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tina56e1-f (2015-09)

49

4.5

Diagnostic Port (RS232C Interface)

The diagnostic port <DIA> permits to output the pressure read-
ing and all status information and to enter all settings at the
same time (

→



[3]).

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"Accessories"

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Содержание PCG55 Series

Страница 1: ...tina56e1 f 2015 09 1 Pirani Capacitance Diaphragm Gauge PCG550 PCG552 PCG554 Operating Manual Incl EU Declaration of Conformity ...

Страница 2: ...ntification In all communications with INFICON please specify the infor mation given on the product nameplate For convenient refer ence copy that information into the space provided below Model PN SN V W LPS INFICON AG LI 9496 Balzers ...

Страница 3: ... as defined in the corresponding ordering information 3PCx 0xx xxxx Flange 1 DN 16 ISO KF 2 DN 16 ISO KF long tube 4 DN 16 CF F 5 DN 16 CF R long tube 6 DN 25 ISO KF D 4 VCR female E 8 VCR female F 1 8 NPT K Flange 29 29 mm M 4 VCR 90 female N 7 16 20 UNF male 0 mbar 1 Torr 2 Pa 3 micron Unit 1 Tungsten 2 Nickel 3 Ceramic coated 6 Tungsten galvanically isolated 7 Nickel galvanically isolated 8 Cer...

Страница 4: ...splay ATM sensor 2 switching functions 6 2 switching functions 7 ATM sensor 2 switching functions Display Switching function 0 FCC 1 D Sub 9 pin 2 D Sub 15 pin HD 4 D Sub 15 pin HD RS485 INF The part number PN can be taken from the product nameplate If not indicated otherwise in the legends the illustrations in this document correspond to gauges with the DN 16 ISO KF vacuum connection and display ...

Страница 5: ...gauge is a combination gauge consisting of a Pirani sensor and a diaphragm capacitive sensor Both sensors are constantly active At low pressures only the signal of the Pirani sensor is used for pressure measurement at high pressures only the signal of the diaphragm capacitive sensor To determine the output signal in the intermediate range both signals are used proportionally to the pressure Tradem...

Страница 6: ...4 3 Installation 25 3 1 Vacuum Connection 25 3 2 Power Connection 28 3 2 1 FCC 68 8 pin Connector 29 3 2 2 D Sub 9 pin Connector 30 3 2 3 D Sub HD 15 pin Connector 31 3 2 4 D Sub HD 15 pin RS485 INF Connector 32 3 2 5 DeviceNet Connector 33 3 2 6 Profibus Connector 34 3 2 7 EtherCAT Connector 35 4 Operation 36 4 1 Status Indication and Displays 36 4 2 Gas Type Dependence 40 4 3 Switching Functions...

Страница 7: ...oubleshooting 59 6 4 Replacing the Sensor 62 7 Returning the Product 63 8 Disposal 64 9 Accessories 65 10 Spare Parts 66 Further Information 69 ETL Certification 70 EU Declaration of Conformity 71 For cross references within this document the symbol XY is used for cross references to further documents listed under Further Information the symbol Z ...

Страница 8: ...tal damage Caution Information on correct handling or use Disregard can lead to malfunctions or minor equipment damage Notice Labeling 1 2 Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the neces sary experience or who have been instructed by the end user of the product ...

Страница 9: ...ontaminated Adhere to the relevant regulations and take the necessary precautions when handling contamin ated parts Communicate the safety instructions to all other users 1 4 Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end user or third parties disregard the information in this document use the product in a non conforming manner make any kind o...

Страница 10: ...nce acc to Pirani Accuracy N2 5 10 4 1 10 3 mbar 50 of reading 1 10 3 100 mbar 15 of reading 100 950 mbar 5 of reading 950 1050 mbar 2 5 of reading Repeatability N2 1 10 3 1100 mbar 2 of reading Output signal measurement signal Voltage range 3PCx 0xx xxx0 0 10 23 V 3PCx 0xx xxx1 0 8 68 V 3PCx 0xx xxx2 0 5 659 V 3PCx 0xx xxx3 0 9 05 V Measurement range 3PCx 0xx xxx0 0 61 10 23 V 3PCx 0xx xxx1 1 2 8...

