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SEMI E69

Test method for reproducibility and zero drift for thermal MFCs

SEMI E80

Test method for determining attitude sensitivity of MFCs

SEMI E16-90

Guidelines for determining and describing mass flow controllers leak rates

SEMI F19

Specification for the finish of the wetted surface of electro polished

216L stainless steel components

SEMI F20

Specifications for 316L stainless steel bar, extruded shapes, plate, and

investment castings for components used in ultra-high purity semi

manufacturing applications

SEMI F36

Guide for dimensions and connections of gas distribution components

SEMI F37

Method for determination of surface roughness parameters for gas

distribution system components

SEMI F44

Guideline for standardization of machined stainless steel weld fittings

SEMI F45

Guideline for standardization of machined stainless steel reducing fittings

SEMI F47

Specifications for semiconductor processing equipment

voltage sag immunity

SEMI S2

Environmental, Health and Safety Guidelines

SEMI S9

Dielectric testing

SEMI S10

Risk assessment

SEMI S12

Decontamination of fielded products

ETG.1000.2

Physical Layer service definition and protocol specification

ETG.1000.3

Data Link Layer service definition

ETG.1000.4

Data Link Layer protocol specification

ETG.1000.5

Application Layer service definition

ETG.1000.6

Application layer protocol specification

ETG.1020

EtherCAT Protocol Enhancements

ETG.2000

EtherCAT Slave Information

ETG.5001.1

Modular Device Profile - Part 1: General MDP Device Model

ETG.5003.1

Semiconductor Device profile - Part 1: Common Device Profile (CDP)

ETG.5003.2020

Specific Device Profile: Enhanced Mass Flow Controller

ETG.5003.2021

Specific Device Profile: Mass Flow Controller

ETG.5003.2022

Specific Device Profile: Mass Flow Meter

ETG.5003.2023

Specific Device Profile: Enhanced Mass Flow Meter

Glossary of Terms and Acronyms

Table 1-2 Terms and Acronyms

Term or Acronym

Definition

CSR

Customer Special Requirement

CVD

Chemical Vapor Deposition

DeviceNet

A 5-wire local network I/O communication device that employs a command/response

communication protocol

DSP

Digital Signal Processor

EPI Epitaxy (EPI)

A process technology where a pure silicon crystalline structure is deposited or “grown”

on a bare wafer, enabling a high-purity starting point for building the semiconductor

device.

HBD

Horizontal Base Down

GP200 Series

Pressure Based Mass Flow Controller

Section 1 Introduction

Содержание GP200 Series

Страница 1: ...Installation Operation Manual GP200 Series Metal Sealed Pressure Based Mass Flow Controllers ...

Страница 2: ...eriouspersonalinjuryand ordamagetotheequipment Connect all products to the proper electrical and pressure sources and outlet connections If no leaks are present bring the system up to the operating pressure maintenance is being performed by qualified persons Essential Instructions Read before proceeding EuropeanPressureEquipment Directive PED EuropeanElectromagneticCompatibility EMC ...

Страница 3: ...etup Process 17 Zeroing the GP200 Series from the LCD Display Panel 18 Zeroing GP200 Series Over DeviceNet 19 Introduction to the Brooks Expert Support Tool 20 Using the Brooks Expert Support Tool 21 GP200 Alarms in the Brooks Expert Support Tool 22 GP200 Warping in the Brooks Expert Support Tool 24 Electrical Connections 25 EtherCAT Connections 25 DeviceNet Connections 26 Analog RS485 Connections...

Страница 4: ... GP200 Warping in the Brooks Expert Support Tool 25 Figure 2 13 GP200 Series EtherCAT M8 Power Connector 26 Figure 2 14 EtherCAT Power Connector Drawing 26 Figure 2 15 GP200 Series DeviceNet Connection 27 Figure 2 16 DeviceNet Pin Connections 27 Figure 2 17 GP200 Series Analog 9 Pin Connector 28 Figure 2 18 GP200 Series Analog 9 Pin Connector M 28 Figure 3 1 GP200 Series MFC Architecture 30 Figure...

Страница 5: ...t highly repeatable Matched Transient Response and dynamic cross talk insensitivity enable tighter process control handling extreme supply pressure variations while maintaining precise mass flow control to the chamber The GP200 platform supports a broad range of process conditions which enables drop in replacement and upgrade of many traditional pressure based mass flow controllers How to Use This...

