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Model EQ-99X

LDLS®

Laser-Driven Light Source

Operation and Maintenance Manual

Revision 6

June 2023

DOC-6521

Содержание ENERGETIQ LDLS EQ-99X

Страница 1: ...Model EQ 99X LDLS Laser Driven Light Source Operation and Maintenance Manual Revision 6 June 2023 DOC 6521 ...

Страница 2: ... Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq The content of this manual is subject to change without notice Energetiq laser driven light source LDLS products are designed to be RoHS and REACH compliant and possess a CE marking For a list of compliance documentation including the Declaration of Conformity visit www energetiq com compliance Ener...

Страница 3: ...d Requirements 16 3 1 Optical Performance 16 3 2 Physical Specifications 16 3 3 Remote Interface Specifications 16 3 4 Utility Requirements 17 3 5 Environmental Requirements 17 Chapter 4 Installation 18 4 1 Unpacking the System 18 4 1 1 Required Contents 18 4 1 2 Optional Accessories 19 4 2 Attaching the Laser Fiber from the Controller to the Lamp Head 19 4 2 1 Tools Required 20 4 2 2 Procedure 20...

Страница 4: ... the System 35 Chapter 6 Maintenance 36 6 1 Fiber Cleaning Process 36 6 1 1 Fiber Inspection Tools 37 6 1 2 Fiber Cleaning Tools 37 6 1 3 Fiber Inspection and Cleaning Procedure 38 6 2 Lamp Bulb Replacement 39 Chapter 7 Troubleshooting 40 7 1 Issues and Remedies 41 Appendix A Mechanical Layout Drawings 43 Appendix B Revision History 45 ...

Страница 5: ...loves Lighted UV warning lights and signs posted on doors to lab areas may help prevent accidental exposure WARNING The EQ 99X system power supply controller utilizes an internal Class 4 IR laser capable of causing severe injury to eyes or skin Do not open or attempt to service this unit Contact Energetiq regarding any problems with the unit 1 2 General Precautions The output beam from the EQ 99X ...

Страница 6: ...e visible bands A class 4 laser is located in the power supply controller Laser energy is delivered to the lamp head via a laser fiber optic cable and connected with an SMA type connector Safety interlocks shut down the laser power if the SMA connector is removed from the lamp head The optical configuration of the lamp head ensures that the direct laser beam cannot exit the unit The EQ 99X system ...

Страница 7: ...Label Power Supply Controller gives the manufacturer s name and address and the model serial number and date of manufacture of the power supply controller Manufacturer s Identification Label Lamp Head gives the manufacturer s name and address and the model serial number and date of manufacture of the lamp head Explanatory Label states the classification of the laser product Class 1 is the lowest h...

Страница 8: ...Chapter 1 Safety and Warranty Information EQ 99X Operation Maintenance Manual 8 of 45 EQ 99X Power Supply Controller Label Locations Figure 1 ...

Страница 9: ... state switch can operate the interlock circuit The interlock circuit must be connected to enable the operation of the unit Should the interlock connection open during operation or standby the source is immediately disabled and all light output from the aperture ceases 1 6 Warranty For information on your EQ 99X system s warranty contact your local distribution representative EQ 99X Lamp Head Labe...

Страница 10: ...ower is required for operation Connection to nitrogen purge gas is optional but strongly recommended for best performance For connection details see Chapter 4 Installation 2 2 Description of System Components The EQ 99X system consists of a power supply controller lamp head laser fiber optic cable and lamp head signal cable not shown Power and Input Output I O interface connections also not shown ...

Страница 11: ... overview of their functions 2 2 1 Power Supply Controller The power supply controller contains the following components EQ 99X System Figure 3 Status Indicator LEDs I O Port Power Port Lamp Head Signal Port Laser Fiber Optic Cable permanently attached IR Diode Laser internal not shown Laser Power Supply internal not shown Thermoelectric Laser Cooler internal not shown ...

Страница 12: ...s connected to the power supply controller LAMP ON UV Light is on LASER ON Laser power is ON and laser light is being delivered to the lamp head CONTROLLER FAULT One of the following has occurred in the power supply controller EQ 99X Power Supply Controller Components Figure 4 Status Indicator LED Functions Table 2 1 External interlock open 2 Controller internal temperature too high 3 Laser power ...

