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Scanning Electron Microscope

EM-30PLUS Operating Manual

28



Bias Value
: It controls the voltage that pulls the electron beam generated from Filament towards
specimens.



After setting Filament Value, adjust the value of Emission Current by adjusting BIAS.
(Recommended Emission Current: 50±5uA)



Spot Size(SP, size of electron beam)

It adjusts the size of electron beam used for observing images.



You can change the current amount of electron beam by adjusting Spot size. (Range of
Spot size: 5~16)
High magnification: Setting Spot size small(Brightness decreases as electron decreases
but resolution increases)
Low magnification: Setting Spot size big(Brightness increases as electron increases but
resolution decreases)

* For the details on Spot Size, see [5.3.2 Setting Spot Size].
* If e-gun is not aligned properly, brightness may vary irregularly when Spot size is
changed. See [ 8.2 Method for e-gun alignment].



Average filtering



If there is a big occurrence of noise on images, you can use Filter function. This function
shows the average value of images after overlapping as many images as the steps chosen.

Choose the filter value you want.
(Filter value: 1~25 Steps)



When using Averaging Filter, noise is reduced but reaction speed slows down.
The filter value that has the best reaction speed is about 2~3.



Charge Reduction: N. A.(Being developed.)

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Содержание EM-30PLUS

Страница 1: ...Scanning Electron Microscope EM 30PLUS Operating Manual COXEM Co Ltd ...

Страница 2: ... Screen of NS 14 2 2 Explanations on Buttons 15 2 2 1 E Gun Power Button 15 2 2 2 Vacuum State Buttons 16 2 2 3 Selection of Detector Mode 17 2 3 Display Mode 18 2 4 Image Mode 20 2 5 Stage Holder Information 20 2 5 1 Maximum Tilt Angle 21 2 6 Right Function Tap 22 2 6 1 Function 22 2 6 2 Magnification 23 2 6 3 Image Viewer Setting 24 2 7 Top Function Tap 25 2 7 1 Setup 26 2 7 2 Option 33 2 7 3 He...

Страница 3: ...ecimen Mounting on Stub 49 3 5 Specimen Mounting 51 3 5 1 Preparation and Mounting of Specimen 51 3 5 2 Specimen Storage 53 4 Preparation for Taking Photos 54 4 1 Power ON OFF 54 4 1 1 Turning on the Main Body of EM 30PLUS 54 4 1 2 Turning off EM 30PLUS 55 4 2 Setting up of Electron Beam 56 4 2 1 Turning on the Electron Beam 56 4 2 2 Filament Optimization 57 4 3 Location Movement of Specimen 59 4 ...

Страница 4: ...t 89 5 5 2 Use of Beam Rotation 90 5 6 Control of Contrast and Brightness 91 5 6 1 Control of Contrast Brightness 91 5 7 BSE Mode 92 5 7 1 Precautions for Using BSE Sensor 93 5 7 2 BSE Setting 94 5 7 3 Directions for BSE Mode 94 5 8 LV Mode Low Vacuum Mode Optional 98 6 Wobble Operation for Aperture 100 6 1 Structure of Aperture 100 6 2 Wobble Procedure of Aperture Alignment 101 6 2 1 Wobble Opera...

Страница 5: ...Scanning Electron Microscope EM 30PLUS Operating Manual 5 8 Alignment Operation 121 8 1 Summary of E Gun Alignment 121 8 2 Method for E Gun Alignment 122 ...

Страница 6: ...keep the manual in a conspicuous place Some devices or functions in manual may not be provided and they can be different depending on optional items or options Images on the cover or in the manual are for illustration which may be different from actual products The functions and performance of this product and manual can be changed without prior notification ...

Страница 7: ...M 30PLUS No Items Descriptions E Gun cover It is a cover for protecting e gun LED Display for vacuum Its vacuum state is displayed with LED lamp Pump Vent button It cancels or set up the state of vacuum by force Chamber door It is a door for chamber in which a specimen is placed Variable Aperture It is a handle used when controlling aperture Power switch It is used for turning on the power ...

Страница 8: ...molecular pump It keeps vacuum state high HV power tank It provides the power of high voltage Damper It absorbs vibrational energy Auto Stage It moves X axis Y axis and T axis Stage Chamber It is a vacuum chamber in which a specimen is placed SE Detector It detects SE Condenser lens It is a lens condensing electron beam Main vent pipe It is a vacuum vent pipe E Gun It radiates electronic beams BSE...

Страница 9: ...ent of Specimen Height 3 5 2 Specimen Mounting on Equipment 2 Power ON 4 1 1 Turning on the Main Body of EM 30PLUS 3 Preparation for Taking Photos 4 3 1 Use of Multi Holder 4 3 2 Use of Stub Except Multi Holder 4 3 5 Specimen Selection and Moving Using Mouse 4 Image acquisition 5 1 Setting up Observation Mode 5 2 Setting Acceleration Voltage 5 3 Setting up Observation Magnification Spot Size 5 4 F...

Страница 10: ...erating Manual 10 1 3 Cautions before Use 1 3 1 Handling If fine dust or debris gets into electron microscope EM the equipment performance can be degraded Therefore be sure to handle the equipment with plastic gloves Example of Plastic Gloves ...

Страница 11: ...erations Detailed performances General operation and taking photos System operator Calibration Agent or person that completed calibration training Hardware replacement Agent or person that completed maintenance training Upgrade and installation of software Agent or person that has knowledge on software installation Disassembly and maintenance of hardware Agent or person that completed maintenance ...