Страница 11: ...dentification FCC 68 0 61 10 23 V 71 5 kΩ HV adjustment at 10 5 mbar ATM adjustment at 100 mbar Solid state relays switching functions SP1 SP2 ATM Setting range N2 5 0 10 5 1500 mbar Hysteresis 1 10 of threshold Switching characteristics 1 Low Trip Point Contact rating 30 V ac dc 0 3 A resistive closed LED lit solid open LED off Switching time 30 ms 1 The hysteresis and the switching characteristi...

Страница 12: ...me 30 ms Diagnostic port Jack connector 2 5 mm 3 pin Supply DANGER The gauge may only be connected to power sup plies instruments or control devices that conform to the requirements of a grounded protective extra low voltage PELV and limited power source LPS Class 2 The connection to the gauge has to be fused 2 Supply voltage at the gauge Class 2 LPS 15 30 V dc Ripple 1 Vpp Power consumption witho...

Страница 13: ... Sensor cable shielded 0 14 mm2 conductor Cable length RS232C operation 100 m 30 m Grounding concept Power Connection Vacuum connection to signal common connected via 10 kΩ RS232C RS485 interface Transmission rate Data format 57600 baud default binary 8 data bits one stop bit no parity bit no handshake Power Connection For further information on the RS232C RS485C interface 3 ...

Страница 14: ...DeviceNet 4 DeviceNet connector Micro Style 5 pin male Cable shielded special DeviceNet cable 5 conductors 33 8 Cable length system wiring according to DeviceNet specifications 7 8 For further information on the DeviceNet interface 4 EtherCAT interface Specification data format communication protocol 11 12 Data rate 100 Mbps Note address explicit device identification EtherCAT connector 2 RJ45 8 p...

Страница 15: ... 0 125dec Profibus connection D Sub 9 pin female Cable shielded special Profibus cable 34 10 Cable length system wiring according to Profibus speci fications 9 10 For further information on the Profibus interface 5 Materials exposed to vacuum Vacuum connection Filament 3PC1 6 0xx xxxx 3PC2 7 0xx xxxx 3PC3 8 0xx xxxx Feedthrough Orifice 3 Diaphragm Further materials stainless steel 1 4435 W Ni cera...

Страница 16: ...re absolute 10 bar Permissible temperatures Operation Vacuum connection 4 long tube 4 Filament Storage 10 C 50 C 80 C 250 C 160 C 20 C 65 C Relative humidity Year s mean During 60 days 65 no condensation 85 no condensation Mounting orientation any Use indoors only altitude up to 2000 m NN Degree of protection IP 40 Weight without fieldbus interface with fieldbus interface 115 g 130 g 230 g 250 g 4...

Страница 17: ... 09 17 Dimensions mm DN 16 ISO KF DN 16 ISO KF long 130 8 14 5 1 8 NPT 36 21 5 31 5 24 4 36 5 34 79 5 65 DN 16 CF F DN 16 CF R long 130 2 30 9 42 7 46 3 4 VCR 8 VCR 45 28 DN 25 ISO KF 29 2 29 2 mm 7 16 20 UNF 4 VCR 90 ...

Страница 18: ...TUS NET MOD 10 8 4 2 6 0 8 E A C LSD MSD ADDRESS 4 2 6 0 8 E A C BUS SP1 SP2 ST I O DIA ADJ 67 56 EtherCAT RS485 SP1 SP2 ST I O DIA ADJ 2 4 0 6 8 A E x100 x10 2 4 0 6 8 A E x1 2 4 0 6 8 A E ERR RUN LA LA IN OUT 67 56 A E 6 2 LSD MSD ADDRESS RATE SP1 SP2 ST DIA BUS ADJ 3 2 1 ON A E 6 2 A E 6 2 67 56 ...

Страница 19: ... 6 5 8 0 7 5 9 0 8 5 10 0 9 5 10 5 1E 05 1E 04 1E 03 1E 02 1E 01 1E 00 1E 01 1E 02 1E 03 1E 04 1E 06 1E 05 Error O mbar Pa Torr p 10 0 778 U c U c 1 286log10 p valid in the range 5 10 5 mbar p 1500 mbar U p c U p c V mbar 6 143 V micron 2 448 V µbar 2 287 V Pa 3 572 V Torr 6 304 V kPa 7 429 V mTorr 2 448 where p pressure U output signal c constant pressure unit dependent ...

