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77
Abb. 45: Front panel
The flow controller mainly consists of the following components:
–
The flow sensor (1)
–
The flow regulating valve (V6)
–
The flow control board HF 42
The flow sensor measures the gas flow, and converts its flow rate into an electrical
signal (DC voltage).
The HF 42 board compares this flow value with the flow set point value.
The signal resulting from the comparator controls a pulse width modulator.
Its output can be seen on TP 8. TP 15 is GND.
The pulse width modulated signal runs a power transistor, which in turn, supplies
the output signal to the flow regulating valve.
The duty cycle of the output signal determines its DC voltage, which, with a flow of
about 180 l/h and with clean chemicals, measures around 9V (on TP 3).
5
6
7
Содержание CS-800
Страница 2: ...2 Copyright Copyright by Eltra GmbH Haan Retsch Allee 1 5 D 42781 Haan Federal Republic of Germany ...
Страница 3: ...3 ...
Страница 10: ...10 Fig 2 Draft 12057 ...
Страница 11: ...11 Fig 3 Draft 11660 ...
Страница 12: ...12 Fig 4 Draft 12200 ...
Страница 14: ...14 Fig 6 Draft 12058 Signal and control ...
Страница 17: ...17 Fig 8 Draft 6 2 4 Gas flow diagram furnace closed ...
Страница 18: ...18 Fig 9 Oxygen flow schematically ...
Страница 19: ...19 Fig 10 Draft 12059 signal and control board ...
Страница 21: ...21 Fig 12 Draft VG 96 connector ...
Страница 22: ...22 Fig 13 Draft 1 14 4 1 ...
Страница 23: ...23 Fig 14 Draft IR 45 power supply ...
Страница 24: ...24 Fig 15 Draft IR sources Fig 16 Draft 7 pin plug ...
Страница 80: ...80 Abb 46 IRC 1 3 ...
Страница 82: ...82 Fig 29 Mainboard Cut out IR Cell general test points ...
Страница 91: ...91 Abb 47 Pneumatics parts 2 1 3 4 5 6 7 8 9 10 11 12 13 14 15 ...
Страница 94: ...94 bar 0 5 1 1 5 2 2 5 0 PR2 1 Fig 49 Front side 4 5 47BPurge pressure Fig 50 PR2 5 6 ...
Страница 109: ...Service 109 10 10 11 9 b7 10 1 12 8 5 6 Fig 60 b7 10 1 ...
Страница 110: ...Service 110 ...
Страница 119: ...Miscellaneous 119 77510 Heaters for IR cell ...
Страница 120: ...Miscellaneous 120 6 1 2 121BFront side Fig 41 Front side ...
Страница 122: ...Miscellaneous 122 6 1 3 122BRight side Fig 42 Right side ...
Страница 126: ...Miscellaneous 126 6 1 5 124BOscillating circuit Fig 44 Oscillating circuit ...
Страница 130: ...Miscellaneous 130 6 1 7 126BFurnace cleaning 75130 14080 75122 70120 14072 14051 14045 75150 14021 14160 ...
Страница 132: ...Miscellaneous 132 21010 Heather section 21120 Quartz tube 70380 O Ring 70380 21120 21010 ...
Страница 134: ...Miscellaneous 134 Fig 47 12055 I ...
Страница 135: ...Miscellaneous 135 Fig 48 12055 II ...
Страница 136: ...Miscellaneous 136 Fig 49 12072 ...
Страница 137: ...Miscellaneous 137 Fig 50 12064 ...
Страница 138: ...Miscellaneous 138 Fig 51 12550 Vacuum cleaner ...
Страница 139: ...Miscellaneous 139 Fig 52 12015 I ...
Страница 140: ...Miscellaneous 140 Fig 53 12015 II ...
Страница 141: ...Miscellaneous 141 Fig 54 12016 ...
Страница 143: ...Miscellaneous 143 6 2 1 127BUNI 1 ...
Страница 144: ...Miscellaneous 144 6 2 2 128BGas flow system ...
Страница 145: ...Miscellaneous 145 ...
Страница 146: ...Miscellaneous 146 6 2 3 129BValve controlling Fig 55 Valve controlling I 11001 6001 ...
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Страница 158: ...Copyright Copyright by Eltra GmbH Haan Retsch Allee 1 5 D 42781 Haan Federal Republic of Germany ...