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Contents

Product Identification

Validity

Intended Use

Functional Principle

Trademarks

Patents

Scope of Delivery

Safety

1.1

Symbols Used

1.2

Personnel Qualifications

1.3

General Safety Instructions

1.4

Liability and Warranty

Technical Data

Installation

3.1

Vacuum Connection

3.2

Power Connection

3.2.1

D-sub, 15-pin Connector

3.2.2

EtherCAT Connector

3.2.3

Mini USB Type B Connector (Diagnostic Port)

Operation

4.1

Status Indication

4.2

Zeroing the Gauge

4.2.1

ZERO

Adjustment

4.3

Switching Functions SP1, SP2, ATM, Status

4.4

Activating the Factory Setting (Factory Reset)

4.7

Diagnostic Port (USB Interface)

4.8

EtherCAT Operation

Deinstallation

Maintenance, Repair

Содержание Stripe CDG045Dhs

Страница 1: ...tina84e1 a 2019 07 1 Capacitance Diaphragm Gauge Stripe CDG045Dhs Operating Manual Incl EU Declaration of Conformity ...

Страница 2: ...efer ence copy that information into the space provided below Model PN SN V W Validity This document applies to products of the Stripe CDG045Dhs series Part numbers of standard products are indicated below OEM products have other part numbers and different parameter settings e g factory setting of setpoint as defined in the corresponding ordering information ...

Страница 3: ...ameplate If not indicated otherwise in the legends the illustrations in this document correspond to gauges with DN 16 ISO KF vacuum connection They apply to gauges with other vacuum connec tions by analogy We reserve the right to make technical changes without prior notice ...

Страница 4: ...gm is deflected by pressure The deflection is measured capacitively and converted into a digital or into an analog linear output signal by the digital electronics The digital output signal can only be read out via the EthreCAT interface The output signal is independent of the gas type Very accurate pressure measurement is achieved by heating the sensor to a constant temperature of 45 C which resul...

Страница 5: ...tina84e1 a 2019 07 5 Scope of Delivery 1 gauge Stripe CDG045Dhs 1 pin for adjusting settings via buttons 1 Calibration Test Report 1 Operating Manual German 1 Operating Manual English ...

Страница 6: ...l Data 10 3 Installation 16 3 1 Vacuum Connection 16 3 2 Power Connection 19 3 2 1 D sub 15 pin Connector 20 3 2 2 EtherCAT Connector 21 3 2 3 Mini USB Type B Connector Diagnostic Port 22 4 Operation 23 4 1 Status Indication 23 4 2 Zeroing the Gauge 24 4 2 1 ZERO Adjustment 24 4 3 Switching Functions SP1 SP2 ATM Status 28 4 4 Activating the Factory Setting Factory Reset 34 4 7 Diagnostic Port USB ...

Страница 7: ...the Product 39 8 Disposal 40 Further Information 41 EU Declaration of Conformity 43 For cross references within this document the symbol XY is used for cross references to further documents listed under Further Information the symbol Z ...

Страница 8: ...tal damage Caution Information on correct handling or use Disregard can lead to malfunctions or minor equipment damage Notice Labeling 1 2 Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the neces sary experience or who have been instructed by the end user of the product ...

Страница 9: ...he relevant regulations and take the necessary precautions when handling contamin ated parts Communicate the safety instructions to all other users 1 4 Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end user or third parties disregard the information in this document use the product in a non conforming manner make any kind of interventions modific...

Страница 10: ...ment signal Measurement range 0 10 V Voltage range 5 10 5 V limited to 10 5 V Relationship voltage pressure linear Output impedance 0 Ω short circuit proof Loaded impedance 10 kΩ Measurement rate 1 kHz Step response time 3 analog output signal 2 20 ms 4 Delay time digital output signal EtherCAT interface 2 ms 1 ISO WD 15725 1 2 Non linearity hysteresis repeatability at 25 C ambient operating tempe...

Страница 11: ...ting range ATM Factor 0 5 1 1 from ATM pressure Hysteresis 5 1 F S Switching characteristics 5 Low Trip Point default High Trip Point Relay contact 30 V dc 0 5 A dc floating NO closed LED lit solid open LED off Status relay Relay contact 30 V dc 0 5 A dc connected to supply com mon pin 5 closed measurement mode warning open no supply voltage warming up error Diagnostic port Cable Mini USB type B 5...