Страница 12: ... alignment tightly before opening the chamber of e gun If you touch the hot surface of cartridge of electron gun with hands you can have a burn Do not touch the cartridge with hands until the surface cools completely CAUTIONS If the product is exposed to excessively high temperature or its heating is too high it can be the causes of defects or malfunction Please maintain a proper indoor environmen...

Страница 13: ...n down Apply for the service when moving the equipment Arbitrary moving or installing can cause failure or damage of equipment Failure caused by arbitrary moving or installing will result in additional expenses for after sales service Do not revise or remodel the hardware or software arbitrarily Arbitrary remodeling can result in fire or electric shock Failure caused by arbitrary revising or remod...

Страница 14: ...Scanning Electron Microscope EM 30PLUS Operating Manual 14 2 Screen Composition 2 1 Main Screen of NS The composition of main screen of NS is as follows ...

Страница 15: ...e equipment with e gun on it can affect filaments Be sure to turn off the e gun first and then turn off the equipment When turned OFF Gray When turned ON Purple USB Disconnect State Communications between EM 30PLUS and PC are bad 1 Confirm the connection state of the USB cable 2 Change the USB cable to the USB connector of PC 3 There are communications related problems in various boards A S requir...

Страница 16: ... When pressing Vacuum OFF button it is converted into Vacuum ON button which is vacuum state Setup Vacuum Toggle button It is a button for controlling the vacuum degree of chamber inside HIGH VACUUM It indicates current state is ready for high vacuum Keep the vacuum state of chamber inside at the level of below 10 4 torr LOW VACUUM It indicates current state is ready for low vacuum Keep the inside...

Страница 17: ...ondary Electron SE and displays the image which is mainly used for observing specimen surface It is changed into SE Mode if you press BSE Mode button BSE Mode It receives the signal of Back Scattered Electron BSE and displays the image with which you can observe the element composition of specimen It is changed into BSE Mode if you press SE Mode button SE BSE Mode It compares and observes two imag...

Страница 18: ...it is set in RED Mode a small enlargement window appears on image window as shown in the figure below fast focusing is possible while viewing this window To move the RED window drag the screen until you find the position you want If you press RED Mode button one more time it is changed into Focus Mode which provides the faster reaction velocity Fast Mode Resolution 800x600 It is a basic display mo...

Страница 19: ...9 Slow Mode Resolution 800x600 It scans a specimen slower than Fast Mode which enables images to be observed more clearly Photo Mode Resolution 1280x960 It is a mode for taking photos of quality images which takes about 1 minute It is used when saving images ...

Страница 20: ...ved automatically in the specified path at the same time When using Image Mode images are saved in the specified path in the image folder of Option Tap and the file name is set and saved as the saved time The basic saving path when shipping the product is C Snap Image 2 5 Stage Holder Information It provides information on the current location of coordinates of Stage and information on the kind of...

Страница 21: ...ection inside the chamber Y axis Vertical direction inside the chamber T axis Tilt angle of Stage When entering the angle in the coordinate window Stage moves 0 45 degrees To prevent OL from colliding with specimen when T axis is rotating the maximum tilt angle is automatically limited below 45 degrees depending on the height of stub and X Y coordinate To use a higher tilt angle use a lower stub a...

Страница 22: ...s fast in wide area by adjusting focus large using mouse After selecting button you can adjust the image in coarse focus more finely and find the optimal focus using mouse If you press button you can find coarse focus automatically Astig After adjusting images focus make circular properties towards X Y directions of electron beam to make more fine images You can adjust it by using mouse wheel or d...

Страница 23: ...e center If you press Y button the position of Y Gun Align moves to the center As the position of center does not necessarily mean the optimum state of e gun carry out Fine Adjustment as the brightest position after moving it to the right center 2 6 2 Magnification You can select or input the magnification you want while observing specimens Magnification Select the magnification you want by using ...

Страница 24: ... adjust Contrast value rather than Brightness value you can acquire more clear and bright images Brightness It adjusts the brightness of images Gamma You can adjust images more naturally by correcting gamma value that makes bright part brighter and dark part darker Use this function when you cannot acquire clear images even if you adjusted the values of Contrast and Brightness When specific parts ...

Страница 25: ...an be applied using the top function tap as the NS 3 0 interface is made conveniently Setup It controls Acceleration Voltage Vacuum Type Emission Current Spot Size SP and BSE image setting Option It changes Line profile and image save path or controls other functions Help You can refer to various manuals ...

Страница 26: ...ens in order to acquire the images you want range of acceleration voltage 1 30kV High acceleration voltage High voltage If acceleration voltage is high resolution increases which is appropriate for measuring high magnification However if acceleration voltage is high it is not appropriate for observing the shape on the surface of specimens and there can be damage on the specimens Low acceleration v...

Страница 27: ... 10 2 torr When using Low vacuum Mode See 5 8 LV Mode Low Vacuum Mode Optional Gun Vacuum It indicates the vacuum state of the e gun chamber Emission Current It indicates the value of Emission Current of electron beam Set the value of Emission Current by adjusting Filament Value and BIAS Value Recommended Emission Current 50 5uA If the value of Emission Current is indicated as 0 after adjusting Fi...

