Honeywell SPM, Техническое руководство

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SPM Single Point Monitor
SPM Technical Handbook 4-9
Gas Name
TLV
(Threshold
Limit Value)
Default
Alarm
Level 1
1
Default
Alarm
Level 2
1
Sample
Time
(sec)
Chemcassette
®
Part Number
SP EP XPS
2
Hydrides (cont’d)
Hydrogen Sulfide (H
2
S) 10 ppm 5.1 ppm 10 ppm 10 1740-9300
Hydrogen Sulfide (H
2
S) Dry 10 ppm 5.1 ppm 10 ppm 10 1740-9300
Hydrogen Sulfide (H
2
S) Low Level 10 ppm 4 ppb 80 ppb 900 1740-9300
Phosphine (PH
3
) 300 ppb 150 ppb 300 ppb 15 705502 700300 1740-9300
Silane (SiH
4
) 5 ppm 2.5 ppm 5 ppm 30 705502 700300 1740-9300
Stibine (SbH
3
) 100 ppb 50 ppb 100 ppb 30 705502 700300
Tert-Butyl Arsine (TBA) 0.01mg/m
3
25 ppb 50 ppb 90 705502 700300 1740-9300
Tert-Butyl Phosphine (TBP) 150 ppb 300 ppb 120 705502 700300 1740-9300
Hydrogen Cyanide (HCN) 4.7 ppm 2.4 ppm 4.7 ppm 10 704510
Hydrogen Sulfide (H
2
S) 10 ppm 5 ppm 10 ppm 10 701012 700304
Hydrogen Sulfide (H
2
S) Low Level 10 ppm
3 3
900 701012 700304
Mineral Acids
Boron Trifluoride (BF
3
) Low Level 1 ppm 502 ppb 749 ppb 240 705505 700337
Boron Trifluoride XP (BF
3
) 1 ppm 0.5 ppm 1.0 ppm 60 1750-9310
Boron Trifluoride XP (BF
3
) Low Level 1000 ppb 502 pb 769 ppb 120 1750-9310
Hydrogen Bromide (HBr) 2 ppm 1.0 ppm 2 .0ppm 15 705505 700337
Hydrogen Bromide XP (HBr) 2 ppm 1.0 ppm 2.0 ppm 30 1750-9310
Hydrogen Bromide XP (HBr) Low Level 2000 ppb 251ppb 502 ppb 120 1750-9310
Hydrogen Chloride (HCl) 2 ppm 1 ppm 2 ppm 10 705505 700337
Hydrogen Chloride (HCl) Low Level 2 ppm 120 ppb 240 ppb 240 705505 700337
Hydrogen Chloride XP (HCl) 2 ppm 1.0 ppm 2.0 ppm 15 1750-9310
Hydrogen Chloride XP (HCl) Low Level 2000 ppb 101 ppb 200 ppb 240 1750-9310
Hydrogen Fluoride (HF) 0.5 ppm 1.0 ppm 2.0 ppm 30 705505 700337
Hydrogen Fluoride XP (HF) 0.5 ppm 1.0 ppm 2.0 ppm 30 1750-9310
Hydrogen Fluoride XP (HF) Low Level 500 ppb 250 ppb 500 ppb 300 1750-9310
(
Note: Due to U.S. Government regulations, this range may be subject to restrictions requiring special licensing for certain countries
outside North America. Contact HA for eligibility information) (Available in ChemKey only)
Hydrogen Iodide (HI)
3 ppm 6 ppm 15 705505 700337
Nitric Acid (HNO
3
) 2 ppm 1 ppm 2 ppm 15 705505 700337
Sulfuric Acid (H
2
SO
4
) 50 ppb 125 ppb 250 ppb 120 705505 700337