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Connection

to

Device

Under

T

est

(DUT)

This

section

describes

how

to

connect

your

DUT

s

to

the

HP

4155A/4156A.

Only

the

basic

operations

for

connecting

are

described.

If

the

HP

4155A/4156A

is

not

congured

with

a

test

xture

or

your

wafer

prober

yet,

see

\Setting

up

HP

4155A/4156A

"

in

Chapter

2,

T

est

Fixture

User's

Guide,

and

your

wafer

prober

manuals

.

This

section

covers

the

HP

16442A

test

xture

only

.

F

or

operating

your

wafer

prober

,

see

your

wafer

prober

manuals

.

Note

that

you

must

set

the

HP

4155A/4156A

to

the

idle

state

when

connecting

or

disconnecting

your

DUT

s

.

If

not,

the

DUT

s

may

be

damaged.

T

o

set

to

idle

state

,

press

4

Stop

5

key

and

make

sure

Standby

indicator

is

o.

The

HP

4156A

is

designed

for

Kelvin

connections.

See

\T

o

Make

Connections

to

Measure

Low

Resistance

(F

or

HP

4156A

Only)"

for

K

elvin

connection

theory

.

In

this

Section.

This

section

has

the

following

task

descriptions:

T

o

mount

a

DUT

on

test

xture

T

o

make

connections

to

reduce

leakage

current

T

o

make

connections

to

measure

low

resistance

(for

HP

4156A

only)

3-3

Содержание 4155A

Страница 1: ...ill find any other available product information on the Agilent Test Measurement website www tm agilent com HP References in this Manual This manual may contain references to HP or Hewlett Packard Please note that Hewlett Packard s former test and measurement semiconductor products and chemical analysis businesses are now part of Agilent Technologies We have made no changes to this manual copy In ...

Страница 2: ...Semiconductor Parameter Analyzer User s Task Guide ...

Страница 3: ...ument Hewlett Packard does not warrant that the operation of the instrument or software or rmware will be uninterrupted or error free Limitation of Warranty The foregoing warranty shall not apply to defects resulting from improper or inadequate maintenance by Buyer Buyer supplied software or interfacing unauthorized modi cations or misuse operation outside of the environment speci cations for the ...

Страница 4: ...s may exist even with the power cable removed To avoid injuries always disconnect power and discharge circuits before touching them DO NOT SERVICE OR ADJUST ALONE Do not attempt internal service or adjustment unless another person capable of rendering rst aid and resuscitation is present DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Because of the danger of introducing additional hazards do not ins...

Страница 5: ...aution sign denotes a hazard It calls attention to an operating procedure practice condition or the like which if not correctly performed or adhered to could result in damage to or destruction of part or all of the product Herstellerbescheinigung GE AUSCHEMISSION Lpa 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T 19 Manufacturer s Declaration ACOUSTIC NOISE EMISSION Lpa 70 dB operator pos...

Страница 6: ......

Страница 7: ......

Страница 8: ......

Страница 9: ......

Страница 10: ...or units PGUs which are installed in HP 41501A SMU Pulse Generator Expander The HP 41501A is attached to HP 4155A or HP 4156A and can be equipped with a ground unit GNDU high power SMU HPSMU two medium power SMUs MPSMUs or two PGUs data storing and printing HP 4155A 4156A can print and store in addition to performing measurement and analysis You can store measurement setup information measurement ...

Страница 11: ...n overview of the HP 4155A 4156A Installation This chapter describes how to install HP 4155A 4156A accessories and peripherals Making a Measurement This chapter describes device connections making a sweep measurement knob sweep measurement and sampling measurement and forcing stress Analyzing Measurement Results This chapter describes how to analyze measurement results manually and automatically F...

Страница 12: ...Index Programmer s Guide This manual provides information about controlling the HP 4155A 4156A by remote command via HP IB interface and HP Instrument BASIC and consists of the following chapters Using HP Instrument BASIC Reference HP Instrument BASIC Getting Started on Programming the HP 4155A 4156A HP 4155A 4156A SCPI Programming Running HP 4145A B Program Directly on HP 4155A 4156A Sample Appli...

Страница 13: ...e used in this manual 4Front panel key5 Represents a key physically located on HP 4155A 4156A or external keyboard NNNNNNNNNNNNNNNNNNNNNNNNNNNNN Softkey Represents a softkey that appears on screen of HP 4155A 4156A Screen Text Represents text that appears on screen of HP 4155A 4156A Italic Refers to a related document or is used for emphasis xii ...

Страница 14: ...ments and Results Display 1 22 Graphical Analysis 1 25 Data Storage 1 26 Plotting and Printing 1 27 2 Installation L 2 2 Requirements 2 3 Power Requirements 2 4 Power Cable 2 5 Ventilation Requirements 2 7 Operating Environment 2 7 Cleaning 2 7 Setting up HP 4155A 4156A 2 8 To Inspect HP 4155A 4156A and Accessories 2 8 To Install HP 41501A SMU Pulse Generator Expander 2 9 To Check HP 4155A 4156A O...

Страница 15: ...tput 3 20 To Set up SMU Pulsed Output 3 21 To Set up PGU Pulsed Output 3 24 To Output Same Value Before and After Measurements 3 27 To De ne a User Function 3 28 To Set up Graphical Display of Measurement Results 3 30 To Set up List Display of Measurement Results 3 32 To Execute or Stop Measurement 3 33 To Control R Box 3 34 Knob Sweep Measurements 3 37 To Execute Knob Sweep Measurement 3 38 To St...

Страница 16: ...cale 4 25 To Change Variable Assigned to X Y1 or Y2 Axis 4 26 To Overlay an Internal Memory Measurement Curve onto Plotting Area 4 27 To Scroll the LIST Page 4 29 To Display or Move Marker on LIST Page 4 30 To Change Variables of LIST page 4 32 Automatic Analysis 4 33 To Draw Line by Specifying Two Points 4 34 To Draw Line by Specifying Gradient and One Point 4 36 To Draw Tangent to Speci ed Measu...

Страница 17: ...u Make A Measurement 6 8 If Measured Value Oscillates when Measuring High Frequency Devices 6 9 If Measured Value Oscillates when Measuring Negative Resistance 6 10 If Noise A ects the Measured Values 6 12 If Measured Voltage has some Error when Forcing a Large Current 6 13 If Large Current Causes High Temperature Thermal Drift 6 13 If Measurement Takes More Time than Speci ed 6 14 If Measurement ...

Страница 18: ... 18 2 1 Power Cables 2 5 2 2 Dimensions of Connector Plate for HP 4155A HP Part Number 04155 60006 2 14 2 3 Dimensions of Connector Plate for HP 4156A HP Part Number 04156 60002 2 15 2 4 Dimensions of Connector Plate for HP 41501A HP Part Number 41501 60004 2 16 2 5 Dimensions of Interlock Switch HP part number 3101 0302 2 20 2 6 Dimensions of Interlock Switch HP part number 3101 3241 2 20 2 7 Dim...

Страница 19: ...Contents ...

Страница 20: ...1 Introducing the HP 4155A 4156A ...

Страница 21: ...ce characteristics Extract device parameters Perform go no go evaluation Perform reliability stress test evaluation The HP 4155A 4156A is easy to operate and can perform automatic graphical analysis like the HP 4145B In addition the HP 4155A 4156A is also easy to use in a system which expands areas of application to quality assurance and in line monitoring In this chapter This chapter provides a v...

Страница 22: ...re the device characteristics HP 41501A SMU and pulse generator expander contains PGUs and additional SMUs HP 41501A is attached to and controlled by HP 4155A 4156A HP 16441A R Box contains accurate 10 k 100 k and 1 M resistors and connection of these resistors is controlled by the HP 4155A 4156A The HP 16441A is used to measure negative resistance and to prevent DUT damage when performing breakdo...

Страница 23: ...lution source monitor units HRSMUs two voltage source units VSUs two voltage monitor units VMUs HP 4156A has higher measurement resolution For details about measurement range and resolution refer to Measurement Units in HP 4155A 4156A User s Dictionary Reference HP 41501A con guration HP 41501A is attached to the HP 4155A 4156A at your site See Chapter 2 on how to install the HP 41501A The HP 4150...

Страница 24: ...e the LINE switch to turn analyzer on and o Flexible disk drive FDD Use 3 5 inch diskette to load or store the analyzer settings and measurement data Keyboard connector You can use an IBM PC AT compatible keyboard HP C1405B to operate the HP 4155A 4156A See Softkey Maps and External Keyboard in HP 4155A 4156A User s Dictionary Reference 1 5 ...

Страница 25: ...ween GRAPH and LIST pages 4Stress5 Moves to STRESS page group You de ne the stress channels set the stress parameters and monitor the stress forcing 4System5 Moves to SYSTEM page group You operate on diskette les set up plotting and printing environment de ne colors of the display and so on MARKER CURSOR key group Rotary knob and arrow keys of the Marker Cursor key group are used to move the marke...

Страница 26: ...revious measurement 4Stop5 Stops the measurement or stress Standby enabled channels return to standby state and other channels return to idle state 4Standby5 Toggles between the standby enabled Standby indicator is lit and disabled states If Standby indicator is lit then STBY ON channels change to standby state instead of idle state when measurement or stress nishes 4Stop5 key has no a ect on stan...

Страница 27: ... data entry eld For example if you press 445 4 5 465 greenkey 4Enter5 the result 24 appears Blue key Changes entry mode to blue key shift mode and lights the indicator In this mode you can enter the blue characters that are printed above the keys Pressing blue key again changes to normal mode Indicator turns o Green key Changes entry mode to green key shift mode This mode is e ective for the next ...

Страница 28: ...Introducing the HP 4155A 4156A Overview of HP 4155A 4156A Rear View of HP 4155A 4156A Figure 1 2 Rear View of HP 4155A 4156A 1 9 ...

Страница 29: ...For oating measurement remove the shorting bar HP part number 5000 4206 W A R N I N G Do not oat the Circuit Common terminal at voltages greater than 642 V referenced to frame ground Failure to heed this warning may result in damage to HP 4155A 4156A Serial number You need this serial number when using the telephone assistance program HP HelpLine Voltage selector Voltage selector must be in proper...

Страница 30: ...one for trigger output L Intlk terminal Used in conjunction with interlock function of HP 4155A 4156A If the Intlk terminal is open maximum SMU output is limited to 640 V Be sure to connect this terminal to HP 16442A test xture or connector plate before performing measurement If you use connector plate you must install interlock circuit For details on how to install the interlock circuit see To Co...

Страница 31: ...verview of HP 4155A 4156A Front and Rear View of HP 41501A Figure 1 3 Front and Rear View of HP 41501A LINE switch Use the LINE switch to turn HP 41501A on and o You must turn on the HP 41501A before turning on the HP 4155A 4156A 1 12 ...

Страница 32: ... position Line voltage and position are Line Voltage Position 90 132 Vac left 198 264 Vac right LINE input receptacle AC power cable is connected to this receptacle Serial number The HP 41501A has its own serial number You need this serial number when using the telephone assistance program HP HelpLine GNDU connector The GNDU connector is a triaxial connector inner conductor is sense middle conduct...