Страница 28: ...on decreases but resolution increases Low magnification Setting Spot size big Brightness increases as electron increases but resolution decreases For the details on Spot Size see 5 3 2 Setting Spot Size If e gun is not aligned properly brightness may vary irregularly when Spot size is changed See 8 2 Method for e gun alignment Average filtering If there is a big occurrence of noise on images you c...

Страница 29: ... in area which should be optimized as the images whose brightness is reversed 3 select Ch1 Ch4 in area again and then 4 select TOPO TOPO Ratio It determines the ratio of change when changing from COMPO Mode to TOPO Mode For the ratio of change 1 is used as Default When changing from Compo Mode to Topo Mode brightness is shown differently depending on the properties of the sample Increase the value...

Страница 30: ...angle of Tilt is as shown in the table below X mm Y mm Sample Holder Height mm Maximum Angle of Tilt 17 5 17 5 42 5 18 17 5 17 5 40 20 17 5 17 5 35 22 17 5 17 5 30 25 17 5 17 5 25 29 17 5 17 5 20 34 17 5 17 5 15 42 17 5 17 5 13 45 When X Y coordinate is not in the Center 17 5mm 17 5mm it can be limited more than the maximum angle of Tilt In case of WD 50mm Sample Mount when Sample is not installed...

Страница 31: ...e EM 30PLUS to the vacuum state 6 You can use the Tilt function for operation When incorrect sample height is input in Height of Sample and Tilt function is used there can be collisions as it is tilted more than the maximum allowable angle of Tilt especially lower value than the actual one Therefore be sure to enter the exact sample height for operation When the bigger value than the maximum angle...

Страница 32: ...ee of 10 1 10 2 torr when operating Low Vacuum Mode Optional The value of Low Vacuum Delay may vary for the conditions water content etc of specimens It is 180 for the basic solid specimen For the details on Low Vacuum Mode see 5 8 LV Mode Others Calibration part The right part on the Setup page is the function on Calibration Arbitrary operation is prohibited ...

Страница 33: ...Scanning Electron Microscope EM 30PLUS Operating Manual 33 2 7 2 Option It changes Line profile and image save path or controls other functions ...

Страница 34: ...s of Focus state Brightness Contrast and Gamma are not set appropriately they can show distorted information Be sure to acquire clear images to obtain exact information Line Profile function is used to obtain information in real time It is recommended to use Observation Mode RED FAST SLOW that can acquire real time image information Micro Wave It observes the distribution of brightness of images b...

Страница 35: ...nification It indicates magnification SE BSE Detector It indicates Detector Type used Vacuum Sensor It indicates Vacuum Mode selected Note It indicates the phrases to be indicated temporarily by users Input in the text box directly Spot Size It indicates Spot size Micron Bar It indicates scale bar Photo It indicates resolution pixel by mode Working distance It indicates the distance of focus betwe...

Страница 36: ...eleasing Check Center X Y Ratio Being developed EDS Path When EDS is installed EM 30AXPLUS it can execute EDS program by clicking icon It selects the EDS program path by clicking icon 2 7 3 Help It executes Install Management Maintenance FAQ Maintenance and Calibration manuals ...

Страница 37: ...bserve the specimen mounted at present 2 8 2 Image Tools With image tools you can measure length or area on specimen images and then save them Image tools are recommended to be used on the images scanned in photo mode and the function of length measurement is used the most For the details of image tools see 7 2 1 Addition of Figures ...

Страница 38: ...the values of Contrast and Brightness When specific part of images are excessively bright correct them adjusting overall balance by decreasing the contrast value and increasing brightness value and then adjusting gamma value 2 8 4 Image Shift During image work you can move electron beam to X Y axis or rotate the electron beam Image Shift It moves the direction of electron beam on the basis of X Y ...

Страница 39: ...n used during aperture alignment If aperture alignment is not proper focusing would not be easy when observing specimens and image quality is deteriorated Aperture alignment is needed when image moves up and down left and right during focus correction At this time press the wobble button turn the aperture X Y knobs and correct images lest they should move For the details on Wobble process see 6 Wo...

Страница 40: ...mens in an adequate way you can acquire clear images even in specimens whose measurement is not easy You should wear Poli Latex gloves during the whole process of dealing with specimens When you deal with specimens with bare hands contaminants or sodium ingredient on hands can be got into the electron microscope EM and deteriorate the performance When you make specimens of glass or semiconductor w...

Страница 41: ...vided when purchasing EM 30PLUS are as follows When you need other size or shape of Stub besides basically provided Stub you can order purchase it additionally Multi Holder Stub 1 Stub Pin 7mm dia Stub 2 Stub Pin 12 7mm dia Stub 3 Section Tilt Stub 12 7mm dia Stub 4 25mm Basic Stub 25mm dia WD 50mm Sample Mount 24mm dia Stub Pin Mount ...

Страница 42: ...ter mounting WD 7mm When adjusting stub horizontally after disassembly WD 10mm WD adjusting screw WD is determined by adjusting the screw position Housing It is a part of adhering to stage as a body part Holder is mounted inside EM 30PLUS Insert desired stub on to load sample Mount or disassemble to change WD into 7mm or 10mm for operation Rotate to make sample on a level with eyes to maintain def...

Страница 43: ...erefore the stub should be cleaned regularly Preparations Poly Glove Wiper Acetone The procedures for stub cleaning are as follows 1 When you adhere specimens to Stub using carbon tape repeatedly Stub surface gets dirty 2 First fold several sheets of wiper and sprinkle acetone on it 3 Face the stub surface downwards 4 Clean the surface while rubbing stub from side to side Residue of carbon tape ad...