Страница 6: ... information limitations disclaimers and applicable warranty periods according to product group Industry Standard References Table 1 1 Industry Standard References Reference Number Reference Description MIL STD 810 Method 514 4 Category 1 Transportation Requirement Method 516 4 Procedure 1 Functional Shock Test Requirement SEMI E12 Standard temperature and pressure SEMI E16 Guideline for determini...

Страница 7: ... 2 Physical Layer service definition and protocol specification ETG 1000 3 Data Link Layer service definition ETG 1000 4 Data Link Layer protocol specification ETG 1000 5 Application Layer service definition ETG 1000 6 Application layer protocol specification ETG 1020 EtherCAT Protocol Enhancements ETG 2000 EtherCAT Slave Information ETG 5001 1 Modular Device Profile Part 1 General MDP Device Mode...

Страница 8: ...pressure technology coupled with its downstream valve architecture removes the current limitations of pressure based mass flow controllers enabling the most precise process gas delivery over the widest range of operating conditions in the industry As the inventor and market leader in gas and flow range programmable Mass Flow Controllers Brooks sophisticated and proprietary MultiFlo gas model is no...

Страница 9: ...osition and Etch processes Downstream Valve Architecture The GP200 s downstream valve architecture ensures that accuracy is independent of downstream pressure enabling flow delivery into pressures as high as 1200 Torr The GP200 s fast closing valve addresses non productive recipe wait times or tail effects that are seen in upstream MFC valve designs that require additional time to bleed down their...

Страница 10: ...Table 1 3 Specifications for GP200 Series Section 1 Introduction 6 ...

Страница 11: ...Section 1 Introduction 7 ...

Страница 12: ...Figure 1 1 Dimensions of GP200 Series Downport Configurations Section 1 Introduction 8 ...

Страница 13: ...Figure 1 2 Dimensions of GP200 Series VCR Configurations Section 1 Introduction 9 ...

Страница 14: ... double vacuum bagged in a Class 100 clean room In your semi clean area remove the outer bag only Pass the device into your clean area Remove the second clean room compatible bag only when the device is ready to be tested and or installed in your clean system Recommended Storage Practice If intermediate or long term storage of the device is required it is recommended that it be stored in accordanc...

Страница 15: ...ecommended refer to Recommended Storage Practice it should be subjected to a pneumatic pressure test in accordance with applicable vessel codes To maintain a device s ultra clean integrity this service should be performed by the factory or one of the certified service centers Gas Connections Prior to installation ensure that all piping is clean and free from obstructions Install piping in such a m...

Страница 16: ...h a manner that permits easy purge and removal if the device requires servicing Flow Controller Installation Arrangement Typical gas supply arrangements are shown below GP200s are often arranged inside a gas panel With the gas model now embedded in each GP200 device on the fly gas range reconfiguration is made possible for maximum process flexibility The GP200 P MFC can be reconfigured for a varie...

Страница 17: ...cess gas supply valve s upstream of the GP200 For additional safety it is recommended to close the two valves between the charged gas line and the GP200 Series to be installed See Figure above for more details It is recommended to archive service and calibration documentation for the GP200 Series to determine the contamination state of each gas line and to assist service personnel DO NOT remove th...

Страница 18: ...e If a good vacuum source is not available the GP200 Series can be de contaminated by purge only 3 Repeat the purge cycle several times within 2 4 hours to complete the cleaning For toxic and corrosive gasses it is recommended to use 100 120 cycles Position and Mount the GP200 Series Position the GP200 Series so that the gas flow is pointed in the same direction as the flow arrow shown on the GP20...

Страница 19: ...ls 4 as provided by integrator are inserted between the GP200 Series and substrate blocks before the screws are installed These metal seals must be replaced after each installation 2 Select the mounting screws noted in Table 2 1 for downported devices M4 screws are used on 1 125 devices K1S M5 screws are used on 1 5 devices K1R2 and K1H 3 Refer to Figure 2 3 Insert the two mounting seals 4 over th...

