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Bronkhorst®

Vapor Delivery Module

9.17.079

Scope of this manual

1.1

Introduction and intended use

The Vapor Delivery Module is a compact integrated system to realize mass flow control of vapor. The Vapor Delivery Module is

intended to generate a predefined vapor flow, accruing from an accurately controlled liquid mass flow injected into an accurately

controlled carrier gas flow with subsequent evaporation inside a temperature controlled chamber.

1.2

References to other applicable documents

Manuals and guides for digital instruments are modular. General instructions give information about the functioning and

installation of instruments. Operational instructions explain the use of the digital instruments features and parameters. Field bus

specific information explains the installation and use of the field bus installed on the instrument.

1.2.1

Related documents

- Instruction manual

FLOW-BUS interface

(document nr. 9.16.024)

- Instruction manual

RS232 interface with FLOW-BUS protocol

(document nr. 9.16.027)

- Instruction manual

E-8000 Readout and Control System

(document nr. 9.17.076)

These documents Contain information for basic and advanced operation, more detailed product information and instructions

for troubleshooting.

1.2.2

Software tooling

For RS232 or FLOW-BUS operation the following Bronkhorst software is available.

FlowDDE

Software tool to interface between digital instruments and windows software

FlowView

Software tool to operate Bronkhorst digital instruments

Flowfix

Software tool for fieldbus connection of digital instruments

FlowPlot

Software tool for monitoring and optimizing digital instruments parameters

www

Manuals and Software tooling can be found at:

http://www.bronkhorst.com/en/downloads

Содержание M+W Instruments SW-10n Series

Страница 1: ...tion Manual carefully before installing and operating the instrument Not following the instructions could result in personal injury and or damage to the equipment Instruction Manual Vapor Delivery Module Doc no 9 17 079A Date 15 10 2014 ...

Страница 2: ...pment be damaged then the local carrier must be notified at once regarding his liability if so required At the same time a report should be submitted to your local sales representative Check the packing list to ensure that you received all of the items Do not discard spare or replacement parts with the packing material and inspect the contents for damage Refer to Removal and return instructions ab...

Страница 3: ...bserved before using this product and any associated instrumentation This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury Read the operating information carefully before using the product Before operating make sure the line cord is connected to a properly grounded power receptacle Inspect ...

Страница 4: ...ts 3 4 2 9 Capacities 3 4 3 9 Pressure rating 3 4 4 9 3 5 Piping 9 3 6 Electrical connections 9 Mains 3 6 1 10 Tracing 3 6 2 10 Pt100 tracing sensor 3 6 3 10 Communication 3 6 4 10 RS232 Propar 3 6 4 1 10 FLOW BUS 3 6 4 2 11 3 7 Connector specifications 11 Hook up diagram 3 7 1 12 Installation 4 12 4 1 Mounting 12 4 2 Fluid connections 12 4 3 Supply pressure 12 4 4 Leak check 12 4 5 Seals 13 4 6 P...

Страница 5: ...ation 5 17 5 1 Power and warm up 17 5 2 User interface 17 Buttons 5 2 1 17 Display 5 2 2 18 Select Instrument 5 2 3 19 Temperature and flow setpoint 5 2 4 19 5 3 Operating settings 20 Operation example 5 3 1 21 Vaporpressure of water 5 3 2 22 Troubleshooting and service 6 22 6 1 Troubleshooting 23 6 2 Maintenance 23 6 3 Service 24 Removal and return instructions 7 ...

Страница 6: ...formation explains the installation and use of the field bus installed on the instrument 1 2 1 Related documents Instruction manual FLOW BUS interface document nr 9 16 024 Instruction manual RS232 interface with FLOW BUS protocol document nr 9 16 027 Instruction manual E 8000 Readout and Control System document nr 9 17 076 These documents Contain information for basic and advanced operation more d...

Страница 7: ...ested to at least 2 10 9 mbar l s Helium outboard The tested pressure is stated on the module with a RED COLOURED sticker Before installation make sure that the test pressure is in accordance with normal safety factors for your application If there is no Pressure Testing Sticker on the module or if the test pressure is not complying with your pressure requirements the equipment should not be mount...

Страница 8: ...types which have to be used in combination with elastomeric O rings to seal to the Vapor Delivery Module Occasionally fittings are orbital welded to the VDM Series For leak tight installation of compression type fittings be sure that the tube is inserted to the shoulder in the fitting body and that no dirt or dust is present on tube ferrules or fittings For exact information on the fitting please ...

Страница 9: ...er supply Vac Maximum power included tracing 3 6 2 Fuse primary heater Fuse secondary heater Fuse main SW 10n n 50 a nn a 110 120 250 VA 50 60 Hz T2 A T4 A T2 A SW 10n n 51 a nn a 110 120 550 VA 50 60 Hz T2 A T4 A T2 A SW 20n n 50 a nn a 110 120 250 VA 50 60 Hz T2 A T4 A T2 A SW 20n n 51 a nn a 110 120 550 VA 50 60 Hz T2 A T4 A T2 A SW 10n n 30 a nn a 220 240 250 VA 50 60 Hz T1 A T4 A T1 A SW 10n ...