Страница 33: ...e Generator Trig Out terminal Trigger pulses synchronized with PGU pulses are output This trigger is used to synchronize the PGU pulse outputs with external pulse generators You cannot change the parameters of this trigger For details about PGU trigger see Measurement Functions in HP 4155A 4156A User s Dictionary Reference To SMU Pulse Generator Selector Interface D SUB 15 pin connector is used to...

Страница 34: ...rview of HP 4155A 4156A Option 410 HP 41501A Option 410 has one HPSMU Figure 1 5 Rear View of HP 41501A Option 410 HPSMU terminals There are two triaxial connectors for Kelvin connections one is for force and the other is for sense 1 15 ...

Страница 35: ... conductor is force and outer conductor is circuit common Ext Pulse Generator Trig Out terminal Trigger pulses synchronized with PGU pulses are output This trigger is used to synchronize the PGU pulse outputs with external pulse generators You cannot change the parameters of this trigger For details about PGU trigger see Measurement Functions in HP 4155A 4156A User s Dictionary Reference To SMU Pu...

Страница 36: ...155A 4156A Option 420 HP 41501A Option 420 has two MPSMUs Figure 1 7 Rear View of HP 41501A Option 420 MPSMU terminals Two MPSMUs are installed and each MPSMU has a triaxial connector But these connectors are not designed for Kelvin connections 1 17 ...

Страница 37: ...ors Inner conductor is force and outer conductor is circuit common Ext Pulse Generator Trig Out terminal Trigger pulses synchronized with the PGU pulses are output This trigger is used to synchronize the PGU pulse outputs with external pulse generators You cannot change the parameters of this trigger For details about PGU trigger see Measurement Functions in HP 4155A 4156A User s Dictionary Refere...

Страница 38: ...An Overview of Functions HP 4155A 4156A has the following useful functions Operation and control Measurements and results display Graphical analysis Data storage Plotting and printing 1 19 ...

Страница 39: ... measurement parameters and conditions set results display mode and so on After you execute the measurement measurement results are displayed on result pages When you operate from the front panel the basic page ow is as follows 1 channel de nition 2 source setup 3 display setup 4 results display Also HP 4155A 4156A can be controlled via HP IB by external controller such as an HP 9000 computer To c...

Страница 40: ... control the HP 4155A 4156A instead of using an external controller This eliminates the need for an external controller so required working space is reduced When you develop measurement programs using the built in HP Instrument BASIC environment of the HP 4155A 4156A you use the HP 4155A 56A remote commands See the HP 4155A 4156A Programmer s Guide and HP IB Command Reference 1 21 ...

Страница 41: ...and sampling measurement These two types of measurements cannot be executed at the same time Sweep measurement For sweep measurements an SMU or a VSU can become a primary sweep source secondary sweep source synchronous sweep source or constant source For example you can perform sweep measurements to get an Ic Vce curve of a bipolar transistor as in the following example In the example above a prim...

Страница 42: ...ce units output constant values and measurements are executed by each unit at the speci ed intervals For example you can get an integration curve of an RC integrator by sampling measurement as follows In the example above measurements by the monitor unit start when the source unit outputs the speci ed value 1 23 ...

Страница 43: ...arameters and conditions on the results page without returning to the setup page Knob sweep For knob sweep measurement you can vary the sweep range by rotating the rotary knob The knob sweep function is useful when you need to quickly make a rough measurement of your DUT characteristics You only need to de ne the channel assignments then you can start the knob sweep measurement You can also change...

Страница 44: ...nt to point speci ed by marker on measurement curve Regression line regression line for area speci ed by two cursors X Y intercept values and gradient of each line are automatically displayed so you can get values such as threshold voltage Vth and Early voltage VA Also you can setup the auto analysis page to position marker and lines at desired location automatically after measurement nishes For e...

Страница 45: ... in Spreadsheet Format in Chapter 5 Also you can load information from the diskette to the HP 4155A 4156A The allowable disk formats are MS DOS R and HP LIF The MS DOS R format is the most popular disk format which allows you to use the diskette in many types of computers The HP 4155A 4156A is upwardly compatible with the HP 4145B so you can load setting information that was created by the HP 4145...

Страница 46: ...plotter or printer to the HP 4155A 4156A via serial interface or HP IB interface See Chapter 2 for information about installing your plotter or printer Also you can store setup data measurement results and screen images on diskette les The stored data les can be read by other computers So you can create reports that include measurement curves or data by using spreadsheet software such as Lotus R 1...

Страница 47: ...Introducing the HP 4155A 4156A An Overview of Functions ...

Страница 48: ...2 Installation ...

Страница 49: ...an electric ground safety ground If you do not use HP 16442A Test Fixture make sure to connect the INTLK terminal to a switch that turns o when the shielding box access door is opened Con rm periodically that INTLK function works normally Before touching the connections of the force guard and sense terminals turn the HP 4155A 4156A o and discharge any capacitors whenever possible If you do not tur...

Страница 50: ...Requirements This section describes the following requirements Power requirements Power cable Ventilation requirements Operating environment 2 3 ...

Страница 51: ...ircuit the fuse holder The HP 4155A 4156A can operate from any single phase ac power source supplying 100 120 V or 220 240 V in the frequency range from 50 to 60 Hz The maximum power consumption is 600 VA for HP 4155A 4156A and 450 VA for HP 41501A For details see Speci cations in HP 4155A 4156A User s Dictionary Reference The line voltage selector switch is set at the factory for your area But yo...

Страница 52: ...ower cable shipped with each instrument depends on the country of destination Refer to Figure 2 1 for the part numbers of the power cables available Plug BS 1363A 250 V Cable HP 8120 1351 Plug NZSS 198 AS C112 250 V Cable HP 8120 1369 Plug CEE VII 250 V Cable HP 8120 1689 Plug NEMA 5 15P 125 V 15 A Cable HP 8120 1378 Plug NEMA 6 15P 250 V 15 A Cable HP 8120 0698 Plug SEV 1011 1959 24507 Type 12 25...

Страница 53: ... it This work should be performed by a quali ed electrician all local electrical codes being strictly observed The color coding used in the cable will depend on the cable supplied If a new plug is to be connected it must meet local safety requirements and include the following features Adequate load carrying capacity see table of Speci cations in HP 4155A 4156A User s Dictionary Reference Ground c...

Страница 54: ...internal operating temperature will be higher reducing the instrument s reliability or causing the instrument s thermal protection circuits to automatically switch o the instrument Operating Environment The HP 4155A 4156A and HP 41501A must be operated within the following environmental conditions Temperature 5 C to 40 C 41 F to 104 F Humidity 15 to 80 RH at 40 C 104 F Cleaning To prevent electric...

Страница 55: ...Accessories Inspect the following items when the HP 4155A 4156A and accessories arrive at your site and when you open the boxes that contain the HP 4155A 4156A and accessories When the HP 4155A 4156A and accessories arrive at your site and before unpacking any components inspect all boxes for any signs of damage that might have occurred during shipment such as Dents Scratches Cuts Water marks If y...

Страница 56: ...labeled To Expander Box Interface from the rear panel of the HP 4155A 4156A 4 Insert the interface board from the HP 41501A into the HP 4155A 4156A then attach it with the thumbscrews W A R N I N G The HP 4155A 4156A together with the HP 41501A weighs about 40 kg 88 4 lb The HP 4155A 4156A is just placed on top of the HP 41501A without attaching it securely So be very careful when handling 2 9 ...

Страница 57: ...1501A is also installed connect the power cable between the HP 41501A and the outlet 4 If the HP 41501A is installed press the LINE button to switch on 5 Press the LINE button to switch on the HP 4155A 4156A The initialization screen appears on the CRT of the HP 4155A 4156A 6 After initialization nishes the CHANNELS CHANNEL DEFINITION page appears as follows 7 Make sure the units displayed in the ...

Страница 58: ...he HP 41501A 8 If HP 41501A units are not displayed in UNIT column turn o the HP 4155A 56A and HP 41501A then make sure that interface board of HP 41501A is rmly inserted into HP 4155A 56A Turn on HP 41501A then turn on HP 4155A 56A 9 Press 4System5 front panel key then select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN MISCELLANEOUS primary softkey Con rm that POWER LINE FREQUENCY eld is correct fr...

Страница 59: ...w To install connector plate To connect interlock terminal To install HP 16442A Test Fixture To install HP 16441A R Box To install HP 16440A SMU Pulse Generator Selector To connect HP 16440A to HP 4155A 4156A When you install a keyboard HP C1405B connect the connector of the keyboard to the keyboard interface on the front panel before switching on the HP 4155A 4156A The HP 4155A 4156A recognizes t...

Страница 60: ... 4 To prevent electric shock make sure to install interlock circuit See To Connect Interlock Terminal 5 Connect the furnished cables between the HP 4155A 4156A and connector plates For details about connections between HP 4155A 4156A and the terminals on the connector plates refer to To Install HP 16442A Test Fixture in this chapter Connections to connector plate are similar to connections to test...

Страница 61: ...he following To prevent the operator from receiving an electric shock from the output voltage or current of the HP 4155A 4156A To minimize the e ects of environmental noise and ambient light For details on how to connect terminals of connector plate and DUTs refer to Connection to Device Under Test DUT in Chapter 3 Figure 2 2 Dimensions of Connector Plate for HP 4155A HP Part Number 04155 60006 2 ...

Страница 62: ...able 2 1 Connectors on Connector Plate Connector HP Part Number Triaxial 1250 1906 for SMU GNDU Coaxial BNC 1250 0083 for VSU VMU PGU Interlock 1252 1419 Figure 2 3 Dimensions of Connector Plate for HP 4156A HP Part Number 04156 60002 2 15 ...

Страница 63: ...Installation Installing Accessories Figure 2 4 Dimensions of Connector Plate for HP 41501A HP Part Number 41501 60004 2 16 ...

Страница 64: ...tric shock When you use the HP 16442A test xture you do not have to install an interlock circuit because the HP 16442A has a built in interlock circuit The upper part of the following shows the interlock circuit you need to make in your shielding box and the lower part shows the pin assignments of the interlock connector on the connector plate 2 17 ...

Страница 65: ...s are shorted this function is disabled So you can force more than 640 V W A R N I N G Dangerous voltages of up to the maximum voltage of SMUs may be present at force guard and sense terminals when the interlock terminals are shorted HP 16435A Interlock Cable Adapter If you already have a connector plate or test xture that has a BNC coaxial connector for interlock such as the HP 16088B test xture ...

Страница 66: ...This warning indicator is not valid when you use the HP 16088B test xture with the HP 4155A 4156A by using HP 16435A interlock cable adapter LED terminal When more than 640 V is forced from an SMU the LED lights to indicate high voltage output recommended parts You can get the following parts from Hewlett Packard HP Part Number Description 3101 3241 switch 3101 0302 switch 1450 0641 LED VF 2 1 V I...

Страница 67: ...Installation Installing Accessories Figure 2 5 Dimensions of Interlock Switch HP part number 3101 0302 Figure 2 6 Dimensions of Interlock Switch HP part number 3101 3241 2 20 ...

Страница 68: ...to display the SYSTEM SELF CALIBRATION DIAGNOSTICS page 3 In the CALIB DIAG eld select NNNNNNNNNNNNNN DIAG secondary softkey 4 In the CATEGORY eld select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN I O PERIPH secondary softkey 5 Move pointer to the 403 INT Interlock LED eld 6 Select NNNNNNNNNNNNNNNNNNNNNNN EXECUTE secondary softkey 7 Con rm the following LED turns on within 1 sec from when interlock ci...