Страница 12: ...100 m For further information on the EtherCAT interface 5 6 Supply DANGER The gauge may only be connected to power sup plies instruments or control devices that conform to the requirements of a grounded protective extra low voltage PELV The connection to the gauge has to be fused 6 Supply voltage at the gauge 14 30 V dc or 15 V dc Power consumption while being heated at operating temperature 14 W ...

Страница 13: ...ower Connection Materials exposed to vacuum ceramics Al2O3 99 5 stainless steel AISI 316L Internal volume 4 2 cm 3 Admissible pressure absolute 1000 1100 F S 1 500 F S 0 01 0 5 F S 4 bar 400 kPa 2 6 bar 260 kPa 1 3 bar 130 kPa Bursting pressure absolute 6 bar 600 kPa Admissible temperatures Storage Operation Bakeout 20 C 85 C 10 C 40 C 110 C at the flange Relative humidity 80 at temperatures 31 C ...

Страница 14: ...14 tina84e1 a 2019 07 Dimensions mm 15 7 31 5 110 4 3 8 DN 16 ISO KF tube ø82 ø85 DN 16 CF R 8VCR female Weight 837 897 g ...

Страница 15: ... F S 1 1 F S Pressure p Measurement Uout V 0 0 F S p Uout 10 V p F S Conversion Torr Pascal Torr mbar 7 Pa 7 c 1 00 1013 25 760 1 3332 101325 760 133 3224 Example Gauge with 10 Torr F S Measurement signal Uout 6 V p 6 V 10 V 10 Torr 0 6 10 Torr 6 Torr 7 Source NPL National Physical Laboratory Guide to the Measurement of Pressure and Vacuum ISBN 0904457x 1998 ...

Страница 16: ... harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized Do not open any clamps while the vacuum system is pressurized Use the type clamps which are suited to overpressure DANGER Overpressure in the vacuum system 2 5 bar KF flange connections with elastomer seals e g O rings cannot withstand such pressures Process media can thus leak and possibl...

Страница 17: ...uges with a KF flange use a conductive metallic clamping ring For gauges with a tube take appropriate measures to fulfill this requirement Caution Vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Dirt sensitive area Touching the product or parts thereof with ba...

Страница 18: ... 0 1 1100 F S standing upright to horizontal If adjustment should be possible after the gauge has been in stalled be sure to install it so that the buttons can be accessed with a pin Remove the protective lid and connect the product to the vac uum system Seal with centering ring Clamp Protective lid Keep the protective lid ...

Страница 19: ...ity please do observe the following notes Use an overall metal braided shielded cable The connector must have a metal case Connect the cable shield to ground at one side via the connector case Make sure the connector case has direct contact to the cable s shield on its whole cir cumference Do not connect the other side of the shield Connect the supply common with protective ground directly at the ...

Страница 20: ... 2 12 7 11 5 15 680 nF 18 V 10 Ω 6 SP1 SP2 Status Electrical connection Pin 1 4 Relay SP1 closing contact 15 8 9 1 D sub 15 pin female soldering side Pin 2 Signal output measuring signal or thresholds SP1 2 Pin 3 Status Pin 5 Supply common Pin 7 11 Supply 14 30 V Pin 8 9 Relay SP2 closing contact Pin 10 Gauge identification or Remote Zero Adjust Pin 12 Signal common Pin 15 Housing Chassis Ground C...

Страница 21: ...cable If no EtherCAT cables are available make them according to the following diagram Connect the EtherCAT cables 8 1 FCC68 8 pin soldering side Pin 1 TD Transmission data Pin 2 TD Transmission data Pin 3 RD Receive data Pin 6 RD Receive data Pin 4 5 7 and 8 n c Sensor cable FCC68 cable IN port FCC68 cable OUT port ...

Страница 22: ...Connector Diagnostic Port A standard USB cable can be used If no cable is available make one according to the following diagram Connect the cable 5 1 Mini USB typ B soldering side Pin 1 VBUS 5 V Pin 2 D Pin 3 D Pin 4 ID Pin 5 GND Mini USB type B ...