Страница 20: ...mm Table 2 2 K1 Substrate Torque Data Connection Torque Pattern Torque Inch Pounds GP200 to Substrate Use a square pattern as shown in Figure 2 5 Start at 25 inch pounds and increase in increments of 10 inch pounds until proper value is obtained K1S K1R2 K1H 45 45 45 4 Using a torque wrench and a metric hex key tighten the screws to the torque value as described in Table 2 2 and Torque Pattern Fig...

Страница 21: ...w inaccuracies particularly at lower control setpoints where the zero offset error becomes a large percentage of the total flow signal Therefore the MFC zero should be constantly monitored and when applicable set correctly and consistently Note the expected signal output at a zero flow condition should be 0 0 0 1 Because the MFC is not intended to be used as a positive shut off device it is not gu...

Страница 22: ...rol valve 5 Shut the upstream isolation valve to prevent any creep effects in the upstream regulator from affecting the inlet pressure 6 Send the MFC a zero setpoint command to close the MFC control valve and wait three minutes 7 The MFC can now be zeroed Zeroing the GP200 Series Zeroing the GP200 Series from the LCD Display Panel 1 Once all the conditions outlined in the preparation sections have...

Страница 23: ...up as follows 0x0E 0x31 0x01 0x0B where 0X0E Read Get data request 0x31 DeviceNet Object Class S Analog Sensor in this case 0x01 Instance 1 0x0B Attribute number 3 Note that data shown in the syntax 0xNN are in hexadecimal format therefore in the example shown above attribute 0x0B decimal 11 if referencing in the attribute table 4 To send the Explicit Zero service command to the MFC the structure ...

Страница 24: ... Series must be correctly zeroed Introduction to the Brooks Expert Support Tool The Brooks Expert Support Tool is a Windows based application that provides expanded monitoring control of the Brooks digital thermal mass flow controller meter flow If the GP200 Series has been in purge mode for a long period of time wait until the GP200 Series has cooled down before zeroing The cool down period shoul...

Страница 25: ... via the computer s serial port or USB port Various cable adapter combinations are available to connect a device to the PC The following tools and cables connect a GP200 device s Micro USB diagnostic port the PC s standard USB port Standard USB to Micro USB cable Figure 2 8 Standard USB to Micro USB Cable To install the Brooks Expert Support Tool application download the BEST installer file from t...

Страница 26: ...s a user to change alarm settings for the device DO NOT make any connections to unlabeled connector pins Any failure to comply could damage the GP200 Series and or the mating electrical device Before connecting the cable make sure that all pin connections of the mating cable have the same pin out connections When installing and removing cables to and from your computer make sure the power is turne...

Страница 27: ...ndow in BEST GP200 Gas Pages in the Brooks Expert Support Tool Customer gas pages can be changed with the Brooks Expert Support Tool using the Customer Page tab in the Flow Calibration menu Reference Figure 2 11 below Section 2 Installation 23 ...

Страница 28: ...The user enters performance data of their device as measured in their environment then the software uses a curve fit to adjust the device s response accordingly Warping requires a Brooks Expert Support Tool license For GP200 devices a warp adjustment is added to the device s factory calibration and can be cleared from a flow page without affecting the factory calibration The same flow page may the...

Страница 29: ...e Brooks Expert Support Tool Electrical Connections EtherCAT Connections Power needs to be supplied via the standard male M8 5 pin connector The M8 connector is located on the upper inlet side of the device Section 2 Installation 25 ...

Страница 30: ...r Drawing DeviceNet Connections DeviceNet is a 5 wire local network connection that employs a command response communication protocol for communicating between a masterand slave Obtain a DeviceNet communication cable Micro M 12 and fasten it to the 5 pin connector Section 2 Installation 26 ...

Страница 31: ...g RS485 Connections The GP200 Series devices are available with Analog 9 Pin D Connectors shown below in Figure 2 16 DO NOT apply more than 10 Inch Pounds of torque to the cable coupling when connecting the cable to the device or damage may result to the connector Section 2 Installation 27 ...

Страница 32: ...Figure 2 17 GP200 Series Analog 9 Pin Connector Figure 2 18 GP200 Series Analog 9 Pin Connector M Section 2 Installation 28 ...

Страница 33: ...es and they are central elements to any gas delivery system Most MFC s contain four basic elements a flow restrictor flow sensor integrated electronics and control valve as shown below in Figure 3 1 The flow restrictor or bypass 1 mechanically sets the maximum flow conditions the flow to make it more laminar and creates a pressure drop to divert a precise sample of gas to the sensor 2 to measure t...

