Hioki SM7810, Инструкция по эксплуатации

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6.4 Measurement Specifications
55
DC current measurement accuracy
Voltage generation
accuracy
Varies with SM7860 series specifications.
Accuracy
Range
Measurement
speed
Current accuracy
±(percent of reading)
Resistance accuracy
±(percent of reading)
100 pA
FAST
− −
MED
5.0 + 15 × 10-
11
/ Im
*
Ve
*
+ 100 × Vofs
*
/ Vs
*
+ 5.0 + 15 × 10-
11
Rm
*
/ Vs
SLOW
3.0 + 15 × 10-
11
/ Im Ve + 100 × Vofs / Vs + 3.0 + 15 × 10-
11
Rm / Vs
SLOW2
1.5 + 6 × 10-
11
/ Im Ve + 100 × Vofs / Vs + 1.5 + 6 × 10-
11
Rm / Vs
1 nA
FAST
4.0 + 15 × 10-
10
/ Im Ve + 100 × Vofs / Vs + 4.0 + 15 × 10-
10
Rm / Vs
MED
3.0 + 6 × 10-
10
/ Im Ve + 100 × Vofs / Vs + 3.0 + 6 × 10-
10
Rm / Vs
SLOW
2.0 + 6 × 10-
10
/ Im Ve + 100 × Vofs / Vs + 2.0 + 6 × 10-
10
Rm / Vs
SLOW2
0.6 + 6 × 10-
10
/ Im Ve + 100 × Vofs / Vs + 0.6 + 6 × 10-
10
Rm / Vs
10 nA
FAST
2.0 + 8 × 10-
9
/ Im Ve + 100 × Vofs / Vs + 2.0 + 8 × 10-
9
Rm/ Vs
MED
1.0 + 6 × 10-
9
/ Im Ve + 100 × Vofs / Vs + 1.0 + 6 × 10-
9
Rm / Vs
SLOW
0.6 + 6 × 10-
9
/ Im Ve + 100 × Vofs / Vs + 0.6 + 6 × 10-
9
Rm / Vs
SLOW2
0.4 + 5 × 10-
9
/ Im Ve + 100 × Vofs / Vs + 0.4 + 5 × 10-
9
Rm / Vs
100 nA
FAST
2.0 + 5 × 10-
8
/ Im Ve + 100 × Vofs / Vs + 2.0 + 5 × 10-
8
Rm / Vs
MED
1.0 + 5 × 10-
8
/ Im Ve + 100 × Vofs / Vs + 1.0 + 5 × 10-
8
Rm / Vs
SLOW
0.6 + 5 × 10-
8
/ Im Ve + 100 × Vofs / Vs + 0.6 + 5 × 10-
8
Rm / Vs
SLOW2
0.4 + 5 × 10-
8
/ Im Ve + 100 × Vofs / Vs + 0.4 + 5 × 10-
8
Rm / Vs
1
μ
A
FAST
2.0 + 5 × 10-
7
/ Im Ve + 100 × Vofs / Vs + 2.0 + 5 × 10-
7
Rm / Vs
MED
1.0 + 5 × 10-
7
/ Im Ve + 100 × Vofs / Vs + 1.0 + 5 × 10-
7
Rm / Vs
SLOW
0.6 + 5 × 10-
7
/ Im Ve + 100 × Vofs / Vs + 0.6 + 5 × 10-
7
Rm / Vs
SLOW2
0.4 + 5 × 10-
7
/ Im Ve + 100 × Vofs / Vs + 0.4 + 5 × 10-
7
Rm / Vs
10
μ
A
FAST
2.0 + 5 × 10-
6
/ Im Ve + 100 × Vofs / Vs + 2.0 + 5 × 10-
6
Rm / Vs
MED
1.0 + 5 × 10-
6
/ Im Ve + 100 × Vofs / Vs + 1.0 + 5 × 10-
6
Rm / Vs
SLOW
0.6 + 5 × 10-
6
/ Im Ve + 100 × Vofs / Vs + 0.6 + 5 × 10-
6
Rm / Vs
SLOW2
0.4 + 5 × 10-
6
/ Im Ve + 100 × Vofs / Vs + 0.4 + 5 × 10-
6
Rm / Vs
100
μ
A
FAST
2.0 + 5 × 10-
5
/ Im Ve + 100 × Vofs / Vs + 2.0 + 5 × 10-
5
Rm / Vs
MED
1.0 + 5 × 10-
5
/ Im Ve + 100 × Vofs / Vs + 1.0 + 5 × 10-
5
Rm / Vs
SLOW
0.6 + 5 × 10-
5
/ Im Ve + 100 × Vofs / Vs + 0.6 + 5 × 10-
5
Rm / Vs
SLOW2
− −
1 mA
FAST
2.0 + 5 × 10-
4
/ Im Ve + 100 × Vofs / Vs + 2.0 + 5 × 10-
4
Rm / Vs
MED
− −
SLOW
− −
SLOW2
− −
* Im : Current measured value
* Rm : Resistance measured value
* Ve : External power source accuracy
* Vs : Voltage setting (The instrument setting and external power source setting must match.)
* Vofs : Offset voltage 0.1 V (Vs < 100 V), 0.5 V (Vs
≥
100 V)
* - : Setting not available
Note: For 0 to 18 and 18 to 40C, add ±(1/10 measurement accuracy) /°C.