Inficon PCG55 Series, Руководство по эксплуатации

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tina56e1-f (2015-09)
2.2 Gas Type Dependence
Indicated pressure (gauge calibrated for air)
10 2
10
1
10
0
10 –1
10 –2
8
6
4
2
10
–3
10
–4 2 4 6
10
–3 2 4 6
10
–2 2 4 6 2 4 6
10
0 2 4 6
10
1
10
–1
10
–4
p
eff
[mbar]
2 4 6
10
2 2 4 6
10
3
10 3
p [mbar]
2
Air, O
2
, CO, N
2
He
Ar
8
6
4
2
8
6
4
2
8
6
4
2
8
6
4
2
8
6
4
2
8
6
4
2
4
2
Capacitive
diaphragm
sensor
Crossover
range
Pirani
sensor
Calibration factors
valid for Pirani pressure range below 1 mbar
p
eff
= C × indicated pressure
Gas type Calibration
factor C
Gas type Calibration
factor C
He
Ne
Ar
Kr
Xe
0.8
1.4
1.7
2.4
3.0 H
2
air, O
2
, CO, N
2
CO
2
water vapor
Freon 12
0.5
1.0
0.9
0.5
0.7