Страница 34: ...oiseuille equation which is a physical law that gives the pressure drop in an incompressible fluid in laminar flow flowing through a long cylindrical pipe of constant cross section By measuring the upstream pressure P1 and downstream pressure P2 across a laminar flow element this equation can be used to relate these measured pressures to the actual mass flow Figure 3 2 Hagen Poiseuille Equation Th...

Страница 35: ...ges every signal processing cycle so every 2ms This forms the foundation of the GP200 P MFC Utilizing a differential pressure transducer element that measures the true differential pressure P solves the need to have two matching absolute pressure sensors and reduces measurement uncertainty for enhanced accuracy and repeatability The combination of Brooks differential pressure approach and downstre...

Страница 36: ...bration Please follow the instructions for removal product packaging and product return instructions found in Section 2 Installation Return Shipment All active process instrumentation and equipment is subject to aging and wear from their environment This includes temperature mechanical stress component tolerance shift contaminant buildup oxidation and other influences The effects are gradual but o...

Страница 37: ...ble 4 1 below 2 Check supply voltage and check for a consistent ground 3 Ensure OEM tool setpoint matches the setpoint at the GP200 OEM tool problems are often caused by something other than the GP200 Series Therefore Brooks recommends that you review both the Troubleshooting Checklist and the GP200 Series Troubleshooting Guide before removing the GP200 Series from your system It is also suggested...

Страница 38: ...ly problem Electrical interference GP200 Series Troubleshooting Guide Table 4 2 GP200 Series Troubleshooting Guide Symptoms Possible Causes Corrective Action 1 No gas flow Is the gas supply turned on Check shut off valve and pressure readout Open the gas supply Is the regulator turned on at the correct operating pressure Turn off the regulator and reset it to the recommended pressure as described ...

Страница 39: ...sure across the too high Verify that the pressure is correct for the gas and range If required adjust inlet outlet pressure to achieve proper pressure reading Are system valves open or is the purge input activated Use tool software to verify Is the setpoint correct for the required flow Use tool software to verify Symptoms Possible Causes Corrective Action 4 No gas flow above some set point NOTE W...

Страница 40: ...quired adjust regulator to achieve proper pressure reading Symptoms Possible Causes Corrective Action 7 GP200 Series does not read zero pressure when gas is shut off Is the differential pressure across the GP200 Series really zero Is the GP200 Series configured properly in the tool software Is the GP200 Series mounted to the proper attitude Verify that the pressure is correct for the gas and range...

Страница 41: ...an extended period of time high inlet pressure or contamination will cause overshoot on first use 12 G200 Series dumps large volume of gas into chamber when setpoint is commanded from the tool The tool is commanding a setpoint before the pneumatic valves are opened GP200Series andpneumatic timingmay be offset GP200 Series overshoots 13 Tool display output doesn t match GP200 Series flow output Cab...

Страница 42: ...iguration 46 CT47 Standard Bin Configuration 47 CT48 Standard Bin Configuration 48 Low Pressure LP Bin LP40 Low Pressure Bin Configuration 40 LP41 Low Pressure Bin Configuration 41 LP42 Low Pressure Bin Configuration 42 LP43 Low Pressure Bin Configuration 43 LP44 Low Pressure Bin Configuration 44 LP45 Low Pressure Bin Configuration 45 LP46 Low Pressure Bin Configuration 46 V Fittings CX 1 1 8 body...

Страница 43: ...factory for new requests 15 psia minimum inlet pressure 15 30 psia inlet pressure range 25 psia minimum inlet pressure 25 40 psia inlet pressure range 35 psia minimum inlet pressure 35 50 psia inlet pressure range 45 psia minimum inlet pressure 45 60 psia inlet pressure range Vacuum Atmosphere Positive Pressure 760 Torr up to 1200 Torr Auto Shut Off Included Auto Shut Off Not Included 0 C Referenc...

Страница 44: ...s is protected by the following US patents and their international filings US 11 073 846 B2 Mass Flow Controller with Absolute and Differential Pressure Transducer US 10 705 543 B2 Mass Flow Controller and Controller Algorithm Section 6 Appendix 40 ...

Страница 45: ...SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under in situ conditions and the results will be traceable to the relevant international qual...

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