Страница 10: ...e can be provided with a trace temperature control In this case the VDM Series is provide with a Pt100 inlet 4 pin M12 A coded male connector This connector is intended for connecting a two three or four wire Pt100 Measurement current through the sensor is 0 5 mA For Pt100 connection use appropriate cabling with M12 4 pin female connector art nr 1 09 593 Warning Be sure that the temperature sensor...

Страница 11: ...Bronkhorst Vapor Delivery Module 11 9 17 079 3 7 Connector specifications 3 7 1 Hook up diagram ...

Страница 12: ...s or documentation Please be aware when using Oxygen O2 that the fittings mounted in the gas line should be absolutely oxygen clean 4 3 Supply pressure Do not apply pressure until electrical connections are made When applying pressure to the system make sure that the pressure is increased gradually and avoid pressure shocks in the system 4 4 Leak check Check the system for leaks before applying fl...

Страница 13: ...0 to LFC Purge for a long time A2 Setup carrier gas supply Close V4 Open V3 A3 Fill the system with liquid Close V1 Open V2 briefly allow mixing valve VDM to fill Wait until all gas bubbles left the system via Purge out and V5 then close V5 Make sure that the carrier gas is always flowing when the liquid flow is on Preferably let always gas flow in the carrier gas line when the system is filled wi...

Страница 14: ...ys flowing when the liquid flow is on Preferably let always gas flow in the carrier gas line when the system is filled with liquid 4 6 1 4 How to leave system overnight Procedure Actions D1 Relief the supply pressure from the liquid and carrier gas lines Close V2 and V3 4 6 1 5 To empty and purge the system Procedure 1 2 Actions E1 Relief the supply pressure from the liquid and carrier gas lines C...

Страница 15: ...tem with liquid Close V1 Open B2 briefly allow mixing valve VDM to fill Close V5 Make sure that the carrier gas is always flowing when the liquid flow is on Preferably let always gas flow in the carrier gas line when the system is filled with liquid A8 Optional degassing mixing valve Open V5 a needle valve will be best to avoid too much liquid be pumped away A9 The system is now ready for use 4 6 ...

Страница 16: ...ty and purge the system Procedure 1 2 Actions E1 Relief the supply pressure from the liquid and carrier gas lines Close V2 and V3 E2 Purge liquid out of lines Open V1 and V4 E3 Purge lines with inert gas Open V4 and V6 Close V7 Give setpoint to MFC E4 Evacuate liquid lines cont Close V1 Open V8 E5 Optional Repeat last two steps for a few times 1 If the liquid is reactive or aggressive be sure to r...

Страница 17: ... menu Enter edit mode Confirm selection changes Menu selection up Select information field Next character in edit mode Up in table Menu selection down Select information field Previous character in edit mode Down in table Return to previous screen Undo cancel and exit edit mode Switch content in the Custom readout 2 field A Top line C Custom readout 1 B Measure readout D Custom readout 2 5 2 2 Dis...

Страница 18: ...line appears above Custom readout 2 than press to activate this field Security settings can be set to avoid unauthorised access to this option The number of displays that have the same instrument selected must not exceed 3 The integrated Instruments will be indicated with their node addresses Press or to search for an instrument on the bus While the message search is displayed the VDM is searching...

Страница 19: ...ent If the entered setpoint is ignored check controller mode See section Controller mode in the E 8000 manual 9 17 076 for more detailed information The button can be used to exit the edit mode and cancel the changes i www This chapter explains the most important user interface options For more information please check the E 8000 manual 9 17 076 at http www bronkhorst com en downloads 5 3 Operatin...

Страница 20: ...as to be moistened Which water flow is needed for a r h of 50 The vapor pressure of water at 80 C is 473 3 mbar according to FLUIDAT i www FLUIDAT on the Net Bronkhorst High Tech s interactive Flow Calculations and routines generating Physical Properties Visit www fluidat com Assumptions Consider water vapor as an ideal gas 1 mole of ideal gas at normal conditions 22 4 l 1 mole of water is 18 g an...

Страница 21: ...Bronkhorst Vapor Delivery Module 21 9 17 079 5 3 2 Vaporpressure of water ...

Страница 22: ...insulation No Liquid flow 1 Wrong controller mode LFC Check controller mode LFC 2 No setpoint Give Setpoint No Gas flow 1 Wrong controller mode MFC Check controller mode MFC 2 No Setpoint Give Setpoint No vapor stream 1 No gas supply Check gas supply 2 No liquid supply Check liquid supply Liquid in process chamber 1 Mixture saturated condensation 1 Increase setpoint Heater 2 Increase setpoint Trac...

Страница 23: ...ww bronkhorst com Do you have any questions about our products Our Sales Department will gladly assist you selecting the right product for your application Contact sales by e mail sales bronkhorst com For after sales questions our Customer Service Department is available with help and guidance To contact CSD by e mail support bronkhorst com No matter the time zone our experts within the Support Gr...

Страница 24: ... is absolutely required to notify the factory if toxic or dangerous fluids have been metered with the instrument This to enable the factory to take sufficient precautionary measures to safeguard the staff in their repair department Take proper care of packing if possible use the original packing box Contaminated instruments must be dispatched with a completely filled in declaration on contaminatio...

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