Страница 20: ...04 1E 05 0 0 0 5 1 0 1 5 2 5 3 5 4 5 5 5 6 5 7 5 8 5 8 68 2 0 3 0 4 0 5 0 6 0 7 0 8 0 9 0 1 2 Error mbar Pa Torr p 10 U c U c log10 p valid in the range 5 10 5 mbar p 1500 mbar U p c U p c V mbar 5 5 V micron 2 625 V µbar 2 5 V Pa 3 5 V Torr 5 625 V kPa 6 5 V mTorr 2 625 where p pressure U output signal c constant pressure unit dependent ...

Страница 21: ...55 0 266644736 26 6644736 0 2000 1 683 0 66661184 66 661184 0 5000 2 217 1 33322368 133 322368 1 0000 2 842 2 66644736 266 644736 2 0000 3 675 6 6661184 666 61184 5 0000 4 206 13 3322368 1333 22368 10 0000 4 577 26 6644736 2666 44736 20 0000 4 846 66 661184 6666 1184 50 0000 4 945 133 322368 13332 2368 100 0000 5 019 266 644736 26664 4736 200 0000 5 111 399 967104 39996 7104 300 0000 5 224 533 289...

Страница 22: ... a b c d e f constant U output signal Valid in the range 2 842 4 945 V p a cU eU 2 1 bU dU 2 fU 3 a 0 1031 c 0 02322 e 0 07229 b 0 3986 d 0 07438 f 0 006866 where p pressure in Torr a b c d e f constant U output signal Valid in the range 4 945 5 659 V p a cU 1 bU dU 2 a 100 624 c 20 5623 b 0 37679 d 0 0348656 where p pressure in Torr a b c d constant U output signal ...

Страница 23: ... 1E 05 0 0 0 5 1 0 1 5 2 5 3 5 4 5 5 5 6 5 7 5 8 5 2 0 3 0 4 0 5 0 6 0 7 0 8 0 9 0 1 57 9 05 9 5 mbar Pa Torr Error p 10 U c U c log10 p valid in the range 5 10 5 mbar p 1500 mbar U p c U p c V mbar 5 8751 V micron 3 V µbar 2 8751 V Pa 3 8751 V Torr 6 V kPa 6 8751 V mTorr 3 where p pressure U output signal c constant pressure unit dependent ...

Страница 24: ...6 102 2 4 6 103 103 p mbar 2 Air O2 CO N2 He Ar 8 6 4 2 8 6 4 2 8 6 4 2 8 6 4 2 8 6 4 2 8 6 4 2 4 2 Capacitive diaphragm sensor Crossover range Pirani sensor Calibration factors valid for Pirani pressure range below 1 mbar peff C indicated pressure Gas type Calibration factor C Gas type Calibration factor C He Ne Ar Kr Xe 0 8 1 4 1 7 2 4 3 0 H2 air O2 CO N2 CO2 water vapor Freon 12 0 5 1 0 0 9 0 5...

Страница 25: ... and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized Do not open any clamps while the vacuum system is pressurized Use the type clamps which are suited to overpressure DANGER DANGER overpressure in the vacuum system 2 5 bar KF flange connections with elastomer seals e g O rings cannot withstand such pressures Process media can thus leak ...

Страница 26: ...ment For gauges with a KF flange use a conductive metallic clamping ring For gauges with a tube and a 29 29 mm flange take appropriate measures to fulfill this requirement Caution Caution vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive a...

Страница 27: ...horizontal to upright posi tion and consider using a seal with centering ring and filter If adjustment should be possible after the gauge has been installed be sure to install it so that the but tons can be accessed with a pin Remove the protective lid and connect the product to the vacuum system or Clamp Seal with centering ring Seal with centering ring and filter Protective lid Keep the protecti...

Страница 28: ...ops differences of potential or EMC problems may affect the measurement signal For optimum signal quality please do observe the following notes Connect the cable shield to ground on one side via the connector housing Do not connect the other side of the shield Connect the supply common with protective ground directly at the power supply Use differential measurement input signal common and supply c...

Страница 29: ...le 8 7 3 5 1 2 6 4 Ident 10k 18V 24V SP2 SP1 4 7Ω 4 7Ω Supply Measurement signal Electrical connection Pin 1 Supply Pin 2 Supply common GND Pin 3 Measurement signal or thresholds SP1 SP2 Pin 4 Gauge identification Pin 5 Signal common Pin 6 8 Relay SP2 Common closing contact com Pin 7 8 Relay SP1 Common closing contact com 1 8 FCC 68 8 pin connector ...