Страница 69: ...connect the GNDU to a DUT The GNDU can sink up to 1 6 A and the maximum current rating of the cable is 1 A Kelvin connections Use a low noise coaxial cable part number 8120 3674 from the connector plate to DUT as shown in the following gure To cancel the e ects of cable resistance connect the sense line as close as possible to the terminal of the DUT 2 22 ...

Страница 70: ... AWG 22 single strand insulated wire part number 8150 2639 from the connector plate to the DUT Measurement results include the residual resistance of the connection wire To easily connect GNDU for a measurement in which the accuracy is not important connect only force to the DUT without shorting sense and force 2 23 ...

Страница 71: ...y capacitors C A U T I O N Never connect the guard terminal to any output including circuit common chassis ground or the guard terminal of any other unit Doing so may result in an emergency condition Kelvin connections Use low noise coaxial cable part number 8120 4461 from connector plate to DUT as shown in following gure To cancel e ects of cable resistance connect sense line as close as possible...

Страница 72: ...nnections are shown in following gure Measurement results include residual resistance from the connection wire To enable highly accurate current forcing and measurements while minimizing leakage surround all force lines from SMU by a guard as far as possible 2 25 ...

Страница 73: ...T E When you make a connection by using low noise coaxial cable part number 8120 4461 shave the Conductive layer and the Insulator clear by knife so that the Center Conductor is insulated from the Conductive layer Refer to following gure 2 26 ...

Страница 74: ...ories VSU and VMU connections The following gure shows an example of a connection between VSU1 VSU2 VMU1 or VMU2 and a DUT Use AWG 24 single strand insulated wire part number 8150 0447 to connect the connector plate and the DUT 2 27 ...

Страница 75: ...ions Regardless of output impedance setting use a low noise coaxial cable part number 8120 0102 from the connector plate to the DUT as shown in the following gure If you use HP 16440A selector use a low noise coaxial cable part number 8120 4461 2 28 ...

Страница 76: ... sure that HP 4155A 4156A and HP 41501A are turned o When you use HP 16442A test xture without HP 16441A R Box or HP 16440A selector you can make HP 16442A stable by using stabilizers as shown in the following gure 1 Put a stabilizer on both sides of test xture 2 Screw a athead screw into hole of each stabilizer 2 29 ...

Страница 77: ...onnect the following by using 3 0 m or 1 5 m coaxial cables VMU terminals HP 4155A VMU terminals HP 16442A 4 Connect the following by using 3 0 m or 1 5 m triaxial cables MPSMU terminals HP 4155A SMU terminals HP 16442A W A R N I N G MPSMUs force dangerous voltage of up to 6100 V at the Force Sense and Guard terminals To prevent electric shock do not expose these lines C A U T I O N Never connect ...

Страница 78: ...ct the following by using 3 0 m or 1 5 m coaxial cables VMU terminals HP 4156A VMU terminals HP 16442A 4 Connect the following by using 3 0 m or 1 5 m Kelvin triaxial cables HRSMU terminals HP 4156A SMU terminals HP 16442A W A R N I N G HRSMUs force dangerous voltage of up to 6100 V at the Force Sense and Guard terminals To prevent electric shock do not expose these lines C A U T I O N Never conne...

Страница 79: ... HP 16442A 3 If the HP 41501A is equipped with two PGUs connect the following by using 3 0 m or 1 5 m coaxial cables PGU terminals HP 41501A PGU terminals HP 16442A 4 Do the following If the HP 41501A is equipped with two MPSMUs connect the following by using 3 0 m or 1 5 m triaxial cables MPSMU terminals HP 41501A SMU terminals HP 16442A If the HP 41501A is equipped with HPSMU connect the followi...

Страница 80: ...of up to 6200 V at the Force Sense and Guard terminals To prevent electric shock do not expose these lines C A U T I O N Never connect the Guard terminal to any output including circuit common chassis ground or other guard terminal Doing so will damage SMU damage Installing HP 16442A test xture with other accessories The HP 16442A test xture can be installed with an HP 16441A R box HP 16440A selec...

Страница 81: ...ting HP 4155A or MPSMUs of HP 41501A MPSMU terminals HP 4155A HP 41501A SMU terminals HP 16088B 2 To prevent electric shock be sure to connect Intlk terminal HP 4155A 4156A and INTLK terminal HP 16088B as follows a Connect the following by using 3 0 m or 1 5 m Intlk cable furnished with HP 4155A 4156A Intlk terminal HP 4155A 4156A 16435 61001 INTLK CABLE ADAPTER b Connect the following by using co...

Страница 82: ...trol cable To R Box terminal HP 4155A 4156A Control terminal HP 16441A 2 Connect the following by using 3 0 m or 1 5 m triaxial cables when connecting HP 4155A or MPSMUs of HP 41501A MPSMU terminals HP 4155A HP 41501A Input Force terminals HP 16441A 3 0 m or 1 5 m Kelvin triaxial cables when connecting HP 4156A or HPSMU of HP 41501A HRSMU or HPSMU terminals HP 4156A HP 41501A Input terminals HP 16...

Страница 83: ...nnecting HP 4156A or HPSMU of HP 41501A Output Force terminals HP 16441A SMU terminals HP 16442A or connector plate Output Sense terminals HP 16441A SMU terminals HP 16442A or connector plate Installing HP 16441A R box with other accessories You can attach the HP 16441A R box to the HP 16442A test xture or to your shielding box The following gures show how to attach the HP 16441A R box Attaching H...

Страница 84: ...Installation Installing Accessories Attaching HP 16441A R Box to Shielding Box 2 37 ...

Страница 85: ...must be equipped with an HP 41501A SMU Pulse Generator Expander that has two PGUs Attaching your HP 16440A selector to HP 16442A test xture 1 Put the HP 16440A selector on your workbench 2 Put the HP 16442A test xture on top of HP 16440A selector 3 Put a plate on both sides 4 Screw the three furnished athead screws into each plate 2 38 ...

Страница 86: ...ip the following steps 5 Put the HP 16440A selector expander on your workbench Then put the HP 16440A selector and HP 16442A test xture that were attached in the previous steps on top of the HP 16440A selector expander 6 Put a plate on both sides 7 Screw the three furnished athead screws into each plate 2 39 ...

Страница 87: ...Installation Installing Accessories You can also attach an HP 16441A R Box to the HP 16442A test xture and HP 16440A selector as follows Attaching R Box to Test Fixture and Selector 2 40 ...

Страница 88: ...ion Installing Accessories Attaching HP 16440A selector to a shielding box The following gure shows the spacing of the HP 16440A screw holes You need to prepare four screws and nuts to match the screw holes 2 41 ...

Страница 89: ...h the HP 16440A selector connect the selector expander as follows before connecting to the shielding box 1 Put the selector expander on your workbench 2 Put the selector on top of selector expander 3 Put a plate on both sides 4 Screw the three furnished athead screws into each plate 2 42 ...

Страница 90: ...previous procedure to shielding box as follows 1 Attach an angle to both sides of HP 16440A by using the furnished screws 2 Put the HP 16440A s on the side panel of your shielding box 3 Put four nuts on the inside panel of your shielding box 4 Screw four athead screws into the side panel 2 43 ...

Страница 91: ...Installation Installing Accessories You can also attach an HP 16441A R Box to the HP 16440A selector on the shielding box as follows Attaching HP 16441A R Box 2 44 ...

Страница 92: ...or to HP 4155A 56A Connecting HP 16440A selector to HP 16440A selector expander If you use selector expander connect selector to selector expander by using 40 cm control cable as follows CONTROL Output terminal selector CONTROL Input terminal selector expander 2 45 ...

Страница 93: ...rminal HP 41501A Repeat following steps for desired channels of selector or expander 2 Connect the following by using a 3 0 m or 1 5 m triaxial cable Input SMU terminal selector SMU terminal HP 4155A 56A or HP 41501A 3 Connect the following by using a 3 0 m or 1 5 m coaxial cable Input PGU terminal selector PGU terminal HP 41501A 4 Connect the following by using a 40 cm triaxial cable Output Selec...

Страница 94: ...3 Making a Measurement ...

Страница 95: ... organized into the following four sections Connection to Device Under Test DUT Sweep Measurements Knob Sweep Measurements Sampling Measurements Stress Force For details about how to enter or input setup data refer to Page Organization in HP 4155A 4156A User s Dictionary Reference To satisfy the speci cations of HP 4155A 4156A and HP 41501A measurement accuracy perform calibration and adjustment e...

Страница 96: ...your wafer prober see your wafer prober manuals Note that you must set the HP 4155A 4156A to the idle state when connecting or disconnecting your DUTs If not the DUTs may be damaged To set to idle state press 4Stop5 key and make sure Standby indicator is o The HP 4156A is designed for Kelvin connections See To Make Connections to Measure Low Resistance For HP 4156A Only for Kelvin connection theor...

Страница 97: ...id of the test xture if necessary When the HP 4155A 4156A forces more than 640 V close the lid of the test xture Otherwise the interlock function will stop the HP 4155A 4156A output C A U T I O N Do not connect or disconnect your DUT and HP 4155A 4156A while the HP 4155A 4156A is forcing voltage or current Otherwise your DUT may be damaged To connect the DUT on the test xture you can use cables th...

Страница 98: ...ent you may want to use a Kelvin 4 wire connection to eliminate the residual resistance e ects of test leads and contacts For example you can use the following connections as Kelvin connections on the test xture Examples Kelvin Connection To cancel the e ects of the residual resistance test leads must be connected as close as possible to the DUT 3 5 ...

Страница 99: ...extend the guard conductor as close as possible to the DUT W A R N I N G Do not touch the guard terminal with bare hands because you may be shocked by high voltage The potential of the guard terminal is equal to the output voltage C A U T I O N Never connect the guard terminal to any other output including circuit common frame ground or the guard terminal of any other unit Doing so may damage the ...

Страница 100: ...tant when you measure low current The following gure shows the theory of guarding The bu er ampli er 21 keeps the potential of the guard conductor at the same potential as the force conductor so current does not ow between the force and guard conductors Therefore the current measured by SMU is same as current at measurement point because no current is leaked 3 7 ...

Страница 101: ... resistance of cables and contacts To cancel the e ect of this resistance you can use Kelvin connections 4 wire which means the force and sense lines are extended separately to the DUT Example The following example connection can be used to measure low resistance The sense point of the voltage measurement is at the contact pad so the voltage due to the residual resistance between the instrument an...

Страница 102: ...RDUT only The impedance of the voltmeter is very high so the voltage drop of resistances rS1 and rS2 is very small The Kelvin connection is e ective even when forcing voltage The voltage drop due to the residual resistance of the force line wiring is fed back to the voltage source via a comparator in the sense line thereby ensuring the speci ed voltage output at the sense point point where force a...

Страница 103: ...re to test your DUT is as follows 1 Connecting your DUT to the HP 4155A 4156A See Connection to Device Under Test DUT for procedures 2 De ning measurement mode and measurement units that you use to make measurement The following tasks are described To De ne Sweep Measurement Units To De ne a User Function To Control R Box 3 10 ...

