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5: Maintenance /Service 

46 

 

Specific for Validation with Falex NIST Traceable Reference Tube 

 

Message 

Condition 

Effect 

Comments 

Validation aborted 

because of deviation 

in measurement data 

 

The deviation of the averaged 

measurement curve to the single 

curves is too big (more than 500 

increments which are 0.038V) 

 

The Validation will fail, 

but the measured  

curves are saved to the 

HMI folder. 

 

Inspect the Tube for dust/dirt 

Refer to Addendum C: NIST 

Reference Validation Tube 

Care & Cleaning or Contact 

Falex Rep/Compass Service 

Validation aborted 

because of Timeout 

during edge detection 

 

Edge Detection lasts longer 

Than 15 seconds. 

 

The Validation will be 

aborted. 

 

Refer to Section 3.5.7  

‘Start Initialization’ or Power 

cycle the unit or Contact 

Falex Rep/Compass Service

 

Validation aborted 

because of Timeout 

during compensation 

A timeout is hit during 

Compensation. 

The Validation will be 

aborted. 

 

Power cycle the unit 

or Contact Falex Rep/Compass 

Service 

Validation aborted 

because of Timeout 

during Notch search 

A timeout is hit during 

Notch search. 

The Validation will be 

aborted. 

 

Power cycle the unit 

or Contact Falex Rep/Compass 

Service 

Validation aborted 

because of Timeout 

during Wafer 

alignment 

A timeout is hit during 

Wafer alignment. 

The Validation will be 

aborted. 

 

Power cycle the unit 

or Contact Falex Rep/Compass 

Service 

Validation aborted 

because of Timeout 

during measurement 

A timeout is hit during 

measurement. 

The Validation will be 

aborted. 

 

Power cycle the unit 

or Contact Falex Rep/Compass 

Service 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Содержание 430 ETR

Страница 1: ...FALEX 430 ETR Ellipsometric Tube Rater Operation Manual Version 2 1 Falex Corporation 1020 Airpark Drive Sugar Grove IL 60554 630 556 3669 www falex com ...

Страница 2: ... Tube Preparation 16 2 3 Heater Tube Installation 16 2 4 Start Test 17 Section 3 Detailed User Interface Features 20 3 1 Software Overview 20 3 2 Display Architecture 20 3 3 Functionality 22 3 4 Password Levels 23 3 5 Display Functionality 23 3 5 1 Measurement Display 23 3 5 2 Validation Display Test 27 3 5 3 File Browser Display 33 3 5 4 Activate Service Mode Button 35 3 5 5 Activate Admin Mode B...

Страница 3: ...erview 44 Warning Messages 45 Error Messages 45 Specific for Validation with Falex NIST Traceable Reference Tube 46 Specific for FPGA Errors 47 Section 6 Addendums 48 A Parts Listing 48 B Sample Measurement Validation Data File 49 C NIST Traceable Validation Tube Care Cleaning 50 ...

Страница 4: ...erly operated Follow operating instructions carefully If you have questions about operating this equipment please contact Falex Corporation Note This equipment should only be operated by personnel trained by Falex or a Falex approved distributor Note This equipment is to be serviced or repaired by factory authorized personnel only It is recommended that for any service related issues this equipmen...

Страница 5: ...tecting the equipment and performance A warning is important to protecting yourself others and the equipment Used in manual to bring attention to an important note or comment Caution Use of controls or adjustments or performance of procedures other than those specified herein may result in hazardous radiation exposure ...

Страница 6: ...from power Caution Use of controls or adjustments or performance of procedures other than those specified herein may result in hazardous radiation exposure 1 2 Brief Description of Equipment The Falex 430 ETR test machine is designed to offer consistent precise analytical measurement of ASTM D3241 heater tube deposits It incorporates a laser light source optical detection system for measuring the ...

Страница 7: ...l and monitoring of the test 2 Control Panel consists of measurement process start stop push buttons machine status indicators and data transfer USB port 3 Protective Housing designed to prevent human body exposure from the laser path or collateral radiation by beam or reflection exposure to laser emissions Consists of a front back and two 2 side covers User Interface Protective Housing Control Pa...

Страница 8: ...vel bench space The unit comes fully assembled The user interface is folded down during shipping to protect it Once the unit is placed in position on the bench raise the user interface and adjust it to an angle that allows the operator to view the displays easily and is free from glare External Power Supply Installation Plug the external power supply into the Power connector located on the back of...

Страница 9: ... where the Falex 430 ETR will be used Printer Installation optional Printing functionality exists if a printer sold separately is connected and has been configured It is recommended that a printer be purchased through Falex Corporation If the machine was shipped with a printer the user interface is already configured for the printer If the machine was not shipped with a printer then the printer ha...