Страница 30: ...1 9 24V SP2 SP1 10k 18V 4 7Ω 4 7Ω Measurement signal Electrical connection Pin 1 Relay SP1 closing contact Pin 2 n c Pin 3 Supply Pin 4 Supply common GND Pin 5 Measurement signal or thresholds SP1 SP2 Pin 6 Relay SP1 Common contact com Pin 7 Relay SP2 Common contact com Pin 8 Signal common Pin 9 Relay SP2 closing contact 1 5 6 9 D Sub 9 pin female soldering side ...

Страница 31: ...0k 24V RxD TxD SP1 SP2 4 7Ω 4 7Ω 18V Measurement signal Electrical connection Pin 1 2 n c Pin 3 Supply Pin 4 Supply common GND Pin 5 Measurement signal Pin 6 Signal common Pin 7 8 9 n c Pin 10 Relay SP1 NO Pin 11 Relay SP2 NO Pin 12 Relay SP2 Common contact com Pin 13 RS232 TxD Pin 14 RS232 RxD Pin 15 Relay SP1 Common contact com 1 5 11 15 6 10 D Sub HD 15 pin female soldering side ...

Страница 32: ...rmination 3 Fail safe bias 470Ω 5V 1 Fail safe bias Measurement signal Electrical connection Pin 1 RS485 B Pin 2 RS485 A Pin 3 Supply Pin 4 Supply common GND Pin 5 Measurement signal Pin 6 Signal common Pin 7 Reserved Pin 8 RS485 GND Pin 9 Reserved Pin 10 Relay SP1 NO Pin 11 Relay SP2 NO Pin 12 Relay SP2 common contact com Pin 13 Relay SP2 NC Pin 14 Relay SP1 NC Pin 15 Relay SP1 common contact com...

Страница 33: ...viceNet cable is available make one according to the following diagram Connect the DeviceNet cable 3 1 4 2 5 Micro Style 5 pin DeviceNet female soldering side Pin 1 Drain Pin 2 Supply 15 30 V dc Pin 3 Supply common GND Pin 4 CAN_H Pin 5 CAN_L DeviceNet cable ...

Страница 34: ...he Profibus cable 1 5 6 9 D Sub 9 pin male soldering side Pin 1 2 Do not connect Pin 6 VP 2 Pin 3 RxD TxD P Pin 7 9 Not connected Pin 4 Pin 5 CNTR P 1 DGND 2 Pin 8 RxD TxD N 1 Only to be connected if an optical link module is used 2 Only required as line termination for devices at both ends of bus cable 10 Profibus cable Sensor cable ...

Страница 35: ...make them according to the following diagram Connect the EtherCAT cables 8 1 FCC68 8 pin soldering side Pin 1 TD Transmission data Pin 2 TD Transmission data Pin 3 RD Receive data Pin 6 RD Receive data Pin 4 5 7 and 8 Not connected FCC68 cable IN port FCC68 cable OUT port Sensor cable ...

Страница 36: ... gauge is factory calibrated Due to long time operation or contamination a zero drift could occur Periodically check the zero and adjust it if necessary adjusting the gauge 57 4 1 Status Indication and Displays Light emitting diodes LEDs SP1 SP2 ADJ ST DIA Status LED State Meaning ST off no supply voltage lit green measurement mode lit solid or is blinking red error 59 SP1 lit green Relay SP 1 clo...

Страница 37: ... LCD Meaning off no supply voltage lit green measurement parameter mode lit red error The display can be rotated by 180 via the diagnostic port Put the gauge into operation When the supply voltage is applied the software version is briefly dis played ...

Страница 38: ...sover range Setpoint ATM setpoint open closed open closed Setpoint ATM setpoint Measurement principle Status of Relay 1 Relay 1 Status of Relay 2 Relay 2 Unit Millibar Torr Pascal Micron Counts no display Underrange Overrange no display Within range Output signal ...

Страница 39: ...d Switching functions S When the SP1 or SP2 button is pushed the corresponding threshold is displayed and the corresponding relay flashes Error display trouble shooting 59 Pirani sensor error Diaphragm sensor error Atmosphere pressure sensor error ...

