Страница 196: ...e frequency of a crystal is unknown A quick sweep of frequencies can be undertaken until the output of the phase comparator changes marking the resonance event For AT crystals we know that the lowest...

Страница 197: ...eness of an evaporation source can be found by repetitively observing the system response to a disturbance under a particular set of controller settings After observing the response improved controlle...

Страница 198: ...hm may be customized Figure 8 7 Response of process to an open loop step change at t 0 control signal is increased A controller model used extensively is the PID type shown in Laplace form in equation...

Страница 199: ...t large errors contribute heavily to the value of the integral Consequently using ISE as a criterion of performance will result in responses with small overshoots but long settling times since small e...

Страница 200: ...nged signal the time period between manipulated variable control voltage changes is lengthened This allows the system to respond to the previous controller setting change and aggressive controller set...

Страница 201: ...omide AgCl 5 560 1 320 silver chloride Al 2 700 1 080 aluminum Al2O3 3 970 0 336 aluminum oxide Al4C3 2 360 1 000 aluminum carbide AIF3 3 070 1 000 aluminum fluoride AIN 3 260 1 000 aluminum nitride A...

Страница 202: ...aO 3 350 1 000 calcium oxide CaO SiO2 2 900 1 000 calcium silicate 3 CaSO4 2 962 0 955 calcium sulfate CaTiO3 4 100 1 000 calcium titanate CaWO4 6 060 1 000 calcium tungstate Cd 8 640 0 682 cadmium Cd...

Страница 203: ...um Er2O3 8 640 1 000 erbium oxide Eu 5 260 1 000 europium EuF2 6 500 1 000 europium fluoride Fe 7 860 0 349 iron Fe2O3 5 240 1 000 iron oxide FeO 5 700 1 000 iron oxide FeS 4 840 1 000 iron sulfide Ga...

Страница 204: ...4 800 1 000 indium phosphide InSb 5 760 0 769 indium antimonide Ir 22 400 0 129 iridium K 0 860 10 189 potassium KBr 2 750 1 893 potassium bromide KCI 1 980 2 050 potassium chloride KF 2 480 1 000 pot...

Страница 205: ...ite NaBr 3 200 1 000 sodium bromide NaCl 2 170 1 570 sodium chloride NaCIO3 2 164 1 565 sodium chlorate NaF 2 558 0 949 sodium fluoride NaNO3 2 270 1 194 sodium nitrate Nb 8 578 0 492 niobium columbiu...

Страница 206: ...praseodymium Pr2O3 6 880 1 000 praseodymium oxide Pt 21 400 0 245 platinum PtO2 10 200 1 000 platinum oxide Ra 5 000 1 000 radium Rb 1 530 2 540 rubidium RbI 3 550 1 000 rubidium iodide Re 21 040 0 1...

Страница 207: ...00 tantalum boride TaC 13 900 1 000 tantalum carbide TaN 16 300 1 000 tantalum nitride Tb 8 270 0 660 terbium Tc 11 500 1 000 technetium Te 6 250 0 900 tellurium TeO2 5 990 0 862 tellurium oxide Th 11...

Страница 208: ...ungsten WB2 10 770 1 000 tungsten boride WC 15 600 0 151 tungsten carbide WO3 7 160 1 000 tungsten trioxide WS2 7 500 1 000 tungsten disulfide WSi2 9 400 1 000 tungsten silicide Y 4 340 0 835 yttrium...

Страница 209: ...A 9 XTC 3 Operating Manual ZrN 7 090 1 000 zirconium nitride ZrO2 5 600 1 000 zirconium oxide Table A 1 Material table continued Formula Density Z Ratio Material Name...

Страница 210: ...inficon com reachus inficon com Due to our continuing program of product improvements specifications are subject to change without notice All trademarks are the property of their respective owners PN...

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