Страница 44: ...tub plate and then mount the specimen Even materials a little bigger than the stub plate can be mounted Materials of high height Facing the most flat part of specimen downwards and a photographing part upwards put the carbon tape and mount the material on stub 3 3 2 Classification by Material For the pretreatment of specimens see 3 4 Production of Specimen Plastic material As plastic material has ...

Страница 45: ...cessary Glass material When you cut it you can see its cross section and tilt image can be acquired using tilt holder For glass specimens ion coating is essential Powder Material Sprinkle the powder material on carbon tape and blow it with blower so that it may not get into the equipment When the powder has not been removed with blower it can be the cause of equipment deterioration ...

Страница 46: ...on according to observation purpose 3 In order to prevent damages that may occur on specimen equipment when you observe specimens with SEM check the specimen properties Is it heat resistant Is it magnetic Is it conductive or nonconductive How big is it 3 4 2 Material Preparation Users can cut the material or it can be used as it is if it is small 1 When taking pictures with standard specimens If y...

Страница 47: ...ter equipment is mainly used for pretreatment process which prevents charge up effect of nonconductive specimens and enhances the efficiency of secondary electron generated on specimens 3 Biologic Specimens The pretreatment for biologic specimens is very important as it can be deformed during natural dry Moreover as they are subject to thermal damage during specimen observation setting acceleratio...

Страница 48: ...his time should be within 0mm 43mm When using WD 50mm sample mount WD 50mm sample height mm Multi Holder WD50mm Sample Mount WD Working Distance refers to the distance between specimen and objective lens WD value Advantages Disadvantages When WD is high Image depth is enhanced Resolution is degraded When WD is low Resolution increases Image depth is degraded In order to acquire images of high magn...

Страница 49: ...fixed on stub plate and do not overlap the specimens 4 After you put the material to plate blow it with blower so that powder or dust may not get into the chamber The size of specimen should be adjusted to be within stub inside Specimen should be fixed on stub with carbon tape as you can t get exact images during specimen observation if specimen is shaken Fix all the specimens on stub and then rem...

Страница 50: ...put many specimens of the same type on Stub marking specimen sequence makes it convenient to observe them As they will appear in the same order when observed by electron microscope EM image observation is easy If you remember the order of specimens on Stub it is efficient when finding the specimens ...

Страница 51: ... state by pressing Vacuum ON button of NS Make sure that vacuum state is released when you mount the specimen on equipment 2 Insert Multi Holder into a groove of specimen mounting portion If the final height of specimen is big it can cause collisions with the objective lens or the BSE Sensor Be sure that the final height of specimen does not go up higher than the height of Housing Cover of Multi H...

Страница 52: ...he right only If Stub is not fixed properly mechanical vibration can appear in images Therefore confirm the fixed state 4 Close the chamber door of specimen mounting portion by pressing it Close the chamber door by pressing it and adhere Stage firmly to the Chamber If you leave the chamber door unclosed for a long time after Pump the rotary pump is operated in air pressure which applies pressure t...

Страница 53: ...ike metals with the possibility of being oxidized or whose components can be damaged it is recommended to place it in a vacuum desiccator The specimens that are should be stored in vacuum easily oxidized metal specimens semiconductor materials and biologic specimens The adhesive power of carbon tape gets stronger when it is exposed to the air for a long time and it can be hard to detach the tape U...

Страница 54: ... starts to work 4 When operation of rotary pump finishes turbo pump starts to work and makes chamber inside vacuum state Rotary pump is in air pressure 10 1 torr vacuum state reaches 50 Turbo molecular pump is in vacuum state within a range of 10 1 torr 10 4 torr it reaches 100 of vacuum state In general it takes about 2 5 minutes until it reaches 100 of vacuum in air pressure However the time for...

Страница 55: ... 2 Turning off EM 30PLUS 1 Turn off the E Gun in NS Wait till the value of Emission Current becomes 0 and then turn off the main power 2 Terminate the NS 3 Turn off the power switch on the side of EM 30PLUS Be sure to turn off the power of product in vacuum state ...

Страница 56: ...tron Beam 1 When specimen is mounted set vacuum state by pressing Vacuum OFF button of NS 2 Check the vacuum state of equipment The color of the vacuum bar of Electron Gun changes as vacuum degree increases 3 When vacuum degree reaches 100 the vacuum bar disappears Then turn the power on by pressing E Gun Off button ...

Страница 57: ...ent Adjust the Filament Value to the green bar area saturation point area Red square Standard saturation point about 75 3 4 of the Filament bar If you set the value over the saturation point beyond the green bar area and use the equipment lifespan of filament can be reduced When e gun is turned on it is automatically set in the filament value used previously ...

Страница 58: ...BIAS Recommended Emission Current 50 5uA In EM 30PLUS brightness of electron beam and filament lifespan are determined according to filament current Filament saturation point refers to Operating Point on graph above when filament current is set to this point equipment can be used most effectively the green bar area in the program When you increase the current value of filament a point from where t...

Страница 59: ...ting the Stub to be measured among many Stubs and find out the specimen easily through Mini map function 1 If you set Holder Type to Holder Type 1 after mounting Multi Holder 7 Stubs are indicated 2 Double click on the Stub where the specimen you want is contained on the Holder screen Figure 1 3 While the Stage moves towards the Stub where the specimen is contained the green process bar appears Fi...