Страница 10: ...be Alignment Internal positioning allows for consistent heater tube alignment and also compensates for warped or slightly bent tubes Heater Tube Inlet Allows access to heater tube loading assembly for positioning of the heater tube Control Panel Consists of measurement process start stop push buttons machine status indicators and data transfer USB port Power On Off Switch USB Port External Power S...

Страница 11: ... administrator and after consulting with your Falex Representative External Power Supply Connection Connection for external power supply The proper power cord 120 or 230 VAC is then to be connected to the external power supply Main Fuse A 10 amp fuse is located on the back of the machine This provides protection of the internal electronic components against overcurrent 1 6 Laser Control Narrative ...

Страница 12: ...achine control system then interprets the on state of the digital input as the shutter door being closed and allows other software sequences to occur Therefore if the proximity switch does not detect that the shutter door is closed the software application shutter door closed condition cannot be satisfied 3 Initiate Laser Emission Once the above conditions have been satisfied laser emission is ini...

Страница 13: ...led laser reflected emissions are prevented The cabinet housing is completely closed so that no laser emissions are accessible during operation An automatic mechanical shutter is used to close the tube inlet before laser emission If the shutter is not closed laser emission is not allowed As part of the quality control testing that is conducted full functionality of the instrument is tested and ass...

Страница 14: ...nformation The determined maximum average thickness should be within 5 of the known value If it is not contact your local Falex Corp representative It may be determined that your Falex 430 ETR is due for a Calibration this is performed by your Falex Corp representative or Compass Instruments service technician Note Service Calibration is to be done only by a trained technician Laser Safety Caution...

Страница 15: ...1 General Information 15 Identification Certification Label Located on the lower right side panel of the housing ...

Страница 16: ... located Doing so will contaminate the deposit 1 Visually inspect the heater tube that is to be tested for any foreign substance such as dust or lint If a foreign substance is noticed gently blow off with clean dry air Note Do not clean the center section of the heater tube with any cleaner or wipe it with a cloth Doing so will contaminate or damage the deposit Refer to ASTM D3241 for proper clean...

Страница 17: ...ethod This section gives a general overview of using the software to run a test Detailed explanation of the individual application software displays is found in later sections of this manual 1 On the user interface select the Measurement display button at the bottom of the display which switches the application software into the measurement mode 2 Press the Start button located on the Falex 430 ET...

Страница 18: ...ogress can be monitored from the Measurement display figure 2 3 by referring to the 3D graph the associated progress bar and the remaining time status Figure 2 3 Measurment display 8 The Ready Running indicator light on the Falex 430 ETR control panel will be blinking during the measurement process 9 When the measurement process is complete a Measurement Result pass or fail pop up window figure 2 ...

Страница 19: ...ater by holding it by the end and store it for future reference The tube inlet shutter door will close Note The allowable time to remove the tube is one 1 minute If the tube has not been removed within this time duration the tube will automatically be re inserted into the machine and the shutter door closed 14 The measurement process is now complete Note The measurement process can be interrupted ...

Страница 20: ...ile created is saved in a format that can be opened with a standard spreadsheet or document application once transferred to an external PC The user interface software application is automatically started when the machine is powered up Should the display go to sleep it can be reawakened by touching somewhere on the touchscreen surface The software configuration is defaulted for ASTM D3241 testing 3...

Страница 21: ...ote Do not pull the flash drive out of the USB port without properly closing ejecting the flash drive first Failure to do this could cause user interface lockup and or corrupt the data stored on the flash drive Always eject the flash drive by selecting the USB utility at the top of the display About When selected a popup will appear showing the software revision level Exit Allows the operator to p...

Страница 22: ... figure 3 2 These fields allow the operator to enter alpha numeric information If alpha numeric information is to be entered into an enterable field on the display a full keyboard figure 3 3 pop up will appear on the display if the keyboard icon is selected Select the enterable filed and the pop up keyboard can be used by selecting the desired character using ones finger or stylus to enter the req...

Страница 23: ...d authorized personnel use only F1020 all letters capitalized 3 5 Display Functionality The following sections will describe the functionality of each display 3 5 1 Measurement Display When the Measurement display button is selected the Measurement display appears figure 3 5 This display contains a 3D graph numeric data buttons and enterable fields to allow the operator to configure run and manage...

Страница 24: ... Operator or Technician Tube SN Tube Serial Number taken by internal camera Serial Number not the photo will also be in Test Data File Description This reference is added to the data file This will be useful in locating specific data files Sample Information Additional Information regarding the Sample Other Information Other useful information ...