Страница 104: ...Output To Set up SMU Pulsed Output To Set up PGU Pulsed Output 4 Setting the display mode to show measurement results The following tasks are described To Set up Graphical Display of Measurement Results To Set up List Display of Measurement Results 5 Executing the measurement The following tasks are described To Output Same Value Before and After Measurements To Execute or Stop Measurement Results...

Страница 105: ...MODE column select NNNNNNNNNNN V secondary softkey for voltage output mode SMU VSU and PGU and grounded voltage measurement mode of VMU NNNNNNNNNNN I secondary softkey for current output mode SMU NNNNNNNNNNNNNNNNNNNN VPULSE secondary softkey for pulsed voltage output mode SMU and PGU NNNNNNNNNNNNNNNNNNNN IPULSE secondary softkey for pulsed current output mode SMU NNNNNNNNNNNNNNNNNNNN COMMON second...

Страница 106: ...55A 4156A User s Dictionary Reference To disable a unit Move the pointer to the row of the unit then select the NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN DELETE ROW secondary softkey The settings in the row are deleted Example The following settings show an example for measuring an n p n transistor s I V characteristics SMU1 is connected to base SMU2 is connected to collector and SMU3 is connected to emitt...

Страница 107: ...y softkey to set linear step mode NNNNNNNNNNNNNNNNNNNN LOG XX secondary softkey to set logarithmic step mode XX is 10 25 or 50 which speci es the number of steps per decade 6 In the START eld of the VAR1 column enter the start value 7 In the STOP eld of the VAR1 column enter the stop value 8 In the STEP eld of the VAR1 column enter the step value The NO OF STEP is automatically calculated from the...

Страница 108: ...Making a Measurement Sweep Measurements Example The following example shows the primary sweep conditions VAR1 parameters 3 15 ...

Страница 109: ...y sweep source you also need to set up primary sweep source For details of how to set up primary sweep source refer to To Set up Primary Sweep Source For secondary sweep source the following is always set automatically SWEEP MODE is set to SINGLE and LIN LOG is set to LINEAR You cannot modify the SWEEP MODE and LIN LOG elds for the secondary sweep source The STOP value is automatically calculated ...

Страница 110: ...Making a Measurement Sweep Measurements Example The following example shows the secondary sweep conditions VAR2 parameters 3 17 ...

Страница 111: ...e of VAR1 is calculated by the following equation V AR10 V AR1 2RATIO OFFSET To output synchronous sweep source you also need to set up primary sweep source VAR1 For details of how to set up VAR1 refer to To Set up Primary Sweep Source VAR1 and VAR1 must both be voltage output mode or both current output mode For example if VAR1 is V output mode then VAR1 must be V or VPULSE output mode To change ...

Страница 112: ...Making a Measurement Sweep Measurements Example The following example shows the synchronous sweep conditions VAR1 parameters 3 19 ...

Страница 113: ...CONTROL key group 3 Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN SWEEP SETUP primary softkey 4 In the SOURCE eld of the desired unit in the CONSTANT area enter the desired output value To modify the UNIT NAME and MODE elds Modify the UNIT NAME and MODE elds on the CHANNELS CHANNEL DEFINITION page Example The following example shows the constant output conditions 3 20 ...

Страница 114: ... CONSTANT area 5 In the PERIOD eld of the SMU PULSE area enter the pulse period value 6 In the WIDTH eld of the SMU PULSE area enter the pulse width value 7 In the BASE eld of the SMU PULSE area enter the pulse base value On the CHANNEL DEFINITION page you can set only one SMU to be a pulsed source Then you set the pulse parameters in the SMU PULSE area of the SWEEP SETUP page The relation between...

Страница 115: ...nt Sweep Measurements The pulse peak values depend on the values you set in the VAR1 VAR1 VAR2 or CONSTANT area To modify the UNIT and NAME elds Modify the UNIT and NAME elds on the CHANNELS CHANNEL DEFINITION page 3 22 ...

Страница 116: ...Making a Measurement Sweep Measurements Example The following shows an example setup of SMU pulsed output on the MEASURE SWEEP SETUP page 3 23 ...

Страница 117: ...d of desired PGU column enter pulse base value 9 In the LEADING TIME eld of desired PGU column enter the leading edge transition time 10 In the TRAILING TIME eld of desired PGU column enter the trailing edge transition time 11 In the IMPEDANCE eld of desired PGU column select NNNNNNNNNNNNNNNNN LOW secondary softkey for approximately zero ohm output impedance NNNNNNNNNNNNNNNNNNNNNNNNNN 50 ohm secon...

Страница 118: ...h has a 100 mA current limit To modify the UNIT and NAME elds Modify the UNIT and NAME elds on the CHANNELS CHANNEL DEFINITION page Using PGUs as Constant Voltage Source To use a PGU as a constant voltage source set the desired PGU as follows V in MODE column on the CHANNEL DEFINITION page Desired output voltage value in SOURCE eld on MEASURE PGU SETUP page 3 25 ...

Страница 119: ...Making a Measurement Sweep Measurements Example The following example shows setup of PGU pulsed output on the MEASURE PGU SETUP page 3 26 ...

Страница 120: ...NNNNNN STANDBY ON the units have the following output value during the Standby state that is before and after measurements or stress Function of a Unit Output during Standby State VAR1 VAR1 Start value VAR1 Ratio 2 Start O set VAR2 VAR2 Start value CONSTANT Output value For sampling measurements only the CONSTANT function is available From Standby state you can execute measurements or force stress...

Страница 121: ...phanumeric characters First character must be alphabet character Name must be unique Name is case sensitive For example HFE is di erent from Hfe In the user function de nition you can enter an expression that consists of any of the following VNAME and INAME names that you entered on the CHANNELS CHANNEL DEFINITION page Other user functions Numerical operators Built in functions such as DELTA and S...

Страница 122: ...Making a Measurement Sweep Measurements Example The following gure shows an example setup to de ne Hfe 3 29 ...

Страница 123: ...n Y2axis column When the pointer is in the NAME row the allowable variable names appear in the secondary softkey area To set a variable name select the desired secondary softkey The allowable names are names that you already set up on the CHANNEL DEFINITION USER FUNCTION and USER VARIABLE pages To display a grid on the plotting area In GRID eld select NNNNNNNN ON secondary softkey To remove the gr...

Страница 124: ...Making a Measurement Sweep Measurements Example The following gure shows an example to set up both Y1 and Y2 axes and to set grid to ON 3 31 ...

Страница 125: ...e variables for which you want to list the measurement results When the pointer is in the NAME row the allowable variable names appear in the secondary softkey area To set a variable name select the desired secondary softkey The allowable names are names that you already set up on CHANNEL DEFINITION USER FUNCTION and USER VARIABLE pages To set up variable to be displayed on the LIST page In DATA V...

Страница 126: ...peat and Append Measurement There are three measurement execution modes as follows Single measurement Clears GRAPHICS or LIST page then executes measurement one time Measurement results are displayed on GRAPHICS or LIST page Repeat measurement Executes measurements continuously Before each measurement is executed the GRAPHICS or LIST page is cleared Most recent measurement results are displayed on...

Страница 127: ...to connect 10 k resistance NNNNNNNNNNNNNNNNNNNNNNNNNN 100k ohm secondary softkey to connect 100 k resistance NNNNNNNNNNNNNNNNNNNN 1M ohm secondary softkey to connect 1 M resistance Resistance is switched just before and just after measurement state In the standby state the stress force state and the idle state 0 is connected HP 4155A 4156A automatically compensates for the resistance values For th...

Страница 128: ...Making a Measurement Sweep Measurements Example The following gure shows an example setup to connect 10 k resistance to SMU1 and SMU2 3 35 ...

Страница 129: ...p Measurements To Measure Negative Resistance Characteristics HP 16441A R Box allows SMUs to measure current controlled negative resistance 1 M characteristics Connect the resistance of HP 16441A as shown in following gure 3 36 ...

Страница 130: ...cute knob sweep measurement To stop knob sweep measurement The knob sweep function is useful in the following cases when you want to determine a parameter value for normal sweep when you want to quickly make a rough measurement of a DUT characteristics The following gure shows the KNOB SWEEP page 3 37 ...

Страница 131: ...primary softkey to display DISPLAY SETUP secondary key group 6 Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN X AXIS REGION secondary softkeys to set the desired X axis display region Selecting the NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN X AXIS REGION secondary softkey toggles as follows 0 0 0 7 Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN Y AXIS REGION secondary softkeys to set the desire...

Страница 132: ...ce function for knob sweep measurement To change the variable assigned to y axis Do as follows 1 Press 4Stop5 front panel key 2 Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN Y AXIS ASSIGN primary softkey 3 Select a secondary softkey to assign the desired variable name to y axis The available variables are the variables you entered in the INAME and VNAME columns of the CHANNELS CHANNEL DEFINITIO...

Страница 133: ...asurement as follows If VAR1 is set in the FCTN eld on the CHANNELS CHANNEL DEFINITION page The channel that is set to VAR1 set to CONST output value VAR1 start So synchronous measurement is not performed If an SMU is set to VPULSE or IPULSE the MODE eld on the CHANNELS CHANNEL DEFINITION page Non pulsed sweep measurement is performed If the POWER COMP elds are set on the MEASURE SWEEP SETUP page ...

Страница 134: ...Making a Measurement Knob Sweep Measurements Example The following gure shows an example to set both X axis and Y axis display regions to positive 3 41 ...

Страница 135: ...tarting knob sweep again after pressing 4Stop5 front panel key If you stop knob sweep measurement then start the measurement again the measurement start point depends on how you start the measurement started by 4Single5 front panel key only If you press the 4Single5 front panel key the knob sweep measurement starts from the point where it was stopped by 4Stop5 front panel key started by green key ...

Страница 136: ...UT is as follows 1 Connecting your DUT to the HP 4155A 4156A See Connection to Device Under Test DUT for procedures 2 De ning measurement mode and measurement units that you use to make measurement The following tasks are described To De ne Sampling Measurement Units To De ne a User Function see previous section To Control R Box see previous section 3 43 ...

Страница 137: ...on 4 Setting the display mode to show measurement results The following tasks are described To Set up Graphical Display of Measurement Results see previous section To Set up List Display of Measurement Results see previous section 5 Executing the measurement The following tasks are described To Output Same Value Before and After Measurements see previous section To Execute or Stop Measurement see ...

Страница 138: ...y softkey for voltage output mode SMU VSU and PGU and grounded voltage measurement mode of VMU NNNNNNNNNNN I secondary softkey for current output mode SMU NNNNNNNNNNNNNNNNNNNN VPULSE secondary softkey for pulsed voltage output mode PGU NNNNNNNNNNNNNNNNNNNN COMMON secondary softkey for circuit common mode SMU and GNDU NNNNNNNNNNNNNNNNN DVOLT secondary softkey for di erential voltage measurement mod...

Страница 139: ...e a unit Move the pointer to the row of the unit then select the NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN DELETE ROW secondary softkey The settings in the row are deleted Example The following gure shows an example setup to de ne sampling measurement units 3 46 ...

