4: Data Files – Measurement / Validation
42
Measurement Data File
Non-normalized Data
Captured raw data that has not been normalized. The 3D graph is populated during a test with
non-normalized data.
2x3 Normalized Data
Each value is a 2.5mm
2
average area value found of six (6) points (
2 columns x 3 lines
). It will be used
to normalize the rest of the data by subtracting it from every data point. Normalization is applied at
the end of the test when all data has been collected. The 3D graph shown at the end of the test has
been normalized.
3x2 Normalized Data
Each value is a 2.5mm
2
average area value found of six (6) points (
3 columns x 2 lines
). It will be used
to normalize the rest of the data by subtracting it from every data point. Normalization is applied at
the end of the test when all data has been collected. The 3D graph shown at the end of the test has
been normalized.
6x1 Normalized Data
Each value is a 2.5mm
2
average area value found of six (6) points (
1 columns x 6 lines
). It will be used
to normalize the rest of the data by subtracting it from every data point. Normalization is applied at
the end of the test when all data has been collected. The 3D graph shown at the end of the test has
been normalized.
Ellipsometric Angles (PSI, DELTA)
These are the ellipsometric angles which are used to calculate the deposit thickness. A psi and delta
pair exists for each point on the heater tube.
Validation Data File
Angle [deg]
Angle and degree recorded for calculation in Validation curves.
Power Wafer 1 and Power Wafer 2
Power readings for each Angle and degree of Wafer 1 and Wafer 2 recorded for calculation in
Validation curves.