Страница 13: ...arious power and control signals to from the lamp head No other connector or cable may be used with the EQ 99X system other than the one supplied E Laser Fiber Optic Cable The laser light is delivered from the power supply controller to the lamp head via a fiber optic cable with armored protection The fiber is permanently attached to the power supply controller and connects to the lamp head via an...

Страница 14: ...ut window accommodates a light output of 0 47 NA An internally threaded SM1 adapter is provided for easy connection of optical hardware See Appendix A Mechanical Layout Drawings for more information B Laser ON Indicator This LED is illuminated when the laser is ON Lamp Output Window Laser ON Indicator Nitrogen Purge Inlet Laser Input J4 Signal Port Lamp Bulb internal not shown Igniter internal not...

Страница 15: ... ozone from atmospheric oxygen and attenuate the light output in the 220 280 nm band as well as below 200 nm in the presence of atmospheric oxygen and water vapor There is no return fitting for the purge nitrogen The purge flow normally escapes within the lamp head enclosure and then to atmosphere D Laser Input This is the inlet for the laser fiber optic cable from the power supply controller It c...

Страница 16: ... the typical output spectrum 3 2 Physical Specifications Dimensions H x W x D Weight 3 3 Remote Interface Specifications Digital Inputs Typical Output Spectrum Figure 6 Lamp Head 82 x 86 x 76 mm 3 2 x 3 4 x 3 0 in Power Supply Controller 113 x 111 x 299 mm 4 4 x 4 4 x 11 8 in Lamp Head 0 7 kg 1 5 lbs Power Supply Controller 1 4 kg 3 0 lbs Type Optocoupler LED Logic Active High Input Voltage 5VDC I...

Страница 17: ...verall lifetime In addition atmospheric oxygen and water vapor will attenuate the output below 200 nm Clean and dry nitrogen from either a dewar or research grade N2 bottle is recommended Do not use any other purge gas Grade 4 8 or better gas purity is recommended to maintain cleanliness of the optics With a 20 psig inlet pressure the EQ 99X system will consume approximately 1 slm of flow There is...

Страница 18: ...in shipping Use care when unpacking to avoid damaging the laser fiber optic cable If any part is missing or appears damaged contact Energetiq immediately Do not attempt to substitute any parts At a minimum the EQ 99X system shipping box contains the following required items 4 1 1 Required Contents Qty Item Description Picture 1 Power Supply Controller 1 Lamp Head Required Contents of Shipping Box ...

Страница 19: ...and 15 pin D connector I O cable 1 12 VDC Power Supply universal input voltage 4 2 Attaching the Laser Fiber from the Controller to the Lamp Head The EQ 99X system is typically delivered with the laser fiber optic cable connected to the lamp head This is done to minimize the possibility of debris or particles contaminating the end of the laser fiber If the power supply controller of your EQ 99X sy...

Страница 20: ... Microscope 1 4 2 2 Procedure To attach the laser fiber optic cable from the power supply controller to the lamp head Note The lamp head pictured in this procedure may appear slightly different than the lamp head included with your EQ 99X system Required Tools Table 5 1 Put on nitrile safety gloves Putting On Nitrile Gloves Figure 7 2 On the laser fiber optic cable attached to the controller remov...

Страница 21: ...as outlined in the section 6 1 Fiber Cleaning Process If contaminated clean the fiber optic cable as described 4 On the lamp head remove the SMA cap covering the Laser Input port Removing the SMA Cap Figure 9 5 Carefully insert the laser fiber optic cable into the Laser Input port of the lamp head Insert the fiber optic cable at a slight angle until the fiber tip is inside the port on the lamp hea...

Страница 22: ...ging the cable Inserting the Laser Fiber Optic Cable Figure 10 6 Screw in the laser fiber connector to tighten the connector to the lamp head Rotate the laser output fiber to ensure the thick black line on the fiber optic cable is on top at the 0 degree position Screwing In the Laser Output Fiber Connector Figure 11 7 Continue setting up your LDLS system as outlined in the product manual ...