Страница 25: ...name in front of the standard date time naming convention This will be useful in locating specific data files It is limited to ten 10 alpha numeric characters Progress Shows the percentage of the measurement test that has been completed Measurement Status Shows the status of the measurement test Possible descriptions are running finished aborted Actual Measuring Point Shows the current measuring p...

Страница 26: ...n the 6x1 Avg Data option will be shown in the drop down Note The 2D view and the view of the normalized data are not available during an active measurement test They can only be viewed after completion of the measurement test when the normalize value has been determined When a measurement file is loaded using the File Browser display double clicking on a selected test file will also open the test...

Страница 27: ...s dust free The tube comes with two NIST certificates one for each wafer that has the certified thickness in Angstroms these certificates are individually serial numbered as well as the NIST Traceable Reference Tube The stainless steel tube also has a permanent sticker on the outside with this information The determined maximum average thickness should be within 5 of the known value If it is not c...

Страница 28: ...t previously done so To run a Validation test From the Measurement screen press the Activate Service Mode tab on the lower toolbar Password Enter ETR all letters capitalized from the touchscreen keyboard press OK or the Enter key This will activate the grayed out tabs on the lower toolbar ETR Go to the Settings screen after tabs on lower tool bar have been activated by pressing the Settings tab on...

Страница 29: ...lidation with synthetic tubes the Validation with synthetic tubes box must be checked Go to the Validation screen by pressing the Validation tab on the lower tool bar Carefully remove the NIST Traceable Reference Tube from the stainless steel tube Insert the NIST Traceable Reference Tube by pressing the Insert Eject Tube icon on the upper tool bar Once the shutter is open carefully insert the tube...

Страница 30: ...he Insert Tube pop up is gone the Please fill in Validation Information popup will appear Note The serial number will not be captured by the camera Enter required information in the Please fill in Validation Information pop up Select keyboard icon to open full size keyboard Note Required information fields are Operator Thickness Tube Name is automatically set to VAL For the Thickness of 60nm 100nm...

Страница 31: ... indexing edge detection as well as acquiring 20 measurements for each wafer 60nm 100nm Once the validation test has completed you will see the Validation Result pass fail pop up click OK to close this pop up The important information you will be looking for is a Pass green thumbs up pop up and the actual wafer thicknesses in green thicknesses in green indicates the measurement is within 5 of the ...

Страница 32: ...s in on the exposed end of the tube to aid in releasing from the clamping device Carefully return the NIST Traceable Reference Tube to the stainless steel tube taking care not to have the wafers brush against the sealing gasket Note It is recommended to run at least three validation tests using the NIST Traceable Reference Tube After each test eject and reinsert the tube If performing back to back...

Страница 33: ...ssociate the numeric red box in figure 3 7 with the numeric description below for functionality details 1 Selecting this icon will open the folder for measurement test data storage also selects the root of the folder 2 Selecting this icon will open the folder for pdf file storage also selects the root of the folder 3 Selecting this icon will open the external USB flash drive root directory 4 Once ...

Страница 34: ...r deleting the selected file s folder within the internal storage Note The file s folder will be permanently deleted Figure 3 9 New Folder Pop up 11 Selecting this icon will open the selected file within the external storage of the corresponding display Measurement or Validation 12 Selecting this icon will open the dialog window figure 3 8 for creating a new folder at the selected location within ...

Страница 35: ... password enabling the Settings display Refer to Section 3 4 and 3 5 6 3 5 5 Activate Admin Mode Display Selection of this display button allows factory technicians and authorized personnel to enter a level 2 password enabling the Admin Mode display Refer to Section 3 4 and 3 5 7 Note Use Caution when accessing areas enabled by this password ...

Страница 36: ...ge Service Mode Password To modify the Service Mode Password you have to type in the current password default is ETR In the next text fields you have to type in the new password If the current password is correct you can click the Save New Password button Ellipsometer Parameters These parameters can be modified to change the Ellipsometer Properties These parameters describe the optical properties ...

Страница 37: ... switches to the other file If the file is already filled it will be overwritten When a USB device is plugged in the Copy Log to external Storage button is active If no USB device is plugged in this feature will be disabled IP Address is shown if the device is connected to an external network A network IP Address will only be detected when the device is restarted and the Settings Display is reopen...

Страница 38: ... Date Time opens a dialog where the system Date Year Month Day Time Hour Minute Time Format 12 or 24 Hr and Time Zone can be adjusted Once modified use the Set button to store the modified settings Use the Cancel button to restore the settings ...

Страница 39: ...s Switch Mode button Every axis has to be enabled before movement There are three 3 temperature sensors inside the Falex 430 ETR only one 1 is displayed The other areas are for troubleshooting and to verify functionality Motion Mode Step Mode With Step Mode active in the text field for the corresponding axis you can type in the step width The axis will move one step for every click of or Velo Mode...