Страница 23: ...ast 2 hours is required 4 1 Status Indication LED LED status Meaning STATUS off no supply voltage lit solid green measurement mode blinking green short blinks long blinks warning over underrange warming up lit solid red error SP1 lit green green setpoint 1 closed blinking green waiting for setpoint 1 input off setpoint 1 open SP2 lit solid green setpoint 2 closed blinking green waiting for setpoin...

Страница 24: ...ring signal is depending on the moun ting orientation The signal difference between the vertical and horizontal mounting orientation is F S U 90 1000 Torr mbar 2 mV 100 Torr mbar 10 mV 10 Torr mbar 50 mV 1 Torr mbar 300 mV 0 1 Torr mbar 1 8 V 0 01 0 05 Torr mbar 0 V The gauge is factory calibrated while standing upright or in horizontal position Calibration Test Report If the gauge is operated via...

Страница 25: ...orr 5 10 2 Torr 3 10 2 Torr 1 10 2 Torr 5 10 3 Torr 3 10 3 Torr 1 10 3 Torr 5 10 4 Torr 3 10 4 Torr 1 10 4 Torr 5 10 5 Torr 3 10 5 Torr 1 10 5 Torr 5 10 6 Torr 3 10 6 Torr 1 10 6 Torr 5 10 7 Torr 7 10 0 Pa 7 10 0 Pa 4 10 0 Pa 2 10 0 Pa 7 10 1 Pa 4 10 1 Pa 2 10 1 Pa 7 10 2 Pa 4 10 2 Pa 2 10 2 Pa 7 10 3 Pa 4 10 3 Pa 2 10 3 Pa 7 10 4 Pa 4 10 4 Pa 2 10 4 Pa 7 10 5 Pa 7 10 2 mbar 4 10 2 mbar 2 10 2 mba...

Страница 26: ...hes until the adjustment duration 8 s is completed After zero adjustment the gauge automatically returns to the measurement mode The STATUS LED blinks green if the signal output is negative 20 mV when the final pres sure has been attained the zero adjustment has failed 4 2 2 ZERO Adjustment with Ramp Function The ramp function allows to adjust the pressure value at a known reference pressure withi...

Страница 27: ... function can be performed via the ZERO button on the gauge the EtherCAT interface 5 6 the diagnostic port 4 Recommended procedure for adjusting the offset of a measuring system Notice 24 Operate the gauge for at least 2 hours until the signal is stable Push the ZERO button with a pin max ø1 1 mm and keep it depressed The STATUS LED starts blinking After 5 s the zero adjustment value starting at t...

Страница 28: ... blinks green if the signal output is negative 20 mV 4 3 Switching Functions SP1 SP2 ATM Status The gauge provides two adjustable and programmable switching functions which are independent of each other A switching contact is provided for each switching function Vacuum pressure set points SP1 SP2 default Atmospheric pressure set point ATM set point Gauge status Switching characteristics and hyster...

Страница 29: ...ct is closed Measurement signal pressure p Time t Off On Hysteresis 1 F S Off Threshold value Reset value Setpoint High Trip Point If the pressure in the vacuum system is higher than the setpoint the corresponding LED SP1 or SP2 is lit solid and the corresponding switching contact is closed Measurement signal pressure p Time t Off On Hysteresis 1 F S Off Threshold value Setpoint Reset value ...

Страница 30: ... a voltmeter after the SP button is pressed can be read via the diagnostic port 4 and the EtherCAT interface 5 6 DANGER Malfunction If processes are controlled via the signal output keep in mind that by pushing an SP button the measurement signal is suppressed and the cor responding threshold value is output instead This can cause malfunctions Push the SP button only if you are sure that no malfun...

Страница 31: ...til the button is released or until the limit of the setting range is reached max ø1 1 mm Keep the button depressed Change of direction inverse ramp Release the button Press and keep it depressed again within 3 5 s the flashing frequency of the STATUS indicator changes briefly Fine adjustment Release the button Briefly press it again within 0 3 s The threshold value changes by one unit ...

Страница 32: ...ip Point Hysteresis High Trip Point High Trip Enable High Trip Point Hysteresis Setpoint Mode Adjusting setpoint SP2 The adjustment procedure is the same as for setpoint SP1 4 3 2 Programming the ATM Setpoint The vacuum pressure setpoints SP1 SP2 can be programmed to atmospheric pressure setpoint ATM setpoint via the diag nostic port 4 or the EtherCAT interface 5 6 Switching characteristics Low Hi...

