Scanning Electron Microscope
EM-30PLUS Operating Manual
31
1. Install the specimen on Stub, and
measure the combined height of Sample
and Holder.
2. Change EM-30PLUS to the state of air
pressure.
3. Install Multi-Holder on Stage in the
direction of the arrow.
4. After entering the value measured in 1
above in Height of Sample of Setup of
NS, click Set Sample Height (mm).
5. Change EM-30PLUS to the vacuum
state.
6. You can use the Tilt function for
operation.
When incorrect sample height is input in Height of Sample and Tilt function is used,
there can be collisions as it is tilted more than the maximum allowable angle of
Tilt(especially lower value than the actual one). Therefore, be sure to enter the exact
sample height for operation.
When the bigger value than the maximum angle of Tilt is input and you execute Tilt
after entering T value, the coordinate indicates the input value but it is not tilted more
than the maximum angle of Tilt in reality.