Страница 140: ...mically spaced sampling intervals XX is 10 25 or 50 sampling points per decade NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN THINNED OUT secondary softkey for reduced sampling interval of more recent samples by thinning less recent samples For details about sampling mode see Measurement Mode in HP 4155A 4156A User s Dictionary Reference 5 In the INITIAL INTERVAL eld enter a value for the rst sampling interv...

Страница 141: ...Making a Measurement Sampling Measurements You can set a hold time by entering a number units seconds in the HOLD TIME eld Example The following gure shows example setup of the sampling parameters 3 48 ...

Страница 142: ...N SAMPLNG SETUP primary softkey 4 In the SOURCE eld of the desired unit in the CONSTANT area enter the desired output value To modify the UNIT NAME and MODE elds Modify the UNIT NAME and MODE elds on the CHANNELS CHANNEL DEFINITION page To set up compliance value for constant output Set desired value in the COMPLIANCE eld of the CONSTANT table For details about compliance see Compliance in HP 4155...

Страница 143: ...Making a Measurement Sampling Measurements Example The following example shows the constant output conditions 3 50 ...

Страница 144: ...mpling when the sampled value is greater than the threshold value NNNNNNNNNNNNNNNNNNNNNNNNNN Val Th secondary softkey to stop the sampling when the sampled value is less than the threshold value NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN Val Th secondary softkey to stop the sampling when the absolute sampled value is greater than the absolute threshold value NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN Val ...

Страница 145: ...ing a Measurement Sampling Measurements You can set an EVENT NO which speci es the sampling to stop when EVENT occurs EVENT NO times Example The following gure shows an example setup of stop condition 3 52 ...

Страница 146: ...6A dc stress Dc voltage stress can be forced from SMUs VSUs or PGUs Dc current stress can be forced from SMUs ac stress also called pulsed stress Ac voltage stress can be forced from PGUs Ac current stress cannot be forced from the HP 4155A 4156A Basic Procedure for Stress Forcing The following illustrates the basic procedures for stress forcing 3 53 ...

Страница 147: ...nits The following tasks are described To Set up Stress Source Channels To Control Selector for Switching SMU and PGU 3 Setting the stress forcing parameters and constant output value The following tasks are described To Set up Stress Conditions Timings To Set up DC Stress To Set up AC Pulse Stress 4 Executing the stress forcing The following task is described To Force Stress 3 54 ...

Страница 148: ...CTN eld of units that will be stress force channels select NNNNNNNNNNNNNN SYNC secondary softkey The stress channel name is only used for reference on the STRESS SETUP page not on any results page So you can omit the name if desired In the FCTN column you can set up to four units to SYNC At least one unit must be set to SYNC in the FCTN column The SYNC stress force units all start forcing stress a...

Страница 149: ...owing procedure 1 Perform rst 3 steps described above 2 In the FCTN eld select NNNNNNNNNNNNNNNNN NSYNC secondary softkey If you use two PGUs as pulsed sources VPULSE both must be SYNC or both NSYNC Example The following gure shows an example setup to set two PGUs to ac stress source 3 56 ...

Страница 150: ...orcing the stress even if an abnormal status occurs NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN STOP AT ANY ABNORM secondary softkey to stop forcing the stress when any abnormal status occurs NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN STOP AT COMPLIANCE secondary softkey to stop forcing the stress only when SMU reaches its compliance setting NNNNNNNNNNNNNNNNNNNNNNNNNNNNN...

Страница 151: ...Current of VSU exceeds 6100 mA SMU or VSU oscillates A D converter over ow occurs Average current of PGU exceeds 6100 mA To set hold time In the HOLD TIME eld set desired value For the meaning of hold time see Stress Force Sequence in Measurement Function of HP 4155A 4156A User s Dictionary Reference 3 58 ...

Страница 152: ...etup of stress condition Setting the Accumulated Stress Time The ACCUMULATED STRESS eld shows the total stress that has been forced If necessary you can change the value in this eld If so the ACCUMULATED STRESS eld on the STRESS STRESS FORCE page also changes to the new value 3 59 ...

Страница 153: ...wing gure 6 In the PEAK VALUE eld enter the pulse peak value 7 In the BASE VALUE eld enter the pulse base value 8 In LEADING TIME eld enter the leading edge transition time of pulse 9 In TRAILING TIME eld enter the trailing edge transition time of pulse The same period you set for PGU1 is also used for PGU2 For the other parameters you can set di erent values for PGU1 and PGU2 To set other areas o...

Страница 154: ...Making a Measurement Stress Force The following gure shows the meaning of delay time Example The following gure shows an example to set up ac stress 3 61 ...

Страница 155: ...ry softkey 3 In the SOURCE eld for the desired unit in the CONSTANT area enter the desired dc stress value 4 In the COMPLIANCE eld in the CONSTANT area enter the compliance value The non stress NSYNC constant units also appear in the CONSTANT area You can set SOURCE and COMPLIANCE values for these units the same way as you set the dc stress units To set other areas of the STRESS STRESS SETUP page ...

Страница 156: ...Making a Measurement Stress Force Example The following gure shows an example setup to set source SMU1 to 5 00 V and compliance SMU1 to 1 00 mA 3 63 ...

Страница 157: ...isplayed only if the DURATION mode is selected on the STRESS STRESS SETUP page To change pulse count pulse count mode Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN CHANGE PLS CNT secondary softkey then enter desired value The NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN CHANGE PLS CNT secondary softkey is displayed only if the PULSE COUNT mode is selected on the STRESS STRESS SETUP page To r...

Страница 158: ...Making a Measurement Stress Force Example The following gure shows an example of STRESS STRESS FORCE page 3 65 ...

Страница 159: ...from DUT by semiconductor switch during measurement state 4 In the STRESS eld of the desired channel in the SMU PG SELECTOR area select NNNNNNNNNNNNNNNNN SMU secondary softkey to connect SMU to DUT during stress force state NNNNNNNNNNNNNNNNN PGU secondary softkey to connect PGU to DUT during stress force state NNNNNNNNNNNNNNNNNNNN OPEN secondary softkey to disconnect SMU PGU and DUT during stress ...

Страница 160: ...Making a Measurement Stress Force Example Following shows an example setup that connects two SMUs to DUT during measurement state and connects two PGUs to DUT during stress force state 3 67 ...

Страница 161: ...Making a Measurement Stress Force ...

Страница 162: ...4 Analyzing Measurement Results ...

Страница 163: ...ting measurements Then after the measurements are performed the lines and markers are positioned automatically according to the setup The information about these functions is organized into the following two sections Manual Analysis Automatic Analysis For details about line modes and specifying points refer to Data Variable and Analysis Function in HP 4155A 4156A User s Dictionary Reference Also s...

Страница 164: ...ter display at cursor location To draw line through two speci ed points To draw line through speci ed point with speci ed gradient To draw tangent to speci ed point of measurement curve To draw regression line for speci ed region To display and select a line To display grid on the graph To change data variable on Graph To change range of X or Y axis scale To change variable assigned to X Y1 or Y2 ...

Страница 165: ... coordinate elds indicate the location of markers The rst second and third elds are X Y1 and Y2 coordinates respectively X and Y1 indicate location of marker on Y1 curve X and Y2 indicate location of marker on Y2 curve To turn o markers Set NNNNNNNNNNNNNNNNNNNN MARKER secondary softkey to OFF To move marker to maximum or minimum value of measurement curve Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN...

Страница 166: ...Analyzing Measurement Results Manual Analysis Example The following gure shows an example to move marker to desired measurement point and to set the Y1 axis marker to active 4 5 ...

Страница 167: ...p a circle marker is displayed on measurement curve of Y1 axis and an asterisk marker 3 is displayed on measurement curve of Y2 axis The MARKER coordinate elds indicate the location of markers The rst second and third elds are X Y1 and Y2 coordinates respectively X and Y1 indicate location of marker on Y1 curve X and Y2 indicate location of marker on Y2 curve To turn o markers Set the NNNNNNNNNNNN...

Страница 168: ...ast Press 4Fast5 front panel key of the MARKER CURSOR key group while rotating rotary knob Example The following gure shows an example to move marker to points between measurement points by setting NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN INTERPOLATE softkey to ON 4 7 ...

Страница 169: ...ary softkey toggles as follows OFF SHORT LONG OFF 3 Move the cursor by using arrow keys of the MARKER CURSOR key group The CURSOR coordinate elds indicate the location of cursor The rst second and third elds are X Y1 and Y2 coordinates respectively To move cursor diagonally Press two adjacent arrow keys of the MARKER CURSOR key group simultaneously To turn o cursor Set NNNNNNNNNNNNNNNNNNNN CURSOR ...

Страница 170: ...Analyzing Measurement Results Manual Analysis Example The following gure shows an example to display a short cursor 4 9 ...

Страница 171: ...using NNNNNNNNNNNNNN AXIS primary softkey 3 Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN AUTO SCALING secondary softkey Scale is changed automatically to t the selected measurement curve When you set VAR2 parameter or when you perform append measurement the scale is changed so that all measurement curves can be displayed To cancel auto scaling Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN C...

Страница 172: ...key to decrease the display range to half the present range NNNNNNNNNNNNNNNNNNNNNNNNNN ZOOM OUT secondary softkey to increase the display range to double the present range The display range is increased or decreased and cursor is moved to the center of the plotting area If no cursor is displayed before step 3 performing step 3 displays a long cursor at the center of the plotting area then zoom is ...

Страница 173: ... and Y2 axis are set up Select desired measurement curve by using NNNNNNNNNNNNNN AXIS primary softkey 4 Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN CENTER AT CURSOR secondary softkey The plotting area is centered around the cursor location If no cursor is displayed before step 4 performing step 4 displays a long cursor at the center of the plotting area To return plotting area to ori...

Страница 174: ...y group To select the cursor you want to move use the NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN SELECT CURSOR secondary softkey If it seems that only one cursor is displayed the cursors are at the same location When lines are displayed and when ON is set in the LINE PARAMETER eld on the DISPLAY DISPLAY SETUP page their X and Y intercepts and gradients are also displayed in the plotting area To tur...

Страница 175: ...Analyzing Measurement Results Manual Analysis Example The following gure shows an example to draw a line through two speci ed points 4 14 ...

Страница 176: ...n by using arrow keys of the MARKER CURSOR key group 6 Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN GRAD VALUE secondary softkey then enter gradient value The line goes through the cursor with speci ed gradient When lines are displayed and when ON is set in the LINE PARAMETER eld on the DISPLAY DISPLAY SETUP page the X and Y intercepts and gradients of selected line are also displayed in the plotting a...

Страница 177: ...Analyzing Measurement Results Manual Analysis Example The following gure shows an example to draw a line through speci ed point with speci ed gradient 4 16 ...

Страница 178: ...When lines are displayed and when ON is set in the LINE PARAMETER eld on the DISPLAY DISPLAY SETUP page the X and Y intercepts and gradients of selected line are also displayed in the plotting area To move marker to next VAR2 or next append curve Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN MARKER SKIP secondary softkey Marker moves to next VAR2 step curve or next append curve every time you press N...

Страница 179: ...Analyzing Measurement Results Manual Analysis Example The following gure shows an example to draw a tangent to a speci ed measurement point 4 18 ...