Страница 33: ... ambience ATM setpoint 110 factor 1 1 Hysteresis 1 F S Off On Off Threshold value Reset value The current programmed ATM threshold setting can be read written via the diagnostic port 4 can be read written via the EtherCAT interface 5 6 Programming ATM setpoint Programmable parameters 4 5 6 Factor of ATM Low Trip Enable Low Trip Point Hysteresis High Trip Enable High Trip Point Hysteresis Setpoint ...

Страница 34: ...e EtherCAT interface 5 6 The status of the gauge is output as a digital signal 4 4 Activating the Factory Setting Factory Reset All user defined parameters e g zero filter are restored to their default values Loading of the default parameters is irreversible Loading the default parameters Put the gauge out of operation Keep the ZERO button depressed for at least 5 s while the gauge is being put in...

Страница 35: ... type A mini B can be used Required software T Gauge Please contact your local INFICON service center Mini USB type B 4 6 EtherCAT Operation Caution Data transmission errors Any attempt to simultaneously operate the gauge via the EtherCAT interface and the diagnostic port causes data transmission errors Therefore the gauge must not be operated simul taneously via the EtherCAT interface and the dia...

Страница 36: ...alization the device address switches are read by the device firmware This device address is supported to the master as Explicit Device Identification 2 4 0 6 8 A E 2 4 0 6 8 A E 2 4 0 6 8 A E The explicit device address is set in hexa decimal form 00 FFFhex via the x100 x10 and x1 switches Example Device address 0xDDD dec 3549 0x100 0xD dec 3328 0x10 0xD dec 208 0x1 0xD dec 13 Status LED LEDs on ...

Страница 37: ...rts can be detrimental to health and environment Before beginning to work find out whether any parts are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts Caution Vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent...

Страница 38: ... hands increases the desorption rate Always wear clean lint free gloves and use clean tools when working in this area Vent the vacuum system Put the gauge out of operation Unfasten the lock screws and disconnect the sensor cable Remove the gauge from the vacuum system and install the protective lid ...

Страница 39: ...d products Contaminated products e g radioactive toxic caustic or microbiological hazard can be detrimen tal to health and environment Products returned to INFICON should preferably be free of harmful substances Adhere to the forward ing regulations of all involved countries and for warding companies and enclose a duly completed declaration of contamination Form under www inficon com Products that...

Страница 40: ...ic components operating fluids etc can be detrimen tal to the environment Dispose of such substances in accordance with the relevant local regulations Separating the components After disassembling the product separate its components ac cording to the following criteria Contaminated components Contaminated components radioactive toxic caustic or bio logical hazard etc must be decontaminated in acco...

Страница 41: ...tocol Diagnostic Port via T Gauge tira84e1 INFICON AG LI 9496 Balzers Liechtenstein 5 Communication Protocol EtherCAT CDG045Dhs ETG 5003 2080 S R V1 0 0 tira68e1 nur englisch INFICON AG LI 9496 Balzers Liechtenstein 6 Communication Protocol EtherCAT CDG045Dhs ETG 5003 2080 S R V1 3 0 tirb45e1 nur englisch INFICON AG LI 9496 Balzers Liechtenstein 7 ETG 5003 1 S R V1 0 0 Semiconductor Device profile...

Страница 42: ...42 tina84e1 a 2019 07 10 ETG 5003 2080 S R V1 3 0 Semiconductor Device profile Part 2080 Specific Device Profile SDP Vacuum Pressure Gauge ...

Страница 43: ... in electrical and electronic equipment Product Capacitance Diaphragm Gauge Stripe CDG045Dhs Standards Harmonized and international national standards and specifi cations EN 61000 6 2 2005 EMC generic immunity standard EN 61000 6 3 2007 A1 2011 EMC generic emission standard EN 61010 1 2010 Safety requirements for electrical equipment for measurement control and laboratory use EN 61326 2013 Group 1...

Страница 44: ...LI 9496 Balzers Liechtenstein Tel 423 388 3111 Fax 423 388 3700 Original German tina84d1 a 2019 07 reachus inficon com ti na84e1 a www inficon com ...

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