Honeywell SPM, Техническое руководство

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SPM Single Point Monitor
SPM Technical Handbook 4-3
4.4 Output Signals
Gas Calibration
Zero
4.0 mA
LDL**
4.56 mA*
9.33 mA
14.67
mA
Full Scale
20.0 mA
Ammonia (NH
3
) 0 ppm 2.6 ppm 25.0 ppm 50.0 ppm 75.0 ppm
Ammonia XP (NH
3
) 0 ppm 1.5 ppm* 25.0 ppm 50.0 ppm 75.0 ppm
Arsine (AsH
3
) 0 ppb 15 ppb* 50 ppb 100 ppb 150 ppb
Arsine XP (AsH
3
) 0 ppb 10 ppb* 50 ppb 100 ppb 150 ppb
Arsine XP (AsH
3
) Low Level 0 ppb 0.5 ppb 5.0 ppb 10.0 ppb 15.0 ppb
Boron Trifluoride (BF
3
) Low Level 0 ppb 67 ppb* 333 ppb 667 ppb 1000 ppb
Boron Trifluoride XP (BF
3
) 0 ppm 0.1 ppm 1.0 ppm 2.0 ppm 3.0 ppm
Boron Trifluoride XP (BF
3
) Low Level 0 ppb 50 ppb 333 ppb 667 ppb 1000 ppb
Bromine (Br
2
) 0 ppb 11 ppb 100 ppb 200 ppb 300 ppb
CHDI 0 ppb 2 ppb 20 ppb 40 ppb 60 ppb
Chlorine II (Cl
2
) 0 ppm 0.05 ppm 0.5 ppm 1.00 ppm 1.50 ppm
Chlorine III (Cl
2
) 0 ppm 0.05 ppm 0.5 ppm 1.00 ppm 1.50 ppm
Chlorine (Cl
2
) Low Level 0 ppb 1 ppb 10 ppb 20 ppb 30 ppb
Chlorine XP (Cl
2
) 0 ppm 0.05 ppm .050 ppm 1.00 ppm 1.50 ppm
Chlorine XP (Cl
2
) Low Level 0 ppb 4 ppb* 20 ppb 40 ppb 60 ppb
Chlorine Dioxide (ClO
2
) 0 ppb 11 ppb 100 ppb 200 ppb 300 ppb
Chlorine Dioxide (ClO
2
) [on F
2
/Oxidizer CC] 0 ppb 31 ppb* 100 ppb 200 ppb 300 ppb
Diborane (B
2
H
6
) 0 ppb 31 ppb* 100 ppb 200 ppb 300 ppb
Diborane XP (B
2
H
6
) 0 ppb 11 ppb 100 ppb 200 ppb 300 ppb
Dimethyl Amine (DMA) 0 ppm 1.0 ppm* 5.0 ppm 10.0 ppm 15.0 ppm
Dimethyl Amine (DMA) Low Level 0 ppm 0.1 ppm* 2.0 ppm 4.0 ppm 6.0 ppm
Dimethyl Amine XP (DMA) 0 ppm 0.5 ppm 5.0 ppm 10.0 ppm 50.0 ppm
Disilane (Si
2
H
6
) 0 ppm 1.5 ppm* 5.0 ppm 10.0 ppm 15.0 ppm
Fluorine (F
2
) 0 ppm 0.11 ppm 1.00 ppm 2.00 ppm 3.00 ppm
Fluorine (F
2
) Low Level 0 ppm 0.06 ppm 0.33 ppm 0.67 ppm 1.00 ppm
Germane (GeH
4
) 0 ppb 141 ppb* 200 ppb 400 ppb 600 ppb
Germane XP (GeH
4
) 0 ppb 141 ppb* 200 ppb 400 ppb 600 ppb
HDI 0 ppb 1 ppb* 20 ppb 40 ppb 60 ppb
HMDI 0 ppb 2 ppb 20 ppb 40 ppb 60 ppb
Hydrazine (N
2
H
4
) 0 ppb 20 ppb* 100 ppb 200 ppb 300 ppb
Hydrazine Low Level (N
2
H
4
) 0 ppb 1 ppb 10 ppb 20 ppb 30 ppb
Hydrogen Bromide (HBr) 0 ppm 0.3 ppm 3.0 ppm 6.0 ppm 9.0 ppm