Brooks Instrument GP200 Series, Руководство по установке и эксплуатации

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F.S. Full Scale
LED Light Emitting Diode
MFC Mass Flow Controller
MultiFlo Technology A physics-based calibration methodology that enables gas and flow range
configuration within a defined standard configuration
P-MFC Pressure-Based Mass Flow Controller
PID Proportional Integral Derivative Controller
PSIA Pounds per Square Inch Absolute
PSID Pounds per Square Inch Differential
PSIG Pounds per Square Inch Gauge
PTI Pressure Transient Insensitive. Reduces the effect of pressure fluctuations in gas flow.
ROR As pressure increases, flow increases at a pressure rate of rise, or ROR.
S.P. Setpoint
VIU Vertical mounting attitude with inlet side facing up
Product Description
The GP200 Series is the first fully (both inlet and outlet) pressure
insensitive P-MFC, designed specifically for semiconductor
applications. The GP200’s unique differential pressure technology,
coupled with its downstream valve architecture, removes the
current limitations of pressure-based mass flow controllers,
enabling the most precise process gas delivery over the widest
range of operating conditions in the industry.
As the inventor and market leader in gas and flow range
programmable Mass Flow Controllers, Brooks sophisticated and
proprietary MultiFlo™ gas model is now embedded within each
GP200 device enabling on-the-fly gas & range reconfiguration for
maximum process flexibility.
The GP200’s ultra-fast, highly repeatable Matched Transient
Response and dynamic cross-talk insensitivity enable tighter
process control, handling extreme supply pressure variations while
maintaining precise mass flow control to the chamber. The GP200
platform supports a broad range of process conditions which
enables drop-in replacement and upgrade of many traditional
pressure-based mass flow controllers.
True Differential Pressure Measurement
By removing the requirement to match and compensate two
Section 1 Introduction
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