Chapter 2. System Description
EQ-99X Operation & Maintenance Manual
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Chapter 2. System Description
2.1 System Overview
The EQ-99X system
is a broadband lamp system for use in a wide variety of applications. The lamp bulb produces high
brightness, broadband light from DUV wavelengths through visible and beyond. The output is very stable, and the
system has a long lifetime before any service is required. A simple control interface ensures ease of use.
Some of the advantages of the EQ-99X system
include:
The EQ-99X system
consists of a power supply controller, lamp head, and interconnecting cables. Connection to DC
power is required for operation. Connection to nitrogen purge gas is optional but strongly recommended for best
performance. For connection details, see
.
2.2 Description of System Components
The EQ-99X system
consists of a power supply controller, lamp head, laser fiber optic cable, and lamp head signal
cable (not shown). Power and Input/Output (I/O) interface connections (also not shown) are provided by the user.
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Very high brightness across complete spectrum
170 nm through visible and beyond
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Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
Simplified optical system
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Excellent spatial stability
Repeatable measurements
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Superior short and long-term power stability
Repeatable measurements
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Electrodeless operation for long life
Reduced consumable costs
Minimal recalibration of instrument