Страница 60: ... specimens and has the function of saving photographs on the Stage screen and serving as a guide for finding the position you want in the specimens In Multi Holder photographs are taken automatically whenever the Stub position is changed 6 Move to the position you want and execute measurement on the measuring screen using Mouse or Joy Stick 4 3 2 Use of Stub Except Multi Holder In case of using ot...

Страница 61: ...EM 30PLUS Operating Manual 61 2 Select Holder Type None for Type on the Holder screen 3 If you press Center on the right Stub moves to the center of Stage Center X 17 500 Y 17 500 Confirm X Y on the bottom of screen for coordinate ...

Страница 62: ...oving using Mouse 4 3 3 Use of Tilt Function You can change the angle to observe specimens If you tilt the angle the upper side information of the specimens can be observed together Because the electron microscope basically sees specimens using secondary electron it is very hard to observe the specimen without bumps like a thin film below 30nm In this case you can observe the image if you tilt the...

Страница 63: ...n of OL with specimens when rotating T axis the maximum tilt angle is limited automatically to be below 45 according to the Stub height and X Y coordinate 2 If you want to use the high tilt angle use 50mm WD Sample Mount and set X Y near by the Center 3 Record Height of Sample exactly For the details on Tilt function and Height of sample see Height of Sample in 2 7 1 Setup ...

Страница 64: ... WD mm Minimum magnification Maximum magnification 5 91 150000 10 61 150000 15 47 150000 20 38 127000 25 31 105000 30 27 95000 35 24 87000 40 21 79000 45 19 72000 50 18 72000 The minimum magnification refers to the value that does not drop any more which varies depending on WD When WD value is big minimum magnification gets small and the value gets small the magnification increases Use the minimum...

Страница 65: ...d Moving using Mouse If your double click the direction you want to go it moves to the clicked direction Before moving After moving Or you can move it with keyboard arrow keys or by inputting value in Stage coordinate However if you move by inputting values the results may not be correct ...

Страница 66: ...tage on Y axis When moving Stage using Joy stick be sure to input exactly in the direction of X Y axis Stage doesn t move if you operate it in a diagonal direction Depending on the user perspective whenever the side button of Joy stick is input the moving direction of Stage can be changed to the opposite direction 2 Magnification change using Joy stick If you press the Joy stick button it goes up ...

Страница 67: ... Manual 67 3 Focus change using Joy stick You can change focus by rotating Joy stick button If you turn the button clockwise the value of WD increases If you turn the button counterclockwise the value of WD decreases Focus figure Up Focus figure Down ...

Страница 68: ... Joy stick Adjust the sensitivity for user convenience Find the SpaceNavigator icon in the collection of small icons on the right of taskbar After clicking mouse right button on the icon click Open 3Dconnexion Properties Move the button on the bottom of the Speed bar and adjust the sensitivity The initial setting value is about 75 ...

Страница 69: ... acceleration voltage according to the purpose of specimen observation 3 Setting observation magnification Move the specimen location in low magnification state select the measurement location and then enlarge it at high magnification 4 Setting Spot Size Adjust adequate Spot Size according to the magnification 5 Setting focus Correct the focus by controlling Coarse Focus Fine Focus and Stig X Y Ca...

Страница 70: ...rving specimens When it is set in RED Mode a small enlargement window appears on image window as shown in the figure below fast focusing is possible while viewing this window To move the RED window drag the screen until you find the position you want If you press RED Mode button one more time it is changed into Focus Mode which provides the faster reaction velocity 5 1 2 Fast Mode Fast Mode Resolu...

Страница 71: ... 5 1 3 Slow Mode Slow Mode Resolution 800x600 It scans a specimen slower than Fast Mode which enables images to be observed more clearly 5 1 4 Photo Mode Photo Mode Resolution 1280x960 It is a mode for taking photos of quality images which takes about 1 minute ...

Страница 72: ...rding to the intensity of acceleration voltage are as follows Acceleration voltage Acc Advantages Disadvantages High acceleration voltage Resolution increases It is impossible to observe surface information Edge Effect gets intensified Charge Up phenomenon is serious Specimen is damaged severely Low acceleration voltage It is possible to observe surface information Edge Effect decreases Charge Up ...

Страница 73: ...ge value increases it is easier to analyze specimen component rather than surface On the other hand as the value of acceleration voltage decreases it is adequate for surface observation of specimen Acceleration voltage 20kV magnification 10K Acceleration voltage 20kV magnification 50K Acceleration voltage 5kV magnification 10K Acceleration voltage 5kV magnification 50K x50k x10k x50k x10k ...

Страница 74: ...ges can be distorted Acceleration voltage 10kV magnification 5K Acceleration voltage 10kV magnification 10K acceleration voltage 30kV magnification 5K acceleration voltage 30kV magnification 10K In order to prevent specimen damage decrease the value of acceleration voltage Spot size of electron beam and scanning time as well Moreover adjusting coating thickness for pretreatment can prevent specime...

Страница 75: ... value of acceleration voltage is high corner of specimen image looks smudged as it is small the corner surface of specimen image looks clearer Because high acceleration voltage makes the consumption of W electron of Filament high it causes bad effect on lifespan of Filament compared to low acceleration voltage ...

