1
1 Introduction
Thank you for purchasing the XPS-7 Semiconductor Plant Gas Detector. To ensure
correct operation, please read this operation manual carefully.
This product is designed to detect gas leaks in semiconductor manufacturing plants.
Sensor units (purchased separately) can be switched to detect a variety of gases.
Read and be sure you fully understand this manual even if you have used a Gas
Detector before.
Do not use the Gas Detector for any purpose other than that for which it was
intended. Do not attempt to use the product in a way other than that described in this
manual.
● Explanation of Symbols
This manual uses the following symbols. Their meanings must be understood and observed to
ensure safe operation of the Gas Detector.
DANGER
Indicates an impending hazardous situation that, if not avoided, could
result in serious injury or death.
WARNING
Indicates a potentially hazardous situation that, if not avoided, could re-
sult in serious injury or death.
CAUTION
Indicates a potentially hazardous situation that, if not avoided, could re-
sult in minor injury or physical damage.
Note
Indicates operational advice and/or instructions.
● Observe the following precautions to ensure safe operation of the
Detector.
WARNING
：
The Gas Detector is not explosion-proof and must be used in a non-hazardous loca-
tion.
CAUTION
：
The Gas Detector is not drip-proof and must be used in a location free from splashing
water.
CAUTION
：
Do not allow the Gas Detector to be subjected to mechanical shock by being dropped
or struck.
CAUTION
：
The Gas Detector must be turned ON in a clean-air environment. Otherwise, the per-
formance of the Detector may be impaired and normal detection may not be possible.
CAUTION
：
The shelf life of the sensor unit is six months. Always check the sensor unit to be
sure its life has not expired prior to use. Normal detection may not be possible if an
expired sensor unit is installed.
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TABLE OF CONTENTS
1 Introduction …………………………………………………………… 1
2 Contents of This Package …………………………………………… 2
3 Sensor Units …………………………………………………………… 2
4 Component Names and Functions ………………………………… 3
5 Operating Procedure ………………………………………………… 6
5-1
Inserting Batteries …………………………………………………………………… 6
5-2
Installing the Sensor Unit …………………………………………………………… 7
5-3
Turning the Gas Detector ON ……………………………………………………… 8
5-4
Detection ……………………………………………………………………………… 8
5-5
Ending Detection……………………………………………………………………… 8
6 Logger Function ……………………………………………………… 9
7 Replacing the Filter …………………………………………………… 10
8 Daily and Periodic Inspections ……………………………………… 11
9 Troubleshooting ……………………………………………………… 11
10 Consummable Parts and Options …………………………………… 11
11 Warranty ……………………………………………………………… 12
12 Specifications ………………………………………………………… 13
