Honeywell SPM, Техническое руководство

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SPM Single Point Monitor
SPM Technical Handbook 4-5
Gas Calibration
Zero
4.0 mA
LDL**
4.56 mA*
9.33 mA
14.67
mA
Full Scale
20.0 mA
Nitrogen Dioxide (NO
2
) [on F
2
/Oxidizer CC] 0 ppm 0.3 ppm 3.0 ppm 6.0 ppm 9.0 ppm
Ozone (O
3
) 0 ppb 31 ppb* 100 ppb 200 ppb 300 ppb
Phosgene (COCl
2
) 0 ppb 11 ppb 100 ppb 200 ppb 300 ppb
Phosgene XP (COCl
2
) 0 ppb 11 ppb 100 ppb 200 ppb 300 ppb
Phosphine (PH
3
) 0 ppb 32 ppb 300 ppb 600 ppb 900 ppb
Phosphine XP (PH
3
) 0 ppb 32 ppb 300 ppb 600 ppb 900 ppb
PPDI 0 ppb 2 ppb 20 ppb 40 ppb 60 ppb
p-Phenylene Diamine (PPD) 0 ppb 2 ppb 20 ppb 40 ppb 60 ppb
Silane (SiH
4
) 0 ppm 0.5 ppm 5.0 ppm 10.0 ppm 15.0 ppm
Silane XP (SiH
4
) 0 ppm 0.3 ppm* 5.0 ppm 10.0 ppm 15.0 ppm
Stibine (SbH
3
) 0 ppb 20 ppb* 100 ppb 200 ppb 300 ppb
Sulfur Dioxide (SO
2
) 0 ppm 0.2 ppm* 2.0 ppm 4.0 ppm 6.0 ppm
Sulfur Dioxide (SO
2
) 0 ppb 26 ppb*** 250 ppb 500 ppb 750 ppb
Sulfuric Acid (H
2
SO
4
) 0 ppb 26 ppb 250 ppb 500 ppb 750 ppb
TDI 0 ppb 2 ppb 20 ppb 40 ppb 60 ppb
Tert-butyl Arsine (TBA) 0 ppb 15 ppb* 50 ppb 100 ppb 150 ppb
Tert - butyl Arsine XP (TBA) 0 ppb 15.0 ppb* 50 ppb 100 ppb 150 ppb
Tert-butyl Phosphine (TBP) 0 ppb 60 ppb* 300 ppb 600 ppb 900 ppb
Tert - butyl Phosphine XP (TBP) 0 ppb 92 ppb* 300 ppb 300 ppb 900 ppb
Tetrakis Dimethylamino Titanium (TDMAT) 0 ppm 0.3 ppm* 1.3 ppm 2.7 ppm 4.0 ppm
Tetrakis Dimethylamino Titanium XP (TDMAT) 0 ppm 0.1 ppm* 1.0 ppm 2.0 ppm 10.0 ppm
TMDI
0 ppb 2 ppb 20 ppb 40 ppb 60 ppb
TMXDI
0 ppb 2 ppb 20 ppb 40 ppb 60 ppb
Toluene Diamine (TDA) 0 ppb 4 ppb* 20 ppb 40 ppb 60 ppb
Trimethyl Amine (TMA) 0 ppm 1.1 ppm 10.0 ppm 20.0 ppm 30.0 ppm
UDMH 0 ppb 53 ppb 500 ppb 1000 ppb 1500 ppb
UDMH Low Level 0 ppb 5 ppb* 10 ppb 20 ppb 30 ppb
XDI
0 ppb 2 ppb 20 ppb 40 ppb 60 ppb
* Output signal at LDL level concentrations of most gases is 4.56 mA. Gases marked with an asterisk have
different LDL output signals as noted in Table 4-1.
** Lower Detection Limit
***Earlier SO2 calibration listed (ppm) uses the Sulfur Dioxide Chemcassette (not Sulfur Dioxide low level Chemcassette)