Страница 76: ...tion voltage you want In order to select acceleration voltage use increase decrease button on acceleration voltage box or change it by selecting the fixed value of acceleration voltage 2 After changing acceleration voltage carry out alignment of e gun and aperture Wobble operation Be sure to carry out alignment of electron gun and wobble operation whenever you change the value of acceleration volt...

Страница 77: ... On the other hand as acceleration voltage decreases electron reaching specimen decreases which results in decreased signal generated and reduced brightness Acceleration voltage 10kV Acceleration voltage 20kV Acceleration voltage 20kV Acceleration voltage 30kV When using high acceleration voltage for a long time the electron acceleration of Filament increases Be careful as it can cause disconnecti...

Страница 78: ...ve the images Recommended Value of Spot Size by Observation Magnification Proper values of Spot size by magnification are as follows Magnification Spot size 50 100K 5 30 50K 6 8 10 30K 8 10 3 10K 10 12 below 3K 12 16 As the value of Spot size gets higher images get brighter and signal increases Therefore the value of contrast should be small Spot size gets smaller images get darker and signal valu...

Страница 79: ...When you select observation magnification there are 2 types of input 1 Free Magnification Select the magnification by putting the mouse cursor on magnification box and scrolling with mouse wheel 2 Fixed Magnification Select the fixed magnification x200 x500 x1000 x2000 x5000 x10000 on magnification box ...

Страница 80: ...agnification for acquiring clear and exact images setting value 5 16 When the value of Spot size is changed the e gun Align can be twisted Confirm the e gun align after changing Spot size See 8 2 Method for E Gun Alignment Differences of Resolution according to Spot size Spot size is strongly related to resolution and the features are as follows As Spot size gets smaller resolution increases and i...

Страница 81: ...e depth decreases due to more electrons flowed in On the other hand aperture gets smaller image depth gets deeper while image gets clearer WD Working Distance As the value of working distance WD gets higher image depth gets deeper and resolution decreases and when it gets smaller images gets clearer and image depth decreases e g Difference of depth according to WD if the size of aperture is 30um W...

Страница 82: ... 30PLUS Operating Manual 82 AStig Adjustment When you set focus as the shape of electron beams get rounder clearer images can be acquired When you adjust focus by adjusting Stig find the clearest position while adjusting X and Y axis ...

Страница 83: ...press button you can find coarse focus automatically When setting focus to acquire clear images correct focus by adjusting coarse focus fine focus and Astig When you set focus it is easy to adjust focus by appointing an angulated part of the specimen or the part whose contrast is distinct Once exact focus is adjusted at high magnification it is unnecessary to adjust focus when you observe images a...

Страница 84: ...d Select Magnification and Spot size Set RED Mode Set Coarse Focus by Set focus by adjusting Astig Set Fine Focus by Finish setting Fine Focus by Finish setting Fine Focus by If you want to correct again Set focus by adjusting Stig If images move violently up down and left right while correcting focus carry out wobble operation Move the location for specimen observation Set minimum value ...

Страница 85: ... of location movement of specimen see 4 3 location movement of specimen 2 Enlarge the specimen find out exact observation position and set the higher magnification than you want e g if you want to acquire an image of 5000 times set the magnification more than 5000 times 3 Set the Spot size adequate for the set magnification e g if you want to acquire an image of 5000 times set the Spot size 10 12 ...

Страница 86: ...ED to adjust focus of small parts exactly 5 Correct the focus using mouse wheel in Coarse focus box WD value can be identified through the WD value at the bottom of the electron microscope EM image screen 6 Correct the focus finely using mouse wheel in Fine focus box 7 Correct the focus by dragging Astig X Y ...

Страница 87: ...t When you set focus it is recommended to start higher magnification than observing magnification and then lower it as you want If you moved Stage location after finishing focus setting correct the focus from the first In this case focus should be set again as it got out of focus due to the changed specimen location while Stage was moving When you observe a specimen in a position for a long time t...

Страница 88: ... using Auto Focus function when there is a big difference in the current value of focus and the value of the actual focus of the sample when the image is not on the Focus Mode screen while executing Auto Focus function high magnification or the surface is smooth without a big difference in brightness Correct Auto Focus area Incorrect Auto Focus area Example of Focus Setting Before focus Focus Afte...

Страница 89: ...t focus and move images finely with enlarged at high magnification use the Image shift function of Left tap Image shift observes images by moving the direction of electron beam rather than Stage 1 Move the image by controlling X Y Shift bar while watching screen 2 When you use Image Shift Image Shift item on the upper right of the screen flickers When you click the item the flicking item disappear...

Страница 90: ...an rotate and observe the part of image you want by rotating electron beam during specimen observation Turn the image in the direction you want by controlling Rotation bar while watching screen When you click R image moves to the starting point When you use rotation it can move in the opposite direction of user if the electron beam has been rotated much After measurements are completed return the ...

Страница 91: ...trast and Brightness you can get clear images 1 Contrast Adjust the visibility by controlling image contrast Controlling contrast value rather than brightness value makes possible to get more clear and bright images 2 Brightness Adjust the brightness of images 3 Gamma By correcting Gamma value which makes bright part brighter and dark part darker you can control images more naturally It is used wh...

Страница 92: ... can be rotated manually and converted to the bottom of electron beam or Stage entrance BSE Detector ON BSE Detector OFF When using BSE Mode be sure to move BSE sensor to the bottom of electron beam When analyzing EDS rotate Detector towards the Stage entrance and convert it for the smooth detection of EDS Signal Method for manual rotation of BSE 1 Pull the body that has bolts in the vertical dire...