Страница 180: ...softkey toggles the setting 5 Set NNNNNNNNNNNNNN LINE secondary softkey to ON A line and two cursors are displayed Selecting NNNNNNNNNNNNNN LINE secondary softkey toggles as follows OFF ON OFF 6 Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN REGRESS MODE secondary softkey if it is not highlighted Softkey becomes highlighted Selecting NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN REGRESS MODE secondary sof...

Страница 181: ...tercept and gradient display Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN DISPLAY SETUP primary softkey then set NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN LINE PRMTRS secondary softkey to OFF To turn o the data variable display area Use the following procedure 1 Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN DISPLAY SETUP primary softkey 2 Set NNNNNNNNNNNNNNNNNNNNNNNNNN DATA VAR secondary softkey ...

Страница 182: ...Analyzing Measurement Results Manual Analysis Example The following gure shows an example to draw a regression line for the speci ed region 4 21 ...

Страница 183: ...are displayed Selecting the NNNNNNNNNNNNNN LINE secondary softkey toggles as follows OFF ON OFF To select line to analyze Set NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN LINE SELECT secondary softkey to desired line 1 or 2 Selected line is highlighted Selecting NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN LINE SELECT secondary softkey toggles as follows 1 2 NONE 1 The following are independent for each line So cha...

Страница 184: ... NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN DISPLAY SETUP primary softkey 2 Set NNNNNNNNNNNNNN GRID secondary softkey to ON Grid is displayed Selecting NNNNNNNNNNNNNN GRID secondary softkey toggles between ON and OFF To turn o grid Set NNNNNNNNNNNNNN GRID secondary softkey to OFF 4 23 ...

Страница 185: ...RAPH secondary softkey 3 Move the pointer to desired data variable eld by using the arrow keys then select secondary softkey to enter the desired variable name 4 Select NNNNNNNNNNNNNN EXIT primary softkey to exit the RE SETUP GRAPH mode To exit without changing data variable Select NNNNNNNNNNNNNNNNNNNN CANCEL primary softkey Example The following gure shows an example setup to change the data vari...

Страница 186: ...econdary softkey 3 Move pointer to maximum or minimum value eld of X or Y axis scale by using the arrow keys then edit the setup value by using ENTRY keys or rotary knob 4 Select NNNNNNNNNNNNNN EXIT primary softkey to exit RE SETUP GRAPH mode To exit without changing range of X or Y axis scale Select NNNNNNNNNNNNNNNNNNNN CANCEL primary softkey Example The following gure shows an example setup to c...

Страница 187: ...APH secondary softkey 3 Move pointer to variable eld of X Y1 or Y2 axis by using arrow keys then select secondary softkey to set the desired variable 4 Select NNNNNNNNNNNNNN EXIT primary softkey to exit RE SETUP GRAPH mode To exit without changing variable assigned to X Y1 or Y2 axis Select NNNNNNNNNNNNNNNNNNNN CANCEL primary softkey Example The following gure shows an example setup to change the ...

Страница 188: ...NNNNNNNNNN OVERLAY PLANE secondary softkey toggles as follows OFF 1 2 3 4 OFF To display information of overlay measurement curve Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN SHOW OVERLAY INFO secondary softkey The following information of overlay measurement curve overwrites the information of the present curve axis names and axis scales cursor and marker coordinates data variable...

Страница 189: ...lyzing Measurement Results Manual Analysis Example The following gure shows an example to overlay a measurement curve that is stored in internal memory 1 onto the presently displayed measurement curve 4 28 ...

Страница 190: ...SOR key group List scrolls in direction of selected arrow List can be scrolled even while performing measurements When marker is displayed marker does not move during scrolling To scroll list fast Press 4Fast5 key of the MARKER CURSOR key group while pressing an arrow key of the MARKER CURSOR key group 4 29 ...

Страница 191: ...t point To turn o marker Set NNNNNNNNNNNNNNNNNNNN MARKER secondary softkey to OFF To move marker to next VAR2 step Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN MARKER SKIP secondary softkey Marker moves to next VAR2 step data or next append data every time you select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN MARKER SKIP secondary softkey To move marker to next append data Select NNNNNNNNNNNNNNNNNNNNNNNNNN...

Страница 192: ...Analyzing Measurement Results Manual Analysis Example The following gure shows an example to display marker 4 31 ...

Страница 193: ...o desired column variable or data variable eld by using arrow keys then select secondary softkey of desired variable 3 Select NNNNNNNNNNNNNN EXIT primary softkey to exit RE SETUP LIST mode To exit without changing LIST variables Select NNNNNNNNNNNNNNNNNNNN CANCEL primary softkey Example The following gure shows an example to change the LIST variables 4 32 ...

Страница 194: ... and lines are automatically positioned according to automatic analysis setup This section covers the following automatic analysis tasks To draw line by specifying two points To draw line by specifying gradient and one point To draw tangent to speci ed measurement point To draw regression line by specifying two points To display marker at speci ed point 4 33 ...

Страница 195: ...ta condition mode Go to step 7 7 If you selected NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN BY X Y COORDINATE secondary softkey a In the X eld enter desired expression to specify X coordinate b In the Y eld enter desired expression to specify Y coordinate c Go to step 8 8 If you selected NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN BY DATA CONDITION secondary softkey a In eld 4...

Страница 196: ...a Variable and Analysis Function in HP 4155A 4156A User s Dictionary Reference To specify a point between two measurement points Set Interpolate eld to ON To disable clear the settings Move the pointer to eld 1 then select NNNNNNNNNNNNNNNNNNNNNNN DISABLE secondary softkey Setup elds disappear Example The following gure shows an example setup to automatically draw a line through two speci ed points...

Страница 197: ...y data condition mode Go to step 7 7 If you selected NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN BY X Y COORDINATE secondary softkey a In the X eld enter desired expression to specify X coordinate b In the Y eld enter desired expression to specify Y coordinate c Go to step 8 8 If you selected NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN BY DATA CONDITION secondary softkey a In e...

Страница 198: ...n step 6 or 7 see Expression in Data Variable and Analysis Function in HP 4155A 4156A User s Dictionary Reference To specify a point between two measurement points Set Interpolate eld to ON To disable clear the settings Move the pointer to eld 1 then select NNNNNNNNNNNNNNNNNNNNNNN DISABLE secondary softkey Setup elds disappear Example The following gure shows an example setup to automatically draw...

Страница 199: ...t a search start condition for nding speci ed point NNNNNNNNNNNNNNNNNNNNNNN DISABLE secondary softkey to disable clear the AFTER settings 9 If you selected NNNNNNNNNNNNNNNNN AFTER select secondary softkey to enter desired data variable in eld 6 10 If you selected NNNNNNNNNNNNNNNNN AFTER enter desired expression in eld 7 Data condition mode speci es a point related to the measurement curve So if no...

Страница 200: ...Analyzing Measurement Results Automatic Analysis Example The following gure shows an example setup to automatically draw a tangent line to a speci ed measurement point 4 39 ...

Страница 201: ...a point by data condition mode Go to step 7 7 If you selected NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN BY X Y COORDINATE secondary softkey a In the X eld enter desired expression to specify X coordinate b In the Y eld enter desired expression to specify Y coordinate c Go to step 8 8 If you selected NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN BY DATA CONDITION secondary softk...

Страница 202: ...ata satisfy the speci ed condition the nearest measurement point is used For the meaning of expression that you can enter in step 6 and 7 see Expression in Data Variable and Analysis Function in HP 4155A 4156A User s Dictionary Reference To specify a point between two measurement points Set Interpolate eld to ON To disable clear the settings Move the pointer to eld 1 then select NNNNNNNNNNNNNNNNNN...

Страница 203: ...mple The following gure shows an example setup to automatically draw a regression line The range for the regression calculation is speci ed by two points One point is speci ed by X Y coordinate mode and other point is speci ed by data condition mode 4 42 ...

Страница 204: ...g speci ed point NNNNNNNNNNNNNNNNNNNNNNN DISABLE secondary softkey to disable clear the AFTER settings 6 If you selected NNNNNNNNNNNNNNNNN AFTER in eld 4 select secondary softkey to set desired data variable 7 If you selected NNNNNNNNNNNNNNNNN AFTER in eld 5 enter desired expression The marker can be displayed on the measurement curve only So if no measurement data satisfy the speci ed condition t...

Страница 205: ...Analyzing Measurement Results Automatic Analysis Example The following gure shows an example setup to automatically display marker at speci ed point 4 44 ...

Страница 206: ...5 Filer ...

Страница 207: ...Filer HP 4155A 4156A has le print and plot functions The information about these functions is organized into the following two sections File Operation Hardcopy 5 2 ...

Страница 208: ... rename a le on diskette To remove a le from diskette To copy le on diskette to another diskette To copy setup or result data from internal memory to diskette To initialize a diskette To backup a diskette You can use these le operations on internal memory and disk memory of HP 4155A 4156A You can perform le operations as follows Selecting softkeys on the SYSTEM FILER page All le operations can be ...

Страница 209: ... for le names If you do an error occurs Following gure shows SYSTEM FILER page The SYSTEM FILER page has the following areas 1 FILE CATALOG area Lists names of les stored on diskette and other information 2 FUNCTION eld Displays the le function selected by secondary softkey 3 FUNCTION setup area Displays the setup elds for the selected le function Front panel keys of User File key group You can al...

Страница 210: ...erence To move the pointer in the FILE CATALOG area rotate the rotary knob If all the le names cannot be displayed in the FILE CATALOG area you can scroll the le names by rotating the rotary knob To display le comments Select one of the following For selected le select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN READ COMMENT secondary softkey For all les select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN...

Страница 211: ...Filer File Operations Example The following gure shows example that displays le catalog 5 6 ...

Страница 212: ... data NNNNNNNNNNN STR secondary softkey for stress setup data NNNNNNNNNNN DAT secondary softkey for measurement setup and result data NNNNNNNNNNN CST secondary softkey for customized system data 5 Optional In COMMENT eld enter a comment Maximum characters 16 The speci ed comment will be displayed in the COMMENT eld of the FILE CATALOG area 6 Select NNNNNNNNNNNNNNNNNNNNNNN EXECUTE primary softkey S...

Страница 213: ...Cannot Store Files 4Save5 front panel key is available from any page However pressing 4Save5 is ignored for the following conditions during measurement or forcing stress when error message is displayed when the PRINT PLOT setup area is displayed by 4Plot Print5 front panel key when the HELP page is displayed when the KNOB SWEEP page is displayed 5 8 ...

Страница 214: ...tkey to store measurement setup data NNNNNNNNNNN STR secondary softkey to store stress setup data NNNNNNNNNNN DAT secondary softkey to store measurement setup and result data 4 Optional In COMMENT eld enter a comment Maximum characters 16 The speci ed comment will be displayed on the label 2nd and 3rd lines of secondary softkey for internal memory 5 Select NNNNNNNNNNNNNNNNNNNNNNN EXECUTE primary s...

Страница 215: ...en you Cannot Store Files 4Save5 front panel key is available from any page However pressing 4Save5 is ignored for the following conditions during measurement or forcing stress when error message is displayed when the PRINT PLOT setup area is displayed by 4Plot Print5 front panel key when the HELP page is displayed when the KNOB SWEEP page is displayed 5 10 ...

