Detected gases
Gases found in semiconductor manufacturing plants
Detection principle
Electrochemical
Gas sampling method
Extractive
Detection range
As per specifications
Concentration display method LCD display
Detection accuracy
(See note 1.)
±10% of full scale
Response time
(See note 1.)
Within 60 s (60% response)
Power supply
Four AA alkaline batteries or AC adapter (optional item)
Battery operating time
(See note 2.)
Up to 12 hours of continuous operation (at 20
℃
with alkaline batteries and
no alarms)
Operating
temperature range
0 to 40
℃
Dimensions
W 62 x H 150 x D 128 mm (projected portions excluded)
Mass
Approx. 1.3 kg
Approval (See note 3.)
CE (EMC Directive, 2014/30/EU)
Note 1:
The detection accuracy and response time were measured under identical detection
conditions.
Note 2:
The operating time of the batteries depends on factors such as environmental
conditions, operating conditions, the storage time, and the manufacturer
Note 3:
AC Adapter and Data Logger Software (optional items) are exempt from CE
marking. (see on page 11)
.
12 Specifications
１３
13