Страница 93: ...tion as there is a risk of damage when excessive power is applied to the sensor during rotation Rotation must be executed by the person who completed training on rotation only Precautions for use of Multi Holder When using Multi Holder if Stub is projected upwards severely above Housing Cover WD 7mm there can be a collision of the specimen with BSE sensor D 7mm when Stub and Housing Cover are on t...

Страница 94: ...SE Mode Be sure to have the optimum electron beam come down by readjusting Wobble and Gun Alignment 3 Execute the optimization of Wobble in SE Mode in the Spot Size that you want to measure in BSE Mode See 6 2 1 Wobble operation 1 Method for selection of SE and BSE Mode You can observe SE images when it is indicated in SE Mode and BSE images when it is indicated in BSE Mode Be sure to move to the ...

Страница 95: ... area 20 50 point If you terminate NS after measurements are completed the values of Spot Size and Image Viewer Setting set are saved automatically It is automatically set in these values again when NS is executed again BSE Compo Topo BSE sensor of EM 30PLUS equipment consists of 4CHs When selecting for all 4CHs you can get Compo images When selecting and in pairs in a diagonal direction you can g...

Страница 96: ...y and those of back scattered electron can be observed together SE BSE The signals of SE and BSE are combined and shown in one image SE Mode BSE Mode SE BSE Mode Diamond Ring compare with each Observation Mode When you want to see SE BSE SE BSE Mode 1 Set in the appropriate image in BSE Mode 2 After selecting SE Mode set in the appropriate image in the same Spot size as in BSE setting 3 After sele...

Страница 97: ...Scanning Electron Microscope EM 30PLUS Operating Manual 97 Reference figure 4 Types of Images based on BSE Composition BSE Compo BSE Topo SE BSE Compo SE BSE Topo ...

Страница 98: ... no charge up effect without pretreatment of nonconductive samples and also improve the quality of BSE images Low Vacuum of EM 30PLUS has the vacuum degree of 10 1 10 2 torr of the chamber High Vacuum has the vacuum degree of 10 4 torr of the chamber LV Mode doesn t support the separated Images of SE BSE and the composed Images of SE BSE Directions for LV Mode 1 Click Vacuum ON button to vent the ...

Страница 99: ...own to 0 you can turn on the e gun 6 Click E Gun Off button and observe the image The directions to change to HV Mode again are as same as the directions for LV After Vent press Vacuum Toggle to change to High Vacuum In Low Vacuum Mode the electron beam increases more when the Spot size is bigger which can generate big charging phenomenon Accordingly be sure to use LV Mode below the appropriate Sp...

Страница 100: ...erture size as there are 4 Stages in Variable Aperture What is Spherical Aberration As it is farther from optic axis electron is bent stronger due to magnetic field and focus is formed at the shorter distance It is impossible to remove spherical aberration completely Minimize it by using lens with high condensing or decreasing convergence angle If the electron beam does not pass through the center...

Страница 101: ... Filament is replaced 5 when e gun is aligned newly After selecting Wobble if the position of specimens doesn t move up down left right on the screen when changing the value of focus and only the focus is changed Wobble Aperture Align is in the normal state If the position of the specimens is changed largely on the screen aperture alignment is needed Wobble Operation 1 If no images are shown on th...

Страница 102: ... 2 1 Wobble Operation 1 Aperture is slightly out of the electron beam path Images are shown but they are out of focus when the focus is controlled 1 Select the RED MODE 2 Set the low magnification about 500 times 3 Click the Wobble button on the bottom of screen ...

Страница 103: ...ove by turning X Y axis of control knob of aperture on side of the equipment In the course of correcting while turning the handle of X and Y axis if image movement increases instead of decreasing adjust it by turning the knob in the opposite direction to reduce the movement During wobble operation adjust the direction of one axis while watching screen and then adjust axis direction of the other X ...

Страница 104: ...he state of being in focus and out of focus repeats in current position Image is out of focus Image is in focus 6 Set the magnification to 1000 times to identify more minutely if it is in focus 7 When image wobbles in a certain direction control it lest it should move while turning X Y axis knob X axis left and right Y axis up and down ...

Страница 105: ...s repeats in current position Image is out of focus Image is in focus 9 Set the magnification to 2000 times to identify more minutely if it is in focus 10 When there is movement in image control it lest it should move while turning X axis Y axis knob 11 When wobble operation is completed terminate it by pressing Wobble button 12 Move to Fast Mode and observe the specimen again ...

Страница 106: ...emise that filament is aligned If filament is not aligned properly image quality can decrease or no images are shown First check if filament is aligned properly before conducting aperture adjustment operation For operational procedure of filament alignment see the maintenance manual 3 4 2 Procedures for Filament Replacement 1st operation E gun alignment 2nd operation Aperture resetting 3rd operati...

Страница 107: ...t to the end and turning it counterclockwise as shown below 2 Align the electron gun with control knob of aperture fixed For the alignment of e gun see 8 2 Methods for E Gun Alignment 3 When you finish electron gun alignment fix the aperture to the original location by pulling control knob of aperture to the end and turning it clockwise ...