Страница 216: ...PUT DATA eld enter the range of result data you want to save corresponds to NO column of LIST page left eld upper limit right eld lower limit Select NNNNNNNNNNN ALL secondary softkey to specify all result data 6 In UNIT eld select NNNNNNNN ON secondary softkey to save units such as V or ms with result data NNNNNNNNNNN OFF secondary softkey to not save units If UNIT is ON result data will be treate...

Страница 217: ...tomatically added 10 Select NNNNNNNNNNNNNN EXIT primary softkey to exit ASCII SAVE window To list le names on diskette Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN FILE CATALOG secondary softkey For details about output format see GRAPH LIST LIST page in HP 4155A 4156A User s Dictionary Reference Example 1 The following gure shows example setup to save result data in a format that can be used in ...

Страница 218: ...ndary softkey 3 Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN FILE CATALOG secondary softkey 4 Move the pointer to the desired le name by using rotary knob 5 Select NNNNNNNNNNNNNNNNNNNN SELECT secondary softkey This sets the NAME and TYPE entries 6 Select NNNNNNNNNNNNNNNNNNNNNNN EXECUTE primary softkey The speci ed le is loaded 7 Select NNNNNNNNNNNNNN EXIT primary softkey to exit GET function See ...

Страница 219: ...156A may change automatically the setup values when loading the setup le Refer to the following conditions When source le setup has HPSMU but present system has HRSMU or MPSMU instead Measurement Range Setup le Changes to 200 V 100 V 1 A 100 mA When source le setup has HRSMU but present system has HPSMU or MPSMU instead Measurement Range Setup le Changes to 10 pA 1 nA 100 pA 1 nA 5 14 ...

Страница 220: ...Cannot Get Files 4Get5 front panel key is available from any page However pressing 4Get5 is ignored for the following conditions during measurement or forcing stress when error message is displayed when the PRINT PLOT setup area is displayed by 4Plot Print5 front panel key when the HELP page is displayed when the KNOB SWEEP page is displayed 5 15 ...

Страница 221: ...mary softkey then select NNNNNNNNNNN GET secondary softkey 2 In the NAME eld select secondary softkey for desired memory This sets the NAME entry 3 Select NNNNNNNNNNNNNNNNNNNNNNN EXECUTE primary softkey Data from the speci ed memory is loaded 4 Select NNNNNNNNNNNNNN EXIT primary softkey to exit GET function Example The following gure shows an example that loads data from an internal memory 5 16 ...

Страница 222: ...from any page However pressing 4Get5 is ignored for the following conditions during measurement or forcing stress when error message is displayed when the PRINT PLOT setup area is displayed by 4Plot Print5 front panel key when the HELP page is displayed when the KNOB SWEEP page is displayed 5 17 ...

Страница 223: ...ary knob then select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN SELECT SOURCE secondary softkey This sets the NAME and TYPE entries 7 In the NEW NAME eld enter a new name maximum characters for HP LIF le 6 maximum characters for DOS le 8 To enter a name from FILE CATALOG area move to desired name then select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN SELECT TARGET 8 Select NNNNNNNNNNNNNNNNNNNNNNN EX...

Страница 224: ...NNNNNNNNNNNNNNNNNNNNNNNNNNNNNN FILE CATALOG secondary softkey 6 Move the pointer to the le name to be removed by using rotary knob then select NNNNNNNNNNNNNNNNNNNN SELECT secondary softkey This sets the NAME and TYPE entries 7 Select NNNNNNNNNNNNNNNNNNNNNNN EXECUTE primary softkey A con rmation message is displayed 8 Select as follows NNNNNNNNNNN YES primary softkey to remove the le NNNNNNNN NO pr...

Страница 225: ...p 6 if you select NNNNN secondary softkey in the TYPE eld an asterisk 3 appears in the TYPE eld instead of the extension When you execute the next steps all le names with name indicated in the NAME eld are deleted For example if NAME eld is MOS1 and TYPE eld is 3 then the following les are deleted if they exist MOS1 MES MOS1 STR MOS1 DAT MOS1 CST MOS1 PRO 5 20 ...

Страница 226: ...key This sets the SOURCE NAME and TYPE entries 7 In the TARGET NAME eld enter the target le name maximum characters for HP LIF le 6 maximum characters for DOS le 8 8 In the TARGET DISK eld select the NNNNNNNNNNNNNNNNN OTHER softkey 9 Select NNNNNNNNNNNNNNNNNNNNNNN EXECUTE primary softkey 10 After Insert Source Diskette message is displayed make sure the source diskette is inserted then select NNNN...

Страница 227: ...Filer File Operations Example The following gure shows an example that copies a measurement setup and result le on the diskette to another diskette 5 22 ...

Страница 228: ...SOURCE NAME eld select the secondary softkey of the internal memory that you want to copy 5 In the TARGET NAME eld enter a target le name maximum characters for HP LIF le 6 maximum characters for DOS le 8 6 Make sure target diskette is inserted then select NNNNNNNNNNNNNNNNNNNNNNN EXECUTE primary softkey 7 Select NNNNNNNNNNNNNN EXIT primary softkey to exit the COPY function Example The following gu...

Страница 229: ...DOS secondary softkey to set DOS format NNNNNNNNNNNNNNNNNNNN HP LIF secondary softkey to set HP LIF format 6 Optional In the VOLUME NAME eld enter a volume name 7 Select NNNNNNNNNNNNNNNNNNNNNNN EXECUTE primary softkey 8 After a con rmation message is displayed insert the diskette to initialize into the exible disk drive then select NNNNNNNNNNN YES primary softkey to initialize the diskette NNNNNNN...

Страница 230: ...Filer File Operations Example The following gure shows an example that initializes a diskette with DOS format 5 25 ...

Страница 231: ...cute disk copy NNNNNNNN NO primary softkey to cancel disk copy 6 After the target diskette message is displayed remove the source diskette con rm that target diskette is initialized insert the target diskette then select NNNNNNNNNNN YES primary softkey to execute disk copy NNNNNNNN NO primary softkey to cancel disk copy Note that source and target diskettes must be same format and size 7 Select NN...

Страница 232: ...Filer File Operations Example The following gure shows an example that backs up a diskette 5 27 ...

Страница 233: ...Filer File Operations ...

Страница 234: ...6 If Y ou Have A Problem ...

Страница 235: ...all the HP 4155A 4156A This section explains how to solve the problems that may occur when installing the HP 4155A 4156A When you make a measurement This section explains how to solve the problems that may occur when making a measurement If errors occur This section lists error codes and messages that may be displayed when operating HP 4155A 4156A Also this section describes how to read data statu...

Страница 236: ...cribes eld where the pointer is located on the page how to setup the eld and the setting restrictions This softkey is not displayed for GRAPHICS LIST KNOB SWEEP or STRESS FORCE page NNNNNNNNNNNNNNNNNNNNNNNNNNNNN DATA STAT Shows how to read data status which is displayed at the bottom of GRAPHICS LIST KNOB SWEEP or STRESS FORCE page This softkey is displayed only for these pages NNNNNNNNNNNNNNNNNNN...

Страница 237: ...en you install the HP 4155A 4156A and the solutions If HP 4155A 4156A cannot be powered on If measurement units of HP 41501A are not displayed on the CHANNELS CHANNEL DEFINITION page If external keyboard does not work If display page does not appear after applying power If HP 16442A test xture is not stable 6 4 ...

Страница 238: ...selector setting Line Voltage Position 90 132 Vac left 198 264 Vac right Check that the fuse is good The fuse holder is located in the lower right corner of the rear panel 1 Turn the HP 4155A 4156A o then disconnect the power cable from the power outlet 2 Unscrew the fuse holder on the rear panel 3 Inspect that the correct fuse is installed and wire inside the fuse is not broken by using a tester ...

Страница 239: ...ition 90 132 Vac left 198 264 Vac right Check that the fuse is good The fuse holder is located in the lower right corner of the rear panel 1 Turn the HP 4155A 4156A and the HP 41501A o 2 Unscrew the fuse holder on the rear panel 3 Inspect that the correct fuse is installed and wire inside the fuse is not broken by using a tester Line Fuse type HP part number 100 120 Vac UL CSA T 8A 250 Vac 2110 03...

Страница 240: ...yed error codes and contact the nearest Hewlett Packard Sales and Service o ce If Display Page does not Appear after Applying Power If HP 41501A is installed rst turn on the HP 41501A then turn on HP 4155A 4156A If the self test fails see If Errors Occur when You Perform Self calibration or Diagnostics in this chapter If HP 16442A Test Fixture is not Stable Install stabilizers on the HP 16442A For...

Страница 241: ...gh frequency devices If measured value oscillates when measuring negative resistance If noise a ects the measured values If measured voltage has some error when forcing a large current If large current causes high temperature thermal drift If measurement takes more time than speci ed If measurement damages the device under test If you get unexpected data when performing sampling measurement 6 8 ...

Страница 242: ... transistors oscillation may cause measurement problems Normal measurement cannot be performed because of oscillation To solve this problem For FETs add resistive ferrite beads as close as possible to the gate For bipolar transistors add resistive ferrite beads as close as possible to the base or emitter Make connection cables as short as possible Long wires cause oscillation because of their larg...

Страница 243: ...UT has negative resistance characteristics SMUs may oscillate Because SMUs operate as negative feedback ampli er To solve this problem For voltage controlled negative resistance device Connect G in parallel with your DUT to cancel negative resistance To obtain an output I V curve use the following equation IY I 0 G 3V 6 10 ...

Страница 244: ...For current controlled negative resistance device Connect R in series with your DUT to cancel negative resistance To obtain an output I V curve use the following equation VZ V 0 R 3I If the resistance of the DUT is less than 1 M you can use R Box 6 11 ...

Страница 245: ...form Shut the lid of test xture or shield box to prevent e ects of light If these are vibrations due to nearby machines or due to air ow put cushioning material under prober cable and HP 4155A 4156A install stabilizer on the prober and make the cables stable by taping Wait several minutes after connecting cables or moving probe needles Because these operations cause electromotive force If you use ...

Страница 246: ...ce connect the sense line as close as possible to the terminal of the DUT For details of Kelvin connections see Connection to Device Under Test DUT in Chapter 3 If Large Current Causes High Temperature Thermal Drift If a large current is forced to a DUT the temperature of the DUT may increase which may cause characteristics to drift To solve this problem Use the pulse output mode of the SMU For la...

Страница 247: ...rement channels automatically increases if you do both the following force voltage from channels that are connected to R Box and display the voltage values or use voltage values in user functions The channels automatically measure current which is used to compensate the voltage values If Measurement Damages the Device under Test When performing breakdown measurements DUTs may be damaged When volta...

Страница 248: ...t range if many measurement channels are set up or if analysis such as moving a marker is performed during measurements To solve this problem Measure current using a xed range that is more than 10 A For measurement ranges 10 A or less measurement takes longer than the speci ed integration time Decrease measurement channels to reduce measurement time Note that the number of measurement channels aut...

Страница 249: ...measurement or forcing stress are not performed correctly measurement data status is displayed at bottom of GRAPHICS LIST KNOB SWEEP or STRESS FORCE page This section describes the following If errors occur when you perform self calibration or diagnostics If error occurs when you operate HP 4155A 4156A If measurement data status is displayed 6 16 ...