Страница 23: ...hapter 6 Maintenance Caution Operating the source without any output target or beam transport is not recommended and may lead to unsafe operating conditions Similarly mounting the lamp head in an orientation that differs from its original factory alignment will cause the plasma position inside the bulb to shift slightly and may cause problems with performance and system lifespan Consult Energetiq ...

Страница 24: ... the four supplied holes in the tabs on the bottom of the chassis Ensure the inlet and outlet air vents of the power supply controller are not blocked Mounting the Power Supply Controller Figure 13 3 Remove the lamp output window cover from the lamp head using an Allen wrench 4 Connect the lamp head output to the user equipment Mount the lamp head so that the lamp output window is facing outward a...

Страница 25: ...lack 9 pin mini D sub interconnect cable from the power supply controller labeled TO LAMP to the lamp head labeled J4 Connecting the Lamp Interconnect Cable Figure 15 7 If using purge gas connect a source of nitrogen purge gas to the port on the lamp head The fitting is a push to connect type sized for 4 mm tubing Refer to 3 4 Utility Requirements for more information 8 Place the EQ 99 RC remote c...

Страница 26: ...terlock jumper plug into the interlock port Alternatively if you are integrating the EQ 99X system into your own interlock system connect a remote contact or solid state switch across pins 1 and 3 in the interlock port Connecting the I O Cable to Remote Control Figure 16 Inserting the Interlock Jumper Plug Figure 17 ...

Страница 27: ... Control for more information Alternatively if using another power supply see 4 4 1 Installing Alternative Power Supply for more information The system is now ready to operate Interlock Pin Locations Figure 18 9 Connect the 12VDC input power source to the power supply controller and a power outlet Connecting the 12VDC Input Power Source Figure 19 ...

Страница 28: ...release unless the body of the cable is pulled first This protects from accidental removal of power if the power cable is pulled Connect to a 12VDC source as follows Connector Kycon KPPX 4P Pins 3 4 12VDC Pins 1 2 12VDC return 4 4 2 Installing Alternative Remote Control The EQ 99X system is controlled through the remote I O port The table I O Port Pin Assignments gives the pin assignments and func...

Страница 29: ...n when OK float on FAULT ISOLATED 5V SUPPLY 5 50mA maximum referenced to digital common DIGITAL COMMON 6 7 8 9 Galvanically isolated from system RESERVED 10 11 Do not connect RESERVED 14 15 Do not connect The user s remote I O port can be powered either by the EQ 99X system internal isolated power supply or an external supply The figure Remote Interface Schematic below shows connection schematics ...

Страница 30: ...Chapter 4 Installation EQ 99X Operation Maintenance Manual 30 of 45 Remote Interface Schematic Figure 20 ...

Страница 31: ...he items listed below 4 6 1 EQ 99 CAL Water Cooling Installation Procedure To assemble the water cooling components of the EQ 99 CAL system 1 Calibrated EQ 99 Lamp Head 2 Swagelok Fittings OD to OD Qty 2 3 OD Tubing 8ft length individually Qty 2 4 Solid State Cooling Systems UC160 190 Chiller not shown EQ 99 CAL Lamp Head Assembly Figure 21 1 Attach the Swagelok fittings to the two pieces of coppe...

Страница 32: ...h are required in order to complete the connection 3 Connect the open ends of the tubing to the inlet and outlet ports on the Solid State Cooling Systems UC160 190 Chiller a The ports on the chiller are quick disconnect fittings To create a good seal press the tubing in b There are no designated ports for the two pieces of tubing Either piece of tubing can fit in either port Assembled EQ 99 CAL La...

Страница 33: ...umes you are using of the EQ 99 RC Remote Control to provide local control If using an alternative control system substitute the appropriate digital input and output lines from the table I O Port Pin Assignments for the switches and LEDs described below 1 Review the status LEDs on the power supply controller The POWER ON LED should be lit and neither the CONTROLLER FAULT nor LAMP MODULE FAULT LEDs...