Страница 108: ... operation Aperture resetting 1 By turning the X axis knob make the length of left A groove and right B groove same 2 Check if image is on the screen while turning the Y axis knob clockwise completely and releasing it 4 6 rounds counterclockwise The state of screen ...

Страница 109: ...olling contrast while watching monitor 3rd operation Wobble operation 1 Start the operation by pressing Wobble button below screen For wobbling operation see 6 2 1 Wobble Operation 1 2 When you finish wobble operation terminate it by pressing Wobble button 3 Select Fast Mode and observe the specimen again ...

Страница 110: ... Aperture Setting 1 Positioning of Aperture Aperture is inside of knob having 4 holes in all Electron beams pass through the hole 2 Method for Aperture Hole Setting Fix the knob by pulling the knob in the direction of No 1 and turning it counter clockwise as No 2 of figure below ...

Страница 111: ...ion Changing of Aperture Holes If you want to change aperture holes select a hole among the lines indicated on knob by pulling the control knob 1st Stage D 2nd Stage C 3rd Stage B 4th Stage A 5th Stage Hole 30um Hole 50um Hole 100um Hole 200um Pull as much as possible ...

Страница 112: ...en when you turn aperture knob to X Y axis little by little carry out the aperture alignment 1 X axis Alignment Turn the X axis knob and make the length of A and B groove same 2 Y axis Alignment Check if image is on the screen while turning the Y axis knob clockwise completely and releasing it 4 6 rounds counter clockwise 6 Rounds 30 um aperture hole position The position of Y axis alignment can v...

Страница 113: ... save it in quality image file 7 1 Management of Image Information Before scanning images manage the information indicated below image When you check or uncheck the checkbox of items you want in Setup tap on the screen top you can add or delete the information indicated on images For management of image operation see 2 7 2 Option ...

Страница 114: ...n image file format you can use figure tools to measure length or area on scanned images It can be used on screen in FAST Mode but it is recommended to use it for photo scanned images 7 2 1 Addition of Figures When scanned images are displayed select the image tools you want at the bottom of the screen and use it ...

Страница 115: ... is a basic cursor when moving images Drawing Lines It draws lines on image Drag the mouse point at the starting point you want and put a dot at end point Single Arrow It indicates one sided arrow on image Drag the mouse point at the starting point you want and put a dot at end point ...

Страница 116: ...on image Drag the mouse point at the starting point you want and put a dot at end point Distance It indicates distance on image Drag the mouse point at the starting point you want and put a dot at end point Length It indicates length on image Drag the mouse point at the starting point you want and put a dot at end point ...

Страница 117: ...age Set the angle by clicking the point you want with mouse right button Square It indicates square on image When dragging mouse point you can draw a square Circle It indicates circle on image You can draw both circle and oval When dragging mouse point short circle is drawn and dragging long oval is made ...

Страница 118: ...t indicates area on image Click mouse left button on every corner of figure whose area is to be measured as the shape you want and click mouse right button at the end point and finish it Text It indicates text on image When text input window pops up input the contents and press OK ...

Страница 119: ...Scanning Electron Microscope EM 30PLUS Operating Manual 119 Types Screens ...

Страница 120: ...ion are automatically saved in the path shown through Option box on upper NS The file is saved on the date and time of save in the folder specified when saving images 1 Click Option Tap at the screen top and specify Image Folder When clicking Image icon select the path where images are automatically saved Basic path of Image Folder is C Snap Image 2 After scanning clear images press Image button I...

Страница 121: ...nt and contact of equipment without the changes above the e gun alignment is needed The structure of e gun in equipment is as follows The e gun alignment is the process to align filament and electron beam in a straight line with Spot size d opened to the utmost limit and find out the optimum point of Filament current Normally as Spot size gets bigger screen gets brighter and vice versa However if ...

Страница 122: ...nt should be done The process of e gun alignment is as follows 1 Set the vacuum state by mounting the specimen in chamber and clicking Vacuum OFF button 2 Turn on the electron beam when vacuum degree reaches 3 Set the filament value almost as maximum 4 Set the Spot size as 16 which is the maximum value 5 Move the electron beam to the center by pressing X Y in Alignment tap on the right of screen ...

Страница 123: ...es not appear set the contrast for the area where White Spots are concentrated 7 Find out the brightest position by turning X axis bolt in the 1 direction or in the opposite direction of 1 On the Upper side of e gun 4 bolts for alignment are symmetrical A pair of bolts facing each other makes an axis which adjusts bolts of axis to be aligned by fastening or loosening Appoint X Y axis randomly ...

Страница 124: ...ng Y axis bolt 9 Check if it is the brightest while watching screen If the brightness of screen changes repeat the 7 8 processes and find out the brightest position 10 When electron gun alignment finishes fix it by turning each X Y axis in the opposite direction If electron gun is not aligned properly image quality can decrease or image cannot be printed ...

Страница 125: ...the position of center does not necessarily mean the optimum state of e gun carry out Fine Adjustment again after moving it to the center After e gun alignment of hardware be sure to carry out gun alignment in NS When using with Gun align biased excessively it can be hard on equipment 12 Find out the location of e gun and then start Filament optimization operation See 4 2 2 Filament Optimization B...

Страница 126: ...rm if brightness of screen gets brighter in proportion to Spot Size As Spot size gets bigger screen gets bright and vice versa If the brightness of electron beam according to Spot size appears different carry out e gun alignment again In same condition comparison before and after e gun Align Screen before e gun Align Screen after e gun Align ...

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