46 |
P a g e
OPERATION
B
ACKFILL THE
C
HAMBER
Atmosphere is restored to the chamber in two stages.
Stage 1: Automatic Partial Backfill
Two triggers cause the oven to close the vacuum valve and partly backfill the oven chamber to
approximately 600 Torr.
Manual Trigger
When
both
vacuum functions are manually turned off.
Profile Automatic Trigger
When an active profile reaches a step in which both vacuum function event parameters are turned
off.
Profile Exception:
If a vacuum function remains on during the End step of a profile, the oven will hold
the chamber under vacuum indefinitely with the vacuum valve open and the backfill valve closed.
Stage 2: Manual Backfill to Room Pressure
1.
Press and hold the Stop / Backfill button.
•
Release the button when the chamber has backfilled to room pressure.
•
The oven door can be opened once the chamber is at room pressure.
Stop / Backfill
Press and Hold
Содержание CTVR522-H
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