Страница 34: ... previous operating condition of the EQ 99X system The EQ 99X system will automatically detect when the LASER ON LED Illuminated Figure 24 3 In approximately 20 150 seconds the igniter automatically turns on and the plasma ignites The LAMP ON LED light illuminates LAMP ON LED Illuminated Figure 25 4 Allow the EQ 99X system to warm up for 30 minutes The system is now ready to be used ...

Страница 35: ...restart this procedure at Step 1 If this issue occurs multiple times see Chapter 7 Troubleshooting or contact Energetiq s Service department 5 2 Stopping the System Note To minimize wear on the ignition components it is best to avoid frequently starting and stopping the EQ 99X system It is recommended to run the system continuously rather than turn the system off and on several times in one day 1 ...

Страница 36: ...rative process The final step of the cleaning should always be a successful inspection Sometimes the cleaning action redistributes particles from an area that is not visible with the inspection scope and not problematic to an area that is visible and is problematic Because of this Energetiq recommends that the first step is removing any loose particles or debris with pressurized nitrogen If the SM...

Страница 37: ...tion Use MW 00518 FS201 Fiber Inspection Scope with Custom SMA Adapter Standalone Fiber Inspection MW 00516 Custom Adapter from FS201 to EQ 99X system Fiber For use with an existing FS201 Fiber Inspection Scope MW 6537 Custom Adapter from Westover Digital Microscope to EQ 99X system Fiber For use with an existing Westover Digital Microscope 6 1 2 Fiber Cleaning Tools JDS Uniphase Westover FVD 2400...

Страница 38: ...ing Platform Table 9 Fiber Cleaning Process Flowchart Figure 28 To clean with the QbE Cleaning Platform gently press the fiber end face into the cleaning cloth or wipe and rotate it in place several times Then reduce pressure and drag the fiber 1 2 cm across the cleaning cloth or wipe The fiber end face must not have any particles on the core or cladding that are detectable with 200X magnification...

Страница 39: ...tion Maintenance Manual 39 of 45 6 2 Lamp Bulb Replacement If a bad lamp bulb is suspected in the EQ 99X system contact Energetiq for more information on having the lamp bulb replaced Contaminated and Clean Fiber End Examples Figure 29 ...

Страница 40: ...atus of the EQ 99X system During normal operation the three green LED lights on the left hand side POWER ON LASER ON LAMP ON should be turned ON The two red LED lights on the right hand side CONTROLLER FAULT LAMP MODULE FAULT should be turned OFF In the event that a green LED light turns OFF or a red LED light turns ON during normal operation see the following section for a list of potential issue...

Страница 41: ... inside the lamp bulb has been extinguished after ignition This also causes the LAMP ON light to turn OFF and LASER ON light to turn OFF 1 Clear the fault lights by toggling the EQ 99 RC Remote Control between the ON and OFF positions The EQ 99X system will not start if a fault condition exists 2 Confirm that the black jumper plug is fully inserted into the back of the EQ 99 RC Remote Control or i...

Страница 42: ... lamp bulb has been extinguished after ignition This also causes the LAMP MODULE FAULT light to turn ON and LASER ON light to turn OFF If the lamb bulb fails to ignite after several attempts contact Energetiq LASER ON is OFF There was a failure to ignite the plasma inside the lamp bulb This also causes the LAMP MODULE FAULT light to turn ON and LAMP ON light to turn OFF ...

Страница 43: ...Appendix A Mechanical Layout Drawings EQ 99X Operation Maintenance Manual 43 of 45 Appendix A Mechanical Layout Drawings Lamp Head Mechanical Layout Figure 31 ...

Страница 44: ...Appendix A Mechanical Layout Drawings EQ 99X Operation Maintenance Manual 44 of 45 Power Supply Controller Dimensional Drawing Figure 32 ...

Страница 45: ...rch 2018 Rev 5 L Chan Updated June 2022 Rev 6 E Burz Reformatted document using new template for Energetiq product manuals Compliance label updates Updated Declaration of Conformity June 2023 1 Declaration of Conformance with latest standards 2 Laser safety labels to reflect latest standards dates 3 Manuf Label to reflect correct Energetiq address 4 Fig 2 Typical Output Spectrum 5 Water Cooling In...

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