Brooks Instrument GP200 Series, Руководство по установке и эксплуатации

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Overview
Table 5-1 GP200 Series Model Code
Section 5 Product Description Code
38
Code Description Code Option Option Description
GP200 Ultra-High Purity Pressure-Based Mass Flow Controllers
P Positive Shut-off/Zero Leak-by Valve
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C Normally Closed Valve with Metal Valve Seat
0013 010C 10 sccm F.S. N2 Equivalent, CT40 Standard Bin Configuration at 35 psia inlet, vacuum outlet
0013 030C 30 sccm F.S. N2 Equivalent, CT41 Standard Bin Configuration at 35 psia inlet, vacuum outlet
0013 100C 100 sccm F.S. N2 Equivalent, CT42 Standard Bin Configuration at 35 psia inlet, vacuum outlet
0013 300C 300 sccm F.S. N2 Equivalent, CT43 Standard Bin Configuration at 35 psia inlet, vacuum outlet
0013 001L 1,000 sccm F.S. N2 Equivalent, CT44 Standard Bin Configuration at 35 psia inlet, vacuum outlet
0013 003L 3,000 sccm F.S. N2 Equivalent, CT45 Standard Bin Configuration at 35 psia inlet, vacuum outlet
0013 010L 10,000 sccm F.S. N2 Equivalent, CT46, Standard Bin Configuration at 35 psia inlet, vacuum outlet
0013 025L 25,000 sccm F.S. N2 Equivalent, CT47 Standard Bin Configuration at 35 psia inlet, vacuum outlet
0013 045L 45,000 sccm F.S. N2 Equivalent, CT48 Standard Bin Configuration at 35 psia inlet, vacuum outlet
Consult Brooks Configurator or Bin Tables
IV. Standard Type (CT) Bin CT40 Standard Bin Configuration #40
CT41 Standard Bin Configuration #41
CT42 Standard Bin Configuration #42
CT43 Standard Bin Configuration #43
CT44 Standard Bin Configuration #44
CT45 Standard Bin Configuration #45
CT46 Standard Bin Configuration #46
CT47 Standard Bin Configuration #47
CT48 Standard Bin Configuration #48
Low Pressure (LP) Bin LP40 Low Pressure Bin Configuration #40
LP41 Low Pressure Bin Configuration 41
LP42 Low Pressure Bin Configuration # 42
LP43 Low Pressure Bin Configuration #43
LP44 Low Pressure Bin Configuration #44
LP45 Low Pressure Bin Configuration #45
LP46 Low Pressure Bin Configuration #46
V. Fittings CX 1-1/8” body width, 92mm C-Seal
WX 1-1/8” body width, 92mm W-Seal
VS 1-1/8" body width, 124mm 1/4" VCR male
LX 1-1/8” body width, 92mm C-Seal w/Poke Yoke
VI. Communications/ Connector
I/O Power Full Scale Setting Producer er onsumer Poll IO External
On State State Transition ansition ate
D0 DeviceNet Idle Count Integer 6000h 2 7 Executing 500KB
D1 DeviceNet Idle Count Integer 6000h 21 7 Executing 500KB
D2 DeviceNet Idle SCCM Float 7FFFh 13 19 Executing 500KB
D3 DeviceNet Idle Count Integer 6000h 22 7 Executing 500KB
D4 DeviceNet eNet ecuting Count Integer 6000h 22 8 Executing 500KB
D5 DeviceNet Idle Count Integer 6000h 6 8 Executing 500KB
D6 DeviceNet Idle Count Integer 7FFFh 3 7 Executing ecuting
D7 DeviceNet Idle Count Integer 7FFFh 6 8 Executing 500KB
D8 DeviceNet Idle Count Integer 6000h 3 7 Executing 500KB
D9 DeviceNet eNet ecuting Count Integer 6000h 2 7 Executing 500KB
DA DeviceNet Idle Count Integer 7FFFh 22 7 Executing 500KB
DB DeviceNet Idle Count Integer 6000h 22 8 Executing 500KB
DC DeviceNet Idle Count Integer 7FFFh 3 7 Idle 500KB
DD DeviceNet eNet ecuting Count Integer 7FFFh 22 8 Executing 500KB
DE DeviceNet eNet ecuting SCCM Float 6000h 15 19 Executing 500KB
DX DeviceNet To Be Defined by Customer Special Request
I. I. Base Model Code
II. Valve Configuration
III. G as and Range
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