Страница 40: ... Limit switches and display the Actual Position in mm Analyzer This will rotate the Analyzer and find the Index Mark as well as display the Actual Position Other Areas Machine Temperature There are three 3 temperature sensors inside the Falex 430 ETR only one is displayed Tube Clamping In this area you can switch on off the Tube Clamping When a tube is inside the Falex 430 ETR the Tube Inserted li...

Страница 41: ...ear i e 2018 hh hour mm minute am pm If 12H selected for Time Format Data files can be copied from the machine to an external device using the File Browser as discussed in Section 3 5 3 The data files are saved in a format that can be opened within a standard spreadsheet or document application once transferred to an external PC The data files are saved as a txt formatted file The measurement vali...

Страница 42: ...very data point Normalization is applied at the end of the test when all data has been collected The 3D graph shown at the end of the test has been normalized 6x1 Normalized Data Each value is a 2 5mm2 average area value found of six 6 points 1 columns x 6 lines It will be used to normalize the rest of the data by subtracting it from every data point Normalization is applied at the end of the test...

Страница 43: ...x of the tube ks extinction coefficient of the tube nf refractive index of the deposit kf extinction coefficient of the deposit DC Offset offset of the photo diode in the dark Lab Name City State Country Ellipsometer SN Serial Number Total Volume Max Ave Thickness Normalization Value Normalization Position Indexing Path Calibration Date The data table portion of the measurement data file consists ...

Страница 44: ...nance is required on the laser system or internal positioning equipment Note Should any issues appear that require service please contact your Falex Representative or Compass Service This equipment is to be serviced or repaired by factory authorized personnel only It is recommended that for any service related issues the machine is to be shipped back to the manufacturer The machine is not to be op...

Страница 45: ...eter File Found The file DeviceParameters param wasn t found in the HMI folder Device parameters can t be reset to standard settings Contact Falex Rep Compass Service Error Messages This is not a complete list these are commonly encountered Error Messages for any other Error Messages please contact your Falex Representative or Compass Service Message Condition Effect Comments Shutter Not Closed Sh...

Страница 46: ...ted Refer to Section 3 5 7 Start Initialization or Power cycle the unit or Contact Falex Rep Compass Service Validation aborted because of Timeout during compensation A timeout is hit during Compensation The Validation will be aborted Power cycle the unit or Contact Falex Rep Compass Service Validation aborted because of Timeout during Notch search A timeout is hit during Notch search The Validati...

Страница 47: ... will continue Refer to Section 3 5 7 Shutter or Power cycle the unit or Contact Falex Rep Compass Service FPGA Error Shutter Limit Switches Both Limit Switches are triggered or there is a timeout when moving the axis Running measurement will abort Refer to Section 3 5 7 Shutter or Power cycle the unit or Contact Falex Rep Compass Service FPGA Error Compensation Limit Switches Both Limit Switches ...

Страница 48: ...Validation Tube 431 003 001 Cabinet housing front 431 003 002 Cabinet housing top 431 003 003 Cabinet housing right side 431 003 004 Cabinet housing left side 431 038 001 User interface panel PC 431 103 001 External power supply 431 200 001 Fuse 10 amp 650 030 161 Power cord 120V 650 204 074 Stylus ...

Страница 49: ...eful information can be entered here Tube Material Aluminum Test Status Complete Pass ni 1 ns 2 65 ks 9 4 nf 1 45 kf 0 DC Offset 0 00112 Lab Name Falex City Sugar Grove State Illinois Country USA Ellipsometer SN ETR_430 DXXXX Total Volume 0 0142053 Max Ave Thickness 86 0872 Normalization value 9 51562 Normalization position 48 Indexing Path 57 4294 Calibration Date Feb 02 2018 01 38 53 pm Non Norm...

Страница 50: ...aceable Reference Tube please refer to the above warnings and follow the below directions Care and Cleaning of the Silicon Wafers Method 1 Apply one drop of Isopropanol then quickly blow off the Isopropanol with the pure air duster If the silicon wafer needs more cleaning apply one drop of Isopropanol wipe silicon wafer gently with laboratory grade Q tip then quickly blow off the Isopropanol with ...

Страница 51: ...ucts solvents isopropyl_alcohol html Air pure duster Thorlabs CA4 EU but there is an US version CA4 US https www thorlabs com newgrouppage9 cfm objectgroup_id 3317 pn CA4 US Q Tips Cotton Ball cleanroom grade http www iab reinraumprodukte de en swabs polyurethane swabs swab pu 3921 html listtype search searchparam PU 203921 ...

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