Страница 250: ...e To display the error codes move pointer to a desired test item Error codes for measurement unit The following are the error codes for measurement units Error codes are 5 digit numbers 1xxyy xx measurement unit 00 VSU1 2 and VMU1 2 01 to 06 SMU1 to SMU6 07 PGU1 2 08 GNDU 09 AD converter yy error number 1xx05 AD converter failed ROM or RAM self test Measurement unit failed AD converter test as a p...

Страница 251: ...timeout during calibration or self test for a measurement unit 1xx91 FIFO rst in rst out for AD converter over owed because SMU controller takes long time to read measurement data 1xx92 Calibration or diagnostics was aborted by an emergency or RST command 1xx94 HP 4155A 4156A was turned on before HP 41501A 1xx97 Communication failed between HOST controller and SMU controller Or calibration diagnos...

Страница 252: ... 20 V range 10042 VSU1 and VMU2 failed 620 V measurement self test in 20 V range 10043 VMU2 and VMU1 failed 620 V measurement self test in 20 V range 10044 VSU1 and VMU1 failed 62 V measurement self test in 2 V range 10045 VSU2 and VMU2 failed 62 V measurement self test in 2 V range 10046 VSU1 and VMU2 failed 62 V measurement self test in 2 V range 10047 VSU2 and VMU1 failed 62 V measurement self ...

Страница 253: ...failed di erential 0 2 V range self test This test measures 0 V by VMUs in di erential mode VSU2 is connected to VMU1 and 2 and forces 0 V 10x20 SMU failed function check 10x21 SMU failed CMR Common Mode Rejection amp calibration 10x22 SMU failed oscillation detector test 10x23 SMU failed V set and V measure calibration 10x24 SMU failed I set and I measure calibration 10x25 SMU failed I bias test ...

Страница 254: ...slope o set calibration 10771 PGU2 failed slope o set calibration 10772 PGU1 failed slope sampling calibration 10773 PGU2 failed slope sampling calibration 10875 GNDU failed o set calibration 10905 AD converter failed ROM or RAM self test 10906 Successive approximation AD converter failed calibration or self test 10907 Integrating type AD converter failed calibration or self test 10908 AD converte...

Страница 255: ...23 EEPROM failed read and write test 23030 Real time clock failed timer test 23040 HP IB controller failed self test This test sets some settings then checks the status 23050 Serial interface controller failed self test This test sets some settings then checks the status 23061 Host controller sends a command and does not receive acknowledge from SMU controller 23062 Host controller failed receivin...

Страница 256: ...e test 23091 Graphic memories DRAM failed read and write test 23092 Graphic memories VRAM failed read and write test 24011 Serial interface failed write test 24012 Serial interface test gets timeout on write test 24013 Serial interface controller is not functioning properly for CTS clear to send 24014 Serial interface failed read test 24015 Serial interface test gets timeout on read test 24016 Ser...

Страница 257: ...k drive failed read and write test 24061 65 V source on post regulator is not output 24062 12 V source on post regulator is not output 24071 A front panel key is stuck in pressed position 24072 Front key assembly may be disconnected 24073 Front panel key controller is not functioning properly 24100 External key controller failed self test 24120 Selector test reached timeout 24130 R Box test reache...

Страница 258: ... number 4 Syntax error Unrecognized parameter 5 Illegal setup The parameter is out of range 6 DATA buffer full Too many APPEND 7 DATA buffer full Too many points 8 Cannot define more than 6 User Vars 9 Syntax error First char should be Alphabet 10 Syntax error Must be alphanumeric 12 Syntax error Unknown variable name 13 System error HOSTC received invalid data HP 4155A 4156A may be broken Contact...

Страница 259: ...est HP sales and service o ce 19 Filer error File name is required 20 Filer error File Type is required 21 System error Realtime clock has problem HP 4155A 4156A may be broken Contact the nearest Hewlett Packard Sales and Service o ce 22 Not 4155A 4156A file 23 File was created by old revision 24 File may be corrupt 25 Zero offset meas failed for unit name O set value is too large so Zero o set me...

Страница 260: ... calibration failed 33 No data in internal memory 34 Illegal data File may be corrupt 35 System busy Unable to save get when MEAS STR 36 System busy Unable to change Y axis 37 System error SMUC lost data HP 4155A 4156A may be broken Contact the nearest Hewlett Packard Sales and Service o ce 38 Buffer overflowed Aborted 39 Syntax error Undisplayable character 40 Illegal setup One unit assigned seve...

Страница 261: ...ncorrect memory number 49 Source and Target are same 50 Unable to copy Memory full 51 Unable to copy SRC and TGT mem num is same You cannot specify same memory number in both SOURCE and TARGET name elds 52 Illegal suffix 53 System busy Emergency handling 54 System busy Measuring 55 System busy Executing cal diag 56 System busy Executing auto calibration 57 System busy Printing out hard copy 6 28 ...

Страница 262: ...e MODE 105 Cannot set multiple SMUs to pulse mode 106 Cannot use VAR when SAMPLING 107 Cannot use SMU pulse when SAMPLING 108 Duplicate variable names exist 109 The setup is not finished 110 Standby chan cannot use R BOX resistor For standby channel you cannot use R Box resistor 111 Common chan cannot use R BOX resistor For common mode channel you cannot use R Box resistor 112 VAR1 step number is ...

Страница 263: ... sampling mode 121 For LINEAR set AUTO if init int 480 s When initial interval is set to 480 s or less and when LINEAR sampling mode is set AUTO must be set in TOTAL SAMP TIME eld 122 TOT SP TM must be INIT INT2 NOofSMP01 Total sampling time must be set in the following range total sampling time initial interval 2 number of samples 0 1 123 STOP CONDITION NAME is not set 124 PGU pulse Period must b...

Страница 264: ...1 Assigned more than 4 SYNC channels 132 Set INIT INT 2ms for multi CH MEAS When you perform multi channel measurements initial interval must be 2 ms or more 133 Use FIXED range when INIT INT 2ms When you use auto ranging or limited auto ranging measurement you must set initial interval to 2 ms or more 134 Cannot disable STBY ON ch in Stress On STRESS CHANNEL DEFINITION page you cannot disable del...

Страница 265: ...ust be NSYNC 145 System busy Unable to change page when MEAS 146 System busy Unable to change page when STRS 147 Ineffective page in this setup 148 X axis is not assigned 149 Y1 axis is not assigned 150 ENABLE DELAY must be 327672INIT INT For sampling measurements when stop condition is set to ENABLE enable delay must be initial interval 2 32767 or less 151 No unit is set to STANDBY ON 152 System ...

Страница 266: ...t be initial interval 2 32767 or less and 121011 or less 159 Measure channel is not assigned 160 Unable to find approximate data 161 Illegal graph scale setup 163 The Sweep Pulse Polarity is not same 164 SYNC can not be set for standby CH 165 Set value is too small for range For LOG sweep measurement start and stop value must be equal or more than setup resolution For sweep measurement step value ...

Страница 267: ... AT ANY secondary softkey 175 CONST setup must be unit output range 176 Pulse BASE must be unit output range 177 PGU pulse WIDTH must be setup res Pulse width of PGUs must be greater than or equal to unit setup resolution 178 TRIG OUT DELAY is too long Trigger out delay must be 32 7 ms or pulse width you speci ed whichever is shorter 179 Cannot ENABLE stop if INIT INT 2 ms When initial interval is...

Страница 268: ...me is not list name 190 Illegal file type is requested 191 System busy Printing out hard copy 192 Unable to set Another controller is on bus 193 Unable to specify this name here 194 PGU Pulse DELAY must be setup res PGU pulse delay time must be setup resolution 195 Cal Diag failed Cannot use unit 196 Compliance too low to force pulse 197 Compliance too high to force pulse 198 Two VPULSE PGUs must ...

Страница 269: ...d 213 Filer error DISK record is not found 215 Filer error DISK record data error 220 Filer error Undefined I O path 221 Filer error Permission denied 224 Filer error The directory is not empty 225 Filer error No DISK in the drive 226 Filer error Initialization failed 227 Filer error Invalid DISK volume label 229 Filer error DISK is not initialized 230 Filer error Checkread error 231 Filer error B...

Страница 270: ...used 237 Filer error Bad device type 238 Filer error Unable to use wildcard 239 Filer error Operations failed 241 Filer error The target type is wrong 242 Filer error The file is protected 243 Filer error DISK is protected 244 System error Unable to verify 245 Filer error Unable to copy between LIF DOS 246 Filer error Reason Unknown 265 HOLD TM must be 0 when INIT INT 2ms 280 VAR1 output value is ...

Страница 271: ...res Start stop and step value of VAR1 channel must be unit output resolution or more 293 Cal Diag aborted failed on some units Calibration or diagnostics was aborted by receiving RST command So some units maybe failed 300 Over voltage is detected 301 Over Current is detected 302 Power failure at Main Frame Turn on HP 4155A 4156A again You can use ler functions after selecting OK secondary softkey ...

Страница 272: ...time out Perform 305 HOSTC SMUC I F test on the SYSTEM SELF CALIBRATION DIAGNOSTICS page If this test fails HP 4155A 4156A may be broken Contact the nearest Hewlett Packard Sales and Service o ce 309 The SMU AND PULSE GENERATOR EXPANDER is not turned on Turn on the expander then cycle mainframe power 310 Unsupported unit detected in Slot Turn off the power and remove the unit The displayed unit mu...

Страница 273: ...s for X Y1 and Y2 axis respectively No Y2 for KNOB SWEEP A A A A A A A A C is for SMU1 to SMU6 VMU1 VMU2 and PGU1 2 respectively Where A B and C mean as follows A hardware status error If multiple errors occur numbers are added and displayed as a hexadecimal number 1 AD converter over ow 2 Oscillation 4 Other channel reached compliance limit 8 This channel reached compliance limit B data error If ...

Страница 274: ...an as follows A hardware status error If multiple errors occur numbers are added and displayed as a hexadecimal number 1 AD converter over ow 2 Oscillation 4 Other channel reached compliance limit 8 This channel reached compliance limit B data error If multiple errors occur numbers are added and displayed as a hexadecimal number 1 stack register over ow 2 calculation error 4 only one data for delt...

Страница 275: ...age is displayed in following format STATUS A C Where A and C mean as follows A hardware status error If multiple errors occur numbers are added and displayed as a hexadecimal number 2 Oscillation 4 Some channel has reached compliance limit C PGU status 1 PGU average current exceeds 100 mA 6 42 ...

Страница 276: ...7 Manual Changes Depending on ROM Version ...

Страница 277: ...02 ROM version To con rm your ROM version check the SOFTWARE REVISION eld on the SYSTEM CONFIGURATION page This chapter contains information for customizing this manual so that it is correct for the HP 4155A 4156A that you are using To customize this manual for your HP 4155A 4156A refer to the following table and make the manual changes depending on the ROM version of your HP 4155A 56A Manual Chan...

Страница 278: ... printer to the value speci ed in the RESOLUTION eld You need to set the RESOLUTION eld to the same value as actual printer resolution setting OUTPUT REGION table Page 5 45 NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN STORE REGION secondary softkey and NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN RECALL REGION secondary softkey to store and recall the output region settings into internal memory are not ava...

Страница 279: ...Manual Changes Depending on ROM Version Change 1 ...

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