Страница 40: ...ar diaphragm capacitive sensor and Pirani sensor crossover range 5 10 5 1 mbar Pirani sensor proportional to pressure 6 4 3 Switching Functions SP1 SP2 The two switching functions can be set to any pressure within the measurement range of the gauge A solid state relay is provided for each switching function 6 The pressure reading applies to dry air O2 CO and N2 For other gases it has to be convert...

Страница 41: ...RS485 interface Switching characteristics and hysteresis The switching characteristics and the hysteresis of each set point can be programmed 44 Low Trip Point default If the pressure in the vacuum system is lower than the setpoint the corresponding LED SP1 or SP2 is lit solid and the corresponding relay is closed Time t Measurement value Off On Hysteresis 10 of threshold Off Setpoint Measurement ...

Страница 42: ...e vacuum system is higher than the setpoint the corresponding LED SP1 or SP2 is lit solid and the corresponding relay is closed Time t Off On Off Setpoint Measurement value Measurement signal Pressure p Threshold value Hysteresis 10 of threshold Threshold value ...

Страница 43: ...ed If the pressure in the vacuum system is lower than the defined Low Trip Point threshold the correspoinding LED SP1 or SP2 is lit and the corresponding relay is closed Setpoint High Trip Point Time t Off On Off Off On Setpoint Low Trip Point Measurement signal Pressure p Hysteresis 10 of threshold Threshold value Hysteresis 10 of threshold Threshold value The setpoints can only be programmed via...

Страница 44: ...e DeviceNet Profibus EtherCAT and RS485 interface 3 4 5 6 If both a High Trip Point and a Low Trip Point are assigned to a setpoint Low Trip Point only can be adjusted via the corresponding button on the gauge DANGER DANGER malfunction If processes are controlled via the signal output keep in mind that by pushing an SP button the measurement signal is suppressed and the cor responding threshold va...

Страница 45: ...hold setting is increased towards the upper limit until the button is released or the limit is reached Keep the button depressed Push the SP1 button again Fine adjustment within 0 1 s the threshold value changes by one unit Change of direction within 2 3 s the threshold adjustment changes its direction The SP1 button is released for more than 5 s the threshold value is saved and the gauge returns ...

Страница 46: ...tting of the corresponding hysteresis 10 is reactivated Programming setpoint SP1 Programmable parameters 3 4 5 6 Low Trip Point Low Trip Enable Low Trip Point Hysteresis High Trip Point High Trip Enable High Trip Point Hysteresis Setpoint Mode Adjusting setpoint SP2 The adjustment procedure is the same as for setpoint SP1 ...

Страница 47: ... gauge The relay switches when the pres sure in the vacuum system has reached the defined value Example ATM setpoint 110 of the atmospheric pressure factor 1 1 Switching characteristic High Trip Point Hysteresis 10 mbar 1078 mbar 980 mbar Atmospheric pres sure ambience ATM setpoint 110 factor 1 1 Hysteresis 10 mbar Off On Off M easurement value Measurement signal Pressure p Threshold value 7 The a...

Страница 48: ...e DANGER DANGER malfunction If processes are controlled via the signal output keep in mind that by pushing the SP button the measurement signal is suppressed and the cor responding threshold value is output instead This can cause malfunctions Push the SP button only if you are sure that no malfunction will cause Programming ATM setpoint Programmable parameters 3 4 5 6 Factor of ATM Low Trip Enable...

Страница 49: ...na56e1 f 2015 09 49 4 5 Diagnostic Port RS232C Interface The diagnostic port DIA permits to output the pressure read ing and all status information and to enter all settings at the same time 3 Accessories ...

Страница 50: ...onic Data Sheet file are required for this purpose This software can be downloaded from our website Node Address Setting default 63dec Set the node address 0 63dec via the ADDRESS MSD and LSD switches default 63dec The node address is polled by the firmware when the gauge is switched on If the setting deviates from the stored value the new value is taken over into the NVRAM If a setting higher tha...

Страница 51: ...ly transmit measurement values when it is authorized by the master When the gauge is put into operation it is in the IDLE status provided there is no error and the value defined in the Safe State is transmitted instead of the measurement value Measurement values are transmitted in the EXECUTING status For the gauge to change from the IDLE to the EXECUTING status a start instruction must be execute...

Страница 52: ... Selftest not yet concluded No supply STATUS MOD blinking green Gauge online but no communication Selftest concluded but no communica tion to other nodes established Gauge not assigned to any master lit solid green Gauge online necessary connections established blinking red One or several input output connections in time out status lit solid red Communication error The gauge has de tected an error...

Страница 53: ...de Address Setting default 01hex For unambiguous identification of the gauge in a Profibus en vironment a node address is required 4 2 6 0 8 E A C LSD MSD ADDRESS 4 2 6 0 8 E A C Node address 0 125dec The node address is set in hexadecimal form 00 7Dhex via the MSD and LSD switches It can not be defined via Profibus Example Node address 7Dhex MSD 8 6 E C LSD Node address 7Dhex 125dec The gauge sta...

Страница 54: ...value defined in the Safe State is transmitted instead of the measurement value Measurement values are transmitted in the EXECUTING status For the gauge to change from the IDLE to the EXECUTING status a start instruction must be executed or the cyclic data exchange must be started in the IDLE status 4 8 EtherCAT Operation Caution Caution data transmission errors The attempt to operate the EtherCAT...

Страница 55: ...4 0 6 8 A E 2 4 0 6 8 A E The explicit device address is set in hexa decimal form 00 FFFhex via the x100 x10 and x1 switches Example Device address 0xDDD dec 3549 0x100 0xD dec 3328 0x10 0xD dec 208 0x1 0xD dec 13 Status LED LEDs on the gauge inform on the gauge status and the current EtherCAT status 6 5 Deinstallation WARNING WARNING fragile components The ceramic sensor may be damaged by impacts...

Страница 56: ...tion vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate Always wear clean lint free gloves and use clean tools when working in this area Vent the vacuu...

Страница 57: ...well as expendable parts e g filament are not covered by the warranty INFICON assumes no liability and the warranty becomes null and void if any repair work is carried out by the end user or third parties 6 1 Adjusting the Gauge The gauge is factory calibrated Due to long time operation or contamination a zero drift could occur Periodically check the zero and adjust it if necessary ...

Страница 58: ...ering ring and filter check that they are clean or replace them if necessary Deinstallation Put the gauge into operation and operate it at atmospheric pressure for at least 10 minutes Press the ADJ button with a pin max ø1 1 mm and the ATM adjustment is carried out The Pirani sensor is ad justed to 1000 mbar by default ATM HV Evacuate the vacuum system to p 10 5 mbar and wait at least 2 minutes Pr...

Страница 59: ...ensor can be calibrated against the diaphragm capacitive sensor in the gauge The gauge electronics compares the output signals of the two sensors and carries out the necessary adjustments to the atmospheric pressure sensor signal The adjustment of the atmospheric pressure sensor can only be carried out via the diagnostic port 3 the DeviceNet Profibus EtherCAT and RS485 interface 3 4 5 6 6 3 Troubl...

Страница 60: ...e off and on again after 5 s reset FAIL PIR1 ST lit solid red Pirani sensor defective Replace the sensor 62 Electronics unit not correctly mounted on sensor Check the connections electronics sensor FAIL CAP1 ST lit solid red Diaphragm sensor defective Replace the sensor 62 Electronics unit not mounted correctly on sensor Check the connections electronics sensor FAIL ATM1 ST lit solid red Atmospher...

Страница 61: ...arate the sensor from the electronics unit 62 Using an ohmmeter make the following measurements on the contact pins Ω Sensor Possible cause PCG550 W PCG554 W 40 1 Ω 40 Ω Contamination 40 Ω Contamination Filament broken PCG552 Ni 35 1 Ω 35 Ω Contamination 35 Ω Contamination Filament broken Correction All of the above faults can only be remedied by replacing the sensor 62 ...

Страница 62: ...se of severe contamination or a malfunction the sensor can be replaced Precondition Gauge deinstalled 55 Unscrew the hexagon socket screws and remove the sensor without twisting it 2 mm Place the new sensor without twisting it and lock it with the screws ...

Страница 63: ... preferably be free of harmful substances Adhere to the forward ing regulations of all involved countries and for warding companies and enclose a duly completed declaration of contamination Form under www inficon com Products that are not clearly declared as free of harmful sub stances are decontaminated at the expense of the customer Products not accompanied by a duly completed declaration of con...

Страница 64: ...d electric components operating fluids etc can be detrimen tal to the environment Dispose of such substances in accordance with the relevant local regulations Separating the components After disassembling the product separate its components ac cording to the following criteria Contaminated components Contaminated components radioactive toxic caustic or bio logical hazard etc must be decontaminated...

Страница 65: ...6e1 f 2015 09 65 9 Accessories Ordering No Centering ring with fine filter DN 16 ISO KF 211 097 Communication adapter 2 m 8 303 333 8 The diagnostic software Windows NT XP can be downloaded from our website ...

Страница 66: ...ISO KF long tube 357 926 3PC6 0x2 xxxx 3PC1 0x4 xxxx DN 16 CF F 357 927 3PC6 0x4 xxxx 3PC1 0x5 xxxx DN 16 CF R long tube 357 928 3PC6 0x5 xxxx 3PC1 0x6 xxxx DN 25 ISO KF 357 929 3PC6 0x6 xxxx 3PC1 0xD xxxx 4 VCR female 357 932 3PC6 0xD xxxx 3PC1 0xE xxxx 8 VCR female 357 931 3PC6 0xE xxxx 3PC1 0xF xxxx 1 8 NPT 357 930 3PC6 0xF xxxx 3PC1 0xK xxxx 29 29 mm 357 934 3PC6 0xK xxxx 3PC1 0xM xxxx 4 VCR 9...

Страница 67: ...57 938 3PC7 0x4 xxxx 3PC2 0x5 xxxx DN 16 CF R long tube 357 939 3PC7 0x5 xxxx 3PC2 0x6 xxxx DN 25 ISO KF 357 940 3PC7 0x6 xxxx 3PC2 0xD xxxx 4 VCR female 357 943 3PC7 0xD xxxx 3PC2 0xE xxxx 8 VCR female 357 942 3PC7 0xE xxxx 3PC2 0xF xxxx 1 8 NPT 357 941 3PC7 0xF xxxx 3PC2 0xK xxxx 29 29 mm 357 945 3PC7 0xK xxxx 3PC2 0xM xxxx 4 VCR 90 female 357 946 3PC7 0xM xxxx 3PC2 0xN xxxx 7 16 20 UNF male 357...

Страница 68: ...357 949 3PC8 0x4 xxxx 3PC3 0x5 xxxx DN 16 CF R long tube 357 950 3PC8 0x5 xxxx 3PC3 0x6 xxxx DN 25 ISO KF 357 951 3PC8 0x6 xxxx 3PC3 0xD xxxx 4 VCR female 357 954 3PC8 0xD xxxx 3PC3 0xE xxxx 8 VCR female 357 953 3PC8 0xE xxxx 3PC3 0xF xxxx 1 8 NPT 357 952 3PC8 0xF xxxx 3PC3 0xK xxxx 29 29 mm 357 956 3PC8 0xK xxxx 3PC3 0xM xxxx 4 VCR 90 female 357 957 3PC8 0xM xxxx 3PC3 0xN xxxx 7 16 20 UNF male 35...

Страница 69: ...rs Liechtenstein 3 www inficon com Communication Protocol Serial Interface RS232C RS485C PCG55x PSG55x tira59d1 German tira59e1 English INFICON AG LI 9496 Balzers Liechtenstein 4 www inficon com Communication Protocol DeviceNet PCG55x PSG55x tira58e1 English INFICON AG LI 9496 Balzers Liechtenstein 5 www inficon com Communication Protocol Profibus PCG55x PSG55x tira56e1 English INFICON AG LI 9496 ...

Страница 70: ...1784 Industrial communication networks Fieldbus profiles 10 www profibus com Profibus user organization 11 ETG 5003 1 Semiconductor Device profile Part 1 Common Device Profile CDP 12 ETG 5003 2080 Semiconductor Device profile Part 2080 Specific Device Profile SDP Vacuum Pressure Gauge ETL Certification 3103457 ETL LISTED The product PCG55x complies with the requirements of the following standards ...

Страница 71: ...ge PCG550 PCG552 PCG554 Standards Harmonized and international national standards and specifi cations EN 61000 6 2 2005 EMC generic immunity standard EN 61000 6 3 2007 A1 2011 EMC generic emission standard EN 61010 1 2010 Safety requirements for electrical equipment for measurement control and laboratory use EN 61326 1 2013 EMC requirements for electrical equipment for measurement control and labo...

Страница 72: ...LI 9496 Balzers Liechtenstein Tel 423 388 3111 Fax 423 388 3700 Original German tina56d1 f 2015 09 reachus inficon com t i na56e1 